KR100393374B1 - Method and device for continuously supplying and injecting abrasives in direct pressure type - Google Patents

Abstract

In the abrasive recovery tank, a continuous amount of abrasive is supplied in a stable state to the spray nozzle. Moreover, the injection quantity of an appropriate abrasive | polishing agent is set easily and surely.

Water-supply port which load-loads the abrasive 34 in the abrasive recovery tank 26 to the circumferential abrasive supply hole 24 of the abrasive supply board 20 which rotates horizontally, and faces the rotation trace of the electrical abrasive supply hole 24. At 22, the electric abrasive 34 is blown by the air by the injection compressed air 31 and transported to the abrasive supply pipe 30 through the water supply pipe 29, and simultaneously conveyed by the pressurized compressed air 32 to the injection nozzle 11 ), The electric abrasive 34 is sprayed onto the workpiece. By adjusting the rotation speed of the abrasive feed plate, an appropriate abrasive feed amount is facilitated.

Description

METHOD AND DEVICE FOR CONTINUOUSLY SUPPLYING AND INJECTING ABRASIVES IN DIRECT PRESSURE TYPE}

In the blasting process, quantitatively spraying the abrasive in the abrasive recovery tank from the injection nozzle to the workpiece, that is, keeping the injection amount constant, is one of the important blasting conditions for performing a good and stable blasting process, especially in recent years. In addition to simple descaling and deburring, which is conventional in blasting, applications for fine cutting of several micrometers to several hundred micrometers are increasing. For example, microcutting by blasting has been performed as a substitute for microcutting thin films of semiconductors, fine ceramics, plasma displays (PDPs) and other thin films, or machining such as metal parts, laser processing, and ultrasonic processing. In particular, when these processes are performed by an automated line, control of the injection amount becomes an important factor.

SUMMARY OF THE INVENTION The present invention addresses such a demand, and includes a method for continuously supplying and spraying abrasives for continuously and stably supplying and spraying abrasives in an abrasive tank quantitatively and directly to a spray nozzle, and Relates to a device.

When the blasting apparatus is classified by the injection method, the abrasive is placed in the abrasive recovery tank, pressurized by the compressed air to pressurize the abrasive, and the abrasive is injected by the nozzle, and the abrasive is applied by the suction force due to the ejector effect by the injection of the compressed air. Is sucked into the nozzle structure and is classified as a suction type that sprays abrasives with compressed air at its tip.

In Fig. 7 showing a conventional direct pressure blasting apparatus, in the abrasive recovery tank 40, the abrasive after spraying is separated from the dust, the dust is sent to the dust collector 53, and the abrasive is dropped downwards to be electrically It remains in the lower part of the abrasive recovery tank 40. An abrasive pressure tank 42 is installed below the abrasive recovery tank 40, and when the abrasive pressure tank 42 is free of abrasives, the dump valve 41 is lowered so that the abrasive in the abrasive recovery tank 40 becomes an abrasive pressure tank ( 42). When the abrasive enters the abrasive pressurizing tank 42, the pressurized air 47 pressurizes the abrasive pressurizing air supply port 44, and at the same time, the dump valve 42 is closed to close the pressure in the abrasive pressurizing tank 42. Becomes high, and the abrasive is extruded from the abrasive feed port 43. At this time, the pressure of the abrasive pressurized air 32 is adjusted by the abrasive feed amount adjusting valve 45, the abrasive of the abrasive feed port 43 is sent to the abrasive hose 12, and the electric abrasive pressurized air 32 It is conveyed to the nozzle body 11 by the abrasive, and the abrasive is sprayed from the nozzle tip 14.

In the conventional direct pressure type abrasive supply device 70, for example, as shown in Fig. 8, the bottom surface of the recovery tank 71 in a direct pressure type to classify dust from the abrasive and recover the reusable abrasive. In the lower part of the vicinity, a feed pipe 73 is provided which passes through the inside from the side wall of the recovery tank 71 and passes through the side wall 72 on the opposite side of the electric side wall, and one end of the electric feed tube 73 is not shown. It communicates with a spray nozzle through an abrasive supply pipe, and the other end of the supply pipe 73 faces the outer side of the side wall of the recovery tank 71 of FIG.

As the abrasive in the recovery tank 71 gradually falls into the feed pipe 73 from the introduction hole 74 provided in the feed pipe 73 at a substantially constant speed, A mortar-shaped hole is formed as indicated by the dashed-dotted line, and the mortar-shaped hole is gradually enlarged. On the other hand, the abrasive falling from the introduction hole 74 accumulates in a feed tube 73 to form a cone, and the abrasive of the cone is sucked toward the injection nozzle by the air flow flowing in the feed tube 73. .

