JP2003080126A - Powder jet method in powder jet processing and apparatus therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the processing efficiency of powder jet processing by uniformizing the concentration of the powder in the powder jet nozzle using an oblong nozzle. SOLUTION: A powder supply belt 16 having recessed parts such as grooves, holes or the like provided to the outer periphery thereof is arranged in close vicinity to the powder jet nozzle 20. A powder bed 12 having a powder charged therein so as to come into contact with a part of the outer periphery of the powder supply belt 16 and the flow of the gas flowing to the powder jet nozzle are provided to a part of the outer periphery of the powder supply belt 16 and the powder supply belt 16 is moved in one direction to take out the powder charged in the recessed parts 11 of the powder supply belt 16 by the flow of the gas flowing to a part of the outer periphery of the powder supply belt and the powder is ejected from the powder jet nozzle to perform powder jet processing good in processing efficiency in jet concentration optimum to jet processing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION A powder injection processing device for performing various surface treatments by spraying various powders onto a processing material using the powder injection device is used. For example, alumina or silicon carbide. Dry etching processing that cuts the workpiece and forms holes, grooves, etc. by spraying powder with high hardness to silicon wafer, glass, ceramic, compound semiconductor, metal, etc. Spraying powder such as glass beads or high-speed steel beads onto metal causes the powder to collide with the work piece. Impact heat increases the hardness of the metal surface. Surface heat treatment by powder on the metal surface, metal powder, When powder such as thermoplastic resin powder is used, the surface of the powder is melted by the collision heat when the powder collides with the workpiece, and the thin film of these materials is applied to the glass and Various processes such as powder deposition process that attaches to the surface of the workpiece such as ceramics and resin, and cleaning process that removes dirt attached to the surface of the workpiece by spraying powder on the surface of the workpiece are performed. .

[0002] The present invention is a powder injection method using a powder injection processing device for performing uniform processing by efficiently and stably injecting powder in these processes using a powder injection device. And a powder injection device.

[0003]

2. Description of the Related Art Conventionally, as a method of processing using a powder jet processing apparatus, for example, an abrasive material is used as powder, and the powder is blown onto a processed substrate by using high pressure air to form partition walls of a plasma display. Sand blasting is performed to perform cutting and other processing such as polishing of the surface of a silicon wafer, and an apparatus as shown in FIG. 13 is used as a powder injection processing apparatus used for these sand blasting.

The powder and the high-pressure gas 1 together with the powder supply device 1
It is supplied to the powder supply pipe 28 such as a powder supply hose from 0,
A horizontally long powder injection nozzle 20 attached to the powder supply pipe 28 mixes and injects an abrasive and a high-pressure gas onto the processed substrate 7.

The powder sprayed from the powder spray nozzle 20 is supplied from the hopper 33 to the main conduit 3 by the negative pressure of the dust collector 35.
4, the powder is classified into a classifier 32 such as a cyclone, and only the powder that can be used for processing enters the abrasive tank 21 and is again supplied from the powder supply device 10 to the powder injection nozzle 20 via the powder supply pipe 28. Is jetted.

Dust from the processed substrate and dust that has been crushed and cannot be used are collected in a dust collector 35.

As described above, the powder is circulated and jetted from the powder jet nozzle 20 so that the powder can be continuously processed.

The powder jet nozzle 20 uses a horizontally long nozzle in order to provide uniform processing. The substrate to be processed is slowly fed from the left side to the right side in the main body of the powder jet processing apparatus, and the nozzle is operated at high speed. Move back and forth to process the substrate.

In a powder jet processing apparatus currently used for forming barrier ribs of a plasma display, the moving speed of a nozzle is about 20 m per minute, and the moving speed of a processed substrate is about 200 mm to 400 mm per minute. is there.

[0010]

In powder injection processing in which powder is injected by high-pressure gas for processing, when the amount of powder is large relative to the amount of high-pressure gas, powder is injected onto the injected powder. The phenomenon that the body is ejected causes the processing efficiency to decrease, and when the amount of powder decreases, the number of particles corresponding to the processing substrate 7 decreases and the processing efficiency similarly decreases.

In order to perform efficient powder jet processing,
It is necessary to make the powder concentration injected from the powder injection nozzle 20 almost the same powder concentration at any place in the nozzle.

In the conventional powder jetting apparatus, the powder jetting nozzle 2 is used by using the powder feeding pipe 28 from the powder feeding apparatus 10.
Since the powder is supplied to 0, when a horizontally long nozzle is used, the powder concentration near the center of the nozzle becomes thicker and becomes more distant from the center, the powder concentration becomes almost the same in all the nozzles. Therefore, there is a problem that efficient processing cannot be performed.

Further, since the powder is supplied from the powder supply device 10 to the powder supply nozzle 20 via the powder supply pipe 28, the powder is stably supplied from the powder supply device to the powder supply pipe. Even if the powder flow fluctuates inside the powder supply pipe, the powder is not stably supplied into the nozzle when the powder is injected from the powder injection nozzle, and uniform processing cannot be performed. There was a problem.

[0014]

As means for solving the above problems, as shown in FIG. 1, the powder 5 is placed in the recess 11 of the powder supply belt 16 in which recesses such as grooves and holes are formed on the circumference of the belt. After the loading, the powder loaded in the recess 11 of the powder feeding belt is taken out by the flow of the gas, and the cross section of the powder jetting portion of the powder jetting nozzle which is close to the outer periphery of the powder feeding belt 16 has a short long side. Powder is directly jetted from the powder jet nozzle 20 having a lateral cross section which is 5 times or more the side, or as shown in FIG. By bringing the injection port of the high-pressure gas injection nozzle close to the powder supply belt into the high-pressure gas injected by the abrasive material loaded on the powder supply belt, the concentration distribution of the powder to be injected is made uniform and processed. Performs efficient and stable powder injection processing So as to.

