JP2003086939A - Method of manufacturing multilayered printed wiring board - Google Patents

Method of manufacturing multilayered printed wiring board

Info

Publication number
JP2003086939A
JP2003086939A JP2001275147A JP2001275147A JP2003086939A JP 2003086939 A JP2003086939 A JP 2003086939A JP 2001275147 A JP2001275147 A JP 2001275147A JP 2001275147 A JP2001275147 A JP 2001275147A JP 2003086939 A JP2003086939 A JP 2003086939A
Authority
JP
Japan
Prior art keywords
metal foil
printed wiring
wiring board
multilayer printed
resin composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001275147A
Other languages
Japanese (ja)
Inventor
Yukio Nakamura
幸雄 中村
Toshiyuki Iijima
利行 飯島
Akira Murai
曜 村井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP2001275147A priority Critical patent/JP2003086939A/en
Publication of JP2003086939A publication Critical patent/JP2003086939A/en
Pending legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method by which a multilayered printed wiring board that is improved in thermal reliability can be manufactured by using specific metal foil and a specific thermosetting resin for a metal foil-clad laminated board and prepreg. SOLUTION: A highly reliable multilayered printed wiring board is obtained by using a resin having a glass transition point of >=165 deg.C and a pyrolysis starting temperature of >=345 deg.C as the matrix resin used for forming the metal foil-clad laminated board and prepreg. In addition, metal foil having a thickness of <=0.035 mm and an elongation percentage of >=12% at 180 deg.C is used for the metal foil-clad laminated board.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、電気・電子機器、
通信機器等に使用される多層プリント配線板の製造方法
に関するものである。
TECHNICAL FIELD The present invention relates to an electric / electronic device,
The present invention relates to a method for manufacturing a multilayer printed wiring board used for communication equipment and the like.

【0002】[0002]

【従来の技術】従来、プリント配線板の製造に用いられ
る多層板は、例えばガラスクロス等の基材にエポキシ樹
脂組成物等の熱硬化性樹脂組成物を含浸した後、加熱乾
燥して半硬化させることによってプリプレグを作製し、
このプリプレグを所要枚数重ねると共に、銅箔等の金属
箔をその片側又は両側に配して積層し、加熱加圧して成
形を行うことによって、金属箔張り積層板を作製する。
そして、その金属箔張り積層板の表面の金属箔をエッチ
ングして、表面に導体回路及びプリント配線板を製造す
るとき用いるガイドマークを形成した内層用基板を作製
した後、必要に応じて粗面化処理を行い、次いで、その
導体回路等を形成した内層用基板に、上記と同様にして
作製したプリプレグをその片側又は両側に所要枚数重ね
ると共に、必要に応じて金属箔をその片側又は両側に配
して積層し、加熱加圧して成形することによって製造を
行っている。
2. Description of the Related Art Conventionally, a multilayer board used for producing a printed wiring board is semi-cured by heat-drying after impregnating a base material such as glass cloth with a thermosetting resin composition such as an epoxy resin composition. To make a prepreg,
A required number of the prepregs are stacked, metal foils such as copper foils are arranged on one side or both sides of the prepregs, and the prepregs are laminated by heating and pressing to form a metal foil-clad laminate.
Then, after etching the metal foil on the surface of the metal foil-clad laminate, an inner layer substrate having guide marks used for manufacturing a conductor circuit and a printed wiring board is formed on the surface, and then a rough surface is formed if necessary. Then, on the inner layer substrate on which the conductor circuits and the like are formed, a required number of prepregs produced in the same manner as above are stacked on one side or both sides, and a metal foil is placed on one side or both sides as necessary. It is manufactured by arranging and stacking, heating and pressing and molding.

【0003】また、この多層板を用いてプリント配線板
を製造する方法としては、内層用基板に形成したガイド
マークを用い、このガイド穴を基準にドリルマシン及び
レーザーマシンにて多層板に穴あけをした後、このドリ
ルマシン及びレーザーマシンであけられた穴の壁面にス
ルーホールメッキを施すと共に、外層の金属箔にエッチ
ングを施して外層の導体回路を形成する方法により製造
されている。
As a method of manufacturing a printed wiring board using this multilayer board, a guide mark formed on the inner layer substrate is used, and a hole is drilled in the multilayer board by a drill machine or a laser machine based on this guide hole. After that, the wall surface of the hole formed by the drill machine and the laser machine is plated with through holes, and the outer layer metal foil is etched to form the outer layer conductor circuit.

【0004】これらの多層プリント配線板に用いられた
金属箔張り積層板の作製に用いられる金属箔は、180
℃における伸び率が2〜6%のものを用いることが一般
的である。
The metal foil used for producing the metal foil-clad laminate used for these multilayer printed wiring boards is 180
It is common to use one having an elongation at 2 ° C of 2 to 6%.

