JP2003136386A5 - - Google Patents
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- JP2003136386A5 JP2003136386A5 JP2001338789A JP2001338789A JP2003136386A5 JP 2003136386 A5 JP2003136386 A5 JP 2003136386A5 JP 2001338789 A JP2001338789 A JP 2001338789A JP 2001338789 A JP2001338789 A JP 2001338789A JP 2003136386 A5 JP2003136386 A5 JP 2003136386A5
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- JP
- Japan
- Prior art keywords
- needle
- recognizing
- polisher
- polishing tool
- load
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【０００９】
【課題を解決するための手段】
本発明の請求項１に記載の針研磨具の認識方法は、被検査体の検査装置において、上記被検査体と接触するプローブカードと、このプローブカードのプローブを研磨する針研磨具と、この針研磨具を認識する認識装置とを備え、上記認識装置によって上記針研磨具の高さを認識する方法であって、上記認識装置として荷重センサを用い、上記針研磨具が移動して上記針研磨具と上記荷重センサが接触した後荷重を検出し、この検出荷重に基づいて上記針研磨具の高さを認識することを特徴とするものである。
また、本発明の請求項２の記載の針研磨具の認識方法は、請求項１に記載の発明において、上記被検査体を載置する移動可能な載置台に上記針研磨具を付設し、上記載置台を介して上記針研磨具を移動させることを特徴とするものである。
[0009]
[Means for Solving the Problems]
A recognition method of a needle polisher according to claim 1 of the present invention is a probe card in contact with the test object, a needle polisher for polishing a probe of the probe card, and the probe polisher in the inspection device of the test object. and a recognizing device a needle abrasive article, a method of recognizing the height of the upper Kihari grinding tool by the said recognition system, using a load sensor as the recognition device, the needle grinding tool is moved detecting a load after upper Kihari polishing tool and the load sensor is in contact Te, it is characterized in that to recognize the height of the needle polishing tool on the basis of the detected load.
Further, in the method for recognizing a needle polisher according to claim 2 of the present invention, in the invention according to claim 1, the needle polisher is attached to a movable mounting table on which the inspection object is placed, The needle polishing tool is moved through the mounting table.
本発明の請求項３に記載の針研磨具の認識方法は、請求項１または請求項２に記載の発明において、上記検出荷重により上記荷重センサのスイッチ機構が作動することを特徴とするものである。 A method of recognizing a needle polisher according to a third aspect of the present invention is characterized in that, in the invention according to the first or second aspect , the switch mechanism of the load sensor is operated by the detected load. is there.
本発明の請求項４に記載の針研磨具の認識方法は、請求項３に記載の発明において、上記スイッチ機構が電源を切ることを特徴とするものである。 A method of recognizing a needle polisher according to a fourth aspect of the present invention is characterized in that, in the invention according to the third aspect , the switch mechanism turns off the power.
本発明の請求項５に記載の針研磨具の認識方法は、請求項２〜請求項４のいずれか１項に記載の発明において、上記載置台に付設された上記針研磨具を認識することを特徴とするものである。 In the recognition method of a needle polisher according to claim 5 of the present invention, in the invention according to any one of claims 2 to 4 , the above-mentioned needle polisher attached to the mounting table is recognized. It is characterized by
また、本発明の請求項６に記載の針研磨具の認識方法は、請求項１〜請求項５のいずれか１項に記載の発明において、上記針研磨具上に載置された上記針研磨具を認識することを特徴とするものである。 Further, in the recognition method for a needle polisher according to claim 6 of the present invention, in the invention according to any one of claims 1 to 5 , the above-mentioned needle polish placed on the above-mentioned needle polisher It is characterized by recognizing a tool.
また、本発明の請求項７に記載の針研磨具の認識方法は、請求項１〜請求項６のいずれか１項に記載の発明において、ブラシ状またはプレート状の針研磨具を認識することを特徴とするものである。 In the recognition method of the needle polisher according to claim 7 of the present invention, in the invention according to any one of claims 1 to 6 , the brush-like or plate-like needle polisher is recognized. It is characterized by
また、本発明の請求項８に記載の針研磨具の認識装置は、被検査体の検査装置において、上記被検査体と接触するプローブカードと、このプローブカードのプローブを研磨する研磨具とを備えたプローブ装置の針研磨具を認識する装置であって、上記針研磨具が移動して上記針研磨具と接触した後の荷重に基づいて上記針研磨具の高さを認識する荷重センサを備えたことを特徴とするものである。
また、本発明の請求項９に記載の針研磨具の認識装置は、請求項８に記載の発明において、上記被検査体を載置する移動可能な載置台に上記針研磨具を付設したことを特徴とするものである。
Further, in the device for recognizing a needle polisher according to an eighth aspect of the present invention, in the inspection device for a subject to be inspected, a probe card in contact with the subject to be inspected and a polisher for polishing a probe of the probe card a device for recognizing hand polishing tool of the probe device provided with a load sensor that recognizes the height of the needle polishing tool based on the load after contact with the needle polishing tool with the needle grinding tool is moved It is characterized by having.
