JP2003110203A - Wiring board for multiple pattern and method of manufacturing the same - Google Patents

Wiring board for multiple pattern and method of manufacturing the same

Info

Publication number
JP2003110203A
JP2003110203A JP2001301288A JP2001301288A JP2003110203A JP 2003110203 A JP2003110203 A JP 2003110203A JP 2001301288 A JP2001301288 A JP 2001301288A JP 2001301288 A JP2001301288 A JP 2001301288A JP 2003110203 A JP2003110203 A JP 2003110203A
Authority
JP
Japan
Prior art keywords
wiring board
wiring
conductor
metal frame
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001301288A
Other languages
Japanese (ja)
Inventor
Koyo Hiramatsu
幸洋 平松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2001301288A priority Critical patent/JP2003110203A/en
Publication of JP2003110203A publication Critical patent/JP2003110203A/en
Withdrawn legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a wiring board for multiple pattern and a method of manufacturing the same by which wiring conductors and piercing conductors can be reliably bonded when a plurality of insulating sheets each having a wiring conductor deposited thereon are stacked and subjected to hot pressing to manufacturing a wiring board for multiple pattern, and electrical inspection can be precisely performed without causing bending. SOLUTION: In this multiple wiring board, a multiplicity of wiring board regions 5, in which a wiring conductor 2 is formed on the insulating layer 1 surface, and a piercing conductor 3 for electrically connecting the vertically positioned wiring conductors 2 is formed inside the insulating layer 1, are disposed in the central portion of a parent board 6 obtained by stacking a plurality of the insulating layers 1. A wiring conductor 2 is formed in the wiring board region 5 on the insulating layer 1 surface, and a piercing conductor is formed in the insulating layer 1 between the vertically positioned wiring conductors 2. A metallic frame 4 is disposed between and in the outer periphery of the wiring board regions 5 on the insulating layer 1 surface.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、広面積の母基板中
に半導体素子や抵抗器等の電子部品を搭載するための配
線基板となる配線基板領域を多数個配列形成して成る多
数個取り配線基板およびその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-cavity structure in which a large number of wiring board regions, which are wiring boards for mounting electronic components such as semiconductor elements and resistors, are arranged in a mother board having a large area. The present invention relates to a wiring board and a manufacturing method thereof.

【0002】[0002]

【従来の技術】従来、半導体素子や抵抗器等の電子部品
を搭載するために用いられる配線基板として、ガラス基
材および熱硬化性樹脂から成る絶縁層と銅箔等から成る
配線導体とを交互に複数積層して成るプリント基板が知
られている。このようなプリント基板は、絶縁層表面に
被着した銅箔をエッチングして配線導体を形成し、配線
導体が形成された絶縁層を熱硬化性樹脂からなる接着材
を間に挟んで複数枚積層圧着して多層化することにより
製造されている。しかしながらこのプリント基板は、絶
縁層表面の配線導体が形成された部分とその他の部分と
の段差により表面が凹凸状態となることから、絶縁層に
若干の可塑性を持たせた絶縁シートを用い、絶縁シート
を積層する際に絶縁シートの配線導体に当接する部位を
配線導体の厚みに対応して塑性変形させることにより配
線導体を絶縁シート中に埋入させ積層・硬化することに
より、プリント基板表面に凹凸が形成されないようにし
ている(特開平10−27959号公報参照)。
2. Description of the Related Art Conventionally, as a wiring board used for mounting electronic components such as semiconductor elements and resistors, an insulating layer made of a glass base material and a thermosetting resin and a wiring conductor made of a copper foil are alternately arranged. There is known a printed circuit board formed by stacking a plurality of layers. Such a printed circuit board is formed by etching a copper foil adhered to the surface of an insulating layer to form a wiring conductor, and a plurality of insulating layers having the wiring conductor are sandwiched by an adhesive material made of a thermosetting resin. It is manufactured by laminating and press-bonding to form a multilayer. However, this printed circuit board has an uneven surface due to the step between the part where the wiring conductor is formed on the surface of the insulating layer and the other part. Therefore, an insulating sheet with a little plasticity is used for the insulating layer. When the sheets are laminated, the portion of the insulating sheet that comes into contact with the wiring conductor is plastically deformed in accordance with the thickness of the wiring conductor to embed the wiring conductor in the insulating sheet, and to stack and cure it No unevenness is formed (see Japanese Patent Laid-Open No. 10-27959).

【0003】特開平10−27959号公報に記載されたプリ
ント基板は、耐熱性繊維に熱硬化性樹脂前駆体を含浸さ
せた絶縁シートの配線基板領域にレーザで貫通孔を形成
した後、この貫通孔内に金属粉末および熱硬化性樹脂前
駆体から成る金属ペーストをスクリーン印刷(圧入)で
埋め込み貫通導体を形成し、他方、耐熱性樹脂から成る
転写シートの表面に銅箔を被着し、所定のパターンにエ
ッチングして絶縁シートの各配線基板領域に対応する位
置に配線導体を形成し、しかる後、貫通導体が形成され
た絶縁シートに配線導体が形成された転写シートを圧接
して配線導体を絶縁シートに転写埋入するとともに貫通
導体と接続させ、さらに、絶縁シートから転写シートを
剥離した後、配線導体が埋入された絶縁シートを複数積
層して熱プレスを用いて熱硬化性樹脂前駆体を硬化一体
化させて多数個取り配線基板を得、最後に、これをルー
タ等の切断機で分割することにより製造される。
The printed circuit board described in Japanese Unexamined Patent Publication No. 10-27959 has a through hole formed by a laser in a wiring board region of an insulating sheet in which a heat-resistant fiber is impregnated with a thermosetting resin precursor. A metal paste consisting of a metal powder and a thermosetting resin precursor is embedded in the holes by screen printing (press-fitting) to form a through conductor, while a copper foil is adhered to the surface of a transfer sheet made of a heat-resistant resin to form a predetermined conductor. To form a wiring conductor at a position corresponding to each wiring board region of the insulating sheet, and then press-contact the transfer sheet having the wiring conductor formed on the insulating sheet having the penetrating conductor formed thereon. Is transferred to the insulating sheet and connected to the through conductor, and after the transfer sheet is peeled from the insulating sheet, a plurality of insulating sheets in which the wiring conductors are embedded are stacked and heat press is used. The thermosetting resin precursor is cured and integrated to obtain a multi-piece wiring board, and finally, the wiring board is divided by a cutting machine such as a router.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、昨今の
電子部品における軽薄短小化の流れのなかで配線基板の
厚みも200〜500μm程度と薄いものとなってきているの
に対し、多数個取り配線基板の厚みが薄くなると剛性が
低くなり自重でその中央部が撓んでしまい、多数個取り
配線基板を水平に置いて上下から電気検査プローブを当
てて電気検査をする際に、電気検査プローブが多数個取
り配線基板表面の配線導体に当接しない部分が生じ、正
確な電気検査結果が得られないという問題点を有してい
た。また、多数個取り配線基板の面積を広くした場合も
自重による撓みが大きくなり、逆に狭くすると配線基板
の取り数が減少し生産効率が低下してしまうという問題
点を有していた。さらに、多数個取り配線基板の剛性を
向上させるために補強板を用いると、それを取りつける
工程が余分に必要となるという問題点を有していた。
However, in the recent trend of making electronic parts lighter, thinner, shorter, and smaller, the thickness of wiring boards has become as thin as about 200 to 500 μm, whereas multi-cavity wiring boards are available. If the thickness of the board becomes thin, the rigidity will decrease and the center part will bend due to its own weight, so when you place the wiring board horizontally and apply the electric test probe from above and below, you will have many electric test probes. There is a problem in that a portion of the surface of the wiring board that does not come into contact with the wiring conductor is generated, and an accurate electrical inspection result cannot be obtained. Further, when the area of the multi-cavity wiring board is widened, the flexure due to its own weight becomes large, and conversely, when the area is narrowed, the number of wiring boards taken up is reduced and the production efficiency is lowered. Further, if a reinforcing plate is used to improve the rigidity of the multi-cavity wiring board, there is a problem in that an extra step of mounting the reinforcing board is required.

