JP2003185406A - 位置検出装置 - Google Patents
位置検出装置Info
- Publication number
- JP2003185406A JP2003185406A JP2001384742A JP2001384742A JP2003185406A JP 2003185406 A JP2003185406 A JP 2003185406A JP 2001384742 A JP2001384742 A JP 2001384742A JP 2001384742 A JP2001384742 A JP 2001384742A JP 2003185406 A JP2003185406 A JP 2003185406A
- Authority
- JP
- Japan
- Prior art keywords
- moving member
- electrode
- moving
- drive
- conversion element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 35
- 238000001514 detection method Methods 0.000 claims description 35
- 230000008602 contraction Effects 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 239000003990 capacitor Substances 0.000 abstract description 39
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 21
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 19
- 239000002184 metal Substances 0.000 description 15
- 230000007423 decrease Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 14
- 230000000630 rising effect Effects 0.000 description 8
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Lens Barrels (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001384742A JP2003185406A (ja) | 2001-12-18 | 2001-12-18 | 位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001384742A JP2003185406A (ja) | 2001-12-18 | 2001-12-18 | 位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003185406A true JP2003185406A (ja) | 2003-07-03 |
| JP2003185406A5 JP2003185406A5 (enExample) | 2005-06-23 |
Family
ID=27594397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001384742A Pending JP2003185406A (ja) | 2001-12-18 | 2001-12-18 | 位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003185406A (enExample) |
Cited By (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006214736A (ja) * | 2005-02-01 | 2006-08-17 | Konica Minolta Opto Inc | 駆動装置 |
| JP2007093287A (ja) * | 2005-09-27 | 2007-04-12 | Tietech Co Ltd | リニアモータ |
| JP2007139862A (ja) * | 2005-11-15 | 2007-06-07 | Olympus Corp | レンズ駆動機構 |
| JP2008131681A (ja) * | 2006-11-16 | 2008-06-05 | Pentax Corp | 移動装置 |
| US7462974B2 (en) | 2006-11-10 | 2008-12-09 | Olympus Corporation | Inertial driving actuator |
| EP2019439A2 (en) | 2007-07-26 | 2009-01-28 | Mitsumi Electric Co., Ltd. | Position detecting device capable of improving detection accuracy |
| JP2009053183A (ja) * | 2007-07-31 | 2009-03-12 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| EP2078981A1 (en) | 2008-01-10 | 2009-07-15 | Dialog Imaging Systems GmbH | Lens positioning system |
| EP2117057A2 (en) | 2008-05-08 | 2009-11-11 | Olympus Corporation | Inertial drive actuator |
| JP2009288058A (ja) * | 2008-05-29 | 2009-12-10 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| US7633208B2 (en) | 2007-04-17 | 2009-12-15 | Mitsumi Electric Co., Ltd. | Driving device capable of transferring vibrations generated by an electro-mechanical transducer to a vibration friction portion with a high degree of efficiency |
| US7633209B2 (en) | 2007-04-17 | 2009-12-15 | Mitsumi Electric Co., Ltd. | Driving device capable of obtaining a stable frequency characteristic |
| US7652407B2 (en) | 2007-04-17 | 2010-01-26 | Mitsumi Electric Co., Ltd. | Driving device capable of improving a shock and vibration resistance thereof |
