JP2003191191A - Vacuum suction device - Google Patents
Vacuum suction deviceInfo
- Publication number
- JP2003191191A JP2003191191A JP2001388524A JP2001388524A JP2003191191A JP 2003191191 A JP2003191191 A JP 2003191191A JP 2001388524 A JP2001388524 A JP 2001388524A JP 2001388524 A JP2001388524 A JP 2001388524A JP 2003191191 A JP2003191191 A JP 2003191191A
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- sheet member
- vacuum suction
- vacuum
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【発明の詳細な説明】
【０００１】
【発明の属する技術分野】本発明は、液晶ディスプレ
ー、プラズマディスプレー、太陽電池パネル、半導体な
どの基板を搬送するロボットアームに設けられた真空吸
着装置に関するものである。
【０００２】
【従来の技術】図４及び図５は、特開２０００−１３３
６９４号公報に記載された真空吸着装置を示す。図４に
は、基板収納用カセット２０と、このカセット２０から
ガラス基板２１を取り出すロボット２２とが示されてい
る。このロボット２２にはアーム２３があり、このアー
ム２３によって前記カセット２０内からガラス基板２１
を１枚づつ取り出し、所定の場所に搬送する。また、前
記アーム２３には、複数の真空吸着部２４が設けられ、
この真空吸着部２４がガラス基板２１の裏面を真空吸着
して保持する。
【０００３】真空吸着部２４は、図５に示すように、接
着層２５によってアーム２３に接着されるスペーサ２６
と、このスペーサ２６の上面に接着層２７によって接着
される被搬送物としてのシート部材２８とから構成され
ている。一方、アーム２３には、真空圧を作用させるた
めの真空源に接続された管路２９が設けられており、こ
の管路２９が、前記接着材層２５，２７及びスペーサ２
６の中央に形成された連通孔３０を介してシート部材２
８に真空圧を作用させ、シート部材２８の外周部分３１
をガラス基板２１側に変形、密着させて、ガラス基板２
１の裏面を真空吸着する。従って、傾きの方向性に関係
なくガラス基板２１の傾きに追従できる。
【０００４】
【発明が解決しようとする課題】ところで、上記従来例
では、真空吸着部２４を長期間にわたって使用すると、
シート部材２８の外周部分３１が変形を繰り返すこと
で、シート部材２８が疲弊し、ガラス基板２１との吸着
が悪くなる。そのため、シート部材２８を取り替える必
要性があった。また、上記真空吸着装置では、ロボット
２２の振動が真空吸着部２４からガラス基板２１に伝わ
ってガラス基板２１が上下に動き、シート部材２８が摩
耗する恐れがある。シート部材２８が摩耗すると、シー
ト部材２８から摩耗粉末が発生し、この粉末がガラス基
板２１に付いてガラス基板２１を汚染してしまう恐れが
ある。また、従来の真空吸着装置には、変形による疲弊
とガラス基板の汚染とを防止し且つ反りのあるガラス基
板を吸着できるように、硬い吸盤をバネで支持したもの
もあるが、この真空吸着装置では装置の大型化と構造の
複雑化とを招いてしまう。
【０００５】この発明は、上記事情に鑑みてなされたも
ので、構造が簡単で且つ耐久性があり、反りのある基板
も傷つけることなく安定して搬送できる真空吸着装置を
供給することを目的とする。
【０００６】
【課題を解決するための手段】上記目的を達成するため
に、請求項１に記載の真空吸着装置は、基板と接するシ
ート部材と、シート部材の下面に設けられて、シート部
材とロボットアームとに接合される弾性部材と、弾性部
材とシート部材とを貫通し、基板に真空圧を作用させる
真空吸着穴とからなり、弾性部材が、シート部材に比べ
軟質で、弾性を有することを特徴としている。この真空
吸着装置では、シート部材の下に、弾性を有しかつシー
ト部材よりも軟質な弾性部材を設けているので、弾性部
材を弾性変形させてシート部材を基板に接着させること
が可能であり、反りのある基板も確実に真空吸着するこ
とができる。また、弾性部材は、搬送装置の振動を吸収
