JPH1058325A - Blast machining method and device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform a highly accurate micro machining evenly as well as efficiently without using a small blast gun. SOLUTION: Abrasives in the abrasive guiding chamber of a gun body are blown from a nozzle 42 to a workpiece, together with a compressed air flow, via a blast gun used for taking in abrasives drawn on the compressed air flow. In this case, the injection flow of the mixed fluid of the abrasives and the compressed air in the nozzle 42 is introduced to abrasive diffusion space having a slender cross sectional form of small breadth at a ratio of a long side or a major axis to a short side or a minor axis equal to 10 or more for uniform separation up to height 10 times or more for the short side or the minor axis. As a result, rectilinearity can be given to the abrasives, thereby providing a blowing state where abrasives are not diffused and the number thereof colliding with the side wall of a recess becomes small.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for blasting, and more particularly, to a method in which a fine abrasive is sprayed at a high speed from a blast gun together with a pressurized fluid such as compressed air and the like to form a highly precise fine groove on a workpiece. The present invention relates to a method and an apparatus for grinding a concave portion such as a blind hole (hereinafter, simply referred to as a “recess portion”) or a hole portion such as a slit having various shapes irrespective of a shape such as a strip, a cylinder, and a square tube.

For example, a plasma display (PDP)
In order to form the ribs or barriers of high definition, a low-melting glass paste is laminated on a base made of glass or the like, and a masking of a resist layer having a predetermined shape is formed by patterning on the surface of the low-melting glass paste. By blasting from the surface on the layer side, a low-melting-point glass paste other than the resist layer is patterned into fine grooves having a rectangular cross section serving as a discharge space, and high-definition ribs are patterned. In order to form such high-definition ribs, it is required to obtain high-precision concave portions. The present invention is not limited to PDPs, but also includes sapphire, glass, silicon wafers, ceramics and other components of electronic devices such as semiconductors. This includes the technical field of processing minute recesses or holes that are unsuitable for laser processing in other products with high precision, and without using the high cost of ultrasonic processing. The present invention also relates to a method and an apparatus for blasting the rib which are preferably applied to form a high-definition rib.

[0003]

2. Description of the Related Art Conventionally, when a fine concave portion or a hole is formed on a surface of a workpiece, a masking of a resin or the like is patterned on the surface of the workpiece, and the patterned workpiece is formed. A fine abrasive was sprayed from a blast gun onto the surface of the object, and the unmasked portion was blasted to form a pattern of ribs or holes.

[0004] For example, a plasma display (PDP)
In order to form the ribs with high definition, as shown in FIG. 9, the surface of the workpiece made of the low-melting glass paste laminated on the substrate made of glass or the like is parallel (striped).
Alternatively, a resist layer (masking) having a predetermined shape such as a lattice pattern is formed by patterning. The surface on the resist layer side is blasted to form a portion of the low melting point glass paste other than the resist layer in a groove serving as a discharge space, and a rib is formed in the resist layer portion.

Conventionally, in general, a suction type blast gun of a blast processing apparatus is, for example, a blast gun 10 as shown in FIG. A substantially cylindrical container-like abrasive guide chamber 12 is formed to communicate with the introduction port 24 and guide the abrasive. A conical inner surface 16 is formed at the front end of the abrasive guide chamber 12. The nozzle 14 penetrates the inner surface 16 of the cone. The tip of the jet 13 inserted from behind the abrasive material guiding chamber 12 is disposed inside the conical inner surface 16. The jet 13 is connected to a compressed air supply source (not shown) via a hose 32, and relatively high-pressure compressed air is sent.

Reference numeral 15 denotes a holder, which has a cylindrical shape having a tapered portion on the inner peripheral surface. The tapered portion on the inner peripheral surface of the holder 15 is fitted on the outer peripheral portion of the nozzle 14 and is provided on the outer peripheral surface of the holder 15. The nozzle 14 is fixed to the gun body 11 by screwing it to the gun body 11 with a screw portion.

When the compressed air is jetted from the tip of the jet 13 toward the nozzle 14, a negative pressure is generated in the abrasive material guiding chamber 12, and the negative pressure causes the abrasive in the recovery tank (not shown) to pass through the hose 31. It is sucked into the abrasive material guiding chamber 12. Abrasive material in the abrasive material guiding chamber 12 is filled with
Is jetted while being conically diffused from the nozzle 14 to the outside on the compressed air flow of the jet 13 to form a concave portion or the like in the workpiece W.

[0008]

By the way, in the conventional blasting method and apparatus, as shown in FIGS. 9A and 9B, the abrasive blasted from the blast gun 10 is coated. When viewed in plan on the surface of the workpiece, the abrasive bounces around 360 ° around the blast gun,
The light is reflected or diffused (FIG. 9A). The same applies to a case where the blast gun is sprayed at an angle of about 45 degrees with respect to the surface of the workpiece. In normal blasting, the injection angle is set in the range of 90 ° to 45 °.
Since the side wall surface is sharply cut away so that the desired square processing cross-sectional shape as indicated by the two-dot chain line is shown and the even bottom portion of the bottom is not ground, the strength of the formed rib is weakened, and the quality is reduced. However, there is a problem that the temperature is reduced.
Even when the blast gun is tilted to 45 degrees or less, the reflection in the direction of the tilted side with a small angle is only partially weakened.