As described above, the recent blasting process is used for micro cutting, and it is required to precisely control the injection amount with such condensed milk. However, the conventional blasting apparatus has the following problems.

In the above-described conventional direct pressure blasting apparatus, energy efficiency is high and intense blasting injection is obtained. Continuous injection could not be performed because the abrasive must be put into the pressurizing tank once to pressurize and discharge the abrasive in the pressurizing tank.

In addition, the amount of injection together with the amount of abrasive supplied can only be adjusted by adjusting the inner diameter of the abrasive supply port 43 and the abrasive supply amount adjusting valve 45 to adjust the amount of the abrasive pressurized air 32, and furthermore, within the abrasive pressurizing tank 42. The amount of abrasives also tended to change depending on the amount of abrasives, and the amount of abrasive supplied could not be finely controlled.

In the abrasive supply means described above, the amount of abrasive supplied from the recovery tank including the recovery tank 71 and the simple abrasive storage tank for storing the abrasive to the feed pipe 73 is the size of the introduction hole 74. It is greatly influenced by the difference in the material, particle size, specific gravity of the abrasive. In addition, when the amount of the abrasive in the recovery tank 71 is large and small, the amount and speed of the abrasive falling from the recovery tank to the feed pipe 73 may be different. When the abrasive is sprayed from the spray nozzle toward the workpiece, the non-reusable abrasive, which has crashed into the workpiece, is classified in the recovery tank 71 and sent to the dust collector for destruction. Therefore, since the amount of the abrasive in the recovery tank 71 decreases as the blasting process is performed, there is a problem that the amount of the abrasive falling into the feed pipe 73 does not necessarily become a constant amount.

In addition, there are some kinds of abrasives that exhibit fine properties and those that do not exhibit fine properties. As a differential property, it refers to the property which shows the state of the fine powder which the degree of repose angle (theta) of the abrasive integrated in the bottom part of a recovery tank does not become constant. In addition, the factors in which the abrasive exhibits fine powder properties vary depending on the abrasive material, specific gravity, particle size, pressure in the recovery tank, and the like. When the abrasive having a fine powder property is used, the conventional abrasive supply device 70 may adsorb to each other or adhere to the wall surface of the recovery tank 71 due to the mutual adhesion of the powder, so that the angle of retardation θ is not constant. As described above, the abrasive in the recovery tank 71 is in a state in which a hole is formed in the vertically upward direction of the introduction hole 74, or as shown in FIG. 10, the cavity 75 is formed in the upper portion of the introduction hole 74 to form an abrasive. It may not fall.

In the suction blasting apparatus, the spraying is performed continuously, but the spraying performance is lower than that of the direct pressure type.

As described above, in the conventional abrasive supply / injection method and apparatus, there is a problem that it is difficult to always supply a certain amount of abrasive to the injection nozzle in the recovery tank to inject.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and provides an abrasive supplying and spraying method and apparatus for continuously supplying and spraying an abrasive in a stable state and continuously with an injection nozzle in an abrasive recovery tank or an abrasive receiving portion communicating with the abrasive. It is also an object of the present invention to provide an abrasive supplying and spraying method and apparatus for easily setting the desired amount of abrasive supplying and spraying according to the type of abrasive, suitable for micromachining and fine cutting, and automating the processing line. It is done.

BRIEF DESCRIPTION OF THE DRAWINGS It is a front view of the blasting apparatus provided with the abrasive supply and injection | pouring apparatus of this invention.

It is a front view which shows the principal part cross section of the abrasive supply / injection apparatus of this invention.

It is a perspective view which shows the principal part of the abrasive supply / injection apparatus of this invention.

4A is a sectional view showing the main parts of another embodiment of the abrasive supply / injection apparatus of the present invention.

4B is a sectional view showing the main parts of still another embodiment of the abrasive supply / injection apparatus of the present invention.

It is a principal part perspective view which shows the principal part cross section of still another embodiment of the abrasive supply / injection apparatus of this invention.

It is a principal part perspective view which shows the principal part cross section of still another embodiment of the abrasive supply / injection apparatus of this invention.

7 is a front view showing a conventional direct pressure blasting apparatus.