し、振動が基板に伝わるのを抑制する役割を果たすの
で、基板が上下に動くのが抑えられる。これにより、基
板が傷つくことのない安定した搬送が得られる。さら
に、シート部材は、弾性部材より硬質でその形が変形さ
れないため、変形による疲弊が抑えられる。したがっ
て、シート部材を取り換える頻度を低減することができ
る。また、シート部材の摩耗が少ないので、摩耗粉末等
の汚染物質の発生を低減することができる。さらに、こ
の真空吸着装置は、簡単な構造からなるため、装置の小
型化及び軽量化を実現することができる。
【０００７】
【発明の実施の形態】以下、本発明の実施形態の真空吸
着装置を図面を参照しながら説明する。図１には、基板
収納用カセットＡからガラス基板１を取り出すロボット
２が示されている。このロボット２にはロボットアーム
３があり、このロボットアーム３によって基板収納用カ
セットＡ内からガラス基板１を１枚づつ取り出し、所定
の場所に搬送する。また、ロボットアーム３には、複数
の真空吸着部４が設けられ、この真空吸着部４がガラス
基板１の裏面を真空吸着して保持する。
【０００８】真空吸着部４の構造は、図２に示すよう
に、押さえ具５によってロボットアーム３に取り付けら
れた弾性部材６と、この弾性部材６の上面に接着される
被搬送物としてのシート部材７と、ガラス基板１に真空
圧を作用させる真空吸着穴８とから構成されている。弾
性部材６の上面とシート部材７の下面には、それぞれ凸
部６ａと凹部７ａとが形成され、これら凸部６ａと凹部
７ａとがかみ合わされて接合されており、その接合面は
ガラス基板１の吸着方向に対して直交する面を持つ。ま
た、真空吸着穴８は、弾性部材６及びシート部材８の中
央を貫通するよう形成されている。
【０００９】一方、ロボットアーム３には、一端が真空
吸着穴８に連通し、もう一端が真空圧を作用させるため
の真空源に接続された管路９が設けられている。
【００１０】ここで、弾性部材６は耐久性、弾力性に優
れたゲル材からなり、シート部材７は薄い樹脂のポリエ
ーテルエーテルケトンからなる。ポリエーテルエーテル
ケトンは強靱で、耐薬品性、耐熱性、耐摩耗性に優れて
おり、シート部材７として好適である。
【００１１】上記真空吸着装置によって、基板収納用カ
セットＡ内のガラス基板１を真空吸着して搬送するに
は、まず、ロボットアーム３を基板収納用カセットＡ内
のガラス基板１の下面に挿入した後、ロボットアーム３
を上方に動かし、ロボットアーム３上の真空吸着部４を
ガラス基板１の下面に軽く押し当て、シート部材７をガ
ラス基板１に接触させる。次に、管路９と接続する真空
源を駆動させて、管路９を真空排気する。すると、管路
９及び真空吸着穴８を通して、シート部材７とガラス基
板１とで囲まれた空間が真空排気され、ガラス基板１に
下向きの真空圧が作用し、ガラス基板１が真空吸着部４
に真空吸着されて、保持される。そして、ガラス基板１
を真空吸着部４上に保持したまま、ロボットアーム３を
基板収納用カセットＡ内から抜き取り、ガラス基板１を
所定の位置まで搬送する。
【００１２】ところで、図３に示すように、ガラス基板
１に反りがある場合は、ガラス基板１の下面に真空吸着
部４を押し当てると、シート部材７よりも軟質な弾性部
材６が変形し、シート部材７がガラス基板１の反りに合
わせて傾けられた状態で、ガラス基板１の下面に接触す
る。したがって、ガラス基板１に反りがある場合でも、
ガラス基板１に真空圧を作用させて吸着することができ
る。
【００１３】なお、上記の実施形態では、搬送物はガラ
ス基板１としたが、シリコン、半導体基板、太陽電池パ
ネルでも同様に実施可能である。また、弾性部材６はゲ
ル材としたが、弾性を有する材料、例えばゴム材でも実
施可能である。さらに、真空吸着部４の配置位置、大き
さ、個数は、搬送物の形状やサイズに合わせて設けられ
るものとする。
【００１４】このように、上記実施形態の真空吸着装置
によれば、硬いシート部材７の下に設けられた軟質な弾
性部材６を弾性変形させることで、シート部材７をガラ
ス基板１に接着させることが可能であり、反りのあるガ
ラス基板１も確実に真空吸着することができる。また、
弾性部材６は、搬送装置の振動を吸収し、振動が基板に
伝わるのを抑制する役割を果たすので、ガラス基板１が
上下に動くのが抑えられる。これにより、ガラス基板１
が傷つくことのない安定した搬送が得られる。また、ガ
ラス基板１の動きが抑えられるので、シート部材７の摩
耗が低減される。したがって、シート部材７の摩耗粉末
でガラス基板１を汚染することなくガラス基板１を搬送