| US7732982B2 (en) | 2007-04-19 | 2010-06-08 | Mitsumi Electric Co., Ltd. | Driving device capable of reducing height thereof |
| US7737606B2 (en) | 2007-07-10 | 2010-06-15 | Olympus Corporation | Inertial drive actuator |
| US7755252B2 (en) | 2007-04-18 | 2010-07-13 | Mitsumi Electric Co., Ltd. | Driving device having suitable stationary member as material |
| US7759634B2 (en) | 2007-04-24 | 2010-07-20 | Mitsumi Electric Co., Ltd. | Position detecting device capable of improving detection accuracy |
| JP2010216986A (ja) * | 2009-03-17 | 2010-09-30 | Olympus Corp | 慣性駆動アクチュエータのキャリブレーション方法、慣性駆動アクチュエータ装置及び移動体の位置算出方法 |
| JP2010216989A (ja) * | 2009-03-17 | 2010-09-30 | Olympus Corp | 慣性駆動アクチュエータのキャリブレーション方法及び慣性駆動アクチュエータ装置 |
| US20100295488A1 (en) * | 2009-05-20 | 2010-11-25 | Kazuhiro Shibatani | Vibratory driving device |
| JP2011033551A (ja) * | 2009-08-05 | 2011-02-17 | Hitachi High-Technologies Corp | 自動分析装置及び分注装置の制御方法 |
| US7902724B2 (en) | 2006-11-10 | 2011-03-08 | Olympus Corporation | Inertial driving actuator |
| US20110080178A1 (en) * | 2009-10-05 | 2011-04-07 | Olympus Corporation | Calibration method for inertial drive actuator, and inertial drive actuator device |
| US7956513B2 (en) | 2007-04-20 | 2011-06-07 | Mitsumi Electric Co., Ltd. | Method of driving a driving device |
| US20110288815A1 (en) * | 2005-04-06 | 2011-11-24 | Konica Minolta Opto, Inc. | Position detector and positioning device |
| US11448339B2 (en) | 2019-11-12 | 2022-09-20 | Aisan Kogyo Kabushiki Kaisha | Valve device and system in which the valve device is mounted |
| JP2023018641A (ja) * | 2021-07-27 | 2023-02-08 | 基合半導体(寧波)有限公司 | フォーカスモーター、フォーカスモーターの閉ループ制御方法及び撮像装置 |
| CN119666038A (zh) * | 2024-12-09 | 2025-03-21 | 清华大学 | 转换电路、电子装置及操作方法 |
-
2001
- 2001-12-18 JP JP2001384742A patent/JP2003185406A/ja active Pending
Cited By (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7315164B2 (en) | 2005-02-01 | 2008-01-01 | Konica Minolta Opto, Inc. | Drive unit provided with position detecting device |
| JP2006214736A (ja) * | 2005-02-01 | 2006-08-17 | Konica Minolta Opto Inc | 駆動装置 |
| US20110288815A1 (en) * | 2005-04-06 | 2011-11-24 | Konica Minolta Opto, Inc. | Position detector and positioning device |
| JP2007093287A (ja) * | 2005-09-27 | 2007-04-12 | Tietech Co Ltd | リニアモータ |
| JP2007139862A (ja) * | 2005-11-15 | 2007-06-07 | Olympus Corp | レンズ駆動機構 |
| US8198786B2 (en) | 2006-11-10 | 2012-06-12 | Olympus Corporation | Inertial driving actuator |
| US7462974B2 (en) | 2006-11-10 | 2008-12-09 | Olympus Corporation | Inertial driving actuator |
| US7902724B2 (en) | 2006-11-10 | 2011-03-08 | Olympus Corporation | Inertial driving actuator |
| JP2008131681A (ja) * | 2006-11-16 | 2008-06-05 | Pentax Corp | 移動装置 |
| US7633208B2 (en) | 2007-04-17 | 2009-12-15 | Mitsumi Electric Co., Ltd. | Driving device capable of transferring vibrations generated by an electro-mechanical transducer to a vibration friction portion with a high degree of efficiency |
| US7633209B2 (en) | 2007-04-17 | 2009-12-15 | Mitsumi Electric Co., Ltd. | Driving device capable of obtaining a stable frequency characteristic |
| US7652407B2 (en) | 2007-04-17 | 2010-01-26 | Mitsumi Electric Co., Ltd. | Driving device capable of improving a shock and vibration resistance thereof |
