JP2003136386A5 - - Google Patents

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Publication number
JP2003136386A5
JP2003136386A5 JP2001338789A JP2001338789A JP2003136386A5 JP 2003136386 A5 JP2003136386 A5 JP 2003136386A5 JP 2001338789 A JP2001338789 A JP 2001338789A JP 2001338789 A JP2001338789 A JP 2001338789A JP 2003136386 A5 JP2003136386 A5 JP 2003136386A5
Authority
JP
Japan
Prior art keywords
needle
recognizing
polisher
polishing tool
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001338789A
Other languages
English (en)
Japanese (ja)
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JP3895584B2 (ja
JP2003136386A (ja
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Publication date
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Priority to JP2001338789A priority Critical patent/JP3895584B2/ja
Priority claimed from JP2001338789A external-priority patent/JP3895584B2/ja
Publication of JP2003136386A publication Critical patent/JP2003136386A/ja
Publication of JP2003136386A5 publication Critical patent/JP2003136386A5/ja
Application granted granted Critical
Publication of JP3895584B2 publication Critical patent/JP3895584B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001338789A 2001-11-02 2001-11-02 針研磨具の認識方法及び針研磨具の認識装置 Expired - Lifetime JP3895584B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001338789A JP3895584B2 (ja) 2001-11-02 2001-11-02 針研磨具の認識方法及び針研磨具の認識装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001338789A JP3895584B2 (ja) 2001-11-02 2001-11-02 針研磨具の認識方法及び針研磨具の認識装置

Publications (3)

Publication Number Publication Date
JP2003136386A JP2003136386A (ja) 2003-05-14
JP2003136386A5 true JP2003136386A5 (enrdf_load_stackoverflow) 2005-06-09
JP3895584B2 JP3895584B2 (ja) 2007-03-22

Family

ID=19153230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001338789A Expired - Lifetime JP3895584B2 (ja) 2001-11-02 2001-11-02 針研磨具の認識方法及び針研磨具の認識装置

Country Status (1)

Country Link
JP (1) JP3895584B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5122151B2 (ja) * 2007-01-26 2013-01-16 東京エレクトロン株式会社 ステージ機構
JP5191312B2 (ja) * 2008-08-25 2013-05-08 東京エレクトロン株式会社 プローブの研磨方法、プローブ研磨用プログラム及びプローブ装置
JP6262547B2 (ja) 2014-01-22 2018-01-17 東京エレクトロン株式会社 プローバ及びプローブカードの針先研磨装置

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