することができる。さらに、シート部材７は変形されな
いため、変形による疲弊が抑えられる。これにより、シ
ート部材７を取り換える頻度を低減することができる。
【００１５】また、上記の真空吸着装置によれば、シー
ト部材７と弾性部材６との接合面がガラス基板１の吸着
方向と直行する面を持つので、シート部材７がガラス基
板１から受ける力を接合面にほぼ垂直に伝え、弾性部材
６が吸着方向に対して横方向に変形するのを最小限に保
ち、弾性部材６の変形による疲弊を低減することができ
る。さらに、上記真空吸着装置によれば、真空吸着部４
が簡単な構造からなるため、装置の小型化及び軽量化を
実現することができる。
【００１６】
【発明の効果】以上、説明したように、本発明の真空吸
着装置によれば、下記の効果を得ることができる。請求
項１記載の真空吸着装置によれば、シート部材の下に、
弾性を有しかつシート部材よりも軟質な弾性部材が設け
られているので、弾性部材を弾性変形させてシート部材
を基板に接着させることが可能であり、反りのある基板
も確実に真空吸着することができる。また、弾性部材
は、搬送装置の振動を吸収し、振動が基板に伝わるのを
抑制する役割を果たすので、基板が上下に動くのが抑え
られる。これにより、基板が傷つくことのない安定した
搬送が得られる。さらに、シート部材は、弾性部材より
硬質でその形が変形されないため、変形による疲弊が抑
えられる。したがって、シート部材を取り換える頻度を
低減することができる。また、シート部材の摩耗が少な
いので、摩耗粉末等の汚染物質の発生を低減することが
できる。さらに、この真空吸着装置は、単純な構造から
なるため、装置の小型化及び軽量化を実現することがで
きる。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum suction device provided on a robot arm for transporting a substrate such as a liquid crystal display, a plasma display, a solar cell panel, and a semiconductor. is there. 2. Description of the Related Art FIG. 4 and FIG.
1 shows a vacuum suction device described in JP-A-694. FIG. 4 shows a substrate storage cassette 20 and a robot 22 for taking out a glass substrate 21 from the cassette 20. The robot 22 has an arm 23. The arm 23 allows the glass substrate 21 to be removed from the cassette 20.
Are taken out one by one and transported to a predetermined place. The arm 23 is provided with a plurality of vacuum suction parts 24,
The vacuum suction unit 24 holds the back surface of the glass substrate 21 by vacuum suction. [0005] As shown in FIG. 5, a vacuum suction portion 24 is provided with a spacer 26 bonded to the arm 23 by an adhesive layer 25.
And a sheet member 28 as a conveyed object adhered to the upper surface of the spacer 26 by an adhesive layer 27. On the other hand, the arm 23 is provided with a conduit 29 connected to a vacuum source for applying a vacuum pressure, and this conduit 29 is formed by the adhesive layers 25 and 27 and the spacer 2.