The powder layer 12 in which powder is loaded so as to come into contact with a part of the outer periphery of the powder supply belt 16 having a recess such as a groove or a hole on the outer periphery, and the flow of gas due to the pressure difference of the gas The powder supply belt 16 is moved in one direction by rotating the belt drive pulley 45 by the driving force of a motor or the like, by providing a powder takeout section 19 for taking out the powder loaded in the powder supply belt concave portion 11. The powder is continuously loaded in the concave portion 11 formed in the powder supply belt in the layer 12, and the powder is continuously taken out from the powder taking-out section 19.
The cross section of the powder jetting portion of the powder jetting nozzle, which is close to the outer circumference of the powder feed belt 16 and is parallel to the powder jetting nozzle, jets the powder from the laterally long powder jetting nozzle 20 whose long side is at least 5 times as long as the short side. .

Powder supply belt 16 and powder injection nozzle 20
Set the distance to 200 mm or less, preferably 100
When the thickness is less than or equal to millimeters, the powder is directly supplied from the powder supply belt 16 to the powder injection nozzle 20, so that stable powder injection is possible.

As a method for producing a gas flow formed by a gas pressure difference, as shown in FIG. 6, the powder injection device 26 and the powder supply pressure tank 22 are sealed except for the powder injection nozzle 20 and the high pressure gas supply section 4. Then, by introducing the high-pressure gas 1 into the powder injection device 26, the inside of the powder injection device 26 is set to a higher pressure than the atmospheric pressure, and the powder introduction part 37 of the powder injection nozzle 20 is set to the powder injection device. Is installed inside and the powder injection unit 38 of the powder injection nozzle 20 is installed in an atmosphere of atmospheric pressure or less to create a gas flow from the powder supply unit of the powder injection device 26 to the powder injection nozzle 20. Method, as shown in FIG. 3, the inside of the processing chamber 31 is set to a negative pressure compared to atmospheric pressure by a vacuum pump or the like, the inside of the powder supply device is set to an atmosphere of atmospheric pressure or higher, and the powder injection port 38 of the injection nozzle 20 is set. Installed in the processing room, powder injection nozzle A method for producing a flow of gas flowing from the inside of the powder ejecting apparatus to the powder ejecting nozzle by installing the powder introducing unit 37 of No. 0 inside the powder ejecting apparatus 26, as shown in FIG. The high pressure gas injection nozzle 25 is installed, and the high pressure gas injection nozzle 2 is connected to the abrasive material injection nozzle 20.
There is a method of creating a flow of gas flowing from the powder supply portion in the powder injection device 26 to the powder injection nozzle 20 by the negative pressure generated by injecting the high pressure gas 1 from 5.

The powder in the powder supply belt 16 is sprayed with the powder jet nozzle 20 by the gas flow generated by these methods.
The amount of powder to be supplied to the nozzle can be changed by changing the size and depth of the recess 11 of the powder supply belt. The size of the recess in the powder supply belt is reduced by decreasing the size of the recess in the powder supply belt or decreasing the depth to reduce the amount of powder supply. It is possible to increase the powder supply amount by increasing or increasing the depth to uniformly adjust the powder concentration in the nozzle, which enables efficient powder injection processing.

Further, in the horizontally long powder jet nozzle 20, the nozzle gap is set uniformly from end to end, and the depth and size of the concave portion 11 of the powder supply belt are also set to be uniform. Since it becomes possible to make the concentration of powder and the amount of gas in the inside thereof uniform, the length of the spraying portion of the powder spraying nozzle 20 and the width of the powder supply belt 16 in which the concave portion for loading the abrasive is formed are set. By setting the width to be larger than the width of the processed substrate 7, it is possible to uniformly and efficiently process the processed substrate only by moving either the processed substrate 7 or the powder injection device 26.

Since the effective injection density changes depending on the particle size and material of the powder and the purpose of processing, it is necessary to change the density of the powder to be injected, but the injection amount of the powder injected from the powder injection nozzle 20. When changing, the rotation speed of the belt drive pulley can be freely changed using an inverter or the like to change the moving speed of the abrasive material supply belt, and it is possible to adjust the injection amount optimum for processing.

As a method for injecting powder, a high-pressure gas having a jet port having a horizontally long cross section in which the long side is 5 times or more of the short side is used without using the powder jet nozzle as shown in FIGS. 4 and 5. High pressure gas is injected from the injection nozzle, and the high pressure gas injection nozzle and the abrasive material supply belt are brought close to each other by 20 mm or less, so that the high pressure gas is injected to take in the surrounding gas. The powder is injected into the high pressure gas sprayed into the recess of the abrasive material supply belt, and the belt drive pulley rotates to move the abrasive material supply belt at a constant speed to uniformly supply the powder material into the high pressure gas. In addition, it is possible to perform stable powder injection processing.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a powder injection method and apparatus in powder injection processing of the present invention will be described below with reference to the drawings.

In the powder jet processing apparatus of FIGS. 8 and 10, the powder is directed from the powder jet nozzle 38 of the powder jet nozzle toward the processed substrate 7 in the processing chamber 30 by the gas emitted from the powder jet nozzle 20. The body is jetted. The powder injection device 26 does not have to be inside the processing chamber 30, and may be outside the processing chamber to inject powder from the powder injection nozzle 20 into the processing chamber, or may be installed inside the processing chamber 30. Alternatively, only the powder injection port 38 of the injection injection nozzle 20 may be installed in the processing chamber.