【0005】また、上記のプリント基板は、絶縁シート
を複数積層して熱プレスを用いて製作されているため、
積層して熱プレスする際に熱硬化性樹脂前駆体の粘度が
低下して熱硬化性樹脂前駆体が流動し、絶縁層表面の配
線導体が変形してしまい、貫通導体とそれと接続される
配線導体の位置がズレてしまい短絡や断線を生じてしま
うという問題点を有していた。
Further, since the above printed circuit board is manufactured by using a hot press by laminating a plurality of insulating sheets,
When laminated and hot pressed, the viscosity of the thermosetting resin precursor decreases and the thermosetting resin precursor flows, and the wiring conductor on the surface of the insulating layer deforms, and the through conductor and the wiring connected to it There has been a problem that the position of the conductor is displaced and a short circuit or disconnection occurs.

【0006】本発明は、かかる従来技術の問題点に鑑み
完成されたものであり、その目的は、配線導体を被着し
た絶縁シートを複数積層し熱プレスによって多数個取り
配線基板を製作する際、配線導体と貫通導体とが確実に
接合できるとともに、撓みが発生せずに電気検査を正確
に行なうことのできる多数個取り配線基板およびその製
造方法を提供するものである。
The present invention has been completed in view of the above problems of the prior art, and an object thereof is to manufacture a multi-cavity wiring board by laminating a plurality of insulating sheets coated with wiring conductors and by hot pressing. Provided are a multi-cavity wiring board and a method for manufacturing the wiring board, in which the wiring conductor and the penetrating conductor can be surely joined to each other and the electrical inspection can be accurately performed without any bending.

【0007】[0007]

【課題を解決するための手段】本発明の多数個取り配線
基板は、絶縁層を複数積層して成る母基板の中央部に、
絶縁層の表面に配線導体が形成され、絶縁層の内部に上
下に位置する配線導体間を電気的に接続する貫通導体が
形成された多数の配線基板領域を配設するとともに、絶
縁層の表面の配線基板領域の間および外周部に金属枠を
配設させて成ることを特徴とするものである。
A multi-cavity wiring board according to the present invention comprises: a mother board formed by laminating a plurality of insulating layers;
A wiring conductor is formed on the surface of the insulating layer, and a large number of wiring board regions are formed inside the insulating layer, and through conductors for electrically connecting the wiring conductors located above and below are formed. The metal frame is arranged between the wiring board regions and in the outer peripheral portion.

【0008】また、本発明の多数個取り配線基板は、上
記構成において、金属枠の厚みが5〜50μmであり、配
線基板領域の間における金属枠の幅が0.5〜2.0mmであ
ることを特徴とするものである。
Further, the multi-cavity wiring board of the present invention is characterized in that, in the above construction, the metal frame has a thickness of 5 to 50 μm and the width of the metal frame between the wiring board regions is 0.5 to 2.0 mm. It is what

【0009】さらに、本発明の多数個取り配線基板は、
上記構成において、金属枠が配線導体と同じ金属から成
ることを特徴とするものである。
Further, the multi-cavity wiring board of the present invention is
In the above configuration, the metal frame is made of the same metal as the wiring conductor.

【0010】また、本発明の多数個取り配線基板の製造
方法は、熱硬化性樹脂前駆体および耐熱性繊維から成
り、中央部に多数の配線基板領域が配設される絶縁シー
ト、ならびに耐熱性樹脂から成る転写シート基材の配線
基板領域に対応する部位に所定パターンの配線導体を形
成するとともに配線基板領域の間および外周部に対応す
る部位に金属枠を形成した転写シートを準備する工程
と、絶縁シートの配線基板領域に貫通孔を穿設するとと
もに、この貫通孔に貫通導体を形成する工程と、転写シ
ートを絶縁シートに圧接して配線導体および金属枠を絶
縁シートに転写埋入させるとともに貫通導体と配線導体
とを電気的に接続する工程と、配線導体および金属枠が
転写埋入された絶縁シートから転写シート基材を剥離す
る工程と、配線導体および金属枠が転写埋入された絶縁
シートを複数枚積層するとともに熱硬化性樹脂前駆体を
硬化して一体化させる工程とを順次行なうことを特徴と
するものである。
Further, the method for manufacturing a multi-cavity wiring board of the present invention comprises an insulating sheet comprising a thermosetting resin precursor and heat resistant fibers, and a large number of wiring board regions arranged in the central portion, and a heat resistant sheet. A step of preparing a transfer sheet in which a wiring conductor having a predetermined pattern is formed in a portion corresponding to a wiring board region of a transfer sheet base material made of a resin, and a metal frame is formed in a portion corresponding to an outer peripheral portion between the wiring board regions; A step of forming a through hole in the wiring board region of the insulating sheet and forming a through conductor in the through hole; and a transfer sheet being pressed against the insulating sheet to transfer and embed the wiring conductor and the metal frame in the insulating sheet. At the same time, a step of electrically connecting the through conductor and the wiring conductor, a step of peeling the transfer sheet base material from the insulating sheet in which the wiring conductor and the metal frame are transfer-embedded, Fine metal frame is characterized in that sequentially perform a step of integrating by curing the thermosetting resin precursor with stacking a plurality implantation has been insulated sheet transfer.

【0011】本発明の多数個取り配線基板によれば、絶
縁層を複数積層して成る母基板の中央部に配設した多数
の配線基板領域の間および外周部に金属枠を配設したこ
とから、多数個取り配線基板の厚みを200〜500μm程度
と薄くした場合においても、金属枠が多数個取り配線基
板の剛性を保ち、多数個取り配線基板が撓むことはな
く、その結果、多数個取り配線基板を電気検査する際、
電気検査プローブを多数個取り配線基板表面の配線導体
に確実に当接させることができ、正確な電気検査結果が
得られる多数個取り配線基板とすることができる。
According to the multi-cavity wiring board of the present invention, the metal frames are arranged between the large number of wiring board regions arranged in the central portion of the mother board formed by laminating a plurality of insulating layers and in the outer peripheral portion. Therefore, even when the thickness of the multi-cavity wiring board is reduced to about 200 to 500 μm, the metal frame maintains the rigidity of the multi-cavity wiring board and the multi-cavity wiring board does not bend. When electrically inspecting the individual wiring board,
The electrical inspection probe can be reliably brought into contact with the wiring conductor on the surface of the multi-cavity wiring board, and a multi-cavity wiring board can be obtained in which an accurate electrical inspection result can be obtained.

【0012】また、本発明の多数個取り配線基板によれ
ば、上記構成において、金属枠の厚みを5〜50μmとす
るともに、配線基板領域の間における金属枠の幅を0.5
〜2.0mmとしたことから、多数個取り配線基板を広面
積としたとしても剛性が低下することはなく、その結
果、配線基板の取り数を増加させることができ、生産効
率の高い多数個取り配線基板とすることができる。
Further, according to the multi-cavity wiring board of the present invention, in the above structure, the thickness of the metal frame is set to 5 to 50 μm, and the width of the metal frame between the wiring board regions is 0.5.
Since the width is up to 2.0 mm, the rigidity does not deteriorate even if the wiring board has a large area, and as a result, the number of wiring boards can be increased, and high-efficiency multi-processing is possible. It can be a wiring board.

【0013】さらに、本発明の多数個取り配線基板によ
れば、上記構成において、金属枠を配線基板領域の配線
導体と同じ金属としたことから、金属枠と配線導体とを
同時に形成することができるとともに補強板の取り付け
等の余分な工程が増えることはなく、生産効率の高い多
数個取り配線基板とすることができる。
Further, according to the multi-cavity wiring board of the present invention, in the above structure, since the metal frame is made of the same metal as the wiring conductor in the wiring board region, the metal frame and the wiring conductor can be simultaneously formed. In addition, it is possible to obtain a multi-cavity wiring board with high production efficiency without adding extra steps such as attaching a reinforcing plate.