In particular, the abrasive reflected in a direction perpendicular to the longitudinal direction of the stripe-shaped rib collides with the side wall surface of the rib, resulting in a strong collision force for scraping the side wall surface of the rib.

In addition, when the surface area defining the cross-sectional shape of the concave portion and the processing area of the hole become fine, even if the blast processing is performed with a fine abrasive, the processing is performed in the same cross-sectional shape as the surface of the workpiece. There is a large limit to the possible depth, and there is a problem that it cannot be processed to a desired depth or shape.

Further, when the concave portion is formed by blasting, particularly when a concave portion smaller than the nozzle diameter of the blast gun is formed, the compressed air is hardly released from the concave portion. There is a problem in that the abrasive is not discharged out of the concave portion, and is deposited particularly on the even corner of the bottom surface, and once the abrasive is deposited in the concave portion, the concave portion cannot be further deepened by the subsequent abrasive. [FIG. 11 (A)].

Therefore, normally, a jet of a mixed fluid of abrasive and compressed air, particularly the abrasive in the recess, is discharged by injecting from the one wall side of the recess with a blast gun of a nozzle smaller in diameter than the recess. [FIG. 11B]. In order to process such a fine recess, it is necessary to make the injected mixed fluid flow out of the recess smoothly, and therefore, when processing the fine recess, it is difficult to use a large-diameter nozzle. Becomes inappropriate. That is, with a large-diameter nozzle, it is very difficult to achieve a smooth outflow of the mixed fluid. The problem that even bottoms are not ground even when the recess is wide,
It remains as before.

Further, the blast gun having a small-diameter nozzle has the following problems.

(1) In order to improve the productivity, many small blast guns having small nozzles are required.
Equipment costs increase.

(2) Since the processing width of each nozzle is inevitably narrow, if the moving speed of the blast gun is low, the amount of local removal of the side wall surface of the rib becomes large. Even if a plurality of blast guns are used, the moving speed of each blast gun must be considerably increased in order to uniformly process each blast gun. That is, when using a large number of blast guns composed of small-diameter nozzles, in order to uniformly perform the blast processing of each recess with each blast gun, the processing cannot be performed unless the moving speed of the blast gun is considerably high. For example,
When the blast gun moves in the X direction and the blast gun reciprocates in the Y direction to perform blasting, the work is performed by X while the blast gun makes one reciprocation in the Y direction in order to perform uniform blasting. Direction must be moved at a speed less than or equal to the abrasive spray width. Therefore, when the abrasive spray width of the spray nozzle is narrow corresponding to the width of the concave portion, the uniformity of the blasting process is reduced by decreasing the work feed speed or increasing the moving speed of the blast gun. It is necessary to increase the efficiency of blasting while maintaining the above. However, in this method, there is naturally a limit to increase the processing efficiency. (3) The method of collecting small blast guns comprising a large number of small-diameter nozzles and treating them as one blast gun as a whole is not uniform because the blast processing state of each blast gun is not uniform. For example, even if a plurality of nozzles are arranged in the X direction so that the abrasive spray width of each spray nozzle does not overlap each other so much that they move in the Y direction synchronously, the total abrasive spray width of the plurality of nozzles can be reduced. Unless the speed is twice as long in the X direction, uniform blasting cannot be performed. If the number of nozzles is increased by one, the work feed speed must be increased. Conversely, if the number of nozzles is decreased, uniform work cannot be obtained unless the work feed speed is reduced.

Therefore, even if a plurality of nozzles are used, it is technically difficult to synchronize each nozzle.

(4) In the air type blast gun, since the abrasive flows along with the compressed air flow, the abrasive blast gun having a small diameter nozzle has a problem in that the wall resistance of the inner wall surface of the nozzle against the abrasive increases. Lacks stability in the injection state.

(5) Fluidity of the abrasive is caused by changes in humidity, inclusion of foreign matter, changes in the particle size of the abrasive due to collision with the workpiece, and in the nozzle due to abrasion when the abrasive passes through the blast gun. In particular, small blast guns are greatly affected by the above-mentioned effects.

(6) Further, since fine abrasives used for fine processing are easily affected by air resistance and do not travel straight, the conventional nozzles are required to diffuse and spray 360 ° radially. Thus, uniform and fine drilling or grinding of recesses was a difficult task.

In processing a fine recess or hole, the thickness of the mask is reduced, so that the durability of the mask is reduced.
Since the bonding area of the mask is small, the bonding strength is also reduced.