6 through a communication hole 30 formed at the center of the sheet member 2.
8 by applying a vacuum pressure to the outer peripheral portion 31 of the sheet member 28.
Is deformed and adhered to the glass substrate 21 side so that the glass substrate 2
1 is vacuum-adsorbed on the back surface. Therefore, it is possible to follow the inclination of the glass substrate 21 regardless of the direction of the inclination. [0004] By the way, in the above conventional example, if the vacuum suction unit 24 is used for a long time,
When the outer peripheral portion 31 of the sheet member 28 is repeatedly deformed, the sheet member 28 is exhausted, and the adsorption to the glass substrate 21 is deteriorated. Therefore, there is a need to replace the sheet member 28. In the vacuum suction device, the vibration of the robot 22 is transmitted from the vacuum suction unit 24 to the glass substrate 21 to move the glass substrate 21 up and down, and the sheet member 28 may be worn. When the sheet member 28 is worn, abrasion powder is generated from the sheet member 28, and the powder may adhere to the glass substrate 21 and contaminate the glass substrate 21. In addition, there is a conventional vacuum suction device in which a hard suction cup is supported by a spring so as to prevent fatigue due to deformation and contamination of the glass substrate and to suction a warped glass substrate. In this case, the size of the apparatus is increased and the structure is complicated. The present invention has been made in view of the above circumstances, and has as its object to provide a vacuum suction device which has a simple structure, is durable, and can stably transfer a warped substrate without damaging it. I do. According to a first aspect of the present invention, there is provided a vacuum suction apparatus, comprising: a sheet member in contact with a substrate; and a sheet member provided on a lower surface of the sheet member. An elastic member joined to the robot arm, and a vacuum suction hole penetrating the elastic member and the sheet member and applying a vacuum pressure to the substrate, the elastic member being softer and more elastic than the sheet member. It is characterized by. In this vacuum suction device, since the elastic member having elasticity and softer than the sheet member is provided under the sheet member, it is possible to elastically deform the elastic member and adhere the sheet member to the substrate. In addition, even a warped substrate can be reliably sucked by vacuum. Further, the elastic member plays a role of absorbing the vibration of the transport device and suppressing the transmission of the vibration to the substrate, so that the substrate is suppressed from moving up and down. As a result, stable transport without damaging the substrate can be obtained. Further, since the sheet member is harder than the elastic member and its shape is not deformed, fatigue due to deformation is suppressed. Therefore, the frequency of replacing the sheet member can be reduced. In addition, since the seat member has little wear, generation of contaminants such as wear powder can be reduced. Further, since the vacuum suction device has a simple structure, the device can be reduced in size and weight. Hereinafter, a vacuum suction apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows a robot 2 for taking out a glass substrate 1 from a substrate storage cassette A. The robot 2 has a robot arm 3, and the robot arm 3 takes out the glass substrates 1 one by one from the substrate storage cassette A and transports them to a predetermined place. Further, the robot arm 3 is provided with a plurality of vacuum suction portions 4, and the vacuum suction portions 4 hold the back surface of the glass substrate 1 by vacuum suction. [0010] As shown in FIG. 2, the structure of the vacuum suction section 4 is such that an elastic member 6 attached to the robot arm 3 by a holding member 5 and a sheet as a conveyed object adhered to the upper surface of the elastic member 6. It comprises a member 7 and a vacuum suction hole 8 for applying a vacuum pressure to the glass substrate 1. A convex portion 6a and a concave portion 7a are formed on the upper surface of the elastic member 6 and the lower surface of the sheet member 7, respectively. The convex portion 6a and the concave portion 7a are engaged with each other and joined together. Has a surface orthogonal to the suction direction. The vacuum suction hole 8 is formed so as to penetrate the center of the elastic member 6 and the sheet member 8. On the other hand, the robot arm 3 is provided with a conduit 9 having one end communicating with the vacuum suction hole 8 and the other end connected to a vacuum source for applying a vacuum pressure. The elastic member 6 is made of a gel material having excellent durability and elasticity, and the sheet member 7 is made of a thin resin such as polyetheretherketone. Polyetheretherketone is tough and has excellent chemical resistance, heat resistance, and abrasion resistance, and is suitable as the sheet member 7. To transfer the glass substrate 1 in the substrate storage cassette A by vacuum suction using the above vacuum suction device, first, the robot arm 3 is inserted into the lower surface of the glass substrate 1 in the substrate storage cassette A. Later, robot arm 3
Is moved upward, and the vacuum suction unit 4 on the robot arm 3 is lightly pressed against the lower surface of the glass substrate 1 to bring the sheet member 7 into contact with the glass substrate 1. Next, the vacuum source connected to the pipe 9 is driven to evacuate the pipe 9. Then, the space enclosed by the sheet member 7 and the glass substrate 1 is evacuated through the pipe 9 and the vacuum suction hole 8, a downward vacuum pressure acts on the glass substrate 1, and the glass substrate 1 is moved to the vacuum suction portion 4.