【0005】近年のルータ・サーバに代表される通信機
器の高性能化等に伴い、そこに使用される多層プリント
配線板の高密度化、高多層化が進み、高信頼性の多層材
料が要求されている。これまで多層プリント配線板に使
用されているマトリックス樹脂は、一般のFR−4(T
g=約120〜130℃)から中Tg材(Tg=約14
0〜160℃)のものが多く使用されてきた。しかし、
この分野の多層プリント配線板において、IPC−TM
650に規定の、はんだ288℃10秒フロート6サイ
クルの耐熱試験後に異常がないことが、必要特性となっ
てきた。上記のFR−4及び中Tgのマトリックス樹脂
は、高温処理下では熱的に不安定であり、熱分解温度も
低いことから、多層プリント配線板のふくれ(ブリス
タ)やスルーホール壁面のレジンリセッション等の問題
が発生していた。
[0005] With the higher performance of communication equipment typified by routers and servers in recent years, the multi-layered printed wiring boards used therein are becoming higher in density and higher in multi-layer, and highly reliable multi-layer materials are required. Has been done. The matrix resin that has been used in multilayer printed wiring boards so far is generally FR-4 (T
g = about 120 to 130 ° C. to medium Tg material (Tg = about 14)
Those of 0 to 160 ° C.) have been widely used. But,
In multilayer printed wiring boards in this field, IPC-TM
It has become a necessary characteristic that there is no abnormality after a heat resistance test of solder 288 ° C. for 10 seconds float 6 cycles specified in 650. The above-mentioned FR-4 and medium Tg matrix resins are thermally unstable under high temperature treatment and have a low thermal decomposition temperature. Therefore, blister of a multilayer printed wiring board or resin recession of a through hole wall surface, etc. Was having problems.

【0006】多層プリント配線板は、高密度化の方向へ
と進み、多層プリント配線板の配線回路の細線化に伴
い、内層回路板に使用される金属箔は、従来使用されて
いたものよりも薄型化が進んでおり、35μm以下の金
属箔が多く使用されるようになってきた。そのため、I
PC−TM650に規定されるはんだ288℃10秒フ
ロート6サイクルの耐熱試験時において、内層金属箔に
フォイルクラックが発生する問題があった。
[0006] Multilayer printed wiring boards are moving toward higher densities, and as wiring circuits of multilayer printed wiring boards are becoming finer, the metal foil used for the inner layer circuit board is more than that conventionally used. Thinning is advancing, and metal foils having a thickness of 35 μm or less have come to be widely used. Therefore, I
There was a problem that foil cracks occurred in the inner metal foil during the heat resistance test of solder 288 ° C. for 10 seconds float 6 cycles specified in PC-TM650.

【0007】[0007]

【発明が解決しようとする課題】本発明は、上記問題点
を改善するために成されたもので、その目的とするとこ
ろは、内層回路板に使用する金属箔の高温時の伸び、ガ
ラス転移温度(Tg)及び熱分解温度を限定したマトリ
ックス樹脂を用いた金属箔張り積層板やプリプレグを使
用し、耐熱特性・信頼性に優れた多層板が得られる、多
層プリント配線板の製造方法を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and its object is to elongate the metal foil used for the inner layer circuit board at a high temperature and the glass transition. Providing a method for manufacturing a multilayer printed wiring board that uses a metal foil-clad laminate or prepreg that uses a matrix resin with a limited temperature (Tg) and thermal decomposition temperature to obtain a multilayer board with excellent heat resistance and reliability To do.

【0008】[0008]

【課題を解決するための手段】前記課題を解決するため
に検討を重ねた結果、金属箔張り積層板及びプリプレグ
の作製に用いるマトリックス樹脂にはTgが高く、熱分
解温度の高い材料を用いることにより、熱的に信頼性の
向上を図ることができ、かつ金属箔の高温時の伸び率の
最適化により、IPC−TM650に規定される288
℃10秒フロート6サイクルの耐熱試験をクリアできる
範囲を見出し、課題を解決した。
As a result of repeated studies to solve the above-mentioned problems, as a matrix resin used for producing a metal foil-clad laminate and a prepreg, a material having a high Tg and a high thermal decomposition temperature is used. Therefore, it is possible to improve the thermal reliability, and by optimizing the elongation rate of the metal foil at high temperature, 288 defined in IPC-TM650.
The problem was solved by finding the range where the heat resistance test of 6 cycles of float at 10 ° C was cleared.