Further, when the sprayed abrasive is reflected by the workpiece and discharged from the concave portion, the abrasive collides with the mask from the lateral direction and jumps out (strength of the flat surface), so that the mask is easily peeled off. become. The strength of the horizontal movement becomes stronger as the area of the concave portion becomes larger.

SUMMARY OF THE INVENTION The present invention has been developed to solve the above-mentioned problems, and has as its object to form fine recesses or holes with high precision, more uniformly and efficiently, and more deeply. It is an object of the present invention to provide a blasting method and apparatus which contribute to forming a high definition rib.

[0023]

In order to achieve the above object, in a blasting method according to the present invention, a nozzle, generally in front of a jet 13 communicating with a compressed air supply source, in a direction of air jet, is generally provided. The compressed air flow of the jet 13 and the abrasive sucked by the compressed air flow from the abrasive guide chamber 12 communicating with the abrasive supply source between
A method for blasting by means of a blast gun for injecting an abrasive in an abrasive guide chamber 12 as a mixed fluid together with a compressed air flow onto a workpiece, wherein the abrasive is formed in front of the blast gun in the abrasive injection direction. In a space, that is, in a plane, the long side or the long axis is
A mixed fluid jet of abrasive and compressed air into an abrasive diffusion space having a cross-sectional shape that is at least twice as narrow and elongated, and the cross-sectional shape defines a height of at least 10 times the short side or short diameter. Is introduced and a polishing material is sprayed on the surface of the workpiece to process a highly accurate concave portion or the like.

The abrasive material diffusion space has a cross-section having a short side or a short diameter of 0.2 to 3 mm and a long side or a long diameter of 50 to 5 mm.
It can be narrow with a width of 00 mm.

Further, the longer side or longer diameter direction of the cross-sectional shape of the abrasive material diffusion space is positioned in a direction orthogonal to the moving direction of the blast gun 40 or the workpiece, and the blast gun or the workpiece is It is also effective to move at least one of the grooves forward or backward parallel to the longitudinal direction of the groove recess to be formed on the workpiece.

The fact that the abrasive is a fine powder abrasive of # 240 to 3000 is effective for processing and forming a highly accurate concave portion or the like.

In the blasting machine of the present invention, a nozzle 42 is provided in front of the jet 13 communicating with the compressed air supply source in the air jet direction, and an abrasive material communicates between the jet 13 and the nozzle 42 with the abrasive supply source. In a blasting machine having a suction type blast gun having an induction chamber 12, a long side or a long diameter with respect to a short side or a short diameter is 1 in front of a mixed fluid jet of abrasive and compressed air of the nozzle 42.
An abrasive diffusion chamber 52 having a narrow and elongated cross-sectional shape of at least 0 times and having a constant cross-sectional shape at a height of at least 10 times the short side or the short diameter is provided.

The cross-sectional shape of the abrasive diffusion space has a short side or a short diameter of 0.2 to 3 mm and a long side or a long diameter of 50 to 5 mm.
It is desirable that the width is narrower than 00 mm and elongated.

The abrasive diffusion chamber 52 is provided with a nozzle 42
Can be integrally formed.

The abrasive diffusion chamber has an abrasive diffusion portion whose cross section, such as an inverted triangular shape, gradually narrows in the abrasive injection direction, and a polishing member having a rectangular cross section formed in front of the abrasive diffusion portion. It is composed of a material rectification unit.

[0031]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a general blasting apparatus will be described as an embodiment of a method and an apparatus for forming fine recesses or holes, such as a thick film pattern of a PDP substrate, in blasting according to the present invention. This will be described with reference to the drawings.

In FIG. 7, in the blasting apparatus according to the present embodiment, reference numeral 61 denotes a cabinet, which is provided with an input port 63 for taking in and out the workpiece W, and the workpiece W inserted from the input port 63 into the cabinet 61. Is provided with a blast gun 40 for spraying an abrasive.

A hopper 68 is provided at a lower portion of the cabinet 61, and a lowermost end of the hopper 68 communicates with an upper portion of a collection tank 70 for collecting abrasives installed at an upper portion of the cabinet 61 via a conduit 65. .

The recovery tank 70 is a so-called cyclone.
This is a device for separating dust from the abrasive material, and as shown in FIG. 5, comprises a cylindrical portion having an upper cylindrical shape and a conical portion having a conical shape gradually narrowing downward at a lower portion. An inlet 73 is provided on the upper side wall of the cylindrical portion 70,
The front end of the conduit 65 is connected to the inflow port 73 via a communication pipe 75. Since the axial direction of the communication pipe 75 is located in the tangential direction of the inner wall surface forming the circular cross section of the cylindrical portion,
The airflow flowing into the recovery tank 70 from the communication pipe 75 descends while rotating along the inner wall of the cylindrical portion.

The lower end of the conical portion of the recovery tank 70 is provided with an abrasive adjuster 78 for adjusting the amount of abrasive injected from the blast gun 40, and the blast gun 40 is connected to the abrasive adjuster 78.

