JP2003157974A - エレクトロルミネッセンス表示パネルの製造方法及び蒸着マスク - Google Patents
エレクトロルミネッセンス表示パネルの製造方法及び蒸着マスクInfo
- Publication number
- JP2003157974A JP2003157974A JP2002252452A JP2002252452A JP2003157974A JP 2003157974 A JP2003157974 A JP 2003157974A JP 2002252452 A JP2002252452 A JP 2002252452A JP 2002252452 A JP2002252452 A JP 2002252452A JP 2003157974 A JP2003157974 A JP 2003157974A
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- mask
- glass substrate
- thermal expansion
- display panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 140
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000011521 glass Substances 0.000 claims abstract description 77
- 239000000463 material Substances 0.000 claims abstract description 75
- 239000000758 substrate Substances 0.000 claims abstract description 69
- 238000000059 patterning Methods 0.000 claims abstract description 12
- 238000005401 electroluminescence Methods 0.000 claims description 49
- 238000001704 evaporation Methods 0.000 claims description 43
- 230000008020 evaporation Effects 0.000 claims description 42
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 34
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 17
- 229910052759 nickel Inorganic materials 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 239000011159 matrix material Substances 0.000 claims description 8
- 229910052742 iron Inorganic materials 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 37
- 239000012044 organic layer Substances 0.000 description 22
- 239000003990 capacitor Substances 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229910001374 Invar Inorganic materials 0.000 description 4
- 230000005525 hole transport Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002252452A JP2003157974A (ja) | 2001-08-31 | 2002-08-30 | エレクトロルミネッセンス表示パネルの製造方法及び蒸着マスク |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-264694 | 2001-08-31 | ||
| JP2001264694 | 2001-08-31 | ||
| JP2002252452A JP2003157974A (ja) | 2001-08-31 | 2002-08-30 | エレクトロルミネッセンス表示パネルの製造方法及び蒸着マスク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003157974A true JP2003157974A (ja) | 2003-05-30 |
| JP2003157974A5 JP2003157974A5 (enExample) | 2005-07-21 |
Family
ID=26621475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002252452A Pending JP2003157974A (ja) | 2001-08-31 | 2002-08-30 | エレクトロルミネッセンス表示パネルの製造方法及び蒸着マスク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003157974A (enExample) |
-
2002
- 2002-08-30 JP JP2002252452A patent/JP2003157974A/ja active Pending
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