【0014】また、本発明の配線基板の製造方法によれ
ば、上記工程を順次行なうことから、絶縁シートを複数
積層して熱プレスする際に熱硬化性樹脂前駆体の粘度が
低下したとしても、金属枠が熱硬化性樹脂前駆体の流動
を防止して配線基板領域の配線導体が変形することはな
く、その結果、貫通導体とそれと接続される配線導体の
位置がズレて短絡や断線を生じることのない接続信頼性
に優れた多数個取り配線基板を提供することができる。
Further, according to the method for manufacturing a wiring board of the present invention, since the above steps are sequentially performed, even if the viscosity of the thermosetting resin precursor is lowered when a plurality of insulating sheets are laminated and hot pressed. The metal frame prevents the flow of the thermosetting resin precursor to prevent the wiring conductor in the wiring board region from being deformed, and as a result, the positions of the through conductor and the wiring conductor connected to it are displaced, resulting in short circuit or disconnection. It is possible to provide a multi-cavity wiring board with excellent connection reliability that does not occur.

【0015】[0015]

【発明の実施の形態】次に、本発明の多数個取り配線基
板を添付の図面に基づいて詳細に説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a multi-cavity wiring board of the present invention will be described in detail with reference to the accompanying drawings.

【0016】図1(a)は本発明の多数個取り配線基板
の平面図であり、(b)は断面図である。これらの図に
おいて、1は絶縁層、2は配線導体、3は貫通導体、4
は金属枠、5は配線基板領域、6は母基板であり、主に
これらで本発明の多数個取り配線基板が構成されてい
る。
FIG. 1A is a plan view of a multi-cavity wiring board of the present invention, and FIG. 1B is a sectional view. In these figures, 1 is an insulating layer, 2 is a wiring conductor, 3 is a through conductor, 4
Is a metal frame, 5 is a wiring board region, and 6 is a mother board. These mainly constitute the multi-cavity wiring board of the present invention.

【0017】本発明の多数個取り配線基板は、絶縁層1
を複数積層して成る母基板6の中央部に多数の配線基板
領域5を配設するとともに、絶縁層1表面の配線基板領
域5の間および外周部に金属枠4を配設させることによ
り形成されている。なお、図1では、絶縁層1を3層積
層した場合の例を示している。
The multi-cavity wiring board of the present invention comprises an insulating layer 1.
Formed by arranging a large number of wiring board regions 5 in the central portion of a mother substrate 6 formed by stacking a plurality of layers and arranging a metal frame 4 between the wiring board regions 5 on the surface of the insulating layer 1 and in the outer peripheral portion. Has been done. Note that FIG. 1 shows an example in which three insulating layers 1 are laminated.

【0018】絶縁層1は、その厚みが50〜150μmであ
り、配線導体2を支持するとともに上下に位置する配線
導体2間の絶縁を保持する機能を有し、エポキシ樹脂や
ビスマレイミドトリアジン樹脂・変性ポリフェニレンエ
ーテル樹脂等の樹脂と絶縁性のフィラーや繊維とから成
る。なお、絶縁層1の厚みが50μm未満であると多数個
取り配線基板の剛性が低下して、配線基板が撓みやすく
なる傾向があり、150μmを超えると配線基板の軽量化
が困難となる傾向がある。
The insulating layer 1 has a thickness of 50 to 150 μm and has a function of supporting the wiring conductors 2 and maintaining insulation between the wiring conductors 2 positioned above and below, and is made of epoxy resin or bismaleimide triazine resin. It is made of a resin such as a modified polyphenylene ether resin and an insulating filler or fiber. If the thickness of the insulating layer 1 is less than 50 μm, the rigidity of the multi-cavity wiring board tends to decrease, and the wiring board tends to bend, while if it exceeds 150 μm, it tends to be difficult to reduce the weight of the wiring board. is there.

【0019】母基板6の中央に形成された配線基板領域
5は、それぞれが例えば半導体素子等の電子部品(図示
せず)を搭載するための小型の配線基板となる領域であ
り、その境界に沿って母基板6をルータ等の切断機を用
いて切断することにより個々の配線基板に分割される。
The wiring board areas 5 formed in the center of the mother board 6 are areas which serve as small wiring boards for mounting electronic components (not shown) such as semiconductor elements, and are provided at the boundaries thereof. Along with this, the mother board 6 is cut by a cutting machine such as a router to be divided into individual wiring boards.

【0020】各配線基板領域5における各絶縁層1の表
面には配線導体2が埋入されている。配線導体2は、配
線基板領域5に搭載される半導体素子等の電子部品の各
電極を外部電気回路基板(図示せず)に電気的に接続す
る導電路の一部としての機能を有し、幅が20〜200μ
m、厚みが5〜50μmで、銅やアルミニウム・ニッケル
・銀・金等の金属箔から成り、特に加工性および安価と
いう観点からは銅箔から成ることが好ましい。配線導体
2の幅が20μm未満となると配線導体2の変形や断線が
発生しやすくなる傾向があり、200μmを超えると高密
度配線が形成できなくなる傾向がある。また、配線導体
2の厚みが5μm未満になると配線導体2の強度が低下
し変形や断線が発生しやすくなる傾向があり、50μmを
超えると絶縁層1への埋入が困難となる傾向がある。し
たがって、配線導体2は、その幅を20〜200μm、厚み
を5〜50μmとすることが好ましい。
A wiring conductor 2 is embedded in the surface of each insulating layer 1 in each wiring board region 5. The wiring conductor 2 has a function as a part of a conductive path that electrically connects each electrode of an electronic component such as a semiconductor element mounted in the wiring board region 5 to an external electric circuit board (not shown), 20-200μ width
m, the thickness is 5 to 50 μm, and is made of a metal foil such as copper, aluminum, nickel, silver, or gold, and particularly preferably a copper foil from the viewpoint of workability and low cost. If the width of the wiring conductor 2 is less than 20 μm, the wiring conductor 2 tends to be deformed or broken, and if it exceeds 200 μm, high density wiring cannot be formed. Further, if the thickness of the wiring conductor 2 is less than 5 μm, the strength of the wiring conductor 2 tends to decrease and deformation or disconnection tends to occur, and if it exceeds 50 μm, embedding in the insulating layer 1 tends to become difficult. . Therefore, the wiring conductor 2 preferably has a width of 20 to 200 μm and a thickness of 5 to 50 μm.

【0021】また、各絶縁層1の各配線基板領域5に
は、その上面から下面にかけて貫通導体3が複数個配設
されている。これらの貫通導体3は、絶縁層1の上下に
位置する配線導体2間を電気的に接続する機能を有し、
その直径が30〜200μmであり、絶縁層1に設けた貫通
孔に銅や銀合金等の金属粉末とトリアジン系熱硬化性樹
脂等とから成るペーストを埋め込むことにより形成され
ている。なお、貫通導体3の直径が30μm未満になると
その加工が困難となる傾向があり、200μmを超えると
高密度配線が形成できなくなる傾向がある。したがっ
て、貫通導体3は、その直径を30〜200μmとすること
が好ましい。
In each wiring board region 5 of each insulating layer 1, a plurality of penetrating conductors 3 are arranged from the upper surface to the lower surface. These penetrating conductors 3 have a function of electrically connecting the wiring conductors 2 located above and below the insulating layer 1,
It has a diameter of 30 to 200 μm and is formed by embedding a paste made of a metal powder such as copper or silver alloy and a triazine-based thermosetting resin in the through hole provided in the insulating layer 1. If the diameter of the through conductor 3 is less than 30 μm, its processing tends to be difficult, and if it exceeds 200 μm, high-density wiring cannot be formed. Therefore, the through conductor 3 preferably has a diameter of 30 to 200 μm.

【0022】さらに、本発明の多数個取り配線基板に
は、各絶縁層1表面の配線基板領域5の間および外周部
に金属枠4が配設されている。そして、本発明の多数個
取り配線基板においてはこのことが重要である。
Further, in the multi-cavity wiring board of the present invention, metal frames 4 are arranged between the wiring board regions 5 on the surface of each insulating layer 1 and in the outer peripheral portion. This is important in the multi-cavity wiring board of the present invention.

