JP2003214807A5 - - Google Patents

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Publication number
JP2003214807A5
JP2003214807A5 JP2003001388A JP2003001388A JP2003214807A5 JP 2003214807 A5 JP2003214807 A5 JP 2003214807A5 JP 2003001388 A JP2003001388 A JP 2003001388A JP 2003001388 A JP2003001388 A JP 2003001388A JP 2003214807 A5 JP2003214807 A5 JP 2003214807A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2003001388A
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Japanese (ja)
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JP2003214807A (ja
JP4143420B2 (ja
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Publication date
Priority claimed from US10/043,970 external-priority patent/US7142500B2/en
Application filed filed Critical
Publication of JP2003214807A publication Critical patent/JP2003214807A/ja
Publication of JP2003214807A5 publication Critical patent/JP2003214807A5/ja
Application granted granted Critical
Publication of JP4143420B2 publication Critical patent/JP4143420B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003001388A 2002-01-11 2003-01-07 静電容量型位置センサ Expired - Fee Related JP4143420B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/043970 2002-01-11
US10/043,970 US7142500B2 (en) 2002-01-11 2002-01-11 Sensor with varying capacitance based on relative position between objects

Publications (3)

Publication Number Publication Date
JP2003214807A JP2003214807A (ja) 2003-07-30
JP2003214807A5 true JP2003214807A5 (https=) 2006-01-05
JP4143420B2 JP4143420B2 (ja) 2008-09-03

Family

ID=21929857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003001388A Expired - Fee Related JP4143420B2 (ja) 2002-01-11 2003-01-07 静電容量型位置センサ

Country Status (8)

Country Link
US (1) US7142500B2 (https=)
EP (1) EP1327861B1 (https=)
JP (1) JP4143420B2 (https=)
KR (1) KR101012981B1 (https=)
CN (1) CN100425943C (https=)
DE (1) DE60336282D1 (https=)
SG (1) SG107623A1 (https=)
TW (1) TWI284195B (https=)

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US20080246493A1 (en) * 2007-04-05 2008-10-09 Gardner Delrae H Semiconductor Processing System With Integrated Showerhead Distance Measuring Device
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US8106668B2 (en) 2007-04-24 2012-01-31 Seiko Instruments Inc. Proximity detector and proximity detecting method
US20090015268A1 (en) * 2007-07-13 2009-01-15 Gardner Delrae H Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment
US7570066B2 (en) * 2007-11-01 2009-08-04 Seagate Technology Llc Simultaneous detection of in-plane and out-of-plane position displacement with capacitive sensors
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US8656778B2 (en) 2010-12-30 2014-02-25 Rosemount Aerospace Inc. In-plane capacitive mems accelerometer
JP5524170B2 (ja) * 2011-12-09 2014-06-18 株式会社東芝 記憶装置
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US9250143B2 (en) * 2012-09-19 2016-02-02 College Park Industries, Inc. Multicapacitor force/moment sensor arrays
CN105103030B (zh) * 2013-01-28 2018-07-06 斯维尔系统 自校准的微机电系统设备
CN104981425B (zh) * 2013-01-31 2016-10-05 惠普发展公司，有限责任合伙企业 具有微粒屏障的传感器
US10312120B2 (en) * 2013-03-15 2019-06-04 Applied Materials, Inc. Position and temperature monitoring of ALD platen susceptor
CN104677390B (zh) * 2013-11-26 2017-09-29 林立 电容式传感器及组合电容式位移测量传感系统
CN104238573B (zh) * 2014-08-21 2017-08-25 衡括流体动力实验室（北京）有限公司 动力提供装置及系统
CN104268967A (zh) * 2014-09-29 2015-01-07 深圳市爱普特微电子有限公司 基于电容式传感器的安全门禁方法和装置
TWI575232B (zh) * 2015-06-12 2017-03-21 財團法人工業技術研究院 感測裝置
ES2969939T3 (es) * 2015-07-12 2024-05-23 Patients Pending Ltd Tapa para sistema de suministro de líquido con detección de posición de émbolo integrada y método correspondiente
TWI577974B (zh) * 2016-02-04 2017-04-11 台灣艾華電子工業股份有限公司 位置感測器及其可變式電容組件
CN107462142B (zh) * 2016-06-03 2019-09-17 清华大学 电容式接触型位移测量传感器及传感系统
CN106705937B (zh) * 2016-12-13 2019-11-15 国家电网公司 基于差分电容的电压杆塔倾斜监测系统及其方法
CN109742998A (zh) * 2018-12-24 2019-05-10 维沃移动通信有限公司 振动组件、马达控制方法及终端
CN109916284A (zh) * 2019-03-01 2019-06-21 维沃移动通信有限公司 一种位置检测方法及终端设备
CN113116162B (zh) * 2019-12-31 2023-10-03 浙江苏泊尔家电制造有限公司 烹饪器具和烹饪器具的控制方法
CN112325756A (zh) * 2020-09-04 2021-02-05 山东休普动力科技股份有限公司 自由活塞发动机动子位移传感器、动子识别系统及方法
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