JP2003197758A - Microwave integrated circuit - Google Patents

Microwave integrated circuit

Info

Publication number
JP2003197758A
JP2003197758A JP2001397488A JP2001397488A JP2003197758A JP 2003197758 A JP2003197758 A JP 2003197758A JP 2001397488 A JP2001397488 A JP 2001397488A JP 2001397488 A JP2001397488 A JP 2001397488A JP 2003197758 A JP2003197758 A JP 2003197758A
Authority
JP
Japan
Prior art keywords
integrated circuit
microwave integrated
interdigital capacitor
ground conductor
coplanar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001397488A
Other languages
Japanese (ja)
Other versions
JP2003197758A5 (en
JP3934417B2 (en
Inventor
Hideki Takasu
英樹 高須
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2001397488A priority Critical patent/JP3934417B2/en
Publication of JP2003197758A publication Critical patent/JP2003197758A/en
Publication of JP2003197758A5 publication Critical patent/JP2003197758A5/ja
Application granted granted Critical
Publication of JP3934417B2 publication Critical patent/JP3934417B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microwave integrated circuit using an interdigital capacitor having a coplanar structure, which reduces the crosstalk with external circuits, decreases the influence on the microwave integrated circuit and external circuits, and increases the charge capacity value of an interdigital capacitor. <P>SOLUTION: The interdigital capacitor 11 has a coplanar structure used for a microwave integrated circuit 10. A bridge-like ground conductor 14 is bridged above and across coplanar electrodes 12, 13 to reduce the crosstalk and the influence on the microwave integrated circuit 10 and external circuits and to increase the charge capacity value of the capacitor 11. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、マイクロ波集積回
路に係り、特にコプレーナ構造で構成されたインタデジ
タル型キャパシタにおいて、コプレーナ電極上方を橋状
接地導体で覆うマイクロ波集積回路に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microwave integrated circuit, and more particularly to a microwave integrated circuit in which an interdigital capacitor having a coplanar structure is covered with a bridge-shaped ground conductor above the coplanar electrode.

【0002】[0002]

【従来の技術】マイクロ波集積回路はマイクロ波の伝送
特性からマイクロ波信号の一部が外部に放射してしま
う。このため、外部に放射したマイクロ波信号がマイク
ロ波集積回路と近接する外部回路と漏話(クロストー
ク)を起こすことがある。この外部回路から見れば、放
射されたマイクロ波信号はノイズである。このノイズが
回路特性に影響を与えることがある。また、これとは逆
に近接する外部回路からのノイズがマイクロ波集積回路
の回路特性に影響を与えることもある。そこで、マイク
ロ波信号の一部が近接する外部回路とクロストークする
ことのない様に対策を施す。一般的には、マイクロ波集
積回路全体に銅板等の金属板のシールドが設けられる。
2. Description of the Related Art In a microwave integrated circuit, part of a microwave signal is radiated to the outside due to the transmission characteristics of microwaves. Therefore, the microwave signal radiated to the outside may cause crosstalk with an external circuit close to the microwave integrated circuit. Seen from this external circuit, the radiated microwave signal is noise. This noise may affect the circuit characteristics. On the contrary, noise from an adjacent external circuit may affect the circuit characteristics of the microwave integrated circuit. Therefore, measures are taken so that a part of the microwave signal does not crosstalk with an adjacent external circuit. Generally, a shield of a metal plate such as a copper plate is provided on the entire microwave integrated circuit.

【0003】図4にマイクロ波集積回路に使用されるコ
プレーナ構造で構成されたインタデジタル型キャパシタ
1を示す。また、このインタデジタル型キャパシタ1の
等価回路を図5に示す。尚、図5中のCc(Cc>0)
は、結合電荷容量値を示す。
FIG. 4 shows an interdigital capacitor 1 having a coplanar structure used in a microwave integrated circuit. An equivalent circuit of this interdigital capacitor 1 is shown in FIG. Incidentally, Cc (Cc> 0) in FIG.
Indicates the combined charge capacity value.

【0004】図4によれば、マイクロ波集積回路に備え
られるインタデジタル型キャパシタ1は、コプレーナ電
極2,3と、接地導体4とを誘電体基板5の上面に備え
る。また、誘電体基板5の下面には下部接地導体6を備
えている。インタデジタル型キャパシタ1のコプレーナ
電極2,3は互いに対面させて設けることで、キャパシ
タを形成している。コプレーナ電極2,3がキャパシタ
を形成している外側には接地導体4が存在する。
According to FIG. 4, the interdigital capacitor 1 included in the microwave integrated circuit includes the coplanar electrodes 2 and 3 and the ground conductor 4 on the upper surface of the dielectric substrate 5. A lower ground conductor 6 is provided on the lower surface of the dielectric substrate 5. The coplanar electrodes 2 and 3 of the interdigital capacitor 1 are provided to face each other to form a capacitor. A ground conductor 4 is present outside the coplanar electrodes 2 and 3 forming a capacitor.