【0009】請求項1の発明に係る多層プリント配線板
の製造方法は、平織りのガラスクロスに熱硬化性樹脂組
成物を含浸した後、金属箔と積層し、次いで加熱加圧し
て作製する金属箔張り積層板の金属箔をエッチングし
て、表面に導体回路を形成した内層回路基板と、平織り
のガラスクロスに熱硬化性樹脂組成物を含浸して作製す
るプリプレグを積層した後、加熱加圧して製造する多層
板の製造方法において、厚さ35μm以下の金属箔を有
する内層回路板を構成材に含み、厚さ35μm以下の金
属箔の180℃における伸び率が12%以上であり、マ
トリックス樹脂のガラス転移温度(Tg)が165℃
(TMA法)以上であることを特徴とする。
In the method for producing a multilayer printed wiring board according to the present invention, a plain weave glass cloth is impregnated with a thermosetting resin composition, laminated with a metal foil, and then heated and pressed to produce a metal foil. After etching the metal foil of the laminated laminate, an inner layer circuit board having a conductor circuit formed on the surface and a prepreg made by impregnating a plain weave glass cloth with a thermosetting resin composition are laminated, and then heated and pressed. In the method for producing a multilayer board to be produced, an inner layer circuit board having a metal foil having a thickness of 35 μm or less is contained as a constituent material, and the elongation of the metal foil having a thickness of 35 μm or less at 180 ° C. is 12% or more, Glass transition temperature (Tg) is 165 ° C
(TMA method) or more.

【0010】請求項2の発明は、請求項1記載の多層プ
リント配線板の製造方法において、層数が10以上の高
多層板であることを特徴する。
The invention of claim 2 is the method of manufacturing a multilayer printed wiring board according to claim 1, which is a high multilayer board having 10 or more layers.

【0011】請求項3の発明は、請求項1または2記載
の多層プリント配線板の製造方法において、マトリック
ス樹脂の熱分解開始温度が345℃であることを特徴と
する。
According to a third aspect of the present invention, in the method for manufacturing a multilayer printed wiring board according to the first or second aspect, the thermal decomposition start temperature of the matrix resin is 345 ° C.

【0012】[0012]

【発明の実施の形態】本発明に係る多層板は、ガラス転
移温度が165℃(TMA法)以上、かつ熱分解開始温
度が345℃以上の熱硬化性樹脂組成物をガラスクロス
に含浸した後、厚みが35μm以下で、180℃の伸び
率が12%以上の金属箔と積層し、次いで加熱加圧して
作製する金属張り積層板の金属箔は、エッチングして表
面に導体回路を形成した内層回路板と、厚み20〜20
0μmのガラスクロスに熱硬化性樹脂組成物を含浸して
作製するプリプレグとを所定枚数積層した後、加熱加圧
して得られる。(最外層にも180℃の伸び率が12%
以上の金属箔を用いることが望ましい。)
BEST MODE FOR CARRYING OUT THE INVENTION The multilayer board according to the present invention is obtained by impregnating glass cloth with a thermosetting resin composition having a glass transition temperature of 165 ° C. or higher (TMA method) and a thermal decomposition initiation temperature of 345 ° C. or higher. The metal foil of the metal-clad laminate prepared by laminating with a metal foil having a thickness of 35 μm or less and an elongation at 180 ° C. of 12% or more, and then heating and pressurizing the metal foil is an inner layer having a conductor circuit formed on the surface by etching. Circuit board and thickness 20-20
It is obtained by laminating a predetermined number of prepregs prepared by impregnating a 0 μm glass cloth with a thermosetting resin composition, and then heating and pressing. (The outermost layer also has a 12% elongation at 180 ° C.
It is desirable to use the above metal foil. )

【0013】金属箔張り積層板の作製には用いるマトリ
ックス樹脂は、ガラス転移温度が最低165℃(TMA
法)確保されており、熱分解開始温度は345℃以上の
材料であることが重要である。もし、金属箔張り積層板
及びプリプレグの作製に用いるマトリックス樹脂のガラ
ス転移温度が165℃(TMA法)以下である場合、厚
さ方向(Z方向)の膨張量が急激に大きくなるため、ス
ルーホール信頼性が低下する。また、熱分解温度が30
0℃の付近の材料である場合、288℃10秒フロート
のサイクル試験において、樹脂の熱分解が始まることか
ら、レジンリセッション、ふくれの要因となり、信頼性
の低下が問題となる。
The matrix resin used for producing the metal foil-clad laminate has a glass transition temperature of at least 165 ° C. (TMA).
It is important that the material has a thermal decomposition starting temperature of 345 ° C. or higher. If the glass transition temperature of the matrix resin used for producing the metal foil-clad laminate and the prepreg is 165 ° C. or lower (TMA method), the expansion amount in the thickness direction (Z direction) will rapidly increase, resulting in a through hole. Reliability is reduced. Also, the thermal decomposition temperature is 30
In the case of a material near 0 ° C., in a cycle test of 288 ° C. for 10 seconds float, thermal decomposition of the resin starts, which causes resin recession and swelling, and a decrease in reliability becomes a problem.