Is held by vacuum suction. And the glass substrate 1
The robot arm 3 is pulled out of the substrate storage cassette A while holding the glass substrate 1 on the vacuum suction unit 4, and the glass substrate 1 is transported to a predetermined position. As shown in FIG. 3, when the glass substrate 1 is warped, when the vacuum suction portion 4 is pressed against the lower surface of the glass substrate 1, the elastic member 6 softer than the sheet member 7 is deformed. The sheet member 7 contacts the lower surface of the glass substrate 1 in a state where the sheet member 7 is tilted in accordance with the warpage of the glass substrate 1. Therefore, even if the glass substrate 1 is warped,
The glass substrate 1 can be adsorbed by applying a vacuum pressure. In the above-described embodiment, the conveyed object is the glass substrate 1. However, the present invention can be similarly applied to silicon, a semiconductor substrate, and a solar cell panel. Further, the elastic member 6 is made of a gel material, but may be made of a material having elasticity, for example, a rubber material. Further, the arrangement position, size, and number of the vacuum suction units 4 are provided according to the shape and size of the conveyed object. As described above, according to the vacuum suction device of the above embodiment, the sheet member 7 is bonded to the glass substrate 1 by elastically deforming the soft elastic member 6 provided below the hard sheet member 7. Therefore, the warped glass substrate 1 can be surely vacuum-adsorbed. Also,
The elastic member 6 serves to absorb the vibration of the transfer device and to suppress the transmission of the vibration to the substrate, so that the glass substrate 1 is prevented from moving up and down. Thereby, the glass substrate 1
Can be stably transported without being damaged. Further, since the movement of the glass substrate 1 is suppressed, the wear of the sheet member 7 is reduced. Therefore, the glass substrate 1 can be transported without contaminating the glass substrate 1 with the wear powder of the sheet member 7. Further, since the sheet member 7 is not deformed, fatigue due to the deformation is suppressed. Thus, the frequency of replacing the sheet member 7 can be reduced. Further, according to the above-mentioned vacuum suction device, since the joining surface between the sheet member 7 and the elastic member 6 has a surface perpendicular to the direction of suction of the glass substrate 1, the force that the sheet member 7 receives from the glass substrate 1 Is transmitted substantially perpendicularly to the joining surface, deformation of the elastic member 6 in the transverse direction with respect to the suction direction is kept to a minimum, and fatigue due to deformation of the elastic member 6 can be reduced. Further, according to the vacuum suction device, the vacuum suction unit 4
Has a simple structure, so that the size and weight of the device can be reduced. As described above, according to the vacuum suction device of the present invention, the following effects can be obtained. According to the vacuum suction device of claim 1, below the sheet member,
Since the elastic member having elasticity and being softer than the sheet member is provided, the elastic member can be elastically deformed and the sheet member can be adhered to the substrate, and the warped substrate is surely vacuum-adsorbed. be able to. Further, the elastic member plays a role of absorbing the vibration of the transport device and suppressing the transmission of the vibration to the substrate, so that the substrate is suppressed from moving up and down. As a result, stable transport without damaging the substrate can be obtained. Further, since the sheet member is harder than the elastic member and its shape is not deformed, fatigue due to deformation is suppressed. Therefore, the frequency of replacing the sheet member can be reduced. In addition, since the seat member has little wear, generation of contaminants such as wear powder can be reduced. Further, since the vacuum suction device has a simple structure, it is possible to reduce the size and weight of the device.
