JP2003090974A - Galvano-scanner device and its control method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attain a punching work or the like with few working errors and high throughput regardless of factors such as the moving angle of a scanner mirror. SOLUTION: A digital computer 60a switches a standby time taken until completing the driving of the scanner mirror based on a standby time table Tw stored in a memory 60me. In the standby time table Tw to be used, the standby time taken until completing the driving when the scanner mirror is held at a target angle after reaching a settling range in accordance with the driving angle and the target angle of the scanner mirror is set. The computer 60a outputs a positioning completion signal SRD to a host controller for designating the driving of the scanner mirror after the lapse of the standby time read out in accordance with the size of the driving angle from the table Tw according to a designation signal SAA from the host controller.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a galvano scanner device for moving an irradiation position of a laser beam and a control method thereof, and in particular, irradiates a laser beam to punch holes in appropriate places such as a printed wiring board. The present invention relates to a galvano scanner device suitable for use in a laser drill machine and a control method thereof.

[0002]

2. Description of the Related Art In a laser drill machine, a laser beam from a laser light source is deflected by, for example, a galvano scanner and made incident on a desired position on a workpiece, which is a workpiece. When such a laser drill machine is used to punch a printed wiring board or the like, for example, high throughput is required, and high-speed operation of the galvano scanner is required.

Generally, the driving characteristics of the galvano scanner differ depending on the operating angle. Although this difference in characteristics is slight, it cannot be ignored due to the demand for higher speed and higher accuracy.

FIG. 9 is a graph showing an error between a target machining position and an actual machining point when a hole is machined in one direction under certain machining conditions. The horizontal axis represents the distance from the starting point of the target processing position, and the vertical axis represents the error of the processing point from the target processing position. As the machining position progresses, a positive error occurs and the accuracy deteriorates. This is a phenomenon that occurs because laser irradiation is performed despite the delay in settling due to changes in the drive characteristics of the processing position.

Conventionally, as a measure against such deterioration of processing accuracy, a measure such as slowing down the driving speed or narrowing the processing area so as not to make a difference in characteristics has been adopted. Was low.

Further, for the purpose of high-speed operation of the galvano scanner, Japanese Patent Laid-Open No. 2000-117476 proposes to set a "setting waiting time" according to the moving angle of the scanner mirror. Specifically, it is considered that the positioning of the scanner mirror is completed after the “setting waiting time” has passed from the output timing of the command value for driving the scanner mirror. Then, the smaller the moving angle (moving distance) of the scanner mirror, the shorter this "setting waiting time" is, thereby shortening the processing tact of the workpiece.

[0007]

However, in the technique of the above publication, the "set waiting time" is determined as the time required from the time when the command value is output. Therefore, especially when the moving angle of the scanner mirror is large, The error between the "set waiting time" and the actual positioning time increases. Such an error causes an error in the drilling process. To avoid this, if the "set waiting time" is set to be long and a large allowable error is taken, the accumulated drilling process will reduce the drilling throughput.

Therefore, the present invention provides a galvano scanner device and a control method therefor that can perform processing such as drilling with a small processing error and high throughput regardless of factors such as the angle of the scanner mirror. The purpose is to

[0009]

In order to solve the above-mentioned problems, the present invention is a galvano scanner device for moving the irradiation position of a laser beam by a mirror and a mirror driving device, wherein the mirror driving device drives the mirror. Settling range detecting means for detecting that the position has reached within a predetermined settling range including the target angle, and it is necessary to reach and hold the target angle after the drive position of the mirror reaches within the settling range. Then, there is provided control means for changing the expected waiting time according to the angle of the mirror.

In the above apparatus, the control means determines the waiting time expected until the drive position of the mirror reaches and is held at the target angle after reaching the settling range according to the angle of the mirror. Since it is changed, it is possible to process the laser via or the like with high throughput with a small error by using the standby time with a small error. That is, since the waiting time corresponds to the remaining time for positioning from the stage when the driving position of the mirror approaches the target angle and reaches the settling range, the set waiting time is determined as the required time from the output of the command value. In comparison with the case of performing the above, short-term prediction is sufficient, and the positioning timing can be predicted relatively accurately. Therefore, not only can the laser beam be accurately positioned at the irradiation position by accurately predicting the time when the drive position of the mirror becomes the target angle, but the timing of positioning can be accurately determined, and based on the waiting time described above. Since the next operation and its preparation can be performed, the throughput of processing using a laser beam can be increased. Here, the settling range may correspond to a preliminary period for starting preparation for the operation of another predetermined component that operates in relation to the operation of the mirror. Apart from the preliminary period, it is possible to set a range specially provided for ensuring accuracy.