【0014】なお、厚さ35μm以下の金属箔の180
℃における伸び率が12%以上にすることにより、28
8℃10秒フロートサイクル試験時の積層板及びプリプ
レグの膨張に追従することが可能となり、内層金属箔に
は膨張・収縮による応力が集中しにくい。よってフォイ
ルクラック等を改善することができる。
The metal foil 180 having a thickness of 35 μm or less is used.
By setting the elongation rate at 12 ° C to 12% or more, 28
It becomes possible to follow the expansion of the laminated plate and the prepreg during the 8 ° C. 10 second float cycle test, and the stress due to expansion / contraction does not concentrate on the inner metal foil. Therefore, foil cracks and the like can be improved.

【0015】なお、本発明に用いる金属箔は、厚み35
μm以下の金属箔に限定される。金属箔の厚みが35μ
mを超える場合は、金属箔の伸び率は大きく、抗張力が
強いことから、内層金属箔のフォイルクラックは、発生
しにくい傾向にある。本発明では、Tgが165℃(T
MA法)以上の樹脂を用いることで、厚み35μm以下
の金属箔にした場合の欠点を改善している。また、金属
箔の厚みが35μmを超える場合は、エッチング精度の
問題から微細配線回路の形成が難しくなる。
The metal foil used in the present invention has a thickness of 35.
It is limited to metal foils of μm or less. The thickness of the metal foil is 35μ
When it exceeds m, the elongation rate of the metal foil is large and the tensile strength is strong, so that foil cracks of the inner layer metal foil tend not to easily occur. In the present invention, Tg is 165 ° C. (T
By using the resin of the MA method) or more, the drawbacks when the metal foil having a thickness of 35 μm or less is formed are improved. When the thickness of the metal foil exceeds 35 μm, it becomes difficult to form a fine wiring circuit due to the problem of etching accuracy.

【0016】また、本発明に用いる金属箔は、エッチン
グ精度、インピーダンスの制御の関係から、粗さが4μ
m以下のロープロファイル箔であることが好ましい。ガ
ラスクロスに含浸する熱硬化性樹脂組成物の比率は、成
形時に内層回路板の回路を十分に埋め込み可能な適度な
範囲に製造することができ好ましい。
In addition, the metal foil used in the present invention has a roughness of 4 μm in view of etching accuracy and impedance control.
It is preferably a low profile foil of m or less. The ratio of the thermosetting resin composition with which the glass cloth is impregnated is preferable because it can be manufactured in an appropriate range so that the circuit of the inner layer circuit board can be sufficiently embedded during molding.

【0017】本発明に用いられる熱硬化性樹脂組成物と
しては、金属箔張り積層板の製造に用いる熱硬化性樹脂
組成物及びプリプレグの製造に用いる熱硬化性樹脂組成
物共に、エポキシ樹脂系、フェノール樹脂系、ポリイミ
ド樹脂系、不飽和ポリエステル樹脂系、ポリフェニレン
エーテル樹脂系等の単独、変性物、混合物のように、熱
硬化性樹脂全般を用いることができる。なお、金属箔張
り積層板の製造に用いる熱硬化性樹脂組成物及びプリプ
レグの製造に用いる熱硬化性樹脂組成物の種類は、同じ
でもよく異なっていてもよい。
As the thermosetting resin composition used in the present invention, both the thermosetting resin composition used for producing the metal foil-clad laminate and the thermosetting resin composition used for producing the prepreg are epoxy resin type, Thermosetting resins as a whole can be used, such as phenol resin-based, polyimide resin-based, unsaturated polyester resin-based, polyphenylene ether resin-based, etc. alone, modified products, and mixtures. The types of the thermosetting resin composition used for producing the metal foil-clad laminate and the thermosetting resin composition used for producing the prepreg may be the same or different.

【0018】この熱硬化性樹脂組成物中には、熱硬化性
樹脂を必須として含有し、必要に応じてその熱硬化性樹
脂の硬化剤、硬化促進剤、無機充填材及び溶剤等を含有
することができる。なお、エポキシ樹脂等のように自己
硬化性の低い熱硬化性樹脂は、その樹脂を硬化するため
の硬化剤等も含有することが必要である。
The thermosetting resin composition contains a thermosetting resin as an essential component and, if necessary, a curing agent for the thermosetting resin, a curing accelerator, an inorganic filler and a solvent. be able to. A thermosetting resin having a low self-hardening property such as an epoxy resin needs to contain a curing agent or the like for curing the resin.