| US7755252B2 (en) | 2007-04-18 | 2010-07-13 | Mitsumi Electric Co., Ltd. | Driving device having suitable stationary member as material |
| US7732982B2 (en) | 2007-04-19 | 2010-06-08 | Mitsumi Electric Co., Ltd. | Driving device capable of reducing height thereof |
| US7956513B2 (en) | 2007-04-20 | 2011-06-07 | Mitsumi Electric Co., Ltd. | Method of driving a driving device |
| US7759634B2 (en) | 2007-04-24 | 2010-07-20 | Mitsumi Electric Co., Ltd. | Position detecting device capable of improving detection accuracy |
| US7737606B2 (en) | 2007-07-10 | 2010-06-15 | Olympus Corporation | Inertial drive actuator |
| US7733587B2 (en) | 2007-07-26 | 2010-06-08 | Mitsumi Electric Co., Ltd. | Position detecting device capable of improving detection accuracy |
| EP2019439A2 (en) | 2007-07-26 | 2009-01-28 | Mitsumi Electric Co., Ltd. | Position detecting device capable of improving detection accuracy |
| JP2009053183A (ja) * | 2007-07-31 | 2009-03-12 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| EP2078981A1 (en) | 2008-01-10 | 2009-07-15 | Dialog Imaging Systems GmbH | Lens positioning system |
| US8363324B2 (en) | 2008-01-10 | 2013-01-29 | Digital Imaging Systems Gmbh | Lens positioning system |
| US7986074B2 (en) | 2008-05-08 | 2011-07-26 | Olympus Corporation | Inertial drive actuator |
| EP2117057A2 (en) | 2008-05-08 | 2009-11-11 | Olympus Corporation | Inertial drive actuator |
| JP2009288058A (ja) * | 2008-05-29 | 2009-12-10 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| US8207746B2 (en) | 2009-03-17 | 2012-06-26 | Olympus Corporation | Calibration method for inertial drive actuator, and inertial drive actuator device |
| US8290731B2 (en) | 2009-03-17 | 2012-10-16 | Olympus Corporation | Calibration method for inertial drive actuator, inertial drive actuator device, and method of calculating position of moving body |
| JP2010216989A (ja) * | 2009-03-17 | 2010-09-30 | Olympus Corp | 慣性駆動アクチュエータのキャリブレーション方法及び慣性駆動アクチュエータ装置 |
| JP2010216986A (ja) * | 2009-03-17 | 2010-09-30 | Olympus Corp | 慣性駆動アクチュエータのキャリブレーション方法、慣性駆動アクチュエータ装置及び移動体の位置算出方法 |
| US20100295488A1 (en) * | 2009-05-20 | 2010-11-25 | Kazuhiro Shibatani | Vibratory driving device |
| US8575870B2 (en) * | 2009-05-20 | 2013-11-05 | Konica Minolta Opto, Inc. | Vibratory driving device |
| JP2011033551A (ja) * | 2009-08-05 | 2011-02-17 | Hitachi High-Technologies Corp | 自動分析装置及び分注装置の制御方法 |
| US20110080178A1 (en) * | 2009-10-05 | 2011-04-07 | Olympus Corporation | Calibration method for inertial drive actuator, and inertial drive actuator device |
| US8686740B2 (en) | 2009-10-05 | 2014-04-01 | Olympus Corporation | Calibration method for inertial drive actuator, and inertial drive actuator device |
| US11448339B2 (en) | 2019-11-12 | 2022-09-20 | Aisan Kogyo Kabushiki Kaisha | Valve device and system in which the valve device is mounted |
| US12181070B2 (en) | 2019-11-12 | 2024-12-31 | Aisan Kogyo Kabushiki Kaisha | Valve device and system in which the valve device is mounted |
| JP2023018641A (ja) * | 2021-07-27 | 2023-02-08 | 基合半導体(寧波)有限公司 | フォーカスモーター、フォーカスモーターの閉ループ制御方法及び撮像装置 |
| CN119666038A (zh) * | 2024-12-09 | 2025-03-21 | 清华大学 | 转换电路、电子装置及操作方法 |
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