In a specific mode of the above apparatus, the standby time is changed according to the drive angle of the mirror, the target angle, or both.

In another specific mode of the above-mentioned apparatus, a waiting time table in which the waiting time is stored in association with the machining position is provided.

In another specific mode of the above apparatus, the waiting time is set for each mirror scanning direction.

In another specific mode of the above apparatus, a waveform forming means for forming a command waveform for driving the mirror as digital data is further provided. In this case, since the desired command waveform can be given to the mirror driving device with a high degree of freedom, the mirror can be efficiently held at the target angle in a short time, and the waiting time can be predicted accurately.

In another specific mode of the above apparatus,
The standby time is set to include a delay of an operation of a predetermined component that operates in association with the operation of the mirror and at least an operation of a control device that controls the operation of the predetermined component. In this case, the interlocking with other predetermined parts can be efficiently controlled, and the throughput can be further increased. In addition,
Here, the other components mean, for example, a laser oscillation device, a drive device of a stage that supports a workpiece, and the like.

In another specific mode of the above apparatus,
Based on the characteristic difference obtained by the characteristic difference detecting means, a characteristic difference detecting means for obtaining a characteristic difference by comparing a deviation or a current value of the driving position of the mirror by the mirror driving device with a reference characteristic, And a correction means for correcting the waiting time extracted from the time table. In this case, since the standby time can be corrected in consideration of the characteristic difference corresponding to the situation (response deterioration) until the mirror reaches the settling range, the throughput of the process using the laser beam can be further increased.

In another specific mode of the above apparatus,
The mirror drive device further includes a characteristic difference detection unit that obtains a characteristic difference by comparing a deviation or a current value of a driving position of the mirror with a reference characteristic, and the waiting time is set to a plurality depending on a plurality of patterns of the characteristic difference. It is stored as a standby time table of. In this case, since the standby time can be determined in consideration of the characteristic difference corresponding to the situation until the mirror reaches the settling range, the throughput of the process using the laser beam can be further increased.

In another specific mode of the above apparatus,
The waveform forming means further comprises characteristic difference detecting means for comparing the deviation or current value of the driving position of the mirror by the mirror driving device with a reference characteristic, and the waveform forming means obtains the characteristic. The command waveform for driving the mirror is modified according to the difference. In this case, since the command waveform can be modified in consideration of the characteristic difference corresponding to the situation until the mirror reaches the settling range, the throughput of the processing using the laser beam can be further increased.

In another specific mode of the above apparatus,
A temperature sensor for detecting the temperature in the vicinity of the mirror and the mirror driving device is further provided, and the standby time is stored for each temperature as a standby time table, for example. in this case,
Since the standby time can be determined in consideration of the temperature change, the accuracy of the processing using the laser beam can be increased and the throughput thereof can be further increased.

In another specific mode of the above apparatus,
Positioning determination means for determining that the positioning of the mirror is completed when the mirror is narrower than the settling range and falls within a predetermined convergence range including the vicinity of the target angle for a predetermined time. In this case, it is possible to increase the throughput of the process using the laser beam while ensuring the processing accuracy by setting the convergence range.

Further, the present invention is a method of controlling a galvano scanner device in which an irradiation position of a laser beam is moved by a mirror and a mirror driving device, wherein the driving position of the mirror reaches a predetermined settling range including a target angle. A step of determining a standby time expected to be required until the target angle is reached and held later, according to the angle of the mirror, for example, using a standby time table; A step of detecting that the drive position has reached the settling range, and when it reaches the settling range, for example, after waiting until the mirror operation is completed based on the waiting time table, outputs a positioning completion signal. And a step of performing.

In the above method, a waiting time expected to be required until the driving position of the mirror reaches the target angle and is held after the driving position reaches the settling range is set according to the angle of the mirror, for example, the waiting time. Since it is stored as a table, it is possible to process the laser via or the like with high throughput and a small error by using the standby time with a small error.

[0023]

1 is a view for explaining the structure of a laser drill machine incorporating a galvano scanner device according to an embodiment of the present invention.

The illustrated laser drill machine includes a laser oscillator 10 for emitting a pulsed laser beam LB as a light source, a galvano scanner 20 for deflecting the laser beam LB from the laser oscillator 10 in a desired direction, and a galvano scanner 20. Fθ lens 30 that collects the laser beam LB that has passed through the surface of the workpiece W, a stage 50 that supports the workpiece W that is a printed wiring board, and a scanner controller 60 that controls the operation of the galvano scanner 20. A stage controller 70 that controls the operation of the stage 50, and a host controller 80 that totally controls the operation of the entire laser drill machine. Here, galvano scanner 2
0 and the scanner control unit 60 constitute a galvano scanner device.