【0023】金属枠4は、厚みが5〜50μmの金属箔か
ら成り、配線導体2および貫通導体3が形成された絶縁
層1を複数積層するとともに熱プレスして多数個取り配
線基板を製作する際に、多数個取り配線基板の剛性を保
ち、多数個取り配線基板が撓むことを防止する機能を有
する。なお、金属枠4の厚みが5μm未満になると多数
個取り配線基板の剛性が低下し、自重で中央部が撓み、
上下から電気検査プローブを当てて電気検査をする際
に、多数個取り配線基板表面の配線導体2に電気検査プ
ローブが当接しない部分が生じ、正確な電気検査の結果
が得られなくなる傾向があり、50μmを超えると多数個
取り配線基板を軽量化できなくなる傾向にある。したが
って、金属枠4は、その厚みを5〜50μmとすることが
好ましい。
The metal frame 4 is made of a metal foil having a thickness of 5 to 50 μm, and a plurality of insulating layers 1 on which the wiring conductors 2 and the penetrating conductors 3 are formed are laminated and hot pressed to produce a multi-cavity wiring board. At this time, it has a function of maintaining the rigidity of the multi-cavity wiring board and preventing the multi-cavity wiring board from bending. If the thickness of the metal frame 4 is less than 5 μm, the rigidity of the multi-cavity wiring board decreases, and the central portion bends due to its own weight.
When an electrical inspection is performed by applying the electrical inspection probe from above and below, a portion where the electrical inspection probe does not come into contact with the wiring conductor 2 on the surface of the multi-cavity wiring board is liable to occur, and an accurate electrical inspection result may not be obtained. If it exceeds 50 μm, it is difficult to reduce the weight of the multi-cavity wiring board. Therefore, the metal frame 4 preferably has a thickness of 5 to 50 μm.

【0024】また、金属枠4は、その配線基板領域5間
に配設される部分の幅を0.5〜2.0mm、配線基板領域5
の外周部に配設される部分の幅を10〜30mmとすること
が好ましい。配線基板領域5間の金属枠4の幅が0.5m
m未満になると多数個取り配線基板の剛性が低下し、自
重で中央部が撓み、上下から電気検査プローブを当てて
電気検査をする際に、多数個取り配線基板表面の配線導
体2に電気検査プローブが当接しない部分が生じ、正確
な電気検査の結果が得られなくなる傾向があり、2.0m
mを超えると配線基板領域5間が広いものとなり配線基
板領域5の取り数が減少する傾向がある。さらに、外周
部の金属枠4の幅が10mm未満になると、多数個取り配
線基板の外周で多数個取り配線基板の剛性が低下し、自
重で中央部が撓み、上下から電気検査プローブを当てて
電気検査をする際に、多数個取り配線基板表面の配線導
体2に電気検査プローブが当接しない部分が生じ正確な
電気検査の結果が得られなくなる傾向があり、30mmを
超えると配線基板領域5の取り数が十分に増やせなくな
る傾向がある。したがって、金属枠4は、その配線基板
領域5間に配設される部分の幅を0.5〜2.0mm、配線基
板領域5の外周部に配設される部分の幅を10〜30mmと
することが好ましい。
Further, the metal frame 4 has a width of 0.5 to 2.0 mm at a portion arranged between the wiring board regions 5,
It is preferable that the width of the portion disposed on the outer peripheral portion of the is 10 to 30 mm. The width of the metal frame 4 between the wiring board regions 5 is 0.5 m
If it is less than m, the rigidity of the multi-cavity wiring board is reduced, the center portion is bent by its own weight, and when conducting an electrical inspection by applying an electrical inspection probe from above and below, the electrical inspection is performed on the wiring conductor 2 on the surface of the multi-cavity wiring board. The area where the probe does not come into contact tends to make it impossible to obtain accurate electrical inspection results.
If it exceeds m, the space between the wiring board regions 5 becomes large and the number of wiring board regions 5 taken tends to decrease. Furthermore, when the width of the metal frame 4 on the outer peripheral portion is less than 10 mm, the rigidity of the multi-cavity wiring board decreases on the outer periphery of the multi-cavity wiring board, the center portion bends due to its own weight, and the electrical inspection probe is applied from above and below. When conducting an electrical inspection, there is a tendency that a portion where the electrical inspection probe does not come into contact with the wiring conductor 2 on the surface of the multi-cavity wiring substrate will not be able to obtain an accurate electrical inspection result. There is a tendency that the number of harvested animals cannot be increased sufficiently. Therefore, in the metal frame 4, the width of the portion disposed between the wiring board regions 5 may be 0.5 to 2.0 mm, and the width of the portion disposed on the outer peripheral portion of the wiring substrate region 5 may be 10 to 30 mm. preferable.

【0025】なお、このような金属枠4は、配線導体2
と同様に銅やアルミニウム・ニッケル・銀・金等の金属
箔から成り、特に加工性および安価という観点からは銅
箔から成ることが好ましく、さらに、金属枠4を配線基
板領域5の配線導体2同じ金属から成るものとすること
により、金属枠4と配線導体2とを同時に形成すること
ができるとともに補強板の取り付け等の余分な工程が増
えることはなく、生産効率の高い多数個取り配線基板と
することができる。したがって、金属枠4を配線基板領
域の配線導体2同じ金属から成るものとすることが好ま
しい。
Incidentally, such a metal frame 4 is used for the wiring conductor 2
Similarly, it is made of a metal foil of copper, aluminum, nickel, silver, gold or the like, and is preferably made of a copper foil particularly from the viewpoints of workability and low cost. Further, the metal frame 4 is provided in the wiring conductor 2 of the wiring board region 5. By using the same metal, the metal frame 4 and the wiring conductor 2 can be formed at the same time, and an extra step such as attaching a reinforcing plate does not increase, and a multi-cavity wiring board with high production efficiency can be obtained. Can be Therefore, it is preferable that the metal frame 4 is made of the same metal as the wiring conductor 2 in the wiring board region.

【0026】このような多数個取り配線基板は、以下に
述べる方法により製作される。まず、例えばガラスクロ
スやアラミド繊維等の耐熱性繊維にエポキシ樹脂や変性
ポリフェニレン樹脂等から成る熱硬化樹脂前駆体を含浸
させて半硬化することにより絶縁シートを製作し、次
に、絶縁シートの配線基板領域5となる所定の位置に炭
酸ガスレーザやYAGレーザ等の従来周知の方法を採用
して直径が30〜200μmの貫通孔を穿設する。そして、
貫通孔に従来周知のスクリーン印刷法を採用して、例え
ば銅や銀合金粉末およびトリアジン系樹脂等の熱硬化性
樹脂前駆体を含むペーストをスクリーン印刷法(圧入)
で埋め込むことによって貫通導体3を形成する。その
後、別途準備した、表面に銅やニッケル等の金属箔から
成る配線導体2を絶縁シートの各配線基板領域5に対応
する部位に所定のパターンに被着形成し、さらに同じく
銅やニッケル等の金属箔から成る金属枠体4を絶縁シー
トの各配線基板領域5間および外周部に対応する部位に
被着形成した、ポリエチレンテレフタレート(PET)
樹脂等の耐熱性樹脂からなる転写シートを絶縁シート
に、所定の貫通導体3と配線導体2とが接続するように
位置合わせして重ね合わせ、これらを熱プレス機を用い
て100〜150℃で数分間プレスすることにより転写シート
を絶縁シートに圧接して、配線導体2および金属枠4を
絶縁シート7に転写埋入させる。しかる後、転写シート
を絶縁シートから剥離するとともに転写シートを剥離し
た絶縁シートを複数枚上下に重ね合わせ、熱プレス機を
用いて150〜240℃の温度で数時間加熱プレスすることに
より多数個取り配線基板が得られる。そして、この多数
個取り配線基板は、ルータ等の切断機で各配線基板領域
5と金属枠4との間を切断することにより、多数の配線
基板領域5に分割される。
Such a multi-cavity wiring board is manufactured by the method described below. First, a heat-resistant fiber such as glass cloth or aramid fiber is impregnated with a thermosetting resin precursor such as an epoxy resin or a modified polyphenylene resin to semi-cure the insulating sheet, and then the wiring of the insulating sheet is manufactured. A through hole having a diameter of 30 to 200 μm is bored at a predetermined position which becomes the substrate region 5 by using a conventionally known method such as a carbon dioxide gas laser or a YAG laser. And
A well-known screen printing method is used for the through holes, and a paste containing a thermosetting resin precursor such as copper or silver alloy powder and a triazine resin is screen printed (press-fitting).
The through conductor 3 is formed by embedding in. After that, a separately prepared wiring conductor 2 made of a metal foil such as copper or nickel is formed on a surface of the insulating sheet in a predetermined pattern at a portion corresponding to each wiring board region 5, and copper or nickel or the like is also formed. Polyethylene terephthalate (PET) in which a metal frame body 4 made of a metal foil is adhered and formed between the wiring board regions 5 of the insulating sheet and at a portion corresponding to the outer peripheral portion.
A transfer sheet made of a heat-resistant resin such as a resin is aligned and superposed on an insulating sheet so that the predetermined through conductors 3 and wiring conductors 2 are connected, and these are laminated at 100 to 150 ° C. using a heat press machine. The transfer sheet is pressed against the insulating sheet by pressing for a few minutes, and the wiring conductor 2 and the metal frame 4 are transferred and embedded in the insulating sheet 7. After that, the transfer sheet is peeled off from the insulating sheet, and the insulating sheets from which the transfer sheet is peeled off are stacked on top of each other and heat-pressed at a temperature of 150 to 240 ° C for several hours using a heat press machine to obtain multiple pieces. A wiring board is obtained. Then, this multi-cavity wiring board is divided into a large number of wiring board areas 5 by cutting between each wiring board area 5 and the metal frame 4 with a cutting machine such as a router.

