JP2003096596A5 - - Google Patents
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- Publication number
- JP2003096596A5 JP2003096596A5 JP2001291835A JP2001291835A JP2003096596A5 JP 2003096596 A5 JP2003096596 A5 JP 2003096596A5 JP 2001291835 A JP2001291835 A JP 2001291835A JP 2001291835 A JP2001291835 A JP 2001291835A JP 2003096596 A5 JP2003096596 A5 JP 2003096596A5
- Authority
- JP
- Japan
- Prior art keywords
- oxidizing
- turkey
- melt
- contacting
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002253 acid Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000000155 melt Substances 0.000 claims 1
- 239000007800 oxidant agent Substances 0.000 claims 1
- 230000001590 oxidative Effects 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001291835A JP2003096596A (ja) | 2001-09-25 | 2001-09-25 | めっき方法及びめっき装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001291835A JP2003096596A (ja) | 2001-09-25 | 2001-09-25 | めっき方法及びめっき装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003096596A JP2003096596A (ja) | 2003-04-03 |
| JP2003096596A5 true JP2003096596A5 (da) | 2004-12-24 |
Family
ID=19113911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001291835A Pending JP2003096596A (ja) | 2001-09-25 | 2001-09-25 | めっき方法及びめっき装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003096596A (da) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1845554A3 (en) * | 2006-04-10 | 2011-07-13 | Imec | A method to create super secondary grain growth in narrow trenches |
| JP4822519B2 (ja) * | 2006-06-26 | 2011-11-24 | Ｊｘ日鉱日石金属株式会社 | 半導体ウェハーの前処理剤及び前処理方法 |
| JP2008024982A (ja) * | 2006-07-20 | 2008-02-07 | Sanshin Seisakusho:Kk | めっき装置 |
| JP4163728B2 (ja) | 2006-10-02 | 2008-10-08 | エス・イー・エス株式会社 | 電気めっき方法 |
| JP4177400B2 (ja) | 2006-11-10 | 2008-11-05 | エス・イー・エス株式会社 | 無電解めっき方法 |
| JP5898540B2 (ja) * | 2012-03-22 | 2016-04-06 | アルメックスＰｅ株式会社 | ワーク保持治具及び表面処理装置 |
| KR101500966B1 (ko) * | 2011-06-30 | 2015-03-10 | 아루멕쿠스 피이 가부시키가이샤 | 표면 처리 장치 및 워크 유지 지그 |
| CN102446829A (zh) * | 2011-09-23 | 2012-05-09 | 上海华力微电子有限公司 | 一种用于在硅片的通孔中进行电镀铜的装置 |
| CN113424309A (zh) * | 2019-02-14 | 2021-09-21 | 朗姆研究公司 | 金通硅掩模电镀 |
-
2001
- 2001-09-25 JP JP2001291835A patent/JP2003096596A/ja active Pending
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