The powder sprayed from the powder spray nozzle 20 is sprayed on the processed substrate 7, passes through the main body conduit 34 by the negative pressure of the dust collector 35, and is classified by a dust collector 35 and the dust collecting conduit 39 such as a cyclone. Enter machine 32.

The classifier 32 separates the powder that can be used again for processing, the powder that cannot be crushed and cannot be used and the dust that scrapes the processed substrate, and only the powder that can be used for processing is transferred from the classifier 32 to the powder tank 21. The powder that enters, is crushed and cannot be used, and the dust produced by scraping the processed substrate is collected by the dust collector 35 and discarded. The powder contained in the powder tank 21 is again injected into the powder injection device 2
6, the powder 5 is supplied from the powder supply belt 16 to the powder injection nozzle 20, the powder is injected from the powder injection nozzle 26, and the powder injection processing is performed.

As a method of spraying powder, as shown in FIGS.
As shown in FIG. 3, the inside of the powder injecting device 26 is pressurized with the high-pressure gas 1, and the powder is injected from the injection nozzle 20 into the atmosphere below atmospheric pressure. As shown in FIG. A method of injecting powder into the processing chamber in a negative pressure state by bringing the interior of the powder injecting apparatus 26 into atmospheric pressure or an atmosphere of atmospheric pressure or higher in a pressure state, as shown in FIG.
The high pressure gas injection nozzle 25 is installed in the powder injection nozzle 6, and the negative pressure generated by injecting the high pressure gas from the high pressure gas injection nozzle 25 into the powder injection nozzle 20 causes the powder supply belt 16 to transfer to the powder injection nozzle 20. There is a method of injecting powder from the powder injection nozzle 20 by the high pressure gas 1 from the high pressure gas injection nozzle 25, and in the method of making the inside of the powder injection device 26 pressurized by the high pressure gas 1, Body injection device 26
In order to hold the inside of the powder injection device 26 in a sealed structure, only the powder injection part 38 of the powder injection nozzle 20 is open to the outside air. In order to supply the powder to the powder supply device 10 while holding the powder supply device, a powder supply pressure tank 22 that is connected to the powder injection device 26 by a high pressure gas conduit 23 is provided above the powder injection device 26. , Powder tank 21 and powder supply pressure tank 2
A powder supply valve 24 capable of holding the pressure of the powder supply pressure tank is provided between the two.

While the interior of the powder injection device 26 is not under pressure, the powder supply valve 24 is opened to transfer the powder to the powder tank 2.
1 to the powder supply pressure tank 22 and the powder layer of the powder injection device, and when powder is injected from the powder injection nozzle 20, the powder supply valve 24 is closed and the powder injection device 26 The pressure can be maintained, and when the powder is exhausted in the powder supply pressure tank 22, the injection is stopped and the powder injection device 2
The powder supply valve 24 is opened so that the inside of the container 6 is at atmospheric pressure, and the powder is supplied from the powder tank 21 to the powder supply pressure tank 22.

By arranging two powder supply valves 24 in series and providing another powder supply tank 22 between the powder supply valves 24, the inside of the powder injection device 26 is pressurized even during the powder supply. The state can be maintained, and the powder can be continuously jetted from the powder jet nozzle 20 without stopping the jet from the powder jet nozzle 20.

A method of making a negative pressure in the processing chamber 31 by a vacuum pump or the like, a method of forming a negative pressure by the high pressure gas 1 injected from the high pressure gas injection nozzle 25 and supplying powder, and an injection from the high pressure gas injection nozzle. In the method of supplying powder into the high pressure gas and injecting the powder, it is not necessary to maintain the pressure inside the powder injection device 26, so that the powder supply pressure tank 21 and the powder supply valve 24 are not used. The powder is directly supplied from the body tank to the powder layer in the powder injection device 26.

Inside the powder injection device 26, there is a powder supply section and a powder injection nozzle 20, and in the powder supply section there is a powder supply belt 16 having recesses 11 such as grooves and holes formed on the surface of the belt. is there.

The concave portion 11 of the powder supply belt is, for example, a V-shaped groove formed on the belt at a constant interval substantially parallel to the belt traveling direction, and the V-shaped groove is substantially vertical to the belt traveling direction. Anything such as one formed on the circumference at intervals, one formed with a large number of circular holes, one formed with a large number of elliptical holes, or the like, has a recessed portion recessed with respect to the outer periphery of the belt, in which powder is contained. It should be loaded.

The powder layer 12 is provided on a part of the outer circumference of the powder supply belt 16, and the belt drive pulley 45 is rotated by the driving force of a motor or the like to move the powder supply belt in one direction to supply the powder. The powder is loaded into the recess 11 of the belt, the powder 5 that has entered the recess 11 of the powder supply belt is taken out, and the powder is jetted from the powder jet nozzle 20.

As a method of supplying powder to the powder supply belt 16, the powder layer 12 is above the powder supply belt 16 as shown in FIGS. 6 and 7, and the powder is supplied from above. 16
And the powder layer 12 is below the powder supply belt 16 as shown in FIGS. 10 and 11, and the lower part of the powder supply belt 16 is buried in the powder layer 12 There is a method of lifting with the concave portion 11 of the powder supply belt.

When the powder in the powder jetting device 26 is pressurized and jetted from the powder jetting nozzle 20, the powder jetting device 2
When the gas pressure in 6 rises, the pressure in the powder injection device 26 is released and the injection from the powder injection nozzle 20 stops, the gas between the powders in the powder injection device 26 expands Occurs.

