JP2003130132A5 - - Google Patents
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- JP2003130132A5 JP2003130132A5 JP2001323386A JP2001323386A JP2003130132A5 JP 2003130132 A5 JP2003130132 A5 JP 2003130132A5 JP 2001323386 A JP2001323386 A JP 2001323386A JP 2001323386 A JP2001323386 A JP 2001323386A JP 2003130132 A5 JP2003130132 A5 JP 2003130132A5
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- JP
- Japan
- Prior art keywords
- amplitude
- guide
- damped
- attenuate
- returning
- Prior art date
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したがって、座屈を回避した鉛直方向に軟らかく、水平方向に硬いコイルばね４と、ガイド６とを組合わせた状態で、テーブルの垂直方向の振動・振幅を減衰させ、テーブルの横揺れは、ガイドによって、自己復帰させると同時に振幅を減衰させることが可能である。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001323386A JP2003130132A (ja) | 2001-10-22 | 2001-10-22 | 除振機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001323386A JP2003130132A (ja) | 2001-10-22 | 2001-10-22 | 除振機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003130132A JP2003130132A (ja) | 2003-05-08 |
| JP2003130132A5 true JP2003130132A5 (ja) | 2005-07-14 |
Family
ID=19140280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001323386A Pending JP2003130132A (ja) | 2001-10-22 | 2001-10-22 | 除振機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003130132A (ja) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101124179B1 (ko) | 2003-04-09 | 2012-03-27 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
| TWI474132B (zh) | 2003-10-28 | 2015-02-21 | 尼康股份有限公司 | 照明光學裝置、投影曝光裝置、曝光方法以及元件製造方法 |
| TWI612338B (zh) | 2003-11-20 | 2018-01-21 | 尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法、以及元件製造方法 |
| TWI360837B (en) | 2004-02-06 | 2012-03-21 | Nikon Corp | Polarization changing device, optical illumination |
| KR101455551B1 (ko) | 2005-05-12 | 2014-10-27 | 가부시키가이샤 니콘 | 투영 광학계, 노광 장치 및 노광 방법 |
| US20090274537A1 (en) * | 2007-09-07 | 2009-11-05 | Nikon Corporation | Suspension apparatus and exposure apparatus |
| JP5267029B2 (ja) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
| US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| US8905369B2 (en) | 2011-09-09 | 2014-12-09 | Mapper Lithography Ip B.V. | Vibration isolation module and substrate processing system |
| CN106374070B (zh) * | 2016-09-28 | 2019-04-23 | 广东晓兰客车有限公司 | 一种新能源汽车用锂电池自动调节缓冲通风装置 |
| CN106229440A (zh) * | 2016-09-28 | 2016-12-14 | 东莞市联洲知识产权运营管理有限公司 | 一种新能源汽车用锂电池缓冲架装置 |
| CN112025769B (zh) * | 2020-09-02 | 2021-09-21 | 张胜伟 | 适用于精密测量机器人的减震台 |
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2001
- 2001-10-22 JP JP2001323386A patent/JP2003130132A/ja active Pending
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