【図面の簡単な説明】
【図１】 本発明の実施形態の真空吸着装置を備えた基
板輸送装置の斜視図である。
【図２】 本発明の実施形態の真空吸着装置の断面図で
ある。
【図３】 本発明の実施形態の真空吸着装置の断面図で
ある。
【図４】 従来例の真空中着装置を備えた基板輸送装置
の斜視図である。
【図５】 従来例の真空吸着装置の断面図である。
【符号の説明】
１ ガラス基板（基板）
３ ロボットアーム
４ 真空吸着部
６ 弾性部材
７ シート部材
８ 真空吸着穴BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a substrate transport device provided with a vacuum suction device according to an embodiment of the present invention. FIG. 2 is a cross-sectional view of the vacuum suction device according to the embodiment of the present invention. FIG. 3 is a cross-sectional view of the vacuum suction device according to the embodiment of the present invention. FIG. 4 is a perspective view of a substrate transporting apparatus provided with a conventional vacuum insulting apparatus. FIG. 5 is a sectional view of a conventional vacuum suction device. [Description of Signs] 1 Glass substrate (substrate) 3 Robot arm 4 Vacuum suction unit 6 Elastic member 7 Sheet member 8 Vacuum suction hole
Claims (1)
トアームに設けられた真空吸着装置であって、真空作用
により前記基板を支える真空吸着部は、前記基板と接す
るシート部材と、該シート部材の下面に設けられて、前
記シート部材と前記ロボットアームとに接合される弾性
部材と、該弾性部材と前記シート部材とを貫通し、前記
基板に真空圧を作用させる真空吸着穴とからなり、前記
弾性部材は、前記シート部材に比べ軟質で、弾性を有す
ることを特徴とする真空吸着装置。Claims: 1. A vacuum suction device provided on a transfer robot arm for vacuum-sucking and transferring a substrate, wherein a vacuum suction portion supporting the substrate by a vacuum action includes a sheet in contact with the substrate. A member, an elastic member provided on a lower surface of the sheet member and joined to the sheet member and the robot arm, and a vacuum that penetrates the elastic member and the sheet member and applies a vacuum pressure to the substrate. A vacuum suction device comprising a suction hole, wherein the elastic member is softer and more elastic than the sheet member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001388524A JP2003191191A (en) | 2001-12-20 | 2001-12-20 | Vacuum suction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001388524A JP2003191191A (en) | 2001-12-20 | 2001-12-20 | Vacuum suction device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003191191A true JP2003191191A (en) | 2003-07-08 |
Family
ID=27596993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001388524A Pending JP2003191191A (en) | 2001-12-20 | 2001-12-20 | Vacuum suction device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003191191A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100850240B1 (en) | 2007-09-06 | 2008-08-04 | 주식회사 에이디피엔지니어링 | Apparatus for joining of substrate |
| KR100850239B1 (en) | 2007-09-06 | 2008-08-04 | 주식회사 에이디피엔지니어링 | Apparatus for joining of substrate |
| JP2012241832A (en) * | 2011-05-20 | 2012-12-10 | Tokyo Institute Of Technology | Adsorption apparatus |
| WO2013058094A1 (en) * | 2011-10-21 | 2013-04-25 | 株式会社クリエイティブ テクノロジー | Workpiece holding device |
| JP2015103696A (en) * | 2013-11-26 | 2015-06-04 | 東京エレクトロン株式会社 | Substrate transport device |
| KR101566289B1 (en) * | 2014-12-15 | 2015-11-05 | (주)유진테크 | Vacuum suction device and methods for setting a fixed position by jig |