Therefore, as shown in FIGS. 10 and 11, the powder layer 1
When 2 is below the powder supply belt 16, the difference between the powder level in the powder supply pressure tank 22 and the powder level in the powder supply belt portion is likely to change, and the powder in the powder supply belt portion is easily changed. When the level of the body surface changes, the amount of powder supplied to the powder supply belt 16 changes, and stable injection is not performed.
A powder level holding portion 27 is provided within 5 mm from the outer circumference of the powder supply belt so that the powder surface level of the powder layer 12 in contact with the powder supply belt 16 does not change.

10 and 11 show a case where a part of the case of the powder injection device is used as the powder level holding section 27.

When the powder layer 12 is above the powder supply belt 16 as shown in FIG. 6, the amount of powder contacting the powder supply belt 16 does not change even if the pressure in the powder injection device 26 changes. Since there is no powder level holding part, it is not necessary to provide a powder level holding part.

As a method of supplying the powder loaded in the recess 11 on the surface of the powder supply belt to the powder injection nozzle 20, FIG.
As shown in FIG. 0 and FIG. 11, the powder introduction part 37 of the powder injection nozzle 20 is brought close to the powder supply belt 16 within 5 mm, and the atmosphere inside the powder injection device 26 and the vicinity of the powder injection port 38 of the injection nozzle. And the powder introduction part 37 of the powder injection nozzle 20 formed by the gas flow from the high-pressure gas layer 17 in the powder injection device 26 to the powder injection nozzle 20 due to the pressure difference between A method of ejecting the powder 5 loaded in the recess 11 of the powder supply belt by the flow of the gas flowing between the powder supply belt 16 and injecting the powder from the powder injection nozzle 20 and the powder as shown in FIG. A gap adjusting plate 18 is installed parallel to the outer periphery of the supply belt 16, and the gap adjusting plate 18 and the powder supply belt 16 are separated by the pressure difference between the inside of the powder injection device 26 and the atmosphere around the powder injection port 38 of the injection nozzle. Flow through the powder take-out section 19 to be formed. By the flow of the powder feed belt outer periphery parallel flowing gas that, the powder 5 powder feed belt recesses 11
There is a method of ejecting from the powder ejection nozzle 20.

Powder is supplied into the high-pressure gas jetted from the high-pressure gas jet nozzle without using the abrasive jet nozzle.
As a method of performing powder injection processing, powder is supplied from a powder supply device 10 connected to a powder supply tank 21 as shown in FIG. 12, and the powder supply device 10 supplies a powder supply belt 16 and a powder supply device. It consists of a belt driving pulley for driving the belt and the powder layer 12 provided so as to contact a part of the circumference of the powder supply belt 16 and is within 20 mm, preferably within 10 mm of the outer circumference of the powder supply belt 16. Then, a high pressure gas injection nozzle is installed.

When the high-pressure gas is injected from the high-pressure gas injection nozzle 25, a flow of the high-pressure gas causes a gas flow to take in the gas around the high-pressure gas.

When the powder supply belt 16 is installed near the high pressure gas injection port 23 of the high pressure gas injection nozzle 25,
The powder in the powder supply belt can be taken into the high-pressure gas by the gas flow, and the high-pressure gas injection nozzle 25
The powder is sprayed by the high-pressure gas sprayed from, and the powder can be sprayed on the base material.

In order to supply the powder into the high-pressure gas, the pressure of the high-pressure gas injected from the high-pressure gas injection nozzle 25 should be 0.05 MPa or more, preferably 0.1 MPa or more. .

The powder supply unit may be installed on one side of the high pressure gas injection nozzle 25 as shown in FIG. 12, or may be installed on both sides of the high pressure gas injection nozzle 26. It is desirable to install on both sides when the supply of water increases.

The powder supply belt 16 used for these powder jetting processes can adjust the jetting amount of the powder jetted from the powder jetting nozzle 20 by adjusting the number of rotations by using an inverter or the like. Becomes

In order to fill the powder supply belt recess 11 with the powder from the powder layer 12, the powder supply tank 21 and the powder supply apparatus 10 are vibrated by the vibrator 36 or the like to cause the recess 11 of the powder supply belt to move. It is desirable to make it easier for powder to enter.

[0046]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments of the powder injection method and apparatus in the powder injection processing apparatus of the present invention described above will be described below with reference to the drawings.

[Embodiment 1] An example of the powder injection device 26 in which the powder layer 12 in the powder injection device 26 is located above the powder supply belt 16 in the device for pressurizing and injecting the powder injection device 26. Will be described with reference to FIGS. 6 and 7.

The powder supply valve 24 is opened, and the powder 5 is supplied from the powder tank 21 into the powder supply pressure tank 22 so as to come into contact with a part of the circumference of the powder supply belt 16. The powder layer 12 is arranged so that the powder is supplied from above the supply belt 16, and the powder 5 is supplied to the powder layer 12.

The vibrator 36 oscillates the powder supply pressure tank 22 and the powder injection device 26, and the powder layer 12
With this, the powder easily enters the recess 11 formed on the outer circumference of the powder supply belt.

A high pressure gas layer 17 is provided so as to contact a part of the outer circumference of the powder supply belt 16, and the high pressure gas layer 17 and the powder supply pressure tank 22 have the same pressure so that the high pressure gas conduit 2
Connect at 3.

A gap adjusting plate 18 is provided in a conductive portion between the high pressure gas layer 17 and the powder injection nozzle 20 in parallel with the outer circumference of the powder supply belt 16.
Is installed to adjust the flow speed of the gas flowing in parallel with the outer circumference of the powder supply belt 16.

The powder supply valve 24 is closed, the high pressure gas 1 is supplied from the high pressure gas supply port 4, and the high pressure gas layer 17 is connected to the high pressure gas layer 17 by the high pressure gas conduit 23. The inside of 22 is pressurized.