Further, in the device for recognizing a needle polisher according to a ninth aspect of the present invention, in the invention according to the eighth aspect, the needle polisher is attached to a movable mounting table on which the inspection object is placed. It is characterized by
また、本発明の請求項１０に記載の針研磨具の認識装置は、請求項８または請求項９に記載の発明において、上記荷重センサを、上記被検査体と上記プローブを位置合わせするアライメント機構のアライメントブリッジに取り付けたことを特徴とするものである。 In the recognition apparatus for a needle polisher according to claim 10 of the present invention, in the invention according to claim 8 or 9 , an alignment mechanism for aligning the load sensor with the inspection object and the probe. It is characterized in that it is attached to the alignment bridge of
また、本発明の請求項１１に記載の針研磨具の認識装置は請求項８〜請求項１０のいずれか１項に記載の発明において、上記荷重センサは、上記荷重に基づいて作動するスイッチ機構を有することを特徴とするものである。 The recognition device for a needle polisher according to claim 11 of the present invention is the switch mechanism according to any one of claims 8 to 10, wherein the load sensor operates based on the load. It is characterized by having.
また、本発明の請求項１２に記載の針研磨具の認識装置は、請求項８〜請求項１１のいずれか１項に記載の発明において、上記荷重センサは、導電性材料によって形成された第１の筒体と、第１の筒体の内側に絶縁体を介して同軸に配置され且つ導電性材料によって一端を封止して形成された第２筒体と、第２の筒体内に弾性部材を介して一端が挿入され且つ他端が拡径部として形成された導電性材料からなるプランジャと、このプランジャの拡径部外周面から突出する導電性材料からなるスイッチとを有し、第１の筒体の開口端には上記弾性部材を介して付勢された上記プランジャの上記スイッチを係止する係止部が形成されていることを特徴とするものである。 Further, in the device for recognizing a needle polisher according to a twelfth aspect of the present invention, in the invention according to any one of the eighth to eleventh aspects, the load sensor is formed of a conductive material. A first cylinder, a second cylinder coaxially disposed inside the first cylinder via an insulator, and sealed at one end with a conductive material, and elastic in the second cylinder A plunger made of a conductive material, one end of which is inserted through the member and the other end of which is formed as an enlarged diameter portion, and a switch made of a conductive material protruding from the outer peripheral surface of the enlarged diameter portion of the plunger; A locking portion for locking the switch of the plunger biased via the elastic member is formed at the open end of the first cylindrical body.
また、本発明の請求項１３に記載の針研磨具の認識装置は、請求項１２に記載の発明において、上記スイッチを一箇所に設けたことを特徴とするものである。 Further, a recognition apparatus for a needle polisher according to a thirteenth aspect of the present invention is characterized in that, in the invention according to the twelfth aspect , the switch is provided at one place.
また、本発明の請求項１４に記載の針研磨具の認識装置は、請求項１２または請求項１３に記載の発明において、第１の筒体と第２の筒体を電源に接続したことを特徴とするものである。 In the recognition apparatus for a needle polisher according to a fourteenth aspect of the present invention, in the invention according to the twelfth or thirteenth aspect , the first cylinder and the second cylinder are connected to a power supply. It is a feature.
【００３８】
【発明の効果】
本発明の請求項１〜請求項１４に記載の発明によれば、種類に関係なく針研磨具の研磨表面を正確に認識して針研磨具の表面高さを正確且つ確実に再現性良く検出することができる針研磨具の認識方法及び針研磨具の認識装置を提供することができる。
[0038]
【Effect of the invention】
According to the inventions of claims 1 to 14 of the present invention, regardless of the type, the polishing surface of the needle polishing tool can be accurately recognized to detect the surface height of the needle polishing tool accurately and reliably with good reproducibility. It is possible to provide a method of recognizing a needle polisher and a device for recognizing a needle polisher that can
Claims (14)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001338789A JP3895584B2 (en) | 2001-11-02 | 2001-11-02 | Needle polishing tool recognition method and needle polishing tool recognition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001338789A JP3895584B2 (en) | 2001-11-02 | 2001-11-02 | Needle polishing tool recognition method and needle polishing tool recognition device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003136386A JP2003136386A (en) | 2003-05-14 |
| JP2003136386A5 true JP2003136386A5 (en) | 2005-06-09 |
| JP3895584B2 JP3895584B2 (en) | 2007-03-22 |
Family
ID=19153230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001338789A Expired - Lifetime JP3895584B2 (en) | 2001-11-02 | 2001-11-02 | Needle polishing tool recognition method and needle polishing tool recognition device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3895584B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5122151B2 (en) * | 2007-01-26 | 2013-01-16 | 東京エレクトロン株式会社 | Stage mechanism |
| JP5191312B2 (en) * | 2008-08-25 | 2013-05-08 | 東京エレクトロン株式会社 | Probe polishing method, probe polishing program, and probe apparatus |
| JP6262547B2 (en) | 2014-01-22 | 2018-01-17 | 東京エレクトロン株式会社 | Probe tip polishing device for prober and probe card |
-
2001
- 2001-11-02 JP JP2001338789A patent/JP3895584B2/en not_active Expired - Lifetime
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