JP2003192665A5 - - Google Patents
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- Publication number
- JP2003192665A5 JP2003192665A5 JP2002275029A JP2002275029A JP2003192665A5 JP 2003192665 A5 JP2003192665 A5 JP 2003192665A5 JP 2002275029 A JP2002275029 A JP 2002275029A JP 2002275029 A JP2002275029 A JP 2002275029A JP 2003192665 A5 JP2003192665 A5 JP 2003192665A5
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- JP
- Japan
- Prior art keywords
- group
- carbon atoms
- resist material
- acid
- branched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 125000004432 carbon atom Chemical group C* 0.000 claims description 45
- 239000002253 acid Substances 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 26
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 25
- 150000001875 compounds Chemical class 0.000 claims description 21
- 239000011347 resin Substances 0.000 claims description 20
- 229920005989 resin Polymers 0.000 claims description 20
- 125000000217 alkyl group Chemical group 0.000 claims description 16
- 229920000642 polymer Polymers 0.000 claims description 15
- 125000006165 cyclic alkyl group Chemical group 0.000 claims description 12
- 125000004122 cyclic group Chemical group 0.000 claims description 8
- -1 sulfonyl diazomethane compound Chemical class 0.000 claims description 8
- YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Chemical compound C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 claims description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 6
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 6
- 125000003545 alkoxy group Chemical group 0.000 claims description 5
- 125000003118 aryl group Chemical group 0.000 claims description 5
- 125000005842 heteroatom Chemical group 0.000 claims description 4
- 150000002430 hydrocarbons Chemical group 0.000 claims description 4
- 125000005188 oxoalkyl group Chemical group 0.000 claims description 4
- 125000003107 substituted aryl group Chemical group 0.000 claims description 4
- 125000004665 trialkylsilyl group Chemical group 0.000 claims description 4
- 239000003513 alkali Substances 0.000 claims description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N Lactic Acid Natural products CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 claims description 2
- 125000005396 acrylic acid ester group Chemical group 0.000 claims description 2
- 150000005215 alkyl ethers Chemical class 0.000 claims description 2
- 125000002947 alkylene group Chemical group 0.000 claims description 2
- 150000007514 bases Chemical class 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 150000002469 indenes Chemical class 0.000 claims description 2
- 235000014655 lactic acid Nutrition 0.000 claims description 2
- 239000004310 lactic acid Substances 0.000 claims description 2
- 125000005397 methacrylic acid ester group Chemical group 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 150000007524 organic acids Chemical class 0.000 claims description 2
- 239000003960 organic solvent Substances 0.000 claims description 2
- 125000001424 substituent group Chemical group 0.000 claims description 2
- 125000000547 substituted alkyl group Chemical group 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 150000002605 large molecules Chemical class 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002275029A JP3991214B2 (ja) | 2001-09-28 | 2002-09-20 | 新規スルホニルジアゾメタン化合物、光酸発生剤、並びにそれを用いたレジスト材料及びパターン形成方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001300345 | 2001-09-28 | ||
| JP2001-300345 | 2001-09-28 | ||
| JP2002275029A JP3991214B2 (ja) | 2001-09-28 | 2002-09-20 | 新規スルホニルジアゾメタン化合物、光酸発生剤、並びにそれを用いたレジスト材料及びパターン形成方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003192665A JP2003192665A (ja) | 2003-07-09 |
| JP2003192665A5 true JP2003192665A5 (cg-RX-API-DMAC7.html) | 2005-05-26 |
| JP3991214B2 JP3991214B2 (ja) | 2007-10-17 |
Family
ID=27615201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002275029A Expired - Lifetime JP3991214B2 (ja) | 2001-09-28 | 2002-09-20 | 新規スルホニルジアゾメタン化合物、光酸発生剤、並びにそれを用いたレジスト材料及びパターン形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3991214B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4359467B2 (ja) * | 2003-08-28 | 2009-11-04 | 信越化学工業株式会社 | 新規スルホニルジアゾメタン化合物、光酸発生剤、並びにそれを用いたレジスト材料及びパターン形成方法。 |
| JP4895526B2 (ja) * | 2005-04-20 | 2012-03-14 | 和光純薬工業株式会社 | チオール化合物を含んでなる弱臭性反応試薬 |
| US8227624B2 (en) | 2007-08-07 | 2012-07-24 | Adeka Corporation | Aromatic sulfonium salt compound |
| KR101602756B1 (ko) | 2007-11-01 | 2016-03-11 | 가부시키가이샤 아데카 | 염 화합물, 양이온 중합 개시제 및 양이온 중합성 조성물 |
| KR20130028891A (ko) | 2009-10-26 | 2013-03-20 | 가부시키가이샤 아데카 | 방향족 술포늄염 화합물 |
| JP5717959B2 (ja) | 2009-11-17 | 2015-05-13 | 株式会社Adeka | 芳香族スルホニウム塩化合物 |
| CN102712599B (zh) | 2010-01-13 | 2016-08-10 | 株式会社Adeka | 新型磺酸衍生物化合物和新型萘二甲酸衍生物化合物 |
| WO2011104127A1 (en) | 2010-02-24 | 2011-09-01 | Basf Se | Latent acids and their use |
| KR102191331B1 (ko) | 2012-11-28 | 2020-12-15 | 가부시키가이샤 아데카 | 신규 술폰산 유도체 화합물, 광산발생제, 양이온 중합 개시제, 레지스트 조성물 및 양이온 중합성 조성물 |
| JP6671381B2 (ja) | 2015-02-02 | 2020-03-25 | ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ | 潜在酸およびそれらの使用 |
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2002
- 2002-09-20 JP JP2002275029A patent/JP3991214B2/ja not_active Expired - Lifetime