【0005】一方、図5によればインタデジタル型キャ
パシタ1の電荷容量値は、コプレーナ電極2とコプレー
ナ電極3との間のCc、即ち、結合電荷容量値のみで決
定される。
On the other hand, according to FIG. 5, the charge capacity value of the interdigital capacitor 1 is determined only by Cc between the coplanar electrode 2 and the coplanar electrode 3, that is, the combined charge capacity value.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、マイク
ロ波集積回路の小型化および集積化が進み、マイクロ波
集積回路と外部回路とがシールドで必ずしも遮蔽される
とは限らない状況がある。この場合、マイクロ波集積回
路に用いられるインタデジタル型キャパシタ1は、イン
タデジタル型キャパシタ1のコプレーナ電極2,3と外
部回路とがシールド無しで近接する。従って、インタデ
ジタル型キャパシタ1はコプレーナ電極2,3間の結合
電荷容量の他にも外部回路の部品との間にも結合電荷容
量を持ち得る。つまり、マイクロ波集積回路は外部回路
と結合し易く、クロストークを生じ易い。
However, the miniaturization and integration of microwave integrated circuits have progressed, and there are situations in which microwave integrated circuits and external circuits are not necessarily shielded by shields. In this case, in the interdigital capacitor 1 used in the microwave integrated circuit, the coplanar electrodes 2 and 3 of the interdigital capacitor 1 and the external circuit are close to each other without shielding. Therefore, the interdigital capacitor 1 can have a combined charge capacity between the coplanar electrodes 2 and 3 as well as a combined charge capacity with an external circuit component. That is, the microwave integrated circuit is easily coupled to the external circuit and crosstalk is likely to occur.

【0007】また、従来のインタデジタル型キャパシタ
は電荷容量値が少なく、マイクロ集積回路設計における
回路設計の自由度を狭めている。
Further, the conventional interdigital type capacitor has a small charge capacity value, which narrows the degree of freedom in circuit design in micro integrated circuit design.

【0008】本発明は、上述した事情を考慮してなされ
たもので、マイクロ波集積回路と近接する外部回路との
クロストークを減少させると共に、マイクロ波集積回路
に備えられるインタデジタル型キャパシタの電荷容量値
を増加させたマイクロ波集積回路を提供することを目的
とする。
The present invention has been made in consideration of the above-mentioned circumstances, and reduces the crosstalk between the microwave integrated circuit and an external circuit in the vicinity thereof, and at the same time, the charge of the interdigital capacitor provided in the microwave integrated circuit. An object is to provide a microwave integrated circuit having an increased capacitance value.

【0009】[0009]

【課題を解決するための手段】本発明に係るマイクロ波
集積回路は上述した課題を解決するため、請求項1に記
載した様に、コプレーナ構造で構成されたインタデジタ
ル型キャパシタを備えたマイクロ波集積回路において、
前記インタデジタル型キャパシタの対向するコプレーナ
電極外部の接地導体間を上方から跨ぐ様に橋状接地導体
を設置し、この橋状接地導体でコプレーナ電極を覆う様
にしたことを特徴とする。
In order to solve the above problems, a microwave integrated circuit according to the present invention has a microwave provided with an interdigital capacitor having a coplanar structure as described in claim 1. In integrated circuits,
A bridge-shaped ground conductor is installed so as to extend from above between ground conductors outside the coplanar electrodes facing each other of the interdigital capacitor, and the bridge-shaped ground conductor covers the coplanar electrode.

【0010】上述した課題を解決するため、本発明に係
るマイクロ波集積回路は、請求項2に記載した様に、前
記インタデジタル型キャパシタが有する前記橋状接地導
体は対向するコプレーナ電極外部の接地導体間を半筒状
のシート部材で形成することを特徴とする。
In order to solve the above problems, in the microwave integrated circuit according to the present invention, as described in claim 2, the bridge-shaped ground conductor of the interdigital capacitor is grounded outside the opposing coplanar electrode. It is characterized in that the space between the conductors is formed by a semi-cylindrical sheet member.

【0011】この様に構成されたマイクロ波集積回路に
おいては、外部回路とのクロストークを減少させると共
に、インタデジタル型キャパシタの電荷容量値を大きく
することが出来、マイクロ波集積回路および外部回路に
与える影響を小さくすることが出来る。
In the microwave integrated circuit thus constructed, the crosstalk with the external circuit can be reduced and the charge capacity value of the interdigital type capacitor can be increased, so that the microwave integrated circuit and the external circuit can be provided. The influence given can be reduced.

