JP2003130132A5 - - Google Patents

Download PDF

Info

Publication number
JP2003130132A5
JP2003130132A5 JP2001323386A JP2001323386A JP2003130132A5 JP 2003130132 A5 JP2003130132 A5 JP 2003130132A5 JP 2001323386 A JP2001323386 A JP 2001323386A JP 2001323386 A JP2001323386 A JP 2001323386A JP 2003130132 A5 JP2003130132 A5 JP 2003130132A5
Authority
JP
Japan
Prior art keywords
amplitude
guide
damped
attenuate
returning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001323386A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003130132A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001323386A priority Critical patent/JP2003130132A/ja
Priority claimed from JP2001323386A external-priority patent/JP2003130132A/ja
Publication of JP2003130132A publication Critical patent/JP2003130132A/ja
Publication of JP2003130132A5 publication Critical patent/JP2003130132A5/ja
Pending legal-status Critical Current

Links

Images

JP2001323386A 2001-10-22 2001-10-22 除振機構 Pending JP2003130132A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001323386A JP2003130132A (ja) 2001-10-22 2001-10-22 除振機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001323386A JP2003130132A (ja) 2001-10-22 2001-10-22 除振機構

Publications (2)

Publication Number Publication Date
JP2003130132A JP2003130132A (ja) 2003-05-08
JP2003130132A5 true JP2003130132A5 (enExample) 2005-07-14

Family

ID=19140280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001323386A Pending JP2003130132A (ja) 2001-10-22 2001-10-22 除振機構

Country Status (1)

Country Link
JP (1) JP2003130132A (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101484435B1 (ko) 2003-04-09 2015-01-19 가부시키가이샤 니콘 노광 방법 및 장치, 그리고 디바이스 제조 방법
TWI628698B (zh) 2003-10-28 2018-07-01 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造方法
TWI612338B (zh) 2003-11-20 2018-01-21 尼康股份有限公司 光學照明裝置、曝光裝置、曝光方法、以及元件製造方法
TWI614795B (zh) 2004-02-06 2018-02-11 Nikon Corporation 光學照明裝置、曝光裝置、曝光方法以及元件製造方法
EP2660853B1 (en) 2005-05-12 2017-07-05 Nikon Corporation Projection optical system, exposure apparatus and exposure method
TW200912560A (en) * 2007-09-07 2009-03-16 Nikon Corp Suspending apparatus and exposure apparatus
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
JP2014530478A (ja) 2011-09-09 2014-11-17 マッパー・リソグラフィー・アイピー・ビー．ブイ． 除振モジュール及び基板処理システム
CN106229440A (zh) * 2016-09-28 2016-12-14 东莞市联洲知识产权运营管理有限公司 一种新能源汽车用锂电池缓冲架装置
CN106374070B (zh) * 2016-09-28 2019-04-23 广东晓兰客车有限公司 一种新能源汽车用锂电池自动调节缓冲通风装置
CN112025769B (zh) * 2020-09-02 2021-09-21 张胜伟 适用于精密测量机器人的减震台

Similar Documents

Publication Publication Date Title
JP2003130132A5 (enExample)
DE10294359D2 (de) Drehschwingungsdämpfer
GB2374396B (en) Torsion vibration damper
GB2366606B (en) Vibration damper
DK1258167T3 (da) Akustisk transducer med forbedret akustisk dæmper
IT1301904B1 (it) Dispositivo per lo smorzamento di vibrazioni torsionali, ad elevatasemplicita' di produzione.
GB2374397B (en) Torsional vibration damper
EP1409803A4 (en) SHOCK ABSORBER PRODUCED BY VIBRATIONS
FR2855578B1 (fr) Amortisseur a force d'amortissement selective en fonction de l'amplitude
BR0103047B1 (pt) amortecedor de vibração de torção.
FR2828539B1 (fr) Amortisseur d'oscillations a force d'amortissement variable
FR2797482B1 (fr) Dispositif amortisseur de vibrations presentant une grande durabilite du corps elastique
WO2004019446A3 (en) Audio radiator with radiator flexure minization and voice coil elastic anti-wobble members
GB0222279D0 (en) NMR tomography machine with noise suppression by damping of mechanical vibrations
ATE404804T1 (de) Adaptiver schwingungstilger
ITRM20010619A1 (it) Struttura di smorzamento delle vibrazioni.
DE10191356D2 (de) Federelement, insbesondere für Torsionsschwingungsdämpfer
GB2370088B (en) Fluid-filled vibration damping device and method of producing the same
FR2833670B1 (fr) Amortisseur d'oscillations de torsion
GB2359607B (en) Vibration damping arrangements
DE60115100D1 (de) Geregelter und flüssigkeitsabgedichteter schwingungsdämpfer
BR0201971B1 (pt) escada rolante ou ascensor rolante.
FR2860054B1 (fr) Amortisseur d'oscillations a force d'amortissement dependante de la course
DE50207326D1 (de) Turbolader mit torsionsschwingungsdämpfer
ITMI20020096A0 (it) Ammortizzazione di vibrazione torsionali ad elevata semplicita' di produzione