The powder injection port 38 of the powder injection nozzle 20 is inside the processing chamber, and the inside of the processing chamber is at atmospheric pressure or less due to the negative pressure of the dust collector 35, and the high pressure gas layer 17 has the high pressure gas 1 By introducing and pressurizing the high pressure gas layer 17, a high pressure gas flowing from the high pressure gas layer 17 to the powder injection nozzle 20 through the powder take-out portion 19 formed in the gap between the gap adjusting plate 18 and the powder supply belt 16 can be generated.

When the belt driving pulley 45 is rotated by a motor, the powder supply belt moves in one direction, and the powder is loaded from the powder layer 12 into the recess 11 on the powder supply belt. The powder 5 loaded in the powder injection belt recess 11 is taken out by the flow of the high-pressure gas flowing through 19, and the powder is injected from the powder injection nozzle 20 onto the processed substrate 7 in the processing chamber by riding on the flow of the high-pressure gas. It

The width of the powder supply belt is 260 mm, and the recesses in the powder supply belt are continuously provided with vertical grooves of 1.5 mm in parallel with the length direction of the belt of the powder supply belt within a width of 240 mm. The formed powder was used, and the cross section of the powder injection nozzle had a longitudinal direction of 240 mm and a nozzle gap of 0.5 mm.

Alumina particles having an average particle diameter of 8 μm were used as the powder, and the pressure of the high pressure gas layer in the powder injection device was 0.2 MP.
Set to a, use a photosensitive dry film for sandblasting made by Nippon Synthetic Chemical Industry for masking, fix the powder injection device, and move the glass substrate of 200 mm square and 0.45 mm thick to the left and right. Through holes having a diameter of 0.5 mm were formed at a pitch of 10 mm on the glass substrate.

[Embodiment 2] An example of a powder injection device in which the powder layer 12 inside the powder injection device 26 is positioned below the powder supply belt 16 by pressurizing the inside of the powder injection device 26 is shown in FIG. This will be described with reference to FIG.

The powder layer 12 of the powder injection device 26 is installed so as to be positioned below the powder supply belt 16, and the powder injection nozzle is provided above the powder supply belt 16 and close to the powder supply belt 16. 20 powder introduction parts 37 are installed.

The concave portion 11 of the powder supply belt has a vertical groove formed on the outer circumference of the belt so that the powder can be loaded inside the powder supply belt.

In order to prevent the powder level in the powder injection device 26 from changing due to the fluidization of the powder due to the expansion phenomenon of the gas in the powder due to the fluctuation of the pressure in the powder injection device 26, the powder supply device. The powder level holding part 27 is installed within 5 mm from the outer circumference of the powder supply belt 16 on the upper part of the powder level surface of No. 26. In the present embodiment, the powder level holding part 27 has the outer diameter of 200 mm. The powder level holding part 27 having a thickness of 30 mm was installed at a height of 30 mm above the center of the powder supply belt 16 so as to have a gap of 1 mm from the outer circumference of the supply belt 16.

An electrostatic capacity type level sensor 42 for detecting powder is installed in the powder supply pressure tank 22. The electrostatic capacity level sensor is a sensor 10 seconds or more after the powder supply valve 24 is opened. The sensor does not work while the powder supply device is closed, and the sensor operates only when the powder is supplied to the powder supply pressure tank 22 after processing. When the sensor becomes low and the sensor no longer detects the powder, the lamp will notify to supply the powder.

A vibrator 36 is attached to the powder injecting device, and the powder injecting device 26 and the powder supply pressure tank 22 vibrate during processing, so that powder is supplied to the powder injecting device 26 and the powder injecting device. The powder injection nozzle 20 is configured to facilitate the supply to the belt recess 11 and to change the rotation of the belt drive pulley 45 for moving the powder supply belt 16 by the inverter by directly connecting the motor to the belt drive pulley 45. The amount of powder supplied to the can be set.

Powder injection device 26 and powder supply pressure tank 2
2 is connected by a high-pressure gas conduit 23 so that the powder supply pressure tank 22 and the powder injection device 26 have the same pressure.

The powder supply valve 24 is opened to supply the powder to the processing chamber 30, and the powder enters the powder tank 21 from the cyclone 32 and passes through the powder supply pressure tank 22 and the powder layer inside the powder injection device. 12, the powder level is loaded in the lower part of the powder level holding portion, and the powder is processed in the chamber 3 until the electrostatic level sensor 42 in the powder supply pressure tank 22 is hidden.
Supplied to 0.

Using the vacuum pump, the processed substrate 7 is sucked onto the substrate suction plate 8 and the processed substrate 7 is set in the processing chamber 30.

The powder supply valve 24 is closed and the high pressure gas supply port 4
The high-pressure gas 1 is supplied to the inside of the powder injection device 26 and the powder supply pressure tank 22, and the vibrator 36 vibrates the powder injection device 26 and the powder supply pressure tank 22 to rotate the belt drive pulley to rotate the powder. Body supply belt 16
Move in one direction.

The high pressure gas supplied to the high pressure gas layer 17 of the powder injecting device 26 causes the high pressure gas layer to be in a pressurized state, and the powder injecting port 38 of the powder injecting nozzle in the processing chamber is enlarged by the dust collector 35. Since the negative pressure is set to be lower than the atmospheric pressure, the high pressure gas can flow from the high pressure gas layer 17 inside the powder injecting device 26 to the powder injecting nozzle 20, and when the powder injecting nozzle 20 is brought close to the powder supply belt 16, A flow of high-pressure gas is generated between the powder supply belt 16 and the powder introduction portion 37 of the powder injection nozzle, and the powder 5 loaded in the powder supply belt concave portion 11 in the powder layer 12 becomes a high-pressure gas. The powder is taken out by the flow, jetted from the powder jet nozzle 20 and jetted to the processed substrate 7 to perform the powder jet processing.

