JP2003214807A5 - - Google Patents

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Publication number
JP2003214807A5
JP2003214807A5 JP2003001388A JP2003001388A JP2003214807A5 JP 2003214807 A5 JP2003214807 A5 JP 2003214807A5 JP 2003001388 A JP2003001388 A JP 2003001388A JP 2003001388 A JP2003001388 A JP 2003001388A JP 2003214807 A5 JP2003214807 A5 JP 2003214807A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2003001388A
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JP2003214807A (ja
JP4143420B2 (ja
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Priority claimed from US10/043,970 external-priority patent/US7142500B2/en
Application filed filed Critical
Publication of JP2003214807A publication Critical patent/JP2003214807A/ja
Publication of JP2003214807A5 publication Critical patent/JP2003214807A5/ja
Application granted granted Critical
Publication of JP4143420B2 publication Critical patent/JP4143420B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003001388A 2002-01-11 2003-01-07 静電容量型位置センサ Expired - Fee Related JP4143420B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/043,970 US7142500B2 (en) 2002-01-11 2002-01-11 Sensor with varying capacitance based on relative position between objects
US10/043970 2002-01-11

Publications (3)

Publication Number Publication Date
JP2003214807A JP2003214807A (ja) 2003-07-30
JP2003214807A5 true JP2003214807A5 (ja) 2006-01-05
JP4143420B2 JP4143420B2 (ja) 2008-09-03

Family

ID=21929857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003001388A Expired - Fee Related JP4143420B2 (ja) 2002-01-11 2003-01-07 静電容量型位置センサ

Country Status (8)

Country Link
US (1) US7142500B2 (ja)
EP (1) EP1327861B1 (ja)
JP (1) JP4143420B2 (ja)
KR (1) KR101012981B1 (ja)
CN (1) CN100425943C (ja)
DE (1) DE60336282D1 (ja)
SG (1) SG107623A1 (ja)
TW (1) TWI284195B (ja)

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US8106668B2 (en) 2007-04-24 2012-01-31 Seiko Instruments Inc. Proximity detector and proximity detecting method
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CN105103030B (zh) * 2013-01-28 2018-07-06 斯维尔系统 自校准的微机电系统设备
CN104981425B (zh) * 2013-01-31 2016-10-05 惠普发展公司，有限责任合伙企业 具有微粒屏障的传感器
WO2014144533A1 (en) * 2013-03-15 2014-09-18 Applied Materials, Inc. Position and temperature monitoring of ald platen susceptor
CN104677390B (zh) * 2013-11-26 2017-09-29 林立 电容式传感器及组合电容式位移测量传感系统
CN104238573B (zh) * 2014-08-21 2017-08-25 衡括流体动力实验室（北京）有限公司 动力提供装置及系统
CN104268967A (zh) * 2014-09-29 2015-01-07 深圳市爱普特微电子有限公司 基于电容式传感器的安全门禁方法和装置
TWI575232B (zh) * 2015-06-12 2017-03-21 財團法人工業技術研究院 感測裝置
WO2017009724A1 (en) * 2015-07-12 2017-01-19 Friedman, Mark Cover for liquid delivery system with integrated plunger position sensing, and corresponding method
TWI577974B (zh) * 2016-02-04 2017-04-11 台灣艾華電子工業股份有限公司 位置感測器及其可變式電容組件
CN107462142B (zh) * 2016-06-03 2019-09-17 清华大学 电容式接触型位移测量传感器及传感系统
CN106705937B (zh) * 2016-12-13 2019-11-15 国家电网公司 基于差分电容的电压杆塔倾斜监测系统及其方法
CN109742998A (zh) * 2018-12-24 2019-05-10 维沃移动通信有限公司 振动组件、马达控制方法及终端
CN109916284A (zh) * 2019-03-01 2019-06-21 维沃移动通信有限公司 一种位置检测方法及终端设备
CN113116162B (zh) * 2019-12-31 2023-10-03 浙江苏泊尔家电制造有限公司 烹饪器具和烹饪器具的控制方法
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