On the other hand, a connecting pipe 74 is provided substantially at the center of the upper end wall surface of the recovery tank 70, and this connecting pipe 74
7, and communicates with the dust collector 66.

The dust collector 66 rotates an air blower 69 to discharge the air in the dust collector 66 to the outside air. The air in the cabinet 61, the conduit 65, and the collection tank 70 of the blast processing device 60 is sucked by the exhaust fan 69,
Each section becomes a negative pressure, and air supplied from a compressed air supply source (not shown)
Since the air is injected from 0, the airflow flows from the cabinet 61 to the conduit 65, the collection tank 70, and the dust collector 66 in this order.

The abrasive sprayed from the blast gun 40 is subjected to impact upon collision with the workpiece W, and debris separated from the surface of the workpiece, crushed non-reusable abrasive, and dust containing other dust. Is generated and is mixed in a reusable abrasive. The sprayed abrasive and dust generated at this time are:
It falls into the hopper 68 below the cabinet 61 and the conduit 6
5 through a conduit 65 due to the airflow generated in the inlet 7
3 to the collection tank 70.

The airflow flowing from the inflow port 73 becomes a rotating airflow and descends while rotating along the inner wall surface of the cylindrical portion due to centrifugal force. When reaching the conical portion, the conical portion gradually narrows downward. As a result, the radius of rotation of the airflow becomes smaller, and accordingly, the rotation speed gradually increases while descending. Abrasives and dust fall in the airflow. When the air flow reaches near the lower end of the conical portion, the air flow reverses and changes direction to become an ascending air flow and rises while slightly rotating the central portion of the recovery tank 70, and from the connection pipe 74 on the upper end wall of the recovery tank 70 via the discharge pipe 67. It flows to the dust collector 66.

However, of the abrasive and the dust that have fallen near the lower end of the conical portion along with the rotating airflow, only the dust of the dust changes direction and rises with the ascending airflow, but the abrasive does not ascend but rises below the conical portion. At the bottom of the collection tank 70 and gradually accumulates.

On the other hand, the dust is connected to the connecting pipe 7 together with the rising air current.
4 is sent to a dust collector 66 via a discharge pipe 67 and is accumulated in the dust collector 66, and clean air is discharged from an air blower 69 provided above the dust collector 66.

The blast gun 40 will be described in more detail with reference to FIGS.
The components and structure in the gun body 11 are the same as those of the conventional blast gun 10 shown in FIG.
Hereinafter, the same members are denoted by the same reference numerals.

The gun body 11 includes a collection tank 70 (FIG. 7).
Is formed into a substantially cylindrical container-like abrasive guide chamber 12 through which the abrasive is guided through a hose 31 through a hose 31 through a hose 31. The abrasive guide chamber 12 has a front end portion constricted in a conical shape. A conical inner surface 16 is formed. The inner surface of the cone 1
The tip of the jet 13 inserted from the rear of the abrasive material guiding chamber 12 is arranged inside 6. This jet 1
Reference numeral 3 denotes a screw 37 fixed to the rear portion of the gun body 11.

The jet 13 is connected to a compressed air supply source (not shown) via a hose 32. A relatively high-pressure compressed air is sent, and the compressed air is jetted from the tip of the jet 13. A jet cover 17 is provided on the outer periphery of the tip of the jet 13 in order to prevent the abrasive from being worn by impact.
Is exterior.

Numeral 42 denotes a nozzle which is provided at the tip of the gun body 11 in front of the jet 13 in the air jetting direction and which is connected to the abrasive guiding chamber 12 through a conical receiving portion 26 which is continuous with the conical inner surface 16. The mixed fluid jet of the abrasive and the compressed air is jetted from the nozzle tip 18 of the nozzle 42 to the rectangular nozzle 51. The rectangular nozzle 51 forms an abrasive diffusion chamber 52, and this abrasive diffusion chamber 52
In this case, a space is defined that is narrow and elongated in a direction perpendicular to the injection direction of the mixed fluid injection flow of the abrasive and the compressed air. The abrasive diffusion chamber 52 communicates with the side of the nozzle 42, and the abrasive diffusion part 52a has, for example, an inverted triangular shape and changes so that the cross section gradually narrows in the abrasive injection direction.
In front of the abrasive diffusion portion 52a, an abrasive rectification portion 5 having a rectangular cross section for rectifying an abrasive having substantially the same height as, but not limited to, the abrasive diffusion portion 52a.
2b.

A communication hole 55 is provided substantially at the center of the rear end surface of the abrasive material diffusion portion 52a, and a screw hole 57 is provided in the inner peripheral surface of the communication hole 55, for example.
At 7, the nozzle 42 is screwed to the outer periphery of the nozzle 42, and the nozzle tip 18 of the nozzle 42 faces the communication hole 55.

The nozzle 42 and the abrasive material diffusion chamber 52 may be formed integrally with each other. In other words, the abrasive material diffusion chamber 52 can be replaced with the nozzle 42 on the member.