In this embodiment, the powder injection nozzle has a cross-sectional length of 150 mm and a gap of 0.5 mm, and the width of the powder supply belt is 170 mm and the width of the groove portion therein. Was set to be 150 mm.

The gap between the injection nozzle and the injection supply belt is set to 1 mm, and the pressure in the powder injection device during powder injection is 0.
It was set to 05 MPa.

The oxide on the surface of the silicon wafer was removed by using alumina powder having an average particle diameter of 6 μm as the powder.

[Third Embodiment] Referring to FIG. 9, the powder supply belt concave portion 1 is formed by the negative pressure generated by injecting the high pressure gas 1 from the high pressure gas injection nozzle 25 to the powder injection nozzle 20.
An embodiment will be described in which the powder is taken out of No. 1 and the powder is supplied to the powder injection nozzle 20 and the powder is sprayed onto the processed substrate 7 by the high pressure gas from the high pressure gas injection nozzle 25.

A powder supply belt 16 having a recess formed on the outer circumference of the belt inside the powder injection device 26, a powder layer 12 loaded with powder so as to contact a part of the outer circumference of the powder supply belt, and the atmospheric pressure. The connected atmospheric pressure layer 14 is installed, and the high pressure gas supply nozzle 25 is installed so as to inject high pressure gas to the powder injection nozzle 20.

Gap adjusting plate 1 parallel to the outer circumference of the powder supply belt
8 is provided to form a gas flow in the gap between the powder supply belt 16 and the gap adjusting plate 18, and to take out the powder 5 loaded in the recess 11 of the powder supply belt.
9 is provided.

The atmospheric pressure layer 14 and the powder jet nozzle 20 are connected by the powder take-out portion 19, and when the high pressure gas 1 is jetted from the high pressure gas jet nozzle 25 to the powder jet nozzle 20, a negative pressure is generated, A gas flow that flows from the atmospheric pressure layer 14 to the powder injection nozzle 20 through the powder ejection portion 19 is generated.

A powder tank 21 is provided above the powder injection device, and a vibrator is attached to the powder tank 21. If the powder has poor fluidity, the powder layer 12 and the concave portion 11 of the powder supply belt are filled with the powder. The powder is supplied to the powder layer 12 by applying vibration so that the body can be easily loaded.

When the belt driving roller 45 in the powder jetting device 26 rotates, the powder supply belt moves in one direction, and the powder 5 is loaded in the powder supply belt recess 11.
The powder 5 loaded in the concave portion 11 of the powder supply belt is taken out by the gas flow of the powder take-out portion 19, and the powder is made to flow to the powder jet nozzle 20 by the flow of the gas flowing from the atmospheric pressure layer 14 to the powder jet nozzle 20. Supply and high pressure gas injection nozzle 25
The powder is jetted from the powder jet nozzle 20 to the processed substrate 7 by the high pressure gas 1 jetted from.

A pitch of 1.
A plurality of 5 mm V-grooves are continuously formed in the length direction of the belt, and a pressure of 0.
High-pressure air of 5 MPa was jetted to a powder jet nozzle having a gap of 2 mm, and the powder was jetted from the powder jet nozzle onto a processed substrate to perform powder jet processing.

The sprayed powder enters the cyclone from the processing chamber 30 and is classified. Only usable powder enters the powder tank 21 below the cyclone 32 and is again supplied to the powder layer 12 and sprayed from the powder spray nozzle 20. The spraying process was continuously performed, and the powder that was crushed and could not be used and the dust that scraped the processing material were collected in the dust collector 35.

As the powder used, glass beads having an average particle size of 30 μm were used, and the powder was sprayed onto a plate of high-speed steel of material SKH-9 to heat-treat the surface of the material by the collision heat when the powder hits the surface of the material. The hardness was increased.

The material used is a cylinder of φ30 mm, the length of the injection port of the high-pressure gas injection nozzle and the length of the injection part of the powder injection nozzle are both set to 50 mm, and the powder supply belt is used. The length of the groove part was set to 50 mm.

[Embodiment 4] An example of a powder injection device 26 for injecting powder from atmospheric pressure to negative pressure will be described with reference to FIG.

The processing chamber is set to a negative pressure by a vacuum pump,
The powder injection port 38 of the powder injection nozzle 20 is installed in the processing chamber 30.

Inside the powder injecting device 26 is a powder supply belt 16 having a recess on the outer periphery of the belt. The powder supply belt 16 is rotated in one direction by the belt driving roller rotated by the driving force of a motor. Moving.

The powder layer 12 and the atmospheric pressure layer 14 are formed so as to be in contact with a part of the outer circumference of the powder supply belt, and the atmospheric pressure layer 14 and the powder injection nozzle 20 are provided in a gap in parallel with the outer circumference of the powder supply belt. The adjustment plate 18 and the powder supply belt 16 are connected by a powder take-out portion 19 which is a gap.

The powder supply belt 16 rotates and the powder layer 12
When the powder supply belt 16 passes through the powder supply belt 16, the powder 5 is loaded in the concave portion 11 of the powder supply belt, and the gas of the powder take-out portion 19 flowing from the atmospheric pressure layer 14 to the powder injection nozzle 20 causes the powder supply belt to flow. The powder loaded in the recess 11 is taken out, the powder is supplied to the powder jet nozzle 20 by the flow of the gas flowing to the powder jet nozzle 20, and the powder is jetted from the powder jet nozzle 20 to the processed substrate 7 in the negative pressure processing chamber. The body is sprayed and powder spray processing is performed.