Fig. 8 shows the main cross section of the conventional abrasive supply apparatus, and particularly shows the state of the abrasive when the abrasive which does not exhibit the fine powder property falls in the feed pipe.

Fig. 9 shows a main cross section of a conventional abrasive supply device, and particularly shows the state of the abrasive when the abrasive exhibiting the fine powder property falls in the feed pipe.

Fig. 10 shows a main cross section of a conventional abrasive supply device, and particularly shows the state of the abrasive when the abrasive exhibiting the fine powder property falls in the pipe.

※ Explanation of symbols for main parts of drawing

11: injection nozzle (nozzle body) 12: abrasive hose

13: cyclone 14: nozzle tip

17: abrasive layer 18: air layer

20: abrasive supply panel 21: rotary motor

22: water supply port 24: abrasive supply hole

25: rotating shaft 26: abrasive recovery tank

27: Light Bulb 28: Conduit

29: water supply pipe 30: abrasive supply pipe

31: injection (compressed) air 32: pressurized (compressed) air

34: abrasive 35: space

40: abrasive recovery tank 41: dump valve

42: abrasive pressure tank 43: abrasive supply port

44: compressed air supply port for abrasive pressure 45: abrasive feed amount control valve

47: compressed air for pressurizing the abrasive 50: blasting apparatus

51: cabinet 52: conduit

53: dust collector 54: air blower

60: axis of rotation 61: bobbin ball

62: swivel rotary plate 63: water supply port (送 受 口)

64: water pipe 65: air layer

70: abrasive supply device 71: recovery tank

73: supply pipe 74: introduction hole

75: cavity 76: abrasive

The abrasive supplying and spraying method of the present invention for achieving the above object is to rotate the abrasive supplying plate horizontally or vertically so that a plurality of abrasive supply holes of a predetermined capacity formed on the outer circumference or side of the abrasive supplying plate are disposed in the abrasive recovery tank. The abrasive is loaded and collected, a space is formed in the rotational trajectory of the electric abrasive supply hole to communicate with the electric abrasive supply hole and the abrasive supply pipe facing the abrasive supply hole, the injection air is injected into this space, and the electric abrasive is injected into the nozzle. It characterized in that the supply to the abrasive supply pipe communicating with (claim 1).

The electric abrasive supply hole comprises an abrasive supply hole forming a plurality of rows formed on the outer circumference of the abrasive supply board or a plurality of rows formed on the side surface. For example, a plurality of rows are formed concentrically with respect to the rotation center of the abrasive supply plate, or a plurality of abrasive supply holes are formed in an annular shape drawing the same rotational trajectory (claims 2 and 12),

When the internal diameter of the injection nozzle is large and the air consumption is large, it is effective to supply the electric abrasive to the abrasive supply pipe by injection air and to supply the pressurized air for feeding the electric abrasive to the electric abrasive supply pipe (Claim 2, 9, 10).

The electric abrasive feeder may be rotated in the electric abrasive recovery tank to collect the electric abrasive in, for example, an abrasive supply hole formed on the outer periphery of the electric abrasive supply board, and may be supplied to the spray nozzle through the electric abrasive supply pipe (Claim 3, 8, 14).

The injection amount of the electric abrasive is adjusted to an arbitrary setting amount by rotating the electric abrasive supply plate at a set rotation speed or speed or by changing the number, density, volume, capacity, or area of the electric abrasive supply hole (claim 4).

Furthermore, the set amount of the abrasive falling to the electric abrasive supply plate can be more reliably maintained by applying vibration to the electric abrasive recovery tank (claim 5) or by stirring the abrasive in the abrasive recovery tank (claim 6).

Moreover, in the abrasive supply / injection apparatus of this invention, the abrasive supply plate 20 which provided the charging tool 27 in the lower part of the abrasive recovery tank 26, and provided the many abrasive supply holes 24 which faced the charging tool. ) Is rotatably installed by the rotation driving means, and faces a rotational trajectory of the electric abrasive supply hole 24, a space 35 communicating with the electric abrasive supply hole and the injection nozzle, and communicating with the abrasive supply pipe, The conduit 28 of the injection air for injection-injecting and supplying the electric abrasive is provided in the space 35, and the conduit 28 is connected to the injection air supply source (claim 7).

Experimental results have shown that the electric abrasive feed hole has a depth of less than 8 times the inner diameter.

In addition, the abrasive feed pipes may be provided to face the rotational trajectories of the abrasive feed holes formed in the plurality of cords, and may be installed to communicate with the plurality of injection nozzles through the abrasive feed pipes, thereby improving processing efficiency.