The laser oscillator 10 may be, for example, an excimer laser that emits an ultraviolet laser beam LB in a pulse form or a CO ₂ laser that emits an infrared laser beam LB in a pulse form. The emission timing of the laser beam LB from the laser oscillator 10 depends on the host controller 8
Controlled by 0.

The galvano scanner 20 has a laser beam LB.
A pair of scanner mirrors M1 and M2 for deflecting light, mirror drive devices 21 and 22 for rotationally driving both scanner mirrors M1 and M2 in directions of two axes orthogonal to each other, and in the vicinity of both mirror drive devices 21 and 22. And temperature sensors 24 and 25 arranged to detect their temperatures.

The fθ lens 30 includes a scanner mirror M1 and
When M2 rotates at a constant angular velocity, the laser beam LB is moved on the workpiece W at a constant velocity. Thereby, the incident spot IS of the pulsed light formed on the surface of the workpiece W by the fθ lens 30 can be moved to an arbitrary point in the XY plane. At the incident spot IS of the pulsed light condensed by the fθ lens 30, the resin layer and the copper thin film on the surface of the workpiece W are decomposed and removed by the ablation phenomenon.

The stage 50 supports the workpiece W to support the X-axis.
It can be moved to any position in the Y plane. That is, when the workpiece W is relatively large, its scanning area (processing area) may be larger than the scanning area in which the via hole can be formed by the scanning of the galvano scanner 20. In this case, via holes are formed in units of scanning areas while the workpiece W is moved in appropriate steps, and this is repeated to form via holes in the entire workpiece W.

The scanner control unit 60 outputs an appropriate signal to the mirror driving devices 21 and 22 of the galvano scanner 20 based on an instruction from the host controller 80 to move the scanner mirrors M1 and M2 to arbitrary driving positions, that is, target angles. And the necessary signal processing is performed based on the output of the drive angle detection device provided in the mirror drive devices 21 and 22.

The stage controller 70 can output an appropriate signal to the stage 50 based on an instruction from the host controller 80 to move the workpiece W on the stage 50 to an arbitrary position. Necessary signal processing is performed on the basis of the output of the position detection device provided in the.

The host controller 80 is composed of a computer system or the like, and operates the galvano scanner 20 via the scanner controller 60 to control the incident position of the laser beam LB on the workpiece W. Further, the host controller 80 operates the stage 50 to operate the galvano scanner 2
The position of the workpiece W with respect to 0 or the like is controlled. The host controller 80 also controls the emission timing of pulsed light from the laser oscillator 10.

FIG. 2 is a block diagram mainly illustrating the circuit configuration of the scanner control unit 60 shown in FIG. The scanner control unit 60 includes a digital calculator 60a that forms a pair of command signals SID for operating the motors MO1 and MO2 as digital data according to a command signal SAA from the host controller 80, and a pair of commands from the digital calculator 60a. A pair of command voltage signals S, which are analog signals SID
D / A converter 60b forming VW and D / A converter 60
analog circuit 60d having a function of forming a pair of command current signals SCW based on a pair of command voltage signals SVW from b, and a pair of output signals SO1 obtained by amplifying a pair of command current waveforms SDW from the analog circuit 60d. , SO2 to output a pair of motors MO1 and MO2 respectively to a power amplifier 60
e, 60f. In FIG. 2, the motor MO
1 and the angle sensor S1 correspond to the mirror driving device 21 in FIG. 1, and the motor MO2 and the angle sensor S2 correspond to the mirror driving device 23 in FIG.

The digital calculator 60a functions as a waveform forming means, and an instruction signal SAA from the host controller 80.
And a pair of command signals SID for operating the mirror driving devices 21 and 22 are formed as digital data according to D /
Output to the A converter 60b. Also, the digital calculator 60
a is the angle state (direction) of the scanner mirrors M1 and M2 based on the angle signals SA and SB from the A / D converter 60h.
To monitor. Further, the digital calculator 60a monitors the temperature states of the scanner mirrors M1 and M2 and the mirror driving devices 21 and 22 of FIG. 1 based on the temperature signal SC from the A / D converter 60h. Further, the digital calculator 60a monitors whether or not the scanner mirrors M1 and M2 are within the settling range, based on the settling range signal SD from the analog circuit 60d. As a result, the digital calculator 60a
It is possible to detect the timing when the scanner mirrors M1 and M2 are within the settling range, which means that they are close to positioning, and the precise waiting time until the scanner mirrors M1 and M2 reach the target angle after reaching the settling range. Can be predicted. Then, the digital calculator 60a uses, as an output means, a positioning completion signal SRD which means completion of positioning.
Is output to the host controller 80.