By adjusting the gap of the powder take-out portion 19 with the gap adjusting plate 19, the speed of the gas flowing to the powder supplying portion is adjusted, and the energy for blowing the powder out of the concave portion 11 of the powder supplying belt is adjusted. To do.

In this example, the pressure inside the processing chamber was set to -0.05 MPa by the vacuum pump, and the difference from the atmospheric pressure was set to 0.05 MPa.

The length of the powder jet nozzle jetting portion is set to 100 mm and the gap is set to 1 mm, and the groove of the powder feeding belt is set to 1.5.
The length of the groove portion of the groove belt was 100 mm, which was a thread shape with a millimeter pitch.

The powder used was 3 μm of silicon carbide.
The surface of the polished stainless plate was sprayed with powder to reduce the surface roughness of the polished stainless steel plate.

A cyclone and a filter were installed between the processing chamber and the vacuum pump to prevent the powder from flowing in the vacuum pump as much as possible, and the vacuum pump used was a roots type vacuum pump which was not easily affected by the powder. .

[Embodiment 5] A powder injection method for injecting powder by high-pressure gas injected from a high-pressure gas injection nozzle without using the powder injection nozzle will be described below with reference to FIG.

A plurality of grooves having a depth of 0.5 mm are formed parallel to the length direction of the belt in the powder supply belt concave portion 11 and the width of the powder supply belt is 450 mm and the thickness is 8 mm. did.

The slit width of the high pressure gas injection nozzle 25 was 0.3 mm, and the length of the slit portion was 450 mm.

The high-pressure gas injection nozzle 25 is installed 0.2 mm away from the outer circumference of the powder supply belt 16 in parallel with the outer circumference of the powder supply belt with the injection port facing downward.
The position of the high pressure gas injection port 23 was set 5 mm below the center of the powder supply belt 16.

By supplying the powder into the processing chamber 30, the powder is supplied from the processing chamber 30 into the powder supply tank 21 via the cyclone 32.

The vibrator 36 vibrates the powder supply tank 21 and the powder supply device 10 so that the powder easily enters the powder layer 12 and the recess 11 formed on the outer periphery of the powder supply belt.

After the powder layer 12 of the powder supply device 10 is filled with the powder, the belt driving pulley 45 is rotated by a motor to move the powder supply belt in one direction, and the powder supply belt recess is formed. 11 is filled with powder from the powder layer 12,
The powder is supplied to the flow of the high pressure gas jetted from the high pressure gas jet nozzle 25 and jetted onto the processed substrate 7 in the processing chamber.

The powder used was spherical silica having an average particle size of 20 μm, and the high pressure gas injection nozzle 25 was used to obtain 0.15M
High-pressure air of Pa is jetted, and the low-melting glass used for the 20-inch plasma display back plate has a depth of 180μ.
Pattern cutting was performed at m.

The pattern formed was a line pattern having a line width of 80 μm and a pitch of 320 μm, and the photosensitive dry film used as a masking material for pattern formation was a dry film for sandblasting manufactured by Nippon Synthetic Chemical Industry.

[0100]

As an effect of the present invention, in the conventional powder injection processing apparatus, the powder supply device 10 and the powder injection nozzle 20 are separated from each other, and the powder is supplied by the powder supply pipe 28 such as the powder supply hose. Since the supply device 10 and the powder injection nozzle 20 are connected to each other, even if a certain amount of powder is sent from the powder supply device 10 to the powder injection nozzle 20, the powder flow inside the powder supply pipe 28 is disturbed. Although it was not possible to spray the powder uniformly, stable spraying became possible by eliminating the powder supply pipe and bringing the powder supply unit and the powder injection nozzle 20 into close proximity.

Further, since the powder is conventionally supplied from the powder supply pipe 28 to the horizontally long powder injection nozzle 20, the amount of the powder is increased only in the central portion of the nozzle, and the powder concentration in the nozzle is uniformly controlled. However, the powder is supplied to the injection nozzle 20 in the vicinity of the powder supply belt 16 by moving the powder supply belt 16 having recesses such as grooves and holes on the outer periphery as the powder supply portion. Therefore, the powder injection nozzle 20
By changing the size and depth of the concave portion on the outer circumference of the powder supply belt in accordance with the width of the gap, it becomes possible to make the concentration of the powder supplied to the powder injection nozzle 20 constant, and By changing the rotation speed by the inverter of the motor that rotates the belt driving pulley for moving, the powder having the optimum concentration for processing can be uniformly supplied to the entire surface of the powder injection nozzle 20 and the processing efficiency is improved. It has become possible.

Conventionally, since it was not possible to make the concentration in the powder injection nozzle constant, in order to perform uniform processing, both the processing substrate 7 and the powder injection nozzle 20 are moved so as to go straight to perform uniform processing. Although it was necessary, by making the width of the nozzle of the horizontally long nozzle and the size and depth of the concave portion 11 of the powder supply belt constant, the powder injection amount and the gas injection amount of each part of the powder injection nozzle can be adjusted. It is possible to make it constant, and it is possible to have the same processing capability in any part of the powder injection nozzle, and the length of the powder injection port 38 of the powder injection nozzle and the recess 11 of the powder supply belt can be set to the processed substrate 7. By making the width of the powder injection processing device 7 larger than the width of the powder injection processing device 7, it is possible to uniformly process the processing substrate 7 only by moving either the powder injection device 26 or the processing substrate 7 in a fixed direction. Smaller than before It can also drive unit could be smaller than conventional.

[Brief description of drawings]

FIG. 1 is a perspective view showing an outline of a powder injection device of the present invention.

FIG. 2 is an explanatory view of a cross section showing an outline of the powder supply apparatus of the present invention.