Further, the abrasive supply / jetting apparatus of the present invention is freely rotatable by the rotation drive means of the abrasive supply plate 20 having the abrasive supply hole 24 on the outer circumference of the abrasive recovery tank or the abrasive accommodating portion 26 communicating therewith. And at least a part of the electric abrasive supply hole 24 of the electric abrasive supply plate 20 is buried in the abrasive 34 in the abrasive accommodating portion 26, and the surface of the electric abrasive supply hole 24 faces the rotational track. And a space 35 communicating with the electric abrasive supply hole and the injection nozzle and communicating with the abrasive supply pipe, the conduit 28 of the injection air installed therein, and the conduit connected to the injection air supply source. (Claim 8).

The electric abrasive supply hole 24 can be formed in a plurality of grooves formed in a plane or circle, or in grooves formed in the outer circumferential width direction of the electric abrasive supply plate.

EXAMPLE

EMBODIMENT OF THE INVENTION Embodiment of the abrasive supply / injection method and apparatus of this invention is described below with reference to drawings.

The blasting apparatus 50 which installs the abrasive supply and spraying apparatus of this invention is equipped with the injection nozzle 11 which injects an abrasive to an electric workpiece, and the cabinet 51 and injection nozzle 11 which inject a workpiece, Dust is separated from the abrasive sprayed from the dust), and the reusable abrasive is recovered, and it communicates with the abrasive recovery tank 26 which stores, through a pipe, and blows, a blower, and a compressor to such a blast processing apparatus. Airflow generating means such as the air is communicated to generate airflow from the cabinet 51 to the abrasive recovery tank 26, and the airflow is loaded with abrasive or dust. The electric abrasive recovery tank 26 may itself be a so-called cyclone, or may be a tank which communicates with the lower part of the cyclone 13 and simply stores the abrasive of the cyclone 13.

Incidentally, in the various abrasive injection methods in the present specification, the abrasive accommodating part serving as a tank for supplying the abrasive to the injection nozzle through the abrasive supply pipe is collectively referred to as "abrasive recovery tank".

1 to 3, the abrasive recovery tank 26 communicating with the lower portion of the electric cyclone 13 is provided with a charging tool 27 communicating with the abrasive supply hole 24 at the lower portion thereof. The abrasive 34 stored in 26 is dropped into the electric abrasive supply hole 24 and flows in and is charged or loaded.

Preferably, vibration generating means such as a vibrator or compressed air not shown in the electric abrasive recovery tank 26 connects the stirring means of the abrasive in the tank to ensure the inflow of the abrasive 34 into the abrasive supply hole 24. As a result, the amount of abrasive supplied to the abrasive supply hole 24 is prevented by the electric vibration generating means and the stirring means to prevent the bridge of the abrasive 34 in the abrasive recovery tank 26.

The abrasive feed plate 20 having the electric abrasive feed hole 24 is preferably in the form of a flat disc, for example made of synthetic resin, which is horizontally rotated at a constant speed by the rotational force of the rotary drive means such as the motor 21, 27) and the electric abrasive supply hole 24 is installed in close proximity to the lower portion of the electric charge (27). In addition, the thickness of the abrasive supply plate 20 can be arbitrarily set according to the supply and spraying amount of the abrasive. If the thickness is formed thickly, the volume of the abrasive supply hole 24 can also be large, and many abrasives 34 can be efficiently supplied. Can be.

In addition, the electric abrasive supply hole 24 is formed by laying in the thickness direction of the electric abrasive supply board 20, and the shape needs to be that the loaded or collected abrasive can hold the abrasive supply hole 24. As a result, a water supply pipe 29 in which the abrasive loaded or collected in the abrasive supply hole 24 branched off the abrasive supply pipe 30 or branched into the abrasive supply pipe 30 is preferable. In the space 35 which is conveyed to the lower portion of the metal water inlet 22 and formed in the portion thereof and communicates with the electric abrasive supply hole and the abrasive supply pipe facing the abrasive supply hole, the abrasive air is injected into the injection air 31. In this case, any shape may be used as long as it can be blown out by compressed air and blown, but, for example, when the maximum inner diameter of the spindle-shaped electric abrasive supply hole 24 is set to 3 mm and the depth is about 15 mm, the abrasive will not fall even with the fine abrasive. It is injected by the injection air 31 from the space 35 which is blown from the abrasive supply hole 24 into the space 35 in the electric water pipe 29 by the turbulence generated in the electric space.