【0027】かくして、本発明の多数個取り配線基板に
よれば、絶縁層1を複数積層して成る母基板の中央部に
配設した多数の配線基板領域5の間および外周部に金属
枠4を配設したことから、多数個取り配線基板の厚みを
200〜500μm程度と薄くした場合においても、金属枠4
が多数個取り配線基板の剛性を保ち、多数個取り配線基
板が撓むことはなく、その結果、多数個取り配線基板を
電気検査する際、電気検査プローブを多数個取り配線基
板表面の配線導体2に確実に当接させることができ、正
確な電気検査結果が得られる多数個取り配線基板とする
ことができる。
Thus, according to the multi-cavity wiring board of the present invention, the metal frame 4 is provided between and in the outer peripheral portions of the plurality of wiring board regions 5 arranged in the central portion of the mother board formed by laminating a plurality of insulating layers 1. Since it is arranged, the thickness of the multi-cavity wiring board can be reduced.
Metal frame 4 even when thinned to around 200-500 μm
Keeps the rigidity of the multi-cavity wiring board, and the multi-cavity wiring board does not bend, and as a result, when electrically inspecting the multi-cavity wiring board, the electrical inspection probe is used for wiring conductors on the surface of the multi-cavity wiring board. It is possible to make a multi-cavity wiring board that can be surely brought into contact with the substrate 2 and can obtain accurate electrical inspection results.

【0028】また、金属枠4の厚みを5〜50μmとする
ともに、配線基板領域5間の金属枠4の幅を0.5〜2.0m
mとしたことから、多数個取り配線基板を広面積とした
としても剛性が低下することはなく、その結果、配線基
板の取り数を向上することができ、生産効率の高い多数
個取り配線基板とすることができる。
The thickness of the metal frame 4 is 5 to 50 μm, and the width of the metal frame 4 between the wiring board regions 5 is 0.5 to 2.0 m.
Since m is set, the rigidity does not decrease even if the multi-piece wiring board has a large area, and as a result, the number of wiring boards to be taken can be increased and the production efficiency of the multi-piece wiring board is high. Can be

【0029】さらに、金属枠4を配線基板領域5の配線
導体2と同じ金属としたことから、金属枠4と配線導体
2とを同時に形成することができるとともに補強板の取
り付け等の余分な工程が増えることはなく、生産効率の
高い多数個取り配線基板とすることができる。
Furthermore, since the metal frame 4 is made of the same metal as the wiring conductor 2 in the wiring board region 5, the metal frame 4 and the wiring conductor 2 can be formed at the same time, and an extra step such as attaching a reinforcing plate is performed. It is possible to obtain a multi-cavity wiring board with high production efficiency without increasing the number of wiring boards.

【0030】なお、本発明は上述の実施例に限定される
ものではなく、本発明の要旨を逸脱しない範囲であれば
種々の変更は可能であり、例えば上述の実施例では絶縁
層を3層積層した場合を例示したが、絶縁層が2層、あ
るいは4層以上であってもかまわない。
The present invention is not limited to the above-mentioned embodiments, and various modifications can be made without departing from the gist of the present invention. For example, in the above-mentioned embodiments, three insulating layers are used. Although the case where the insulating layers are laminated is illustrated, the insulating layer may be two layers or four or more layers.

【0031】次に、本発明の多数個取り配線基板の製造
方法を、上述した多数個取り配線基板を製造する場合を
例にとって詳細に説明する。図2(a)〜(d)は、本
発明の多数個取り配線基板の製造方法を説明するための
各工程毎の工程図であり、これらの図において、7は絶
縁シート、8は転写シートである。なお、図1と共通の
部材については、図1と同一の番号を付した。
Next, the method for manufacturing a multi-cavity wiring board of the present invention will be described in detail by taking the case of manufacturing the above-mentioned multi-cavity wiring board as an example. 2 (a) to 2 (d) are process drawings for each process for explaining the method for manufacturing a multi-cavity wiring board of the present invention. In these drawings, 7 is an insulating sheet and 8 is a transfer sheet. Is. The same members as those in FIG. 1 are designated by the same reference numerals as those in FIG.

【0032】まず、絶縁シート7および転写シート8を
準備する。絶縁シート7は、図1に示した多数個取り配
線基板における絶縁層1となるものであり、厚みが50〜
150μm程度で、例えばガラスクロスやアラミド繊維等
の耐熱性繊維にエポキシ樹脂や変性ポリフェニレン樹脂
等から成る熱硬化性樹脂前駆体を含浸させて半硬化させ
たものから成り、その表面は配線導体2や金属枠4を埋
入可能な程度の可塑性を具えている。また、この絶縁シ
ート7の中央部には、後述するように複数の配線基板領
域5が配設される。
First, the insulating sheet 7 and the transfer sheet 8 are prepared. The insulating sheet 7 serves as the insulating layer 1 in the multi-cavity wiring board shown in FIG.
It is about 150 μm and is made by impregnating heat-resistant fiber such as glass cloth or aramid fiber with a thermosetting resin precursor such as epoxy resin or modified polyphenylene resin and semi-curing the surface of the wiring conductor 2 or The plasticity is such that the metal frame 4 can be embedded. A plurality of wiring board regions 5 are arranged in the central portion of the insulating sheet 7, as will be described later.