【0019】なお、熱硬化性樹脂組成物が、エポキシ樹
脂系の場合、電気特性及び接着性のバランスが良好であ
り好ましい。エポキシ樹脂系の樹脂組成物に含有するエ
ポキシ樹脂としては、例えば、ビスフェノールA型エポ
キシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェ
ノールS型エポキシ樹脂、フェノールノボラック型エポ
キシ樹脂、ビスフェノールAノボラック型エポキシ樹
脂、ビスフェノールFノボラック型エポキシ樹脂、クレ
ゾールノボラック型エポキシ樹脂、ジアミノジフェニル
メタン型エポキシ樹脂、及びこれらのエポキシ樹脂構造
体中の水素原子の一部をハロゲン化することにより、難
燃化したエポキシ樹脂等が挙げられる。また、このエポ
キシ樹脂系の樹脂組成物に含有する硬化剤としては、例
えば、ジシアンジアミド、脂肪族ポリアミド等のアミド
系硬化剤や、アンモニア、トリエチルアミン、ジエチル
アミン等のアミン系硬化剤や、フェノールノボラック樹
脂、クレゾールノボラック樹脂、p−キシレン−ノボラ
ック樹脂等のフェノール系硬化剤や、酸無水物類等が挙
げられる。
When the thermosetting resin composition is an epoxy resin type, it is preferable because it has a good balance of electrical characteristics and adhesiveness. Examples of the epoxy resin contained in the epoxy resin-based resin composition include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, phenol novolac type epoxy resin, bisphenol A novolac type epoxy resin, and bisphenol F. Examples thereof include novolac type epoxy resins, cresol novolac type epoxy resins, diaminodiphenylmethane type epoxy resins, and epoxy resins flame-retarded by halogenating a part of hydrogen atoms in these epoxy resin structures. Examples of the curing agent contained in the epoxy resin-based resin composition include amide-based curing agents such as dicyandiamide and aliphatic polyamide, and amine-based curing agents such as ammonia, triethylamine and diethylamine, and phenol novolac resins. Examples include phenolic curing agents such as cresol novolac resin and p-xylene-novolac resin, and acid anhydrides.

【0020】なお、上記熱硬化性樹脂組成物に含有する
ことができる無機充填材としては、シリカ、炭酸カルシ
ウム、水酸化アルミニウム、タルク等の無機質粉末充填
材や、ガラス繊維、パルプ繊維、合成繊維、セラミック
繊維等の繊維質充填材が挙げられ、また、上記熱硬化性
樹脂組成物に含有することができる溶剤としては、N,
N−ジメチルホルムアミド等のアミド類、エチレングリ
コールモノメチルエーテル等のエーテル類、アセトン、
メチルエチルケトン等のケトン類、メタノール、エタノ
ール等のアルコール類、ベンゼン、トルエン等の芳香族
炭化水素類等が挙げられる。
Examples of the inorganic filler that can be contained in the thermosetting resin composition include silica, calcium carbonate, aluminum hydroxide, talc and other inorganic powder fillers, glass fibers, pulp fibers and synthetic fibers. , Fibrous fillers such as ceramic fibers, and the solvent that can be contained in the thermosetting resin composition is N,
Amides such as N-dimethylformamide, ethers such as ethylene glycol monomethyl ether, acetone,
Examples thereof include ketones such as methyl ethyl ketone, alcohols such as methanol and ethanol, and aromatic hydrocarbons such as benzene and toluene.

【0021】この熱硬化性樹脂組成物をガラスクロスに
含浸する方法としては、特に限定するものではなく、一
般の方法が適用可能である。なお、熱硬化性樹脂組成物
をガラスクロスに含浸した後、必要に応じて加熱乾燥し
ていてもよい。
The method of impregnating the glass cloth with the thermosetting resin composition is not particularly limited, and a general method can be applied. After impregnating the glass cloth with the thermosetting resin composition, it may be dried by heating if necessary.

【0022】本発明に用いられる金属箔としては銅、ア
ルミニウム、真鍮、ニッケル等の単独、合金、複合の金
属箔を用いることができ、金属箔の代わりに金属箔が積
層成形された片面金属張り積層板、両面金属張り積層板
を用いることもできる。なお、この金属箔は、金属箔張
り積層板の作製のみに用いることに限定するものではな
く、内層用基板とプリプレグとを積層したその積層物の
片側又は両側に積層して用いてもよい。この金属箔の厚
みとしては、金属箔張り積層板の作製に用いる場合、
0.003〜0.035mmが一般的であり、内層用基
板とプリプレグとを積層したその積層物の片側又は両側
に積層する場合は、0.003〜0.035mmが一般
的である。
As the metal foil used in the present invention, a single, alloy, or composite metal foil of copper, aluminum, brass, nickel or the like can be used, and a metal foil laminated instead of the metal foil is coated on one side with metal. A laminated board or a double-sided metal-clad laminated board can also be used. The metal foil is not limited to being used only for producing a metal foil-clad laminate, and may be used by laminating it on one side or both sides of the laminate in which the inner layer substrate and the prepreg are laminated. As the thickness of this metal foil, when used in the production of a metal foil-clad laminate,
The thickness is generally 0.003 to 0.035 mm, and when it is laminated on one side or both sides of the laminate in which the inner layer substrate and the prepreg are laminated, the thickness is generally 0.003 to 0.035 mm.