It is preferable that the depth of the abrasive supply hole 24 is 8 times or less with respect to an inner diameter, and an abrasive may remain in depth outside the said range.

In addition, the abrasive supply hole 24 has a plurality of insertion trajectories each of which has a plurality of insertion trajectories arranged in concentric circles with respect to the rotation center of the abrasive supply plate 20, in the first embodiment of FIGS. It can be formed in annular form and can also be formed in one or two or more lines. In addition, when the plurality of annular abrasive supply holes 24 strings are installed at positions not overlapping each other in the radial direction of the abrasive supply plate 20 in each row of the inner circumferential side and the outer circumferential side, each of the plurality of abrasive supply holes 24 During the rotation of the abrasive feed plate 20, the edges of the electric abrasive feed pipe 30 are always transported to or below the water inlet 22 of the water feed pipe 29 branching the abrasive feed pipe 30, which is formed in the water feed pipe 29. One end is closed and the other end is located in the space 35 which communicates with the electric abrasive supply hole 24 and the abrasive supply pipe 29 facing the abrasive supply hole, and supplies the abrasive 34 to the electric water inlet 22. This is not broken.

The abrasive supply pipe 30 which communicates with the injection nozzle 11 branches this into the water supply pipe 29, and the water inlet 22 formed in the end of this water supply pipe 29 is used for the abrasive supply hole 24 of many electric wires. Rotational trajectory, in this embodiment, so as to face all rotational trajectories of the plurality of electric abrasive supply hole (24).

As shown in FIG. 2, FIG. 4A, the electric space 35 has the outer wall of the electrical water pipe 29 as a double structure, and is formed in the space inside the electrical water pipe 29 and the outer wall of a dual structure.

Thus, the abrasive supply hole 24 is not shown through the water inlet 22, the water pipe 29 forming the space 35, the space 35 in the outer wall of the double structure of the water pipe 29 and the conduit 28 not shown In communication with the source.

4b shows that the passage of the injection air constituting the space 35 from the electrical conduit 28 is installed in the center of the water supply pipe 29, and is installed on the abrasive supply pipe 30 so as to communicate with the injection air source, and directly to the electrical conduit ( The tip of 28 is configured to face the abrasive supply hole 24, and has a structure without the space 35 in FIG. 4A.

In addition, the water supply port 22 formed at the end of the conduit 28 communicating with the injection air supply source is provided in the electric water supply pipe 29 so that the abrasive supply plate 20 is rotatably approached or slide-contacted.

The abrasive loaded or collected in the abrasive supply hole 24 is transferred to the lower portion of the electric water supply port 22 by the rotation of the electric abrasive supply plate 20, and the electric water supply pipe is introduced by the injection air 31 from the conduit 28. The abrasive is blown in the space 35 including the 29 and sent to the electric abrasive supply pipe 30.

The abrasive sent to the water pipe (29) is injected from the injection nozzle (11) through the abrasive supply pipe (30) by the injection air (31). When the amount of fine abrasive and consumption air is small, the injection air alone supplies the abrasive and the nozzle from the nozzle. Although it is possible to process by injection of the abrasive, injection of the abrasive into the abrasive supply hole 24 is sufficient depending on the material, specific gravity or particle size of the abrasive, but this injection air 31 is pressurized from a pressurized air source not shown separately. The compressed air is connected to the abrasive supply pipe, and the pressurized air 32, here pressurized air, is used to spray the abrasive to the workpiece, thereby enabling the injection at an appropriate pressure.

Under the same conditions, some abrasive residue was observed when the depth of the abrasive feed hole was 25 mm.

In addition, in the case where the electric abrasive supply holes 24 are formed in a plurality of strings, a plurality of water inlets 22 are provided so as to face rotational trajectories of the respective abrasive supply holes 24, and each of the plurality of water inlets 22 is provided. When the injection nozzles 11 communicated with each other are provided, the abrasive can be stably sprayed from the plurality of injection nozzles 11 onto the workpiece.

Reference numeral 20 denotes an abrasive feed plate. In the present embodiment, as shown in Figs. 1 to 3, the same rotational trajectory is formed concentrically with respect to the rotation center of the abrasive feed plate in the thickness direction of the abrasive feed plate 20, respectively. The abrasive feed hole 24, which is a circular hole continuous in the rotational direction thereof, is formed in three rows in parallel.