【0033】他方、転写シート8は、例えばポリエチレ
ンテレフタレート(PET)樹脂等の耐熱性樹脂から成
り、その表面には、銅やニッケル等の金属箔から成る配
線導体2が絶縁シート7の各配線基板領域5に対応する
部位に所定のパターンに被着形成されているとともに、
同じく銅やニッケル等の金属箔から成る金属枠体4が絶
縁シート7の各配線基板領域5間および外周部に対応す
る部位に被着形成されている。このような配線導体2お
よび金属枠体4は、例えば厚みが18μm程度のポリエチ
レンテレフタレート等の耐熱性樹脂から成る転写シート
8基材の一方の主面全面に、厚みが約18μmの銅やニッ
ケルから成る金属箔をアクリル系樹脂等の接着材を介し
て剥離可能に接着した後、金属箔上に液状またはフィル
ム状の感光性レジストを塗布するとともにこれを露光・
現像して配線導体2および金属枠4のパターンに対応す
るパターンのエッチングマスクを形成した後、塩化第二
鉄溶液中に浸漬して金属箔の非パターン部をエッチング
除去した後、感光性レジストを剥離除去することにより
形成される。
On the other hand, the transfer sheet 8 is made of a heat resistant resin such as polyethylene terephthalate (PET) resin, and the wiring conductor 2 made of a metal foil such as copper or nickel is provided on the surface of each of the wiring boards of the insulating sheet 7. In addition to being formed in a predetermined pattern on the region corresponding to the region 5,
Similarly, a metal frame body 4 made of a metal foil such as copper or nickel is adhered and formed between the wiring board regions 5 of the insulating sheet 7 and at a portion corresponding to the outer peripheral portion. The wiring conductor 2 and the metal frame body 4 are made of copper or nickel having a thickness of about 18 μm on the entire one main surface of the transfer sheet 8 base material made of a heat-resistant resin such as polyethylene terephthalate having a thickness of about 18 μm. After peelingly adhering the resulting metal foil via an adhesive such as acrylic resin, apply a liquid or film-like photosensitive resist on the metal foil and expose it.
After developing to form an etching mask having a pattern corresponding to the pattern of the wiring conductor 2 and the metal frame 4, the non-patterned portion of the metal foil is removed by etching by immersion in a ferric chloride solution, and then a photosensitive resist is applied. It is formed by peeling and removing.

【0034】次に、図2(a)の工程図に示すように、
絶縁シートの7の配線基板領域5に貫通孔を穿設すると
ともに、この貫通孔に導電ペーストを埋め込むことによ
り貫通導体3を形成する。このような貫通導体3は、絶
縁シート7に炭酸ガスレーザーやYAGレーザーなどを
用いて貫通孔を形成した後に、この貫通孔内に例えば銅
や銀合金粉末およびトリアジン系樹脂等の熱硬化性樹脂
前駆体を含む金属ペーストをスクリーン印刷法(圧入)
で埋め込むことによって形成される。なお、貫通導体3
は、その直径が30〜200μmであり、貫通導体3の直径
が30μm未満になるとその加工が困難となる傾向があ
り、200μmを超えると高密度配線を形成することが困
難となる傾向がある。したがって、貫通導体3は、その
直径を30〜200μmとすることが好ましい。
Next, as shown in the process diagram of FIG.
Through holes are formed in the wiring board region 5 of the insulating sheet 7, and the through conductors 3 are formed by embedding a conductive paste in the through holes. Such a through conductor 3 is formed by forming a through hole in the insulating sheet 7 using a carbon dioxide gas laser, a YAG laser or the like, and then, for example, copper or silver alloy powder and a thermosetting resin such as a triazine resin in the through hole. Screen printing method (press-fitting) of metal paste containing precursor
It is formed by embedding in. The through conductor 3
Has a diameter of 30 to 200 μm, and if the diameter of the through conductor 3 is less than 30 μm, its processing tends to be difficult, and if it exceeds 200 μm, it tends to be difficult to form high-density wiring. Therefore, the through conductor 3 preferably has a diameter of 30 to 200 μm.

【0035】次に、図2(b)に工程図で示すように、
貫通導体3と配線導体4とが電気的に接続するように転
写シート8と絶縁シート7との位置合せを行ない、しか
る後、これらを熱プレス機を用いて100〜150℃で数分間
プレスすることにより、転写シート8を絶縁シート7に
圧接して、配線導体2および金属枠4を絶縁シート7に
転写埋入させる。このとき、絶縁シート7の各配線基板
領域5の間および外周部には金属枠4が埋入されること
から、後述する複数の絶縁シート7を複数積層して熱プ
レスする際に熱硬化性樹脂前駆体の粘度が低下したとし
ても、金属枠4が熱硬化性樹脂前駆体の流動を防止し配
線導体2が変形することはなく、その結果、貫通導体3
とそれと接続される配線導体2の位置がズレて短絡や断
線を生じることのない接続信頼性に優れた多数個取り配
線基板を製作することができる。なお、配線導体2およ
び金属枠4の厚みが5μm未満では、金属枠4の剛性が
低いため、熱硬化性樹脂前駆体の流動を充分に防止でき
ず、配線導体2に変形が発生しやすくなり、他方、50μ
mを超えると、配線導体2や金属枠4を絶縁シート7に
良好に埋入させることが困難となり、得られる多数個取
り配線基板の表面に大きな凹凸が形成されてしまい、こ
の配線基板に電子部品を良好に搭載することができなく
なってしまう傾向がある。したがって、配線導体2およ
び金属枠4の厚みは5〜50μmの範囲とすることが好ま
しい。また、各配線基板領域5の間の金属枠4の幅が0.
5mm未満の場合、金属枠4の剛性が低いため、熱硬化
性樹脂前駆体の流動を防止することが困難と成り、熱硬
化性樹脂前駆体の流動を充分に防止できず、配線導体2
に変形が発生しやすくなり、他方、2mmを超えると、
そのような幅の金属枠4を各配線基板領域5間に設ける
ために多数個取り配線基板の大きさが不要に大きくなっ
たり、あるいは配線基板領域5の取り数が少ないものと
なってしまう。したがって、各配線基板領域5の間の金
属枠4の幅は0.5〜2mmの範囲が好ましい。さらに、
絶縁シート7の外周部の金属枠4の幅が10mm未満の場
合、金属枠4の剛性が低いため、熱硬化性樹脂前駆体の
流動を充分に防止できず、配線導体2および金属枠4を
絶縁シート7に転写する際に配線導体2および金属枠4
に変形が発生しやすくなり、他方、30mmを超えると、
そのような幅の金属枠4を絶縁シート7の外周部に設け
るために多数個取り配線基板の大きさが不要に大きくな
ったり、あるいは配線基板領域5の取り数が少ないもの
となってしまう。したがって、絶縁シート7の外周部の
金属枠4の幅は10〜30mmの範囲が好ましい。
Next, as shown in the process diagram of FIG.
The transfer sheet 8 and the insulating sheet 7 are aligned so that the penetrating conductor 3 and the wiring conductor 4 are electrically connected, and then these are pressed for several minutes at 100 to 150 ° C. using a heat press machine. Thus, the transfer sheet 8 is pressed against the insulating sheet 7, and the wiring conductor 2 and the metal frame 4 are transferred and embedded in the insulating sheet 7. At this time, since the metal frame 4 is embedded between the wiring board regions 5 of the insulating sheet 7 and in the outer peripheral portion, it is thermosetting when a plurality of insulating sheets 7 described later are laminated and hot pressed. Even if the viscosity of the resin precursor is reduced, the metal frame 4 prevents the thermosetting resin precursor from flowing and the wiring conductor 2 is not deformed. As a result, the through conductor 3
It is possible to manufacture a multi-cavity wiring board which is excellent in connection reliability and does not cause a short circuit or a disconnection due to the position of the wiring conductor 2 connected thereto being displaced. If the thickness of the wiring conductor 2 and the metal frame 4 is less than 5 μm, the rigidity of the metal frame 4 is low, so that the flow of the thermosetting resin precursor cannot be sufficiently prevented and the wiring conductor 2 is likely to be deformed. , On the other hand, 50μ
When it exceeds m, it becomes difficult to satisfactorily embed the wiring conductor 2 and the metal frame 4 in the insulating sheet 7, and large irregularities are formed on the surface of the obtained multi-cavity wiring board, and this wiring board has electronic components. There is a tendency that components cannot be mounted well. Therefore, the thickness of the wiring conductor 2 and the metal frame 4 is preferably in the range of 5 to 50 μm. Further, the width of the metal frame 4 between the wiring board regions 5 is 0.
When the thickness is less than 5 mm, it is difficult to prevent the flow of the thermosetting resin precursor because the rigidity of the metal frame 4 is low, and the flow of the thermosetting resin precursor cannot be sufficiently prevented, and the wiring conductor 2
Deformation tends to occur on the other hand, if it exceeds 2 mm,
Since the metal frame 4 having such a width is provided between the wiring board areas 5, the size of the multi-piece wiring board becomes unnecessarily large, or the number of wiring board areas 5 taken becomes small. Therefore, the width of the metal frame 4 between the wiring board regions 5 is preferably in the range of 0.5 to 2 mm. further,
When the width of the metal frame 4 on the outer peripheral portion of the insulating sheet 7 is less than 10 mm, the rigidity of the metal frame 4 is low, so that the flow of the thermosetting resin precursor cannot be sufficiently prevented, and the wiring conductor 2 and the metal frame 4 are prevented from flowing. When transferring to the insulating sheet 7, the wiring conductor 2 and the metal frame 4
Is likely to be deformed, while if it exceeds 30 mm,
Since the metal frame 4 having such a width is provided on the outer peripheral portion of the insulating sheet 7, the size of the multi-piece wiring board becomes unnecessarily large, or the number of wiring board regions 5 is small. Therefore, the width of the metal frame 4 on the outer peripheral portion of the insulating sheet 7 is preferably in the range of 10 to 30 mm.