The analog circuit 60d is provided with a feedback control circuit, and outputs a command current signal SCW based on the command voltage signal SVW from the D / A converter 60b and the angle measurement signal SMA from the angle sensors S1 and S2. After being formed, the command current signal SCW is output to the power amplifiers 60e and 60f. Here, the command voltage signal SVW is the scanner mirror M
1, a voltage waveform for converging M2 to a target angle,
The command current signal SCW is used to scan the scanner mirrors M1 and M2 and the mirror angle corresponding to the command voltage signal SVW and the angle measurement signal SMA.
Is a current waveform for rotating in accordance with the difference from the mirror angle corresponding to. Further, the analog circuit 60d functions as a settling range detecting means, generates an in-settling range signal SD corresponding to whether or not the scanner mirrors M1 and M2 are in the settling range based on the angle measurement signal SMA, and digitally outputs the signal. Output to the calculator 60a. Furthermore, the analog circuit 60d is
Based on the angle measurement signal SMA, the scanner mirrors M1 and M2
Deviation SAD or current angle SAP is generated and output to the digital calculator 60a. Here, the deviation SAD is
It corresponds to the difference between the angle corresponding to the angle measurement signal SMA and the angle corresponding to the command voltage signal SVW.

FIG. 3 is a block diagram for explaining the circuit configuration of the digital calculator 60a shown in FIG. This digital calculator 60a uses the mirror drive device 2 based on the instruction signal SAA.
Positioning completion determination based on the command value generation unit 60cg that forms a pair of command signals SID for operating 1 and 22 as digital data, the angle signals SAD, SAP, the settling range signal SD, the temperature signal STE, and the like. The determination unit 60ad that performs processing such as determination of the waiting time and the memory 60me that stores information necessary for processing such as determination of the waiting time are provided.

The command value generator 60cg is used for the mirror driving device 2
Patterns for operating the first and the second, that is, the scanner mirror M
A pair of command signals S for operating the mirror driving devices 21 and 22 based on the command signal SAA including the driving amounts of 1 and M2.
Form an ID. Both command signals SID are applied to the mirror driving device 2
It corresponds to the drive amount and drive speed of the motors constituting Nos. 1 and 22, and changes with time to converge to the target value.

The judgment unit 60ad receives the signal SD within the settling range, determines the waiting time until the completion of positioning based on the waiting time table, and after this time, the positioning completion signal S
Output RD. The determination unit 60ad can correct the command signal SID for operating the mirror driving devices 21 and 22 based on the monitored signals SAD, SAP, SD, STE and the like. Specifically, for example, the angle signals SAD, S
When the change of AP is slower than planned, a pair of command signals S
The characteristics of the ID can be changed to cause the angle change with a steeper gradient than planned.

The memory 60me includes scanner mirrors M1 and M2.
A standby time table Tw is stored in which the standby time until the target angle is maintained after the value of the value reaches the settling range is stored in association with the drive angle. The memory 60me can store the reference characteristic Cr in addition to the waiting time table Tw. The reference characteristic Cr is an operation waveform in which a standard drive angle of the scanner mirrors M1 and M2 or a standard drive amount of the mirror drive devices 21 and 22 is a function of time.

In a laser processing apparatus using a galvano scanner, since the operating characteristics of the galvano scanner are non-interfering on the X axis and the Y axis, the above time settings are set on the X axis and the Y axis.
It can also be done separately for each axis.

The operation of the laser drill machine shown in FIGS. 1 to 3 will be described below.

First, the workpiece W, which is a printed wiring board, is placed and fixed on the stage 50.

Next, based on an instruction from the host controller 80, while operating the laser oscillator 10, the laser beam LB from the galvano scanner 20 is made to enter the proper position of the workpiece W on the stage 50, and processing is performed there. Form a hole. More specifically, the stage 50 is moved in accordance with the output from the stage control unit 70 so that a specific section on the workpiece W has a specific area on the galvano scanner 20 and the fθ lens 3.
It is moved so as to be the irradiation region of the scanning optical system consisting of 0.

Next, the galvano scanner 20 is operated in accordance with the output from the scanner control unit 60, and the laser beam LB from the laser oscillator 10 is made to enter the work W at an appropriate position, whereby the work W is specified. Machining holes are formed in the desired section in the desired section.

Next, the stage 50 is moved so that the section adjacent to the specific section becomes the irradiation area of the scanning optical system.