The abrasive material rectifying section 52b has a narrow rectangular cross section having a depth A corresponding to a narrow short side and a width B corresponding to a long side, and this cross sectional shape is defined as a constant space up to a height C. The front end face of the abrasive rectifying section 52b is entirely open (54). However, the method of connecting the nozzle 42 and the abrasive diffusion chamber 52 is not limited to this embodiment, and the abrasive diffusion chamber 52 is limited to defining a narrow and narrow rectangular cross-section space of the present embodiment. Instead, for example, a space defined by a combination of a part of an arc such as an ellipse, another curve such as a waveform, a straight line, or the like, and defining a space having a narrow and elongated cross-sectional shape may be defined.

The abrasive material rectifying section 52b uses an abrasive material of # 240 to # 3000 (average average particle diameter: 5).
In the case of a fine abrasive of ８０80 μ; JIS6001), the depth A of the cross section is desirably 0.2 to 3 mm as shown in FIG. The reason is that if it is 0.2 mm or less, the wall resistance inside the abrasive material rectifying section 52b becomes large,
If the size is larger, the following problem occurs when the fine abrasive blasted from the abrasive rectifier 52b collides with the workpiece and is reflected.

In other words, since the abrasive sprayed from the center in the depth direction of the abrasive rectifying portion 52b collides with the workpiece and bounces substantially vertically, the abrasive bounces off. The abrasive collides with the subsequently injected abrasive, and the abrasive is deposited on the bottom surface of the concave portion, the energy of the subsequent abrasive is consumed, and the reflection direction of the abrasive is random, so that the abrasive is reflected on the side wall surface of the concave. This is because various impacts are caused, such as collision and scraping of the side wall surface.

The width B of the abrasive material rectifying portion 52b is desirably 10 times or more the depth A. When the depth A of the cross section is 0.2 to 3 mm, the width B is 50 to 500 mm. It is desirable.

Further, the height C of the abrasive material rectifying portion 52b is
It is desirable that the depth is 10 times or more of the depth A in order to provide the abrasive with straightness after spraying.

In the experimental example, A: B = 0.2 to 0.2
1.3 mm: 50 to 500 mm was used, but in the embodiment, the depth (short side) A of the abrasive material rectifying section 52b is 1.3 mm, and the width (long side) B is within 50 mm. Part 52b
Has a height C of 50 mm.

The jet flow of the mixed fluid jetted while diffusing in a conical manner from the nozzle 42 collides with the side walls 58, 58 of the abrasive diffusion portion 52 a of the abrasive diffusion chamber 52, and is deflected and diffused.

Further, the jet flow of the mixed fluid of the nozzle 42 is jetted to the abrasive diffusion portion 52a, so that the jet flow of the mixed fluid of the abrasive and the compressed air is formed in the abrasive rectification portion 52b in the abrasive diffusion chamber 52. The fluid cross section is deformed into a narrow and elongated cross-sectional shape, the internal pressure rises, the abrasive is diffused in the abrasive diffusion part 52a, and rectified in the abrasive rectification part 52b, and the straightness is imparted. It is injected forward from the injection port 54.

In the embodiment, the abrasive injection port 54 corresponding to the long side is a straight line in the horizontal direction, but may be inclined toward one short side. In this case,
When the blast gun is positioned in the horizontal direction, the injection distance becomes different from the horizontal processing surface, and the cutting (depth) effect can be changed correspondingly.

According to experiments, the injection distance from the abrasive injection port 54 of the abrasive rectifying section 52b to the surface of the workpiece is less than about 200 mm, and has almost no effect on the cutting depth. The reason for this is that if the injection distance increases, the diffusion of the abrasive increases, and the straightness of the abrasive is lost.

[Processing Example] Using the blast processing device 60 and the blast gun 40, under the processing conditions shown in Table 1,
Abrasive was sprayed from the blast gun 40 onto the surface of the workpiece W to perform blast processing. As shown in FIG. 1, the width direction (B) of the cross-sectional shape of the abrasive rectifying portion 52b of the blast gun 40, that is, the rectangular nozzle 51, is applied to the workpiece whose surface is masked in a stripe shape. In the direction perpendicular to the reciprocating direction of In addition, the reciprocating direction of the blast gun 40 is parallel to, that is, the same as, the longitudinal direction of the workpiece concave surface formed on the workpiece.

[0059]

[Table 1]

As shown in FIG. 3A, the rib of the workpiece processed by the blast gun 40 of the present example has a top width of 130 μm and a pitch of 450 μm (130 μ + 320).
μ), 90 μ at the middle width of the rib, 1 at the base width of the rib.
The height (groove depth) was 60 to 170 µ and the height (groove depth) was 180 µ.