【0012】[0012]

【発明の実施の形態】以下、本発明に係るマイクロ波集
積回路の実施形態を添付図面を参照して説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a microwave integrated circuit according to the present invention will be described below with reference to the accompanying drawings.

【0013】図1に本発明の実施形態を示すマイクロ波
集積回路10に用いられるコプレーナ構造で構成された
インタデジタル型キャパシタ11の斜視図を示す。ま
た、図2に図1のA−A線に沿う断面図を示す。
FIG. 1 is a perspective view of an interdigital capacitor 11 having a coplanar structure used in a microwave integrated circuit 10 showing an embodiment of the present invention. Further, FIG. 2 shows a sectional view taken along the line AA of FIG.

【0014】図1および図2によれば、インタデジタル
型キャパシタ11は、コプレーナ電極12,13と、橋
状接地導体14とを誘電体基板15の上面に備える。一
方、誘電体基板15の下面には下部接地導体16を備え
る。誘電体基板15の上面には、コプレーナ電極12,
13が互いに対向して設けられる。また、コプレーナ構
造で構成されたインタデジタル型キャパシタ11のた
め、コプレーナ電極12,13が対向する外側には、接
地導体17が存在する。コプレーナ電極12,13の上
方には、半楕円筒(半筒)状のシート部材出形成された
橋状接地導体14がコプレーナ電極12,13を覆う様
に跨設され、両接地導体17と電気的に接続される。即
ち、橋状接地導体14は接地導体17,17間をブリッ
ジ結合しており、コプレーナ電極12,13に跨設され
る。
According to FIGS. 1 and 2, the interdigital capacitor 11 includes coplanar electrodes 12 and 13 and a bridge-shaped ground conductor 14 on the upper surface of a dielectric substrate 15. On the other hand, a lower ground conductor 16 is provided on the lower surface of the dielectric substrate 15. On the upper surface of the dielectric substrate 15, the coplanar electrode 12,
13 are provided facing each other. Further, because of the interdigital capacitor 11 having the coplanar structure, the ground conductor 17 exists on the outer side where the coplanar electrodes 12 and 13 face each other. Above the coplanar electrodes 12 and 13, a bridge-like grounding conductor 14 formed from a semi-elliptical cylinder (semi-cylindrical) sheet member is provided so as to cover the coplanar electrodes 12 and 13, and electrically connected to both ground conductors 17. Connected. That is, the bridge-shaped ground conductor 14 is bridge-connected between the ground conductors 17 and 17, and is provided over the coplanar electrodes 12 and 13.

【0015】インタデジタル型キャパシタ11は、コプ
レーナ電極12,13の上方に橋状接地導体14を橋を
架ける様にして設けることで、橋状接地導体14がシー
ルド板と同じ効果を果たしている。この橋状接地導体1
4のシールド効果によって、インタデジタル型キャパシ
タ11は、クロストークの要因となる外部回路の素子と
間の結合電荷容量をほとんど持たない。従って、クロス
トークをはるかに低減出来る。
In the interdigital capacitor 11, the bridge-shaped ground conductor 14 is provided above the coplanar electrodes 12 and 13 so as to bridge the bridge-shaped ground conductor 14, so that the bridge-shaped ground conductor 14 has the same effect as the shield plate. This bridge ground conductor 1
Due to the shielding effect of No. 4, the interdigital capacitor 11 has almost no coupling charge capacity with the element of the external circuit which causes the crosstalk. Therefore, crosstalk can be reduced significantly.

【0016】また、マイクロ波集積回路10において、
近接する外部回路との間に結合電荷容量を持ち得るの
は、キャパシタ成分なので、インタデジタル型キャパシ
タ11において、外部回路との結合電荷容量を小さく抑
えられれば、マイクロ波集積回路10全体としてのクロ
ストーク低減を図ることが出来る。
In the microwave integrated circuit 10,
Since it is a capacitor component that can have a coupled charge capacity with an adjacent external circuit, if the interdigital capacitor 11 can suppress the coupled charge capacity with an external circuit to a small value, the crossing of the microwave integrated circuit 10 as a whole will occur. It is possible to reduce talk.