As an example, the inner diameter of the electrical supply hole 24 was 3 mm and the depth was 15 mm. At a depth of 25 mm, some abrasive residue was observed.

The abrasive feed plate 20 is connected to the rotation driving means of the motor 21, but the rotation speed of the rotation driving means is freely adjusted by the known means.

In addition, by adjusting the rotation speed of the abrasive feed plate 20, the rotation speed can be increased and decreased, and the amount of abrasive supplied to the injection nozzle 11 can be adjusted. For example, a large amount of abrasive is supplied by increasing the rotational speed of the abrasive supply panel 20, and a constant amount of abrasive is always maintained in a stable state by keeping the rotational speed of the abrasive supply panel 20 constant. The abrasive is quantitatively sprayed from the spray nozzle 11 on the work piece continuously and stably. Therefore, when the volume of the other abrasive supply hole 24 or the opening area of the water inlet 22 and the like are constant, the rotational speed of the abrasive supply plate 20 and the amount of abrasive supply are correlated, so this relational expression is obtained to calculate the abrasive supply amount. It is possible to easily adjust the appropriate abrasive supply amount by digitizing at the rotational speed of the feed plate 20.

When the abrasive feed plate 20 is rotated at the same speed by the rotation driving means, the abrasive loaded in the abrasive feed hole 24 is transferred to the lower portion of the water inlet 22. When the solenoid valve (not shown) is opened by the operation of the foot switch or the micro switch, and the injection air 31 is sent from the injection air source through the electric conduit 28, the abrasive in the abrasive supply hole 24 is discharged to the water inlet 22 and Through the water supply pipe 29 is injected into the abrasive supply pipe 30 is blown. At the same time, the electric abrasive supply pipe 30 communicates with the pressurized air supply source (not shown) and is supplied to the injection nozzle 11 at high pressure by interacting with the pressurized air 32 and the abrasive sent through the water supply pipe 29.

Furthermore, the abrasive 34 is connected to the electric abrasive recovery tank 26 by vibrating or stirring means, vibrating the abrasive recovery tank 26, or stirring the abrasive 34 in the abrasive recovery tank 26. 27, the abrasive is sufficiently loaded into the abrasive feed hole 24, and the amount of the abrasive flowing into the abrasive feed hole 24 is always quantitative, and a certain amount of abrasive is supplied in a more stable state.

When the abrasive is sprayed from the injection nozzle 11 to the workpiece in the cabinet 51 and the workpiece is blasted, the abrasive becomes a reusable abrasive and a broken non-reusable abrasive, and the dust generated by peeling off the abrasive and the workpiece The back is fed to the cyclone 13 by air flow through the conduit 52 together. In this cyclone 13, non-reusable abrasive and dust are separated from the reusable abrasive, non-reusable abrasive or dust is fed to the dust collector 53, accumulated in the lower part of the dust collector 53, and clean air is collected in the dust collector. It is discharged | emitted from the air blower 54 of 53 to the outside air. On the other hand, the reusable abrasive is stored at the bottom of the abrasive recovery tank 26, and the above-described operation is repeated.

Blasting was performed under the following processing conditions by using the above abrasive supply and spraying method and apparatus.

Example 1

Nozzle nozzle ø5mm Injection Compressed Air Pressure (31) 4kg / ㎠ Compressed Air Pressure (32) 3.0kg / ㎠ Abrasives (34) Carbon Randham ＃ 600 (Material SiC) Abrasive supply hole (24) inner diameter 3 mm Abrasive Supply Hole (24) Depth 15 mm

In the processing according to the above embodiment, no abrasive remains in the abrasive supply hole 24, and when micromachining the glass substrate, the uniformity (difference between the strong and weak parts of the processing) within 30 cm 2 is processed within 2%. It became.

Example 2 (FIGS. 2 and 3)

Nozzle nozzle ø5mm Injection Compressed Air Pressure (31) 4kg / ㎠ Compressed Air Pressure (32) 3.0kg / ㎠ Abrasives (34) Carbon Randham ＃ 600 (Material SiC) Abrasive supply hole (24) inner diameter 3mm × 3 rows Abrasive Supply Hole (24) Depth 15 mm

Next, with reference to the embodiment of FIGS. 4-6, a point different from embodiment mentioned above is demonstrated.

In FIG. 4, reference numeral 26 denotes an abrasive recovery tank, preferably a closed tank that forms a rectangular parallelepiped, and an abrasive layer 17 made of abrasive introduced in the lower portion of the abrasive