[Comparative Example 1: FIG. 3] Four conventional nozzles 14 (φ9 mm) having a circular cross section, an ejection distance of 80 mm, and an ejection pressure of 3
In order to form ribs of the same shape on a workpiece (low-melting glass) of the same material using a blast gun 10 of kg / cm ² , the moving speed (conveyor speed) of the workpiece is substantially the same (35 mm). / Min), as shown in FIG. 3 (B), the ribs of the workpiece are 130 μm in the upper end width of the rib, 450 μm in pitch, 50-60 μm in the intermediate width of the rib, and ribs as shown in FIG. 180 to 19 at the base width
0 μ and the height (groove depth) were 180 μ.

Therefore, in the conventional example, the side wall surface of the rib is largely removed, and the rib has a disadvantage that the intermediate width of the rib is about half or less of the upper end width of the rib, so that the rib easily falls down. It can be seen that it has been improved.

The reason is as follows.
At 0, the direction in which the injected abrasive collides with the workpiece and rebounds is a direction orthogonal to the widthwise linear portion of the abrasive rectifying portion 52b as indicated by the arrow in FIG.
This is because interference with the abrasive to be subsequently injected is reduced, so that the abrasive collides with the side wall surface of the rib.

In view of the conveyor speed, the conventional example has four nozzles, that is, blast guns, and in the present application example, a processing speed approximately four times per nozzle can be obtained as compared with the conventional example.

Comparative Example 2 In order to compare the present example with the conventional example, a long groove having a width of 100 μm as shown in FIG.
The surface of the workpiece was masked so as to form a groove having a size of 180 μ × 300 μ, and both grooves were blasted at the same time.

Comparing the present example and the conventional example, in the conventional example, a groove having a width of 100 μ is worse in workability than a groove having a size of 180 μ × 300 μ. When a groove having a width of 100 μ is processed to a predetermined depth, a groove having a width of 180 μ × 300 μm is obtained. For grooves of size
It is machined to 5 times the depth. However, in the example of the present application, the two grooves are machined to substantially the same depth. That is, the example of the present application shows that high-quality blasting can be performed at a stable processing speed even when grooving is performed on a groove having a narrow processing width and a groove having a wide processing width at the same time.

[Comparative Example 3] In processing a fine recess or hole, the thickness of the mask is reduced, so that the durability of the mask is reduced. Since the bonding area of the mask is small, the bonding strength is also reduced. I do. In addition to this, the factor that deteriorates the durability of the mask is basically due to the injection amount of the abrasive in the blasting process. However, in reality, the effect of heat generated at the time of the blasting process is great. In particular, the heat generation temperature of the fine abrasive is higher than that of other abrasives because the speed at which the fine abrasive is injected approaches the speed of the air injected from the blast gun.

Therefore, generally, the processing depth is repeatedly increased while moving the blast gun many times within a certain range of the blast processing area. This is because, when the blasting is performed to a desired processing depth by one movement of the blast gun, the surface temperature of the mask in the portion to be processed increases and the mask is damaged. The blasting of the blasted surface at time intervals prevented the surface temperature from rising.

In the case of the conventional blast gun 10 having a circular cross section, it takes time for the abrasive sprayed in a conical shape to pass through a narrow area. In other words, it takes time from when the abrasive is sprayed to a certain narrow area until the blast gun passes and the abrasive is no longer sprayed. However, when compared with the conventional example with the same moving speed of the blast gun, the rectangular blast gun of the present application passes in a short time because it is narrow. Incidentally, the conventional blast gun 10 has a sectional diameter of 7 mm, and the blast gun 40 of the present application.
When the cross-section is 1 mm in depth × 50 mm in width, the ratio of abrasive injection time between the conventional example and the present example is 7: 1. The blast gun of the present application moves in the depth direction of the rectangular nozzle cross section.
Therefore, when the moving speed of the blast gun is the same, the rate of increase in the surface temperature of the mask of the present example is much lower than that of the conventional example.

A comparative test was performed between the present example and the conventional example to determine how deep the mask can be processed using the same mask until the mask is damaged.
I was able to carve four times the depth.

By the way, when the blast processing is performed at the same moving speed by using the blast gun 10 having the large and small diameter nozzles having a circular cross section, the blast gun having the small diameter nozzle has a longer mask life.

Further, in the present example, the mask is not easily peeled as compared with the conventional example. The cause of the peeling off of the mask is not that the abrasive directly hits the mask, but rather that the injected abrasive collides with the mask from the side as it is reflected from the workpiece and is ejected from the recess (horizontal). (Strength of striking). The strength of the horizontal movement becomes stronger as the area of the concave portion becomes larger.

In other words, it is considered that the energy of the abrasive increases because the distance from the time when the abrasive is ejected from the blast gun to the time when the abrasive is discharged from the concave portion increases. However, in the case of the example of the present application, since the abrasive sprayed from the blast gun 40 escapes immediately from the abrasive spraying area after colliding with the workpiece, the strength of the transverse movement does not increase. By the way, when comparing the conventional example and the present example with a workpiece using a mask having a relatively low adhesive strength, the present example shows that the depth of the concave portion until the mask is peeled is 1.
5 times.

