JP2003199371A5 - - Google Patents

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Publication number
JP2003199371A5
JP2003199371A5 JP2001390880A JP2001390880A JP2003199371A5 JP 2003199371 A5 JP2003199371 A5 JP 2003199371A5 JP 2001390880 A JP2001390880 A JP 2001390880A JP 2001390880 A JP2001390880 A JP 2001390880A JP 2003199371 A5 JP2003199371 A5 JP 2003199371A5
Authority
JP
Japan
Prior art keywords
ultrasonic motor
reversing
waveform
changing
supply voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001390880A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003199371A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001390880A priority Critical patent/JP2003199371A/ja
Priority claimed from JP2001390880A external-priority patent/JP2003199371A/ja
Publication of JP2003199371A publication Critical patent/JP2003199371A/ja
Publication of JP2003199371A5 publication Critical patent/JP2003199371A5/ja
Pending legal-status Critical Current

Links

JP2001390880A 2001-12-25 2001-12-25 超音波モータ Pending JP2003199371A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001390880A JP2003199371A (ja) 2001-12-25 2001-12-25 超音波モータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001390880A JP2003199371A (ja) 2001-12-25 2001-12-25 超音波モータ

Publications (2)

Publication Number Publication Date
JP2003199371A JP2003199371A (ja) 2003-07-11
JP2003199371A5 true JP2003199371A5 (OSRAM) 2004-11-25

Family

ID=27598632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001390880A Pending JP2003199371A (ja) 2001-12-25 2001-12-25 超音波モータ

Country Status (1)

Country Link
JP (1) JP2003199371A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5466253B2 (ja) * 2006-01-17 2014-04-09 セイコーインスツル株式会社 圧電アクチュエータ及びそれを用いた電子機器
JP4767726B2 (ja) 2006-03-13 2011-09-07 富士フイルム株式会社 超音波アクチュエータ
JP2008253107A (ja) * 2007-03-30 2008-10-16 Fujinon Corp 駆動装置
JP6862398B2 (ja) 2018-09-11 2021-04-21 株式会社東芝 超音波装置及び検査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63167685A (ja) * 1986-12-27 1988-07-11 Marcon Electronics Co Ltd 圧電アクチユエ−タ
JPH09308271A (ja) * 1996-05-15 1997-11-28 Toshiba Corp 超音波モータの駆動方法及び装置
JPH1169852A (ja) * 1997-08-25 1999-03-09 Sharp Corp 超音波モータ
JP4073061B2 (ja) * 1997-11-04 2008-04-09 株式会社ナノコントロール 圧電素子による衝撃力を用いた精密位置決め装置

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