Next, the scanning optical system is used to form holes in a desired arrangement in the adjacent sections on the object W to be processed.

By repeating the above operation, a machined hole is formed at an appropriate place on the entire surface of the workpiece W.

In the above operation, the scanner control unit 60 operates the galvano scanner 20 in the five modes described below.

In the first mode, the scanner controller 60
Based on the waiting time table Tw stored in the memory 60me of the digital calculator 60a provided in the above, the waiting time until completion of driving of both scanner mirrors M1 and M2 is switched. In the waiting time table Tw used here, the waiting time until the completion of driving, which is held at the target angle after reaching the setting range, is the target angle of the scanner mirrors M1 and M2 corresponding to the distance (hole distance) between the processing points. It is determined according to the driving amount (angle) up to. The scanner control unit 60, in response to the instruction signal SAA from the host controller 80 that instructs the drive of the scanner mirrors M1 and M2, after the waiting time read from the waiting time table Tw according to the magnitude of the drive angle, the positioning completion signal. The SRD is output to the host controller 80. The host controller 80 sends a trigger signal to the laser oscillator 10 as soon as the positioning completion signal is detected.

Here, the waiting time table Tw is prepared by repeating experiments in advance and accumulating data.
Specifically, for each of the scanner mirrors M1 and M2, the characteristic of the angle deviation (or current angle) when the magnitude of the drive angle is changed is measured by an experiment. From this, it is clarified how the operating characteristics of both scanner mirrors M1 and M2 change under each angle condition, and the waiting time from the arrival within the setting range to the completion of positioning is determined for each angle condition. Standby time table Tw obtained in this way
Is incorporated in the memory 60me of the digital calculator 60a.

When the digital calculator 60a operates after waiting for the waiting time, the internal processing of the host controller 80 and other electric components (for example, from the completion of positioning to the actual irradiation of the laser beam LB) (for example, There is often a useless delay time due to a delay in operation of the laser oscillator 10, the stage 50, the stage control unit 70, etc.). It is effective to further shorten the processing time by clarifying such a delay time experimentally in advance and subtracting the delay time when determining the waiting time as the waiting time. In practice, the waiting time stored as the waiting time table Tw is corrected by increasing the delay time caused by the operation of the upper controller 80 or the like.

In the second mode, the waiting time table T
Based on w, not only the waiting time until completion of driving of the scanner mirrors M1 and M2 is switched, but also the switched waiting time is further changed according to the situation. Specifically, the digital calculator 60 that functions as a characteristic difference detecting unit and a correcting unit.
a compares the reference characteristic Cr stored in the memory 60me with the deviation or current value of the driving position of the scanner mirrors M1 and M2 at predetermined time intervals to detect a characteristic difference, and based on this characteristic difference, from the standby time table Tw. Correct the extracted waiting time. As a correction method, it is conceivable to multiply the waiting time extracted from the waiting time table Tw according to each operating condition by a coefficient according to the characteristic difference or add an offset according to the characteristic difference. It is also possible to prepare some standby time tables Tw in advance and switch the standby time tables according to changes in operating characteristics. In comparing the characteristic differences, for example, the overshoot difference obtained by comparing the overshoot of the drive amount of the scanner mirrors M1 and M2 with the overshoot of the reference characteristic Cr, and the following speed of the scanner mirrors M1 and M2 as the following speed of the reference characteristic Cr. The compared speed difference can be used.

Here, the reference characteristic Cr is a standard operating characteristic in the initial stage of the galvano scanner 20, and the current value () of each of the scanner mirrors M1 and M2 when the size of the drive angle is changed ( Drive angle)
Change characteristics of deviation and deviation (angle deviation) are experimentally measured, and operation characteristics are obtained for each predetermined drive angle range.
The reference characteristic Cr changes depending on whether the driving positions of the scanner mirrors M1 and M2 are grasped as deviations or present values. That is, the deviation reference characteristic Cr corresponds to the difference between the current value and the command value.

Further, the convergent value of the reference characteristic Cr becomes 0 when the deviation is used for the control, but when the current value is used for the control, the converged value is made to match the command value from the host controller 80. It is necessary to shift the characteristics, and the characteristics are set so as to accurately converge to the command value.

In the third mode, the waiting time table T
In addition to switching the waiting time until the completion of driving the scanner mirrors M1 and M2 based on w,
1. Change the driving pattern of M2 itself. Specifically, the digital calculator 60a compares the reference characteristic Cr stored in the memory 60me with the deviation or the current value of the driving position of the scanner mirrors M1 and M2 at each time, and detects the characteristic difference. Based on this, the drive patterns of the scanner mirrors M1 and M2 are appropriately modified. As a correction method, for example, when the overshoot of the current value or the like is larger than the reference characteristic, the overshoot or the slope of the command value is reduced based on the obtained characteristic difference. Further, when the following speed of the current value or the like is slow, a method of increasing the inclination of the command value based on the obtained characteristic difference may be considered.