【0036】次に、図2(c)に断面図で示すように、
配線導体2および金属枠4が転写埋入された絶縁シート
7から転写シート8基材を剥離する。
Next, as shown in the sectional view of FIG.
The base material of the transfer sheet 8 is peeled off from the insulating sheet 7 in which the wiring conductor 2 and the metal frame 4 have been transferred and embedded.

【0037】最後に、図2(d)に断面図で示すよう
に、両面または片面に配線導体2および金属枠4が転写
埋入された絶縁シート7を複数枚積層して熱プレス機を
用いて150〜240℃で数時間加熱プレスすることにより、
各絶縁シート7および貫通導体3中の熱硬化性樹脂前駆
体を硬化一体化させることにより本発明の多数個取り配
線基板が得られる。
Finally, as shown in the sectional view of FIG. 2 (d), a plurality of insulating sheets 7 having the wiring conductors 2 and the metal frame 4 imprinted and embedded on both sides or one side are laminated and a heat press is used. By hot pressing at 150-240 ℃ for several hours,
The multi-cavity wiring board of the present invention can be obtained by curing and integrating the insulating sheet 7 and the thermosetting resin precursor in the penetrating conductor 3.

【0038】かくして本発明の多数個取り配線基板の製
造方法によれば、各絶縁シート7の配線基板領域5の間
および外周に金属枠4を配設したことから、多数個取り
配線基板の厚みを50〜150μm程度と薄くした場合にお
いても、金属枠4が多数個取り配線基板の剛性を保ち、
多数個取り配線基板が撓むことはなく、その結果、多数
個取り配線基板を電気検査する際、電気検査プローブを
多数個取り配線基板表面の配線導体2に確実に当接させ
ることができ、正確な電気検査結果が得られる多数個取
り配線基板を得ることができる。
Thus, according to the method for manufacturing a multi-cavity wiring board of the present invention, since the metal frames 4 are arranged between the wiring board regions 5 of the respective insulating sheets 7 and on the outer periphery thereof, the thickness of the multi-cavity wiring board is increased. Even when the thickness is reduced to about 50 to 150 μm, the metal frame 4 retains the rigidity of the multi-cavity wiring board,
The multi-cavity wiring board does not bend, and as a result, when electrically inspecting the multi-cavity wiring board, the electrical inspection probe can be reliably brought into contact with the wiring conductor 2 on the surface of the multi-cavity wiring board. It is possible to obtain a multi-cavity wiring board that can obtain accurate electrical inspection results.

【0039】そして、この多数個取り配線基板は、ルー
タ等の切断機で各配線基板領域5と金属枠4との間を切
断することにより、多数の配線基板領域5に分割され
る。
The multi-cavity wiring board is divided into a large number of wiring board areas 5 by cutting between the wiring board areas 5 and the metal frame 4 with a cutting machine such as a router.

【0040】なお、本発明は上述の実施例に限定される
ものでなく、本発明の要旨を逸脱しない範囲であれば、
種々の変更は可能であることは言うまでもない。
The present invention is not limited to the above-mentioned embodiments, and may be within the scope of the present invention.
It goes without saying that various modifications are possible.

【0041】[0041]

【発明の効果】本発明の多数個取り配線基板によれば、
絶縁層を複数積層して成る母基板の中央部に配設した多
数の配線基板領域の間および外周部に金属枠を配設した
ことから、多数個取り配線基板の厚みを200〜500μm程
度と薄くした場合においても、金属枠が多数個取り配線
基板の剛性を保ち、多数個取り配線基板が撓むことはな
く、その結果、多数個取り配線基板を電気検査する際、
電気検査プローブを多数個取り配線基板表面の配線導体
に確実に当接させることができ、正確な電気検査結果が
得られる多数個取り配線基板とすることができる。
According to the multi-cavity wiring board of the present invention,
Since the metal frame is provided between the outer periphery and the many wiring board regions arranged in the central portion of the mother board formed by stacking a plurality of insulating layers, the thickness of the multi-cavity wiring board is about 200 to 500 μm. Even when thinned, the metal frame maintains the rigidity of the multi-cavity wiring board, and the multi-cavity wiring board does not bend. As a result, when electrically inspecting the multi-cavity wiring board,
The electrical inspection probe can be reliably brought into contact with the wiring conductor on the surface of the multi-cavity wiring board, and a multi-cavity wiring board can be obtained in which an accurate electrical inspection result can be obtained.

【0042】また、本発明の多数個取り配線基板によれ
ば、金属枠の厚みを5〜50μmとするともに、配線基板
領域の間における金属枠の幅を0.5〜2.0mmとしたこと
から、多数個取り配線基板を広面積としたとしても剛性
が低下することはなく、その結果、配線基板の取り数を
増加させることができ、生産効率の高い多数個取り配線
基板とすることができる。
According to the multi-cavity wiring board of the present invention, the metal frame has a thickness of 5 to 50 μm and the width of the metal frame between the wiring board regions is 0.5 to 2.0 mm. Even if the individual wiring board has a large area, the rigidity does not decrease, and as a result, the number of wiring boards can be increased, and a multi-cavity wiring board with high production efficiency can be obtained.

【0043】さらに、本発明の多数個取り配線基板によ
れば、金属枠を配線基板領域の配線導体と同じ金属とし
たことから、金属枠と配線導体とを同時に形成すること
ができるとともに補強板の取り付け等の余分な工程が増
えることはなく、生産効率の高い多数個取り配線基板と
することができる。
Further, according to the multi-cavity wiring board of the present invention, since the metal frame is made of the same metal as the wiring conductor in the wiring board region, the metal frame and the wiring conductor can be formed at the same time and the reinforcing plate. There is no increase in extra steps such as mounting, and a multi-cavity wiring board with high production efficiency can be obtained.

【0044】また、本発明の配線基板の製造方法によれ
ば、上述の工程を順次行なうことから、絶縁シートを複
数積層して熱プレスする際に熱硬化性樹脂前駆体の粘度
が低下したとしても、金属枠が熱硬化性樹脂前駆体の流
動を防止して配線基板領域の配線導体が変形することは
なく、その結果、貫通導体とそれと接続される配線導体
の位置がズレて短絡や断線を生じることのない接続信頼
性に優れた多数個取り配線基板を提供することができ
る。
Further, according to the method for manufacturing a wiring board of the present invention, since the above steps are sequentially performed, it is considered that the viscosity of the thermosetting resin precursor is lowered when a plurality of insulating sheets are laminated and hot pressed. However, the metal frame prevents the flow of the thermosetting resin precursor and the wiring conductor in the wiring substrate area is not deformed. As a result, the position of the through conductor and the wiring conductor connected to it is displaced, resulting in a short circuit or disconnection. It is possible to provide a multi-cavity wiring board that is excellent in connection reliability and that does not cause a problem.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)、(b)は、それぞれ本発明の多数個取
り配線基板の実施形態の一例を示す平面図および断面図
である。
1A and 1B are a plan view and a cross-sectional view showing an example of an embodiment of a multi-cavity wiring board of the present invention, respectively.

