JP2003086778A5 - - Google Patents
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- Publication number
- JP2003086778A5 JP2003086778A5 JP2001275283A JP2001275283A JP2003086778A5 JP 2003086778 A5 JP2003086778 A5 JP 2003086778A5 JP 2001275283 A JP2001275283 A JP 2001275283A JP 2001275283 A JP2001275283 A JP 2001275283A JP 2003086778 A5 JP2003086778 A5 JP 2003086778A5
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- film
- photoelectric conversion
- material film
- high refractive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000463 material Substances 0.000 claims description 24
- 238000006243 chemical reaction Methods 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000011229 interlayer Substances 0.000 claims description 12
- 239000010410 layer Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 206010034972 Photosensitivity reaction Diseases 0.000 claims description 6
- 230000036211 photosensitivity Effects 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000012780 transparent material Substances 0.000 claims 4
- 239000010419 fine particle Substances 0.000 claims 2
- 229910052809 inorganic oxide Inorganic materials 0.000 claims 2
- 238000000059 patterning Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001275283A JP2003086778A (ja) | 2001-09-11 | 2001-09-11 | 半導体装置の製造方法及び半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001275283A JP2003086778A (ja) | 2001-09-11 | 2001-09-11 | 半導体装置の製造方法及び半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003086778A JP2003086778A (ja) | 2003-03-20 |
| JP2003086778A5 true JP2003086778A5 (enExample) | 2004-12-16 |
Family
ID=19100170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001275283A Pending JP2003086778A (ja) | 2001-09-11 | 2001-09-11 | 半導体装置の製造方法及び半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003086778A (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4595405B2 (ja) * | 2004-07-02 | 2010-12-08 | ソニー株式会社 | 固体撮像装置及びその製造方法 |
| JP2006156799A (ja) * | 2004-11-30 | 2006-06-15 | Fuji Photo Film Co Ltd | 固体撮像素子及びその製造方法 |
| JP4622526B2 (ja) * | 2005-01-11 | 2011-02-02 | ソニー株式会社 | 固体撮像素子の製造方法 |
| JP2006222270A (ja) * | 2005-02-10 | 2006-08-24 | Sony Corp | 固体撮像素子及び固体撮像素子の製造方法 |
| JP2006269533A (ja) * | 2005-03-22 | 2006-10-05 | Sharp Corp | 固体撮像装置およびその製造方法、電子情報機器 |
| JP4793042B2 (ja) * | 2005-03-24 | 2011-10-12 | ソニー株式会社 | 固体撮像素子及び撮像装置 |
| US7666704B2 (en) | 2005-04-22 | 2010-02-23 | Panasonic Corporation | Solid-state image pickup element, method for manufacturing such solid-state image pickup element and optical waveguide forming device |
| US7968888B2 (en) | 2005-06-08 | 2011-06-28 | Panasonic Corporation | Solid-state image sensor and manufacturing method thereof |
| JP2006344755A (ja) * | 2005-06-08 | 2006-12-21 | Matsushita Electric Ind Co Ltd | 固体撮像装置及びそれを用いたカメラ |
| US7638804B2 (en) | 2006-03-20 | 2009-12-29 | Sony Corporation | Solid-state imaging device and imaging apparatus |
| JP2008042024A (ja) * | 2006-08-08 | 2008-02-21 | Fujifilm Corp | 固体撮像装置 |
| JP5816428B2 (ja) * | 2010-12-24 | 2015-11-18 | 富士フイルム株式会社 | 固体撮像素子のカラーフィルタ用感光性透明組成物、並びに、これを用いた固体撮像素子のカラーフィルタの製造方法、固体撮像素子のカラーフィルタ、及び、固体撮像素子 |
-
2001
- 2001-09-11 JP JP2001275283A patent/JP2003086778A/ja active Pending
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