When the respective angles of the scanner mirrors M1 and M2 are deviated from the target angles when the driving is completed,
A method of shifting the final value of the command value is also possible. In this case, the convergence value of the reference characteristic Cr is set to a value deviated from the command value.

In the fourth mode, the waiting time table T
The waiting time until the driving of the scanner mirrors M1 and M2 is completed is switched based on w, and the waiting time table Tw used at this time takes the temperature of the galvano scanner 20 into consideration. That is, the scanner control unit 60 includes the host controller 8 that instructs driving of both scanner mirrors M1 and M2.
According to the instruction signal SAA from 0, an appropriate waiting time is read from the waiting time table Tw in correspondence with the drive amount and the temperature detection signal STE from the temperature sensors 24 and 25. The scanner controller 60 uses the read standby time as the data signal S.
It is output to the host controller 80 as RD.

Here, the waiting time table Tw is created by repeating the experiment while changing the temperature of the galvano scanner 20 in advance and collecting the data. In particular,
For both scanner mirrors M1 and M2, the characteristic of the angle deviation when the size of the drive angle is changed is measured in various temperature ranges, and the waiting time from reaching the setting range to the completion of positioning is determined for each temperature range. To do. The waiting time table Tw thus obtained is incorporated in the memory 60me of the digital calculator 60a.

In the fifth mode, the waiting time table T
The waiting time until the driving of the scanner mirrors M1 and M2 is completed is switched based on w. In this case, a positioning completion signal is sent from the digital calculator 60a to the host controller 80 when a certain period of time elapses within a predetermined convergence range. Send. That is, when the positioning completion judgment is performed based on the deviation of the driving amounts of the two scanner mirrors M1 and M2, the digital calculator 60a, which is the positioning judgment means, the value of the deviation SAD output from the analog circuit 60d after reaching the settling range. Is read for each drive, and the positioning is completed when the value of the deviation SAD falls within a desired convergence range for a preset time or more. In this case, it takes more time to complete the positioning after entering the convergence range, but it is possible to automatically cope with a change in operating characteristics with time.

FIG. 4 is a graph for explaining a specific operation of the laser drill machine according to the embodiment. 4A shows the case where the drive angle is large, and FIG. 4B shows the case where the drive angle is small. In the figure, the vertical axis represents the scanner mirrors M1 and M2.
The angle of and the horizontal axis is time. Both figures show target angles Caa, Cab, command values Cca, Ccb, operating characteristics Cda1, Cdb1 showing changes in the current value of the first scanner mirror M1, and operating characteristics showing changes in the current value of the second scanner mirror M2. Cda2 and Cdb2 are represented. The zone-shaped settling range and the overshoot of the operating characteristics Cda1, Cdb1, Cda2, and Cdb2 are drawn larger than they actually are for the sake of easy understanding.

As is clear from the figure, the target angle Caa,
Since the convergence characteristics of the scanner mirrors M1 and M2 toward the Cab usually change depending on the size of the scanner mirrors, the time from reaching within the settling range to convergence also differs for each scanner mirror M1 and M2. For example, when the drive angle is large as shown in FIG. 4A, the first scanner mirror M1
In the case of, the convergence requires a time A, and in the case of the second scanner mirror M2, the convergence takes a time B. The convergence characteristics of the scanner mirrors M1 and M2 also change depending on the size of the drive angle. For example, in the case of the first scanner mirror M1, the operation characteristic Cda1 when the drive angle is large requires a time A to converge, and the operation characteristic Cdb when the drive angle is small.
1 requires time C for its convergence.

In the galvano scanner 20 as described above, it is possible to set a uniform waiting time after reaching the settling range in accordance with the condition that requires the longest time for positioning, and to judge that positioning is completed after this waiting time. . In the illustrated example, the longest time B from reaching within the settling range to convergence is B
Can be considered as the entire standby time, but when the drive angle is large and the time A ′ is small and the drive angle is small in the case of the second scanner mirror M1 from reaching the settling range to completion of positioning. The time C'in the case of the first scanner mirror M1 and the time D'in the case of the second scanner mirror M2 are wasteful waiting times. On the other hand, if the waiting time table Tw stored in the memory 60me shown in FIG. 3 is used, unnecessary waiting times A ′, C ′, D ′ will not occur.