【0023】金属箔張り積層板を製造するときの加熱加
圧する条件、及び内層用基板とプリプレグとを積層した
後の加熱加圧する条件としては、熱硬化性樹脂組成物が
硬化する条件で適宜調整して加熱加圧すればよいが、加
圧の圧力が高いと導体回路の寸法収縮のばらつきが大き
くなる場合があるため、成形性を満足する範囲で、でき
るだけ低圧で加圧することが好ましい。なお、加熱加圧
を300Torr以下の減圧雰囲気下で行うと、成形性
が良好となり好ましい。
The conditions for heating and pressing when producing the metal foil-clad laminate and the conditions for heating and pressing after laminating the inner layer substrate and the prepreg are appropriately adjusted depending on the conditions under which the thermosetting resin composition is cured. It is sufficient to heat and pressurize, but if the pressurizing pressure is high, the dimensional shrinkage of the conductor circuit may vary greatly. Therefore, it is preferable to pressurize as low as possible within the range where the formability is satisfied. It is preferable to heat and pressurize under a reduced pressure atmosphere of 300 Torr or less because the moldability becomes good.

【0024】金属箔張り積層板表面の金属箔をエッチン
グする方法としては、特に限定するものではなく、金属
箔及びそのエッチングに用いるエッチングレジストによ
り、一般の方法が適用可能である。
The method for etching the metal foil on the surface of the metal foil-clad laminate is not particularly limited, and a general method can be applied depending on the metal foil and the etching resist used for the etching.

【0025】[0025]

【実施例】実施例1 熱硬化性樹脂組成物として、下記のエポキシ樹脂2種
類、硬化剤、硬化促進剤及び溶剤よりなるエポキシ樹脂
系樹脂組成物を使用した。 ・エポキシ樹脂1:ビスフェノールAノボラック型エポキシ樹脂 (大日本インキ化学工業株式会社製、エピクロンN868、商品名)50重量部 ・エポキシ樹脂2:ブロム化ビスフェノールA型エポキシ樹脂 (住友化学工業株式会社製、ESB−400、商品名) 50重量部 ・硬化剤:ビスフェノールAノボラック樹脂 (ジャパンエポキシレジン株式会社製、YLH−129、商品名) 40重量部 ・硬化促進剤:1−シアノエチル−2−フェニルイミダゾール 1重量部 ・溶剤:メチルエチルケトン 90重量部
Example 1 As a thermosetting resin composition, an epoxy resin resin composition comprising the following two kinds of epoxy resins, a curing agent, a curing accelerator and a solvent was used.・ Epoxy resin 1: 50 parts by weight of bisphenol A novolac type epoxy resin (Dainippon Ink and Chemicals, Inc., Epicron N868, trade name) ・ Epoxy resin 2: Brominated bisphenol A type epoxy resin (Sumitomo Chemical Co., Ltd., ESB-400, trade name) 50 parts by weight-Curing agent: bisphenol A novolak resin (YLH-129, manufactured by Japan Epoxy Resin Co., Ltd., trade name) 40 parts by weight-Curing accelerator: 1-cyanoethyl-2-phenylimidazole 1 Parts by weight / solvent: 90 parts by weight of methyl ethyl ketone

【0026】この樹脂組成物を、ガラスクロス(#10
80タイプ:重量48g/m2 )に、乾燥後の熱硬化
性樹脂組成物の量が、熱硬化性樹脂組成物及びガラスク
ロスの合計100重量部に対し、62重量部となるよう
に調整して含浸した後、最高温度165℃で乾燥してプ
リプレグを作製した。
This resin composition was mixed with glass cloth (# 10
80 type: weight 48 g / m 2 ) and the amount of the thermosetting resin composition after drying was adjusted to 62 parts by weight based on 100 parts by weight of the total amount of the thermosetting resin composition and the glass cloth. And impregnated with it, and then dried at a maximum temperature of 165 ° C. to prepare a prepreg.

【0027】次いで、得られた所定枚数のプリプレグの
両側に、厚み18μmの銅箔(180℃の伸び率16
%)を配して積層した後、この積層物を金属プレートで
挟み、最高温度180℃、圧力3.0MPaで90分加
熱加圧して成形して、両面銅張り積層板を作製した。
Then, a copper foil having a thickness of 18 μm (elongation at 180 ° C. of 16
%) Was placed and laminated, this laminate was sandwiched between metal plates, and heated and pressed at a maximum temperature of 180 ° C. and a pressure of 3.0 MPa for 90 minutes to form a double-sided copper-clad laminate.