【0017】図3に本発明のマイクロ波集積回路10に
備えられるインタデジタル型キャパシタ11の電荷容量
値を表す等価回路を示す。図5に示される従来のインタ
デジタル型キャパシタ1の電荷容量値はコプレーナ電極
2とコプレーナ電極3との間の結合電荷容量値、つまり
Ccのみで決定していた。しかし、図3(A)によれ
ば、インタデジタル型キャパシタ11は、コプレーナ電
極12,13との間の結合電荷容量値Ccの他に、それ
ぞれのコプレーナ電極12,13と橋状接地導体14と
の間の電荷容量値Cp(Cp>0)、接地―電極間電荷
容量値を持つ。
FIG. 3 shows an equivalent circuit showing the charge capacity value of the interdigital capacitor 11 provided in the microwave integrated circuit 10 of the present invention. The charge capacity value of the conventional interdigital capacitor 1 shown in FIG. 5 is determined only by the combined charge capacity value between the coplanar electrode 2 and the coplanar electrode 3, that is, Cc. However, according to FIG. 3A, the interdigital capacitor 11 includes the coplanar electrodes 12, 13 and the bridge-shaped ground conductor 14 in addition to the coupling charge capacity value Cc between the coplanar electrodes 12, 13. Has a charge capacity value Cp (Cp> 0) between them, and a ground-electrode charge capacity value.

【0018】図3(A)の等価回路をより具体化した等
価回路が図3(B)である。この図によれば、インタデ
ジタル型キャパシタ11の電荷容量値は、Ccの電荷容
量値のキャパシタと、Cpの電荷容量値のキャパシタを
2つ直列接続したキャパシタとを並列接続したキャパシ
タの電荷容量値と等しくなる。従って、インタデジタル
型キャパシタ11の電荷容量値は、従来のインタデジタ
ル型キャパシタ1の電荷容量値よりも大きくなる。
FIG. 3B shows an equivalent circuit that is a more specific version of the equivalent circuit of FIG. According to this figure, the charge capacitance value of the interdigital capacitor 11 is the charge capacitance value of a capacitor in which a capacitor having a charge capacitance value of Cc and a capacitor having two capacitors having a charge capacitance value of Cp are connected in series. Is equal to Therefore, the charge capacity value of the interdigital capacitor 11 is larger than the charge capacity value of the conventional interdigital capacitor 1.

【0019】本発明の実施形態によれば、橋状接地導体
14をコプレーナ電極12,13の上方に跨設したイン
タデジタル型キャパシタ11を備えるマイクロ波集積回
路10は、橋状接地導体14がシールドの役目を果たす
ので、外部回路とのクロストークをはるかに減少させ、
マイクロ波集積回路10および外部回路に与える影響を
低減出来る。また、インタデジタル型キャパシタ11の
電荷容量値は、従来のインタデジタル型キャパシタ1の
電荷容量値と比べて大きくなり、回路設計上の自由度が
拡がる。
According to the embodiment of the present invention, in the microwave integrated circuit 10 including the interdigital capacitor 11 in which the bridge-shaped ground conductor 14 is provided above the coplanar electrodes 12 and 13, the bridge-shaped ground conductor 14 is shielded. It greatly reduces crosstalk with external circuits,
The influence on the microwave integrated circuit 10 and the external circuit can be reduced. Further, the charge capacity value of the interdigital capacitor 11 is larger than the charge capacity value of the conventional interdigital capacitor 1, and the degree of freedom in circuit design is expanded.

【0020】尚、本実施形態におけるマイクロ波集積回
路10において、橋状接地導体14は半楕円筒状で形成
されているが、半楕円筒状に限定されない。あらゆる半
筒状を包含する。即ち、橋状接地導体14は半円状で形
成されても良いし、半角筒状で形成されても良い。
In the microwave integrated circuit 10 according to this embodiment, the bridge-shaped ground conductor 14 is formed in a semi-elliptical cylinder shape, but is not limited to the semi-elliptical cylinder shape. Includes all semi-cylindrical shapes. That is, the bridge-shaped ground conductor 14 may be formed in a semicircular shape or a half-angle tubular shape.

【0021】また、この橋状接地導体14をコプレーナ
電極12,13の上方に跨設したインタデジタル型キャ
パシタの数量は少なくとも1つ以上存在すれば良い。
At least one interdigital capacitor in which the bridge-shaped ground conductor 14 is provided above the coplanar electrodes 12 and 13 may be present.

【0022】さらに、本実施形態におけるマイクロ波集
積回路10に備えられるインタデジタル型キャパシタ1
1は、誘電体基板15の下面に下部接地導体16を備え
ているが、この下部接地導体16は無くても良い。
Furthermore, the interdigital capacitor 1 provided in the microwave integrated circuit 10 according to the present embodiment.
Although No. 1 includes the lower ground conductor 16 on the lower surface of the dielectric substrate 15, the lower ground conductor 16 may be omitted.