FIG. 5 is a graph for specifically explaining the operation in the third mode. In the figure, the vertical axis represents the scanner mirror angle and the horizontal axis represents time. In the figure, the target angle Ca, the command value Cc, and the operation characteristics Cd of the scanner mirror are shown.
The change over time is shown. When the characteristics of the galvano scanner 20 change over time due to continued use, the operating characteristics Cd become the characteristics Cdd1 with a large overshoot or the characteristics Cdd2 with a small following speed. Further, there may be a case where the characteristic Cdd3 is held at an angle deviated from the command value Cc.

For example, when the galvano scanner 20 detects that the operating characteristic Cdd1 has a large overshoot, the scanner control unit 60 corrects the command value Cc to a command value Ccc1 that relatively smoothly rises, and the galvano scanner 20 corrects the galvanometer. The scanner 20 is operated. As a result, the operation of the galvano scanner 20 can be brought close to the operation characteristic Cd.
In addition, the galvano scanner 20 has an operating characteristic C with a small inclination.
When it is detected that the value is dd2, the scanner control unit 60 corrects the command value Cc to the command value Ccc2 having a large inclination and operates the galvano scanner 20. When the galvano scanner 20 detects that the operation characteristic Cdd3 has a target value deviation, the scanner control unit 60 operates the galvano scanner 20 by correcting the command value Cc to a command value that offsets the target value. Let

FIG. 6 is a diagram for specifically explaining the waiting time table Tw used in the fourth mode. In this case, the temperature of the galvano scanner 20 is 0 to A ° C, A to B ° C, and B to C.
The temperature is divided into four regions of C and C to above C, and the standby time corresponding to the drive angle is set for each region.

According to the present embodiment, the setting of the digital calculator is only changed from the result of the processing experiment, so that difficult servo adjustment is not necessary.

Next, the second embodiment of the present invention will be described in detail.

In the present embodiment, in the first mode of the first embodiment, after the digital computer 60a receives the settling range signal SD, the host controller 80
The waiting time until the positioning completion signal SRD is output to
As shown in FIG. 7, it is variable according to the target angle of the mirror corresponding to the processing position. In the case of the example shown in FIG. 9, the waiting time is set longer at the processing position where the processing accuracy is poor, and the settling waiting time until the processing is performed is lengthened.

In the first embodiment, the waiting time is changed according to the driving angle (hole distance) of the mirror, and in the second embodiment, the waiting time is changed according to the target angle (machining position) of the mirror.
As in the third embodiment shown in FIG.
As a three-dimensional table corresponding to both the target angle (machining position) of the mirror and the drive angle (hole distance), a waiting time a to e (for example, a <b <c is set according to both the target angle and the drive angle of the mirror). It is also possible to change <d <e).

According to the present embodiment, it is possible to carry out more favorable processing.

Although the present invention has been described with reference to the above embodiment, the present invention is not limited to the above embodiment.
For example, the galvano scanner device of the embodiment can be incorporated in various laser processing devices including not only a laser drill machine but also a marking machine and the like.

In the above embodiment, the scanner control unit 60 is operated in the first to fifth modes, but the scanner control unit 6 is appropriately combined with the first to fifth modes.
0 can be operated. For example, the characteristic difference between the scanner mirrors M1 and M2 can be corrected in consideration of the temperature of the galvano scanner 20 during the operation in the second and third modes. Specifically, the coefficient to be multiplied by the standard standby time and the offset to be added can be used as a function of time, or a large number of standby time tables prepared according to characteristic differences can be made to include temperature parameters.

[0072]

According to the present invention, the waiting time expected until the driving position of the mirror reaches the target angle and is held after the driving position reaches the settling range is set to the driving angle of the mirror or Since the angle is changed according to the target angle, it is possible to process the laser via or the like with a high throughput and a small error by using the waiting time.

[Brief description of drawings]

FIG. 1 is a block diagram illustrating the structure of a laser drill machine incorporating the device of an embodiment.

FIG. 2 is a block diagram mainly illustrating a circuit configuration of a scanner control unit in FIG.

3 is a block diagram illustrating a circuit configuration of the digital calculator of FIG.

FIG. 4 is a graph illustrating a specific operation of the laser drill machine.

FIG. 5 is a graph explaining a specific operation of the laser drill machine.

FIG. 6 is a diagram illustrating a modified example of a standby time table used to drive a laser drill machine.

FIG. 7 is a diagram showing an example of the relationship between the target angle of the mirror and the waiting time in the second embodiment of the invention.