【0028】次いで、得られた両面銅張り積層板の所定
枚数に表面処理を施し、所定枚数のプリプレグを配して
積層した後、この積層物を金属プレートで挟み、最高温
度180℃、圧力2.5MPaで80分加熱加圧して成
形して多層板を作製した。この時のガラス転移温度(T
g)は、174℃(TMA法)であった。また、熱分解
開始温度は、347℃であった。
Next, a predetermined number of the obtained double-sided copper-clad laminates were subjected to surface treatment, a predetermined number of prepregs were arranged and laminated, and the laminates were sandwiched between metal plates, the maximum temperature was 180 ° C., and the pressure was 2 A multilayer board was produced by heating and pressing at 0.5 MPa for 80 minutes and molding. Glass transition temperature (T
g) was 174 ° C. (TMA method). The thermal decomposition starting temperature was 347 ° C.

【0029】実施例2 18μm銅箔(180℃の伸び率20%)を得たこと以
外は、実施例1と同様にして両面銅張り積層板及びプリ
プレグを作製して多層板を得た。
Example 2 A double-sided copper-clad laminate and a prepreg were prepared in the same manner as in Example 1 except that an 18 μm copper foil (elongation at 180 ° C., 20%) was obtained to obtain a multilayer board.

【0030】実施例3 12μm銅箔(180℃の伸び率12%)を得たこと以
外は、実施例1と同様にして両面銅張り積層板及びプリ
プレグを作製して多層板を得た。
Example 3 A double-sided copper-clad laminate and a prepreg were prepared in the same manner as in Example 1 except that a 12 μm copper foil (elongation at 180 ° C., 12%) was obtained to obtain a multilayer board.

【0031】実施例4 12μm銅箔(180℃の伸び率18%)を得たこと以
外は、実施例1と同様にして両面銅張り積層板及びプリ
プレグを作製して多層板を得た。
Example 4 A double-sided copper-clad laminate and a prepreg were prepared in the same manner as in Example 1 except that a 12 μm copper foil (elongation at 180 ° C., 18%) was obtained.

【0032】比較例1 18μm銅箔(180℃の伸び率9%)を得たこと以外
は、実施例1と同様にして両面銅張り積層板及びプリプ
レグを作製して多層板を得た。この時のガラス転移温度
(Tg)は、173℃(TMA法)であった。この時の
熱分解開始温度(Tg)は、346℃であった。
Comparative Example 1 A double-sided copper-clad laminate and a prepreg were prepared in the same manner as in Example 1 except that a 18 μm copper foil (elongation at 180 ° C .: 9%) was obtained to obtain a multilayer board. At this time, the glass transition temperature (Tg) was 173 ° C. (TMA method). The thermal decomposition starting temperature (Tg) at this time was 346 ° C.

【0033】比較例2 他社材の両面銅張り積層板(18μm銅箔:180℃の
伸び率16%)の所定枚数に表面処理を施し、所定枚数
の他社材のプリプレグを配して積層した後、この積層物
を金属プレートで挟み、最高温度180℃、圧力2.5
MPaで80分加熱加圧して成形して多層板を作製し
た。この時のガラス転移温度(Tg)は、163℃(T
MA法)であった。この時の熱分解開始温度(Tg)
は、298℃であった。
Comparative Example 2 After subjecting a predetermined number of double-sided copper-clad laminates (18 μm copper foil: elongation at 180 ° C. 16% of 16%) of another company's material to a surface treatment and arranging and laminating a predetermined number of prepregs of another company's material , Sandwich this laminate between metal plates, maximum temperature 180 ℃, pressure 2.5
A multilayer plate was produced by heating and pressing at 80 MPa for 80 minutes for molding. The glass transition temperature (Tg) at this time is 163 ° C. (Tg)
MA method). Thermal decomposition start temperature (Tg) at this time
Was 298 ° C.

【0034】(評価、結果)実施例1〜4及び比較例1
〜2で得られた多層板について、IPC−TM650に
準拠して、288℃10秒6サイクルのはんだフロート
試験を行った。
(Evaluation, Results) Examples 1 to 4 and Comparative Example 1
About the multilayer board obtained by -2, the solder float test of 288 degreeC 10 second 6 cycle was done based on IPC-TM650.

【0035】結果は表1に示した通り、各実施例1〜4
は、比較例1と比べ、耐フォイルクラック性が向上する
ことが確認された。また、各実施例1〜4は、比較例2
と多層板の構成は変わらないが、はんだによる耐熱性
(レジンリセッション、ふくれ)と、スルーホール信頼
性が向上することが確認された。
The results are shown in Table 1 and are shown in Examples 1 to 4
It was confirmed that, compared with Comparative Example 1, the foil crack resistance was improved. In addition, each of Examples 1 to 4 is a comparative example 2.
It was confirmed that the heat resistance (resin recession, blistering) by soldering and the through-hole reliability were improved, though the structure of the multilayer board remained the same.