【0023】[0023]

【発明の効果】本発明に係るマイクロ波集積回路では、
マイクロ波集積回路に使用されるコプレーナ構造で構成
されたインタデジタル型キャパシタにおいて、コプレー
ナ電極上方に橋状接地導体を跨設することで、外部回路
とのクロストークを減少させ、マイクロ波集積回路およ
び外部回路に与える影響を低減させ、かつ、インタデジ
タル型キャパシタの電荷容量値の増加を図ったマイクロ
波集積回路を提供することが出来る。
According to the microwave integrated circuit of the present invention,
In an interdigital capacitor composed of a coplanar structure used in a microwave integrated circuit, a bridge-shaped ground conductor is provided over the coplanar electrode to reduce crosstalk with an external circuit, It is possible to provide a microwave integrated circuit in which the influence on the external circuit is reduced and the charge capacity value of the interdigital capacitor is increased.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るマイクロ波集積回路に備えられる
インタデジタル型キャパシタの斜視図。
FIG. 1 is a perspective view of an interdigital capacitor provided in a microwave integrated circuit according to the present invention.

【図2】本発明に係るマイクロ波集積回路に備えられる
インタデジタル型キャパシタの斜視図におけるA−A線
に沿う断面図。
FIG. 2 is a sectional view taken along line AA in the perspective view of the interdigital capacitor provided in the microwave integrated circuit according to the present invention.

【図3】本発明に係るマイクロ波集積回路に備えられる
インタデジタル型キャパシタの電荷容量値を表す等価回
路。
FIG. 3 is an equivalent circuit showing a charge capacity value of an interdigital capacitor provided in the microwave integrated circuit according to the present invention.

【図4】従来のマイクロ波集積回路に備えられるインタ
デジタル型キャパシタの構成概要図。
FIG. 4 is a schematic configuration diagram of an interdigital capacitor provided in a conventional microwave integrated circuit.

【図5】従来のマイクロ波集積回路に備えられるインタ
デジタル型キャパシタの電荷容量値を表す等価回路。
FIG. 5 is an equivalent circuit showing a charge capacity value of an interdigital capacitor provided in a conventional microwave integrated circuit.

【符号の説明】[Explanation of symbols]

10 マイクロ波集積回路 11 インタデジタル型キャパシタ 12,13 コプレーナ電極 14 橋状接地導体 15 誘電体基板 16 下部接地導体 17 接地導体 10 Microwave integrated circuit 11 Interdigital capacitor 12,13 Coplanar electrode 14 Bridge-shaped ground conductor 15 Dielectric substrate 16 Lower ground conductor 17 Ground conductor

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 コプレーナ構造で構成されたインタデジ
タル型キャパシタを備えたマイクロ波集積回路におい
て、前記インタデジタル型キャパシタの対向するコプレ
ーナ電極外部の接地導体間を上方から跨ぐ様に橋状接地
導体を設置し、この橋状接地導体でコプレーナ電極を覆
う様にしたことを特徴とするマイクロ波集積回路。
1. A microwave integrated circuit including an interdigital capacitor having a coplanar structure, wherein a bridge-shaped ground conductor is formed so as to extend from above between ground conductors outside the coplanar electrodes facing each other of the interdigital capacitor. A microwave integrated circuit that is installed, and the bridge-shaped ground conductor covers the coplanar electrode.
【請求項2】 前記インタデジタル型キャパシタが有す
る前記橋状接地導体は対向するコプレーナ電極外部の接
地導体間を半筒状のシート部材で形成することを特徴と
する請求項1に記載のマイクロ波集積回路。
2. The microwave according to claim 1, wherein the bridge-shaped ground conductor of the interdigital capacitor has a semi-cylindrical sheet member between the ground conductors outside the coplanar electrodes facing each other. Integrated circuit.
JP2001397488A 2001-12-27 2001-12-27 Microwave integrated circuit Expired - Fee Related JP3934417B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001397488A JP3934417B2 (en) 2001-12-27 2001-12-27 Microwave integrated circuit

Applications Claiming Priority (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020225856A1 (en) * 2019-05-07 2020-11-12 三菱電機株式会社 Cascode power amplifier
CN115458334A (en) * 2022-08-31 2022-12-09 电子科技大学 Columnar interdigital supercapacitor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020225856A1 (en) * 2019-05-07 2020-11-12 三菱電機株式会社 Cascode power amplifier
CN115458334A (en) * 2022-08-31 2022-12-09 电子科技大学 Columnar interdigital supercapacitor
CN115458334B (en) * 2022-08-31 2023-10-27 电子科技大学 Columnar interdigital supercapacitor

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