| KR20170056988A (en) * | 2015-11-16 | 2017-05-24 | 세메스 주식회사 | Manufacturing method of loading member and Apparatus for treating substrate |
| KR20210030726A (en) * | 2019-09-10 | 2021-03-18 | 세메스 주식회사 | Transfer robot and Apparatus for treating substrate with the robot |
| JP2021052169A (en) * | 2019-09-17 | 2021-04-01 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate holding device and substrate transport device including the same |
| JP2022113985A (en) * | 2021-01-26 | 2022-08-05 | 東京応化工業株式会社 | Suction pad and substrate conveyance device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08107136A (en) * | 1994-10-03 | 1996-04-23 | Dainippon Screen Mfg Co Ltd | Substrate transfer device |
| JP2001179672A (en) * | 1999-12-21 | 2001-07-03 | Mitsubishi Electric Corp | Robot hand |
| JP2003100848A (en) * | 2001-09-25 | 2003-04-04 | Applied Materials Inc | Substrate holder |
-
2001
- 2001-12-20 JP JP2001388524A patent/JP2003191191A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08107136A (en) * | 1994-10-03 | 1996-04-23 | Dainippon Screen Mfg Co Ltd | Substrate transfer device |
| JP2001179672A (en) * | 1999-12-21 | 2001-07-03 | Mitsubishi Electric Corp | Robot hand |
| JP2003100848A (en) * | 2001-09-25 | 2003-04-04 | Applied Materials Inc | Substrate holder |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100850240B1 (en) | 2007-09-06 | 2008-08-04 | 주식회사 에이디피엔지니어링 | Apparatus for joining of substrate |
| KR100850239B1 (en) | 2007-09-06 | 2008-08-04 | 주식회사 에이디피엔지니어링 | Apparatus for joining of substrate |
| JP2012241832A (en) * | 2011-05-20 | 2012-12-10 | Tokyo Institute Of Technology | Adsorption apparatus |
| WO2013058094A1 (en) * | 2011-10-21 | 2013-04-25 | 株式会社クリエイティブ テクノロジー | Workpiece holding device |
| JP2015103696A (en) * | 2013-11-26 | 2015-06-04 | 東京エレクトロン株式会社 | Substrate transport device |
| KR101566289B1 (en) * | 2014-12-15 | 2015-11-05 | (주)유진테크 | Vacuum suction device and methods for setting a fixed position by jig |
| KR20170056988A (en) * | 2015-11-16 | 2017-05-24 | 세메스 주식회사 | Manufacturing method of loading member and Apparatus for treating substrate |
| KR102454696B1 (en) * | 2015-11-16 | 2022-10-14 | 세메스 주식회사 | Manufacturing method of loading member and Apparatus for treating substrate |
| KR20210030726A (en) * | 2019-09-10 | 2021-03-18 | 세메스 주식회사 | Transfer robot and Apparatus for treating substrate with the robot |
| KR102298088B1 (en) * | 2019-09-10 | 2021-09-02 | 세메스 주식회사 | Transfer robot and Apparatus for treating substrate with the robot |
| JP2021052169A (en) * | 2019-09-17 | 2021-04-01 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate holding device and substrate transport device including the same |
| JP7376420B2 (en) | 2019-09-17 | 2023-11-08 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate holding device and substrate transport device equipped with the same |
| JP2022113985A (en) * | 2021-01-26 | 2022-08-05 | 東京応化工業株式会社 | Suction pad and substrate conveyance device |
| JP7465550B2 (en) | 2021-01-26 | 2024-04-11 | Ａｉメカテック株式会社 | Suction pad and substrate transport device |
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