【0036】[0036]

【表1】 [Table 1]

【0037】[0037]

【発明の効果】本発明によれば、金属箔張り積層板及び
プリプレグの作製に用いるマトリックス樹脂として、ガ
ラス転移温度が165℃以上、熱分解開始温度が345
℃以上であることと、金属箔張り積層板に使用する金属
箔の厚さは、0.035mm以下で、180℃での伸び
率が12%以上であることを特徴とする材料を適用した
場合、耐熱性、耐フォイルクラック性、信頼性に優れた
多層プリント配線板を得ることができる。
According to the present invention, the glass transition temperature is 165 ° C. or higher and the thermal decomposition starting temperature is 345 as the matrix resin used for producing the metal foil-clad laminate and the prepreg.
In the case of applying a material characterized in that the temperature is ℃ or more, the thickness of the metal foil used for the metal foil-clad laminate is 0.035 mm or less, and the elongation at 180 ° C. is 12% or more. It is possible to obtain a multilayer printed wiring board having excellent heat resistance, foil crack resistance, and reliability.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 村井 曜 茨城県下館市大字小川1500番地 日立化成 工業株式会社下館事業所内 Fターム(参考) 5E346 CC04 CC09 CC10 CC12 CC13 CC32 CC34 CC37 DD12 EE09 HH21    ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor You Murai             Hitachi Chemical, 1500 Ogawa, Shimodate City, Ibaraki Prefecture             Shimodate Office of Industry Co., Ltd. F-term (reference) 5E346 CC04 CC09 CC10 CC12 CC13                       CC32 CC34 CC37 DD12 EE09                       HH21

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】平織りのガラスクロスに熱硬化性樹脂組成
物を含浸した後、金属箔と積層し、次いで加熱加圧して
作製する金属張り積層板の金属箔をエッチングして、表
面に導体回路を形成した内層回路基板と、平織りのガラ
スクロスに熱硬化性樹脂組成物を含浸して作製するプリ
プレグを積層した後、加熱加圧して製造する多層プリン
ト配線板の製造方法において、 厚さ35μm以下の金属箔を有する内層回路板を構成材
に含み、厚さ35μm以下の金属箔の180℃における
伸び率が12%以上であり、マトリックス樹脂のガラス
転移温度(以下Tgと示す。)が165℃(TMA法)
以上であることを特徴とする多層プリント配線板の製造
方法。
1. A metal cloth of a metal-clad laminate prepared by impregnating a plain weave glass cloth with a thermosetting resin composition, laminating it with a metal foil, and then heating and pressurizing the metal foil to etch a conductor circuit on the surface. In the method for producing a multilayer printed wiring board, the inner layer circuit board on which is formed and a prepreg produced by impregnating a plain weave glass cloth with a thermosetting resin composition are laminated, and then heated and pressed to obtain a thickness of 35 μm or less. The inner layer circuit board having the metal foil of No. 3 is included in the constituent materials, the elongation of the metal foil having a thickness of 35 μm or less at 180 ° C. is 12% or more, and the glass transition temperature (hereinafter referred to as Tg) of the matrix resin is 165 ° C. (TMA method)
A method for manufacturing a multilayer printed wiring board having the above.
【請求項2】前記多層プリント配線板の層数が10以上
の高多層板であることを特徴とする請求項1記載の多層
プリント配線板の製造方法。
2. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein the multilayer printed wiring board is a high multilayer board having 10 or more layers.
【請求項3】前記マトリックス樹脂の熱分解開始温度
は、345℃以上であることを特徴とする請求項1また
は2記載の多層プリント配線板の製造方法。
3. The method for producing a multilayer printed wiring board according to claim 1, wherein the thermal decomposition start temperature of the matrix resin is 345 ° C. or higher.
JP2001275147A 2001-09-11 2001-09-11 Method of manufacturing multilayered printed wiring board Pending JP2003086939A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001275147A JP2003086939A (en) 2001-09-11 2001-09-11 Method of manufacturing multilayered printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001275147A JP2003086939A (en) 2001-09-11 2001-09-11 Method of manufacturing multilayered printed wiring board

Publications (1)

Publication Number Publication Date
JP2003086939A true JP2003086939A (en) 2003-03-20

Family

ID=19100064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001275147A Pending JP2003086939A (en) 2001-09-11 2001-09-11 Method of manufacturing multilayered printed wiring board

Country Status (1)

Country Link
JP (1) JP2003086939A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0582928A (en) * 1986-04-16 1993-04-02 Hitachi Ltd Manufacture of multilayered printed circuit board
JPH09293971A (en) * 1996-04-26 1997-11-11 Matsushita Electric Works Ltd Manufacture of multilayer board
JPH10272733A (en) * 1997-03-31 1998-10-13 Hitachi Chem Co Ltd Manufacture of metal-clad laminate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0582928A (en) * 1986-04-16 1993-04-02 Hitachi Ltd Manufacture of multilayered printed circuit board
JPH09293971A (en) * 1996-04-26 1997-11-11 Matsushita Electric Works Ltd Manufacture of multilayer board
JPH10272733A (en) * 1997-03-31 1998-10-13 Hitachi Chem Co Ltd Manufacture of metal-clad laminate

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