【図2】(a)〜(d)は、それぞれ本発明の配線基板
の製造方法を説明するための各工程毎の工程図である。
FIG. 2A to FIG. 2D are process drawings for each process for explaining the method for manufacturing a wiring board according to the present invention.

【符号の説明】[Explanation of symbols]

1・・・・・・絶縁層 2・・・・・・配線導体 3・・・・・・貫通導体 4・・・・・・金属枠 5・・・・・・配線基板領域 6・・・・・・母基板 7・・・・・・絶縁シート 8・・・・・・転写シート 1 ... Insulating layer 2 ... Wiring conductor 3 ... Penetration conductor 4 ... Metal frame 5 ・ ・ Wiring board area 6 ... Mother board 7 ... Insulation sheet 8 ... Transfer sheet

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H05K 3/40 H05K 3/40 E 3/46 3/46 G N T Z Fターム(参考) 5E317 AA24 BB02 BB03 BB12 CC22 CC25 CD29 CD31 CD32 GG09 GG11 GG16 5E338 AA03 AA16 BB02 BB13 BB25 BB45 BB72 CC01 CD22 EE28 EE32 5E343 AA05 AA12 AA39 BB15 BB24 BB66 DD56 DD62 ER52 GG08 GG20 5E346 AA12 AA15 AA32 AA35 AA38 AA43 BB01 CC02 CC08 CC32 DD02 DD33 EE02 EE06 EE07 FF18 GG26 GG28 HH07 HH11 HH33 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) H05K 3/40 H05K 3/40 E 3/46 3/46 G NTZ F term (reference) 5E317 AA24 BB02 BB03 BB12 CC22 CC25 CD29 CD31 CD32 GG09 GG11 GG16 5E338 AA03 AA16 BB02 BB13 BB25 BB45 BB72 CC01 CD22 EE28 EE32. FF18 GG26 GG28 HH07 HH11 HH33

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 絶縁層を複数積層して成る母基板の中央
部に、前記絶縁層の表面に配線導体が形成され、前記絶
縁層の内部に上下に位置する前記配線導体間を電気的に
接続する貫通導体が形成された多数の配線基板領域を配
設するとともに、前記絶縁層の表面の前記配線基板領域
の間および外周部に金属枠を配設して成ることを特徴と
する多数個取り配線基板。
1. A wiring conductor is formed on a surface of the insulating layer in a central portion of a mother substrate formed by laminating a plurality of insulating layers, and the wiring conductors located vertically above and below the insulating layer are electrically connected to each other. A large number of wiring board regions in which penetrating conductors to be connected are formed, and a metal frame is arranged between the wiring board regions on the surface of the insulating layer and in the outer peripheral portion. Wiring board.
【請求項2】 前記金属枠は、厚みが5〜50μmであ
り、前記配線基板領域の間における幅が0.5〜2.0
mmであることを特徴とする請求項1記載の多数個取り
配線基板。
2. The metal frame has a thickness of 5 to 50 μm and a width between the wiring board regions of 0.5 to 2.0.
The multi-cavity wiring board according to claim 1, wherein the wiring board has a multi-wiring structure.
【請求項3】 前記金属枠は、前記配線導体と同じ金属
から成ることを特徴とする請求項1または請求項2記載
の多数個取り配線基板。
3. The multi-cavity wiring board according to claim 1, wherein the metal frame is made of the same metal as the wiring conductor.
【請求項4】 熱硬化性樹脂前駆体および耐熱性繊維か
ら成り、中央部に多数の配線基板領域が配設される絶縁
シート、ならびに耐熱性樹脂から成る転写シート基材の
前記配線基板領域に対応する部位に所定パターンの配線
導体を形成するとともに前記配線基板領域の間および外
周部に対応する部位に金属枠を形成した転写シートを準
備する工程と、前記絶縁シートの前記配線基板領域に貫
通孔を穿設するとともに、該貫通孔に貫通導体を形成す
る工程と、前記転写シートを前記絶縁シートに圧接して
前記配線導体および前記金属枠を前記絶縁シートに転写
埋入させるとともに前記貫通導体と前記配線導体とを電
気的に接続する工程と、前記配線導体および前記金属枠
が転写埋入された前記絶縁シートから前記転写シート基
材を剥離する工程と、前記配線導体および前記金属枠が
転写埋入された絶縁シートを複数枚積層するとともに前
記熱硬化性樹脂前駆体を硬化して一体化させる工程とを
順次行なうことを特徴とする多数個取り配線基板の製造
方法。
4. An insulating sheet comprising a thermosetting resin precursor and a heat resistant fiber, wherein a large number of wiring board regions are arranged in the central portion, and a transfer sheet substrate made of a heat resistant resin on the wiring board region. A step of preparing a transfer sheet in which a wiring conductor having a predetermined pattern is formed in corresponding portions and a metal frame is formed between the wiring substrate areas and portions corresponding to the outer peripheral portion, and the insulating sheet is penetrated into the wiring substrate area. Forming a through hole and forming a through conductor in the through hole; and pressing the transfer sheet against the insulating sheet to transfer and embed the wiring conductor and the metal frame in the insulating sheet, and the through conductor. And a step of electrically connecting the wiring conductor to the wiring conductor, and a step of peeling the transfer sheet base material from the insulating sheet in which the wiring conductor and the metal frame are transfer-embedded. A step of stacking a plurality of insulating sheets in which the wiring conductors and the metal frame are transfer-embedded and curing the thermosetting resin precursor to integrate them into a multi-cavity wiring. Substrate manufacturing method.
JP2001301288A 2001-09-28 2001-09-28 Wiring board for multiple pattern and method of manufacturing the same Withdrawn JP2003110203A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001301288A JP2003110203A (en) 2001-09-28 2001-09-28 Wiring board for multiple pattern and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001301288A JP2003110203A (en) 2001-09-28 2001-09-28 Wiring board for multiple pattern and method of manufacturing the same

Publications (1)

Publication Number Publication Date
JP2003110203A true JP2003110203A (en) 2003-04-11

Family

ID=19121727

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2003110203A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006319071A (en) * 2005-05-11 2006-11-24 Denso Corp Method for manufacturing multi-layer circuit board
JP2007207934A (en) * 2006-01-31 2007-08-16 Kyocera Kinseki Corp Sheet-like aggregate substrate
JP2008193065A (en) * 2007-02-07 2008-08-21 Samsung Electro Mech Co Ltd Method of manufacturing printed circuit board
JP2009076721A (en) * 2007-09-21 2009-04-09 Shinko Electric Ind Co Ltd Multilayer wiring board
JP2010238829A (en) * 2009-03-30 2010-10-21 Ngk Spark Plug Co Ltd Method of manufacturing wiring substrate with reinforcing material
JP2012231105A (en) * 2011-04-15 2012-11-22 Kyocera Corp Molded body and multi-piece wiring board
WO2016079784A1 (en) * 2014-11-17 2016-05-26 日本メクトロン株式会社 Multi-part printed circuit and coil pattern inspection method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006319071A (en) * 2005-05-11 2006-11-24 Denso Corp Method for manufacturing multi-layer circuit board
JP4548210B2 (en) * 2005-05-11 2010-09-22 株式会社デンソー Multilayer circuit board manufacturing method
JP2007207934A (en) * 2006-01-31 2007-08-16 Kyocera Kinseki Corp Sheet-like aggregate substrate
JP2008193065A (en) * 2007-02-07 2008-08-21 Samsung Electro Mech Co Ltd Method of manufacturing printed circuit board
JP2009076721A (en) * 2007-09-21 2009-04-09 Shinko Electric Ind Co Ltd Multilayer wiring board
JP2010238829A (en) * 2009-03-30 2010-10-21 Ngk Spark Plug Co Ltd Method of manufacturing wiring substrate with reinforcing material
JP2012231105A (en) * 2011-04-15 2012-11-22 Kyocera Corp Molded body and multi-piece wiring board
WO2016079784A1 (en) * 2014-11-17 2016-05-26 日本メクトロン株式会社 Multi-part printed circuit and coil pattern inspection method

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