JP2003101373A - 弾性表面波素子および弾性表面波装置 - Google Patents

弾性表面波素子および弾性表面波装置

Info

Publication number
JP2003101373A
JP2003101373A JP2001292471A JP2001292471A JP2003101373A JP 2003101373 A JP2003101373 A JP 2003101373A JP 2001292471 A JP2001292471 A JP 2001292471A JP 2001292471 A JP2001292471 A JP 2001292471A JP 2003101373 A JP2003101373 A JP 2003101373A
Authority
JP
Japan
Prior art keywords
surface acoustic
acoustic wave
excitation electrode
piezoelectric substrate
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001292471A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003101373A5 (cg-RX-API-DMAC10.html
Inventor
Kenji Inoue
憲司 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP2001292471A priority Critical patent/JP2003101373A/ja
Priority to EP02021468.0A priority patent/EP1296454B1/en
Priority to US10/253,988 priority patent/US20030062969A1/en
Publication of JP2003101373A publication Critical patent/JP2003101373A/ja
Priority to US10/699,779 priority patent/US7116187B2/en
Publication of JP2003101373A5 publication Critical patent/JP2003101373A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2001292471A 2001-09-25 2001-09-25 弾性表面波素子および弾性表面波装置 Pending JP2003101373A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001292471A JP2003101373A (ja) 2001-09-25 2001-09-25 弾性表面波素子および弾性表面波装置
EP02021468.0A EP1296454B1 (en) 2001-09-25 2002-09-25 SAW element and SAW device
US10/253,988 US20030062969A1 (en) 2001-09-25 2002-09-25 Saw element and saw device
US10/699,779 US7116187B2 (en) 2001-09-25 2003-11-04 Saw element and saw device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001292471A JP2003101373A (ja) 2001-09-25 2001-09-25 弾性表面波素子および弾性表面波装置

Publications (2)

Publication Number Publication Date
JP2003101373A true JP2003101373A (ja) 2003-04-04
JP2003101373A5 JP2003101373A5 (cg-RX-API-DMAC10.html) 2005-10-06

Family

ID=19114427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001292471A Pending JP2003101373A (ja) 2001-09-25 2001-09-25 弾性表面波素子および弾性表面波装置

Country Status (1)

Country Link
JP (1) JP2003101373A (cg-RX-API-DMAC10.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010252321A (ja) * 2009-03-27 2010-11-04 Kyocera Corp 弾性表面波装置及びその製造方法
WO2018135538A1 (ja) * 2017-01-19 2018-07-26 株式会社村田製作所 高周波フィルタ、高周波フロントエンド回路、および通信装置
WO2018139320A1 (ja) * 2017-01-30 2018-08-02 株式会社村田製作所 高周波フィルタ、高周波フロントエンド回路及び通信装置
US10056878B2 (en) 2014-12-12 2018-08-21 Taiyo Yuden Co., Ltd. Acoustic wave device and method of fabricating the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010252321A (ja) * 2009-03-27 2010-11-04 Kyocera Corp 弾性表面波装置及びその製造方法
US10056878B2 (en) 2014-12-12 2018-08-21 Taiyo Yuden Co., Ltd. Acoustic wave device and method of fabricating the same
WO2018135538A1 (ja) * 2017-01-19 2018-07-26 株式会社村田製作所 高周波フィルタ、高周波フロントエンド回路、および通信装置
US11012050B2 (en) 2017-01-19 2021-05-18 Murata Manufacturing Co., Ltd. Radio-frequency filter, radio-frequency front-end circuit, and communication apparatus
WO2018139320A1 (ja) * 2017-01-30 2018-08-02 株式会社村田製作所 高周波フィルタ、高周波フロントエンド回路及び通信装置
US11031920B2 (en) 2017-01-30 2021-06-08 Murata Manufacturing Co., Ltd. Radio-frequency filter, radio-frequency front-end circuit, and communication apparatus

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