The present invention is not limited to the above-described embodiment, but can be embodied in other forms by making appropriate changes. In the example of the present embodiment, an air type gravity type blasting device has been described as an example of a blasting device, but an air type direct pressure type blasting device and other blasting devices can be used arbitrarily according to the embodiment.

[0075]

The present invention has the following effects.

(1) The mixed fluid jet of the abrasive and the compressed air from the nozzle is formed to have a narrow and elongated cross-sectional shape whose long side or long diameter is at least 5 times the short side or short diameter, and this cross-sectional shape is The abrasive is introduced into the abrasive diffusion space, which is defined to be at least 10 times the height of the short side or minor axis, and the abrasive is sprayed from the front end of the abrasive diffusion space. Further, after the blasted abrasive collides with the workpiece, the abrasive can rebound mainly in the direction perpendicular to the longer side or the longer diameter direction of the cross-sectional shape.

Therefore, since the abrasive is sprayed without diffusing, the amount of the abrasive which collides with the side wall surface of the processed concave portion is reduced, and since the cross-sectional shape of the abrasive diffusion space is narrow, the abrasive is diffused in the vertical direction. The amount of abrasive that bounces off is reduced, so that the subsequent abrasive can be sprayed onto the workpiece without being hindered by the bounced abrasive, eliminating energy loss and efficiently forming deeper recesses with high precision. Was.

In the nozzle 40 of the present application, the friction loss in the nozzle due to the abrasive is significantly reduced as compared with the conventional nozzle 10. For example, assuming that the diameter of a conventional nozzle is d and the nozzle of the present application has a cross section of short side × long side of d × 10d, the friction loss head in the “pipe” is generally proportional to the fluid friction coefficient of λ.

Λ is inversely proportional to the Reynolds number, whether laminar or turbulent. In the embodiment, it corresponds to turbulence. The Reynolds number of the diameter d is cd / [nu one side d, rectangular Reynolds number of other sides 10d is ^{4mc / ν = 4 * (10d} 2 / 22d) * c / ν = 40cd / 22 * / ν above ratios (cd / ν) / (40cd / 22 ^* / ν) ⁼ 22/40 = 0.55 A nozzle having a diameter d and one side having a diameter d and the other side having a diameter 10d has a friction loss of about ２. When narrowing down to the same width (smaller width), a rectangle is more efficient than a circular cross section.

(2) Since the abrasive collides with the workpiece without being diffused, the amount of abrasive colliding with the side wall surface of the concave portion can be reduced, and a highly accurate concave portion can be formed. The example of the present application is
Per unit time, the maximum depth could be cut down by as much as 30%. That is, in the example of the present application, not only the processing accuracy is improved, but also the blast processing speed is significantly improved. By the way, under the same amount of air used during the blasting, the example of the present application was able to reduce the time by 35% as compared with the conventional example.
It is considered that the reason why the processing speed was improved in this manner is that the loss of energy of the abrasive is reduced because the bounced abrasive is less likely to interfere with the subsequently injected abrasive. In addition, since a plurality of recesses or holes are simultaneously blasted with the processing width in the width direction of the abrasive material rectifying portion 52b of the blast gun 40 of the present application, compared to a conventional small circular blast gun having a small-diameter nozzle. The workpiece is blasted efficiently.

(3) The cross-sectional shape of the abrasive diffusion space is such that the short side or short diameter is 0.2 to 3 mm and the long side or long diameter is 50 to 50.
Since the width is narrow and 0 mm, the wall resistance in the abrasive diffusion space was reduced, and the direction of reflection of the abrasive colliding with the workpiece was not perpendicular. In other words, the abrasive can be efficiently ejected, and the rebounded abrasive can be prevented from hindering the subsequent abrasive, thereby contributing to an improvement in the processing speed.

(4) The long side or long diameter direction of the sectional shape of the abrasive material diffusion space is positioned in a direction orthogonal to the forward direction of the blast gun.
Since the recesses formed are advanced in the longitudinal direction, for example, a plurality of rows of high-precision recesses can be efficiently formed simultaneously.

(5) The fact that the abrasive is a fine powder abrasive of # 240 to 3000 is suitable for processing a high precision concave portion.

(6) The apparatus of the present invention improves the durability of the mask as compared with the conventional apparatus, so that a deeper recess can be formed as a result.

(7) In the example of the present application, blast processing could be performed at a stable processing speed for a concave part having a narrow processing section in the horizontal direction as well as a concave part having a wide processing section.

[Brief description of the drawings]

FIG. 1 is a perspective view of a blast processing apparatus showing an embodiment of the present invention.

2 (A) is a plan view, and FIG. 2 (B) is a plan view showing the direction of reflection and the direction of reflection of the abrasive sprayed from a rectangular nozzle in blast processing according to an embodiment of the present invention. It is sectional drawing.

3A and 3B show the cross-sectional shape and dimensions of a high-definition rib obtained by blasting. FIG. 3A shows a high-definition rib according to an example of the present application, and FIG. 3B shows a high-definition rib according to a conventional example. .