FIG. 8 is a diagrammatic view showing an example of the relationship between the target angle and drive angle of the mirror and the standby time in the third embodiment.

FIG. 9 is a diagram for explaining conventional problems.

[Explanation of symbols]

10 ... Laser oscillator 20 ... Galvo scanner 21, 22 ... Mirror drive device 24, 25 ... Temperature sensor 30 ... fθ lens 50 ... Stage 60 ... Scanner control unit 60a ... Digital calculator 60d ... Analog circuit 60ad ... Judgment section 60cg ... Command value generator 60me ... memory 70 ... Stage control unit 80 ... Host controller Cr ... Standard characteristics LB ... laser beam M1 ... First scanner mirror M2 ... Second scanner mirror S1, S2 ... Angle sensor Tw ... waiting time table W ... Workpiece

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kenta Tanaka             Sumitomo Heavy Industries, No. 15-15 Kyoritsutsumi, Hiratsuka City, Kanagawa Prefecture             Machine Industry Co., Ltd. Hiratsuka Office F term (reference) 2H045 AB03 AB44 AB48 AB54                 4E068 AF00 CB01 CD11 CE02 DA11

Claims (15)

[Claims] 1. A galvano scanner device for moving an irradiation position of a laser beam by a mirror and a mirror driving device, wherein the driving position of the mirror reaches a predetermined settling range including a target angle by the mirror driving device. A settling range detecting means for detecting, and a waiting time expected to be required until the driving position of the mirror reaches and is held at the target angle after reaching the settling range, depending on the angle of the mirror. A galvano scanner device comprising: a control unit that changes. 2. The galvano scanner device according to claim 1, wherein the standby time is changed according to a drive angle of the mirror. 3. The galvano scanner device according to claim 1, wherein the standby time is changed according to a target angle of the mirror. 4. The galvano scanner device according to claim 1, wherein the standby time is changed according to both a target angle and a drive angle of the mirror. 5. The galvano scanner device according to claim 1, further comprising a standby time table that stores the standby time in association with a processing position. 6. The galvano scanner device according to claim 1, wherein the waiting time is set for each mirror scanning direction. 7. The galvano scanner device according to claim 1, further comprising waveform forming means for forming a command waveform for driving said mirror as digital data. 8. The apparatus according to claim 1, further comprising an output means for outputting a positioning completion signal after waiting until the operation of the mirror is completed based on the waiting time when reaching the setting range. 7. The galvano scanner device according to any one of 7. 9. The standby time is set to include a delay of an operation of a predetermined component that operates in association with the operation of the mirror and at least an operation of a controller that controls the operation of the predetermined component. The galvano scanner device according to any one of claims 1 to 8. 10. A characteristic difference detecting means for obtaining a characteristic difference by comparing a deviation or a current value of a driving position of the mirror by the mirror driving device with a reference characteristic, and based on the characteristic difference obtained by the characteristic difference detecting means. 10. The galvano scanner device according to claim 1, further comprising a correction unit that corrects the standby time. 11. A characteristic difference detecting unit for obtaining a characteristic difference by comparing a deviation or a current value of a driving position of the mirror by the mirror driving device with a reference characteristic, and further comprising a waiting time for a plurality of patterns of the characteristic difference. The galvano scanner device according to any one of claims 1 to 9, wherein the galvano scanner device stores a plurality of standby time tables in accordance with the above. 12. A characteristic difference detecting means for obtaining a characteristic difference by comparing a deviation or a current value of a driving position of the mirror by the mirror driving device with a reference characteristic, wherein the waveform forming means has the characteristic difference detecting means. 8. The galvano scanner device according to claim 7, wherein a command waveform for driving the mirror is corrected according to the characteristic difference obtained by. 13. A temperature sensor for detecting a temperature in the vicinity of the mirror and the mirror driving device, further comprising the standby time stored for each temperature.
2. The galvano scanner device according to any one of 2. 14. A positioning judgment means for judging that the positioning of said mirror is completed when said mirror is narrower than said settling range and enters a predetermined convergence range including the vicinity of said target angle for a predetermined time. The galvano scanner device according to any one of claims 1 to 13, further comprising: 15. A control method of a galvano scanner device for moving an irradiation position of a laser beam by a mirror and a mirror driving device, wherein the target angle is reached after the driving position of the mirror reaches a predetermined settling range including a target angle. The step of determining the waiting time expected to be reached and held according to the angle of the mirror, and that the driving position of the mirror is reached by the mirror driving device within the settling range. A method for controlling a galvano scanner device, comprising: a detecting step; and a step of outputting a positioning completion signal after waiting until the operation of the mirror is completed based on the waiting time.