FIG. 3 is a side cross-sectional view showing a powder injection device of an embodiment of the present invention which performs injection during negative pressure.

FIG. 4 is a perspective view showing an outline of supplying powder into high-pressure gas according to the present invention.

FIG. 5 is a cross-sectional view showing an outline of supplying powder into high-pressure gas according to the present invention.

FIG. 6 is a side sectional view showing a powder injection device according to an embodiment of the present invention.

FIG. 7 is a perspective view showing a powder injection device according to an embodiment of the present invention.

FIG. 8 is a perspective view showing an outline of a powder injection processing device using the powder injection device of the present invention.

FIG. 9 is a side sectional view showing a powder injection device according to an embodiment of the present invention.

FIG. 10 is a side sectional view showing a powder injection device according to an embodiment of the present invention.

FIG. 11 is a side perspective view showing the outline of the powder injection device of the present invention.

FIG. 12 is a side sectional view showing a powder ejecting apparatus of an embodiment that does not use the powder ejecting nozzle of the present invention.

FIG. 13 is an explanatory diagram showing an outline of a conventional powder jet processing apparatus.

[Explanation of symbols]

1 high pressure gas 2 exhaust 3 Air flow due to differential pressure between negative pressure layer and atmospheric pressure layer 4 High pressure gas supply port 5 powder 6 powder + high pressure gas 7 Processed substrate 8 Processed substrate suction plate 9 Suction by negative pressure 10 Powder feeder 11 Abrasive supply belt recess 12 powder layer 13 vacuum layer 14 Atmospheric pressure layer 15 Negative pressure layer 16 Powder supply belt 17 High-pressure gas layer 18 Gap adjustment plate 19 Powder take-out section 20 powder injection nozzle 21 powder tank 22 Powder supply pressure tank 23 High-pressure gas conduit 24 Powder supply valve 25 High-pressure gas injection nozzle 26 Powder injection device 27 Powder level holder 28 powder supply pipe (powder supply hose) 29 Earthquake-proof rubber 30 processing room 31 Powder injection processing machine body 32 classifier (Cyclone) 33 hopper 34 Body conduit 35 dust collector 36 vibrator 37 Powder injection part of powder injection nozzle 38 Powder injection port of powder injection nozzle 39 Dust collection conduit 40 nozzle drive 42 Capacitive sensor 45 Belt drive pulley 47 High-pressure gas injection nozzle 48 High pressure gas injection port

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01J 11/02 H01J 11/02 B // H01J 9/02 9/02 FF term (reference) 4D075 AA02 AA71 AA78 CA02 CA15 DA06 DB13 DB14 DC21 EA02 EB01 4F033 QA01 QA03 QB02Y QB04 QB12Y QB19 QD04 QD11 QD13 QD16 QE01 QE21 QE23 QF07Y QF15X QH01 QH10 QH13 QK04Y 5C027 A1909C040

Claims (9)

[Claims] 1. In powder injection processing for performing surface treatment by spraying a mixture of gas and powder from a powder injection nozzle using powder, the pulley is moved in one direction by rotation of a pulley. The powder is loaded in recesses such as grooves and holes formed on the surface of the belt, and the powder loaded in the belt is supplied to the powder injection nozzle by the flow of gas flowing from the high pressure portion to the low pressure portion. Powder injection processing device that does. 2. The powder jetting apparatus according to claim 1, wherein the powder is jetted from a powder jetting nozzle into an atmosphere of atmospheric pressure or less by pressurizing the inside of the powder jetting apparatus. Method. 3. The powder injection device according to claim 1, wherein the pressure in the processing chamber is lower than the atmospheric pressure and the pressure inside the powder injection device,
A powder injection processing method, characterized in that the inside of the powder injection device is in communication with an atmosphere of atmospheric pressure or higher, and the powder is injected from the powder injection device by a pressure difference between the processing chamber and the powder injection device. 4. The powder injection device according to claim 1, wherein a high-pressure gas injection unit is installed in front of the powder injection nozzle, and a high-pressure gas is injected from the high-pressure gas injection unit to the powder injection nozzle. A powder injection processing method characterized in that powder is taken in from a concave portion of a powder supply belt by a gas flow generated by pressure and the powder is injected from a powder injection nozzle. 5. In powder injection processing in which surface treatment is performed by spraying a mixture of gas and powder from a powder injection nozzle using powder, the pulley is rotated to move in one direction. The powder is loaded into the recesses such as grooves and holes formed on the surface of the belt, and the high pressure gas injected from the high pressure gas injection nozzle tries to take in the surrounding gas. A powder injection device characterized by spraying a mixture of high pressure gas and powder by incorporating the loaded powder into high pressure gas injected from a high pressure gas injection nozzle. 6. The powder injection process according to claim 1, wherein the cross section of the powder injection section of the powder injection nozzle or the cross section of the high pressure gas injection section of the high pressure gas injection nozzle has long sides on short sides. On the other hand, the powder injection device is 5 times or more, and the upper side of the long side and a part of the lower side are parallel to each other. 7. A powder jetting apparatus according to any one of claims 1 to 4, wherein a powder feed section and a powder jetting nozzle are integrated. 8. A powder supply belt according to claim 1, wherein the powder layer is provided below the powder supply belt so that a part of the powder supply belt is buried. A powder jetting device, characterized in that a powder jetting nozzle is installed on the upper part of the above and in close proximity to the powder feeding belt within 5 mm. 9. In the powder jetting process according to any one of claims 1 to 4, a gap flow adjusting plate is installed in parallel with the outer periphery of the powder supply belt to remove the powder loaded on the powder supply belt. A method for injecting powder, characterized in that