FIG. 4 shows an example of a shape of a concave portion formed by blast processing in order to compare the present application example and a conventional example.

FIG. 5 is a cross-sectional view of a blast gun of a blast processing device showing an embodiment of the present invention.

FIG. 6 is a cross-sectional view of a main part from the side in FIG. 5;

FIG. 7 is a front view showing a pneumatic gravity type blast device used in the embodiment of the present invention.

FIG. 8 is a sectional view showing the entire blast gun used in the conventional example.

9A and 9B are a plan view and a cross-sectional view, respectively, showing a jetting direction and a reflecting direction of an abrasive sprayed from a blast gun in a blasting process showing a conventional example. .

FIG. 10 shows a shape of a concave portion formed by blast processing in a conventional example.

FIGS. 11A and 11B are schematic cross-sectional views of a concave portion for explaining a state when the concave portion is formed by blast processing in a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Blast gun 11 Gun main body 12 Abrasive material guiding chamber 13 Jet 14 Nozzle 15 Holder 16 Conical inner surface 17 Jet cover 18 Nozzle tip 31 Hose 32 Hose 37 Screw 40 Blast gun 42 Nozzle 46 Conical inner surface 51 Rectangular nozzle 52 Abrasive material diffusion chamber 54 Abrasive material injection port 55 Communication hole 57 Screw hole 58 Side wall 60 Blasting device 61 Cabinet 62 Nozzle 63 Collection tank 64 Dust collector 65 Conduit 66 Dust collector 67 Drain pipe 68 Hopper 69 Air blower 70 Collection tank 73 Inflow 74 Connection pipe 75 Communication Pipe 78 Abrasive Conditioner

Claims (9)

[Claims] An abrasive material in a polishing material guiding chamber is sucked by a compressed air flow from a jet from a polishing material guiding chamber communicating with an abrasive material supply source in front of a jet communicating with a compressed air supply source in an air jetting direction. In a blasting method of injecting a mixed fluid of abrasive and compressed air onto a workpiece, a cross-sectional shape of the abrasive guide chamber is at least 10 times longer than a short side or a short diameter in a mixed fluid injection direction. Injecting the mixed fluid into an abrasive diffusion space formed from a side or a major axis, and defining the cross-sectional shape to be at least 10 times higher than the short side or the minor axis, and injecting the mixed fluid into a cross-section A blasting method comprising rectifying a shape into a cross-sectional shape of an abrasive diffusion space and spraying an abrasive onto a surface of a workpiece. 2. A blasting method for jetting the mixed fluid to a workpiece from a nozzle in front of the jet in the air jetting direction, wherein the mixed fluid is injected into the abrasive diffusion space in the abrasive jetting front of the nozzle. 2. The blasting method according to claim 1, wherein the blast processing is performed by rectifying a cross-sectional shape of the mixed fluid into a cross-sectional shape of an abrasive diffusion space and jetting an abrasive onto a surface of a workpiece. 3. The abrasive material diffusion space has a cross-sectional shape with a short side or short diameter of 0.2 to 3 mm and a long side or long diameter of 50 to 500 mm.
The blasting method according to claim 1, wherein the blasting method is narrow and elongated. 4. The method according to claim 1, wherein a longer side or a longer diameter of a cross-sectional shape of the abrasive diffusion space is positioned in a direction orthogonal to a moving direction of the blast gun or the workpiece, and the moving direction is formed on the workpiece. 4. A blasting method according to claim 1, wherein said blasting process is parallel to the longitudinal direction of the concave portion or groove to be formed. 5. The blasting method according to claim 1, wherein the abrasive is a fine abrasive of # 240 to # 3000. 6. A blast including a suction type blast gun including a nozzle in front of a jet communicating with a compressed air supply source in an air jet direction and an abrasive guide chamber communicating between the jet and the nozzle with the abrasive supply source. In the processing apparatus, a long side or a long diameter with respect to a short side or a short diameter is a narrow and elongated cross-sectional shape which is 10 times or more with respect to a short side or a short diameter in front of the mixed fluid jet flow of the abrasive and the compressed air of the nozzle. It is preferable that an abrasive diffusion chamber is formed at a height equal to or more than 10 times the side or minor axis, and an abrasive diffusion chamber provided with an abrasive injection port for injecting abrasive is provided at a front end. Blast processing equipment that is a feature. 7. The blasting apparatus according to claim 6, wherein the nozzle and the abrasive diffusion chamber are formed integrally. 8. The abrasive material diffusion chamber has a cross-sectional shape having a short side or a short diameter of 0.2 to 3 mm and a long side or a long diameter of 50 to 500 mm.
7. The blasting device according to claim 6, wherein the blasting device is narrow and elongated. 9. The abrasive diffusion chamber has an abrasive diffusion section whose cross section gradually narrows in an abrasive injection direction, and an abrasive rectification section having a rectangular cross section formed in front of the abrasive diffusion section. The blasting device according to claim 6, comprising: