JP2003188015A - 集積回路上に平形に形成された誘導マイクロセンサ - Google Patents

集積回路上に平形に形成された誘導マイクロセンサ

Info

Publication number
JP2003188015A
JP2003188015A JP2002313945A JP2002313945A JP2003188015A JP 2003188015 A JP2003188015 A JP 2003188015A JP 2002313945 A JP2002313945 A JP 2002313945A JP 2002313945 A JP2002313945 A JP 2002313945A JP 2003188015 A JP2003188015 A JP 2003188015A
Authority
JP
Japan
Prior art keywords
segment
microsensor
inductive
integrated circuit
long
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002313945A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003188015A5 (enExample
Inventor
Pierre Andre Farine
ピエール・アンドレ・ファリーン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asulab AG
Original Assignee
Asulab AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asulab AG filed Critical Asulab AG
Publication of JP2003188015A publication Critical patent/JP2003188015A/ja
Publication of JP2003188015A5 publication Critical patent/JP2003188015A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F5/00Coils
    • H01F5/003Printed circuit coils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Coils Or Transformers For Communication (AREA)
JP2002313945A 2001-11-06 2002-10-29 集積回路上に平形に形成された誘導マイクロセンサ Pending JP2003188015A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP01204214A EP1308969B1 (fr) 2001-11-06 2001-11-06 Micro-capteur inductif formé à plat sur un substrat
EP01204214.9 2001-11-06

Publications (2)

Publication Number Publication Date
JP2003188015A true JP2003188015A (ja) 2003-07-04
JP2003188015A5 JP2003188015A5 (enExample) 2005-10-27

Family

ID=8181186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002313945A Pending JP2003188015A (ja) 2001-11-06 2002-10-29 集積回路上に平形に形成された誘導マイクロセンサ

Country Status (4)

Country Link
US (1) US20030085790A1 (enExample)
EP (1) EP1308969B1 (enExample)
JP (1) JP2003188015A (enExample)
DE (1) DE60138388D1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008066141A1 (fr) * 2006-11-29 2008-06-05 Linkcom Manufacturing Co., Ltd. Bobine
JP2008141202A (ja) * 2006-11-29 2008-06-19 Ud Tech Kk コイル装置
JP2008141201A (ja) * 2006-11-29 2008-06-19 Holy Loyalty Internatl Co Ltd コイル装置
US7999650B2 (en) 2005-11-30 2011-08-16 Ryutaro Mori Coil device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7187179B1 (en) * 2005-10-19 2007-03-06 International Business Machines Corporation Wiring test structures for determining open and short circuits in semiconductor devices
CN109801769B (zh) * 2017-11-16 2021-06-11 世界先进积体电路股份有限公司 电感结构
US10600556B2 (en) * 2018-01-04 2020-03-24 Vanguard International Semiconductor Corporation Inductor structure
JP7176435B2 (ja) * 2019-02-15 2022-11-22 株式会社村田製作所 インダクタ部品
DE102021122810A1 (de) 2021-09-03 2023-03-09 Turck Holding Gmbh Miniaturisierter, induktiver Näherungssensor und Verfahren zur Detektion eines Erfassungskörpers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3721759A1 (de) * 1987-07-01 1989-01-12 Ceag Licht & Strom Auf einer leiterplatte angebrachter transformator
DE4205084A1 (de) * 1992-02-17 1993-09-02 Karl Harms Handels Gmbh & Co K Vorrichtung zum empfangen elektromagnetischer wellen, insbesondere fuer diebstahlsicherungssysteme
DE19731969A1 (de) * 1997-07-24 1998-08-27 Siemens Ag Verfahren zum Herstellen eines elektrischen Bauteils

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7999650B2 (en) 2005-11-30 2011-08-16 Ryutaro Mori Coil device
WO2008066141A1 (fr) * 2006-11-29 2008-06-05 Linkcom Manufacturing Co., Ltd. Bobine
WO2008066143A1 (en) * 2006-11-29 2008-06-05 Linkcom Manufacturing Co., Ltd. Transformer device
JP2008141202A (ja) * 2006-11-29 2008-06-19 Ud Tech Kk コイル装置
JP2008141201A (ja) * 2006-11-29 2008-06-19 Holy Loyalty Internatl Co Ltd コイル装置

Also Published As

Publication number Publication date
DE60138388D1 (de) 2009-05-28
EP1308969A1 (fr) 2003-05-07
EP1308969B1 (fr) 2009-04-15
US20030085790A1 (en) 2003-05-08

Similar Documents

Publication Publication Date Title
US6411086B1 (en) Differential solenoidal magnetic field sensing device and method for manufacturing the same
CN1114111C (zh) 差动式螺旋形磁场感测装置和使用该装置的磁场检测组件
JP5747294B1 (ja) 電磁コイル付マグネト・インピーダンス・センサ素子および電磁コイル付マグネト・インピーダンス・センサ
JP6520896B2 (ja) 磁気センサ用インダクタンス素子及びこれを備える磁気センサ
TWI513960B (zh) 具有微電感結構之感測晶片
JP4209782B2 (ja) 半導体基板に集積された磁界検出素子およびその製造方法
EP1387179A2 (en) Printed circuit board integrated with a two-axis fluxgate sensor and method for manufacturing the same
JP2009503443A (ja) 直交フラックスゲート式磁界センサー
JPH08503778A (ja) 磁性反転導体と一又は複数の磁気抵抗レジスタとからなる磁界センサ
JP2003188015A (ja) 集積回路上に平形に形成された誘導マイクロセンサ
US20170108558A1 (en) Magnetic sensor
US7382123B2 (en) Micro fluxgate sensor and method of manufacturing the same
JP3712389B2 (ja) 印刷回路基板に集積された磁界検出素子及びその製造方法
WO2018143122A1 (ja) 平衡式電流センサ
CN107526046A (zh) 一种平面电感型磁传感器
JP2004245835A (ja) 半導体基板に集積された磁界検出素子及びその製造方法
JP4415159B2 (ja) 磁気センサに用いるピックアップコイル
JP2009036717A (ja) 磁気センサ
JP4121747B2 (ja) 回転可能な部材の回転角度を検出するための装置
US20120032673A1 (en) Magnetic sensor
JP3969002B2 (ja) 磁気センサ
JP3351122B2 (ja) 磁気センサの製造方法
KR100667296B1 (ko) 마이크로 플럭스 케이트 센서 제조방법
US10418546B2 (en) Magnetic sensor
JPH09113590A (ja) 磁気センサー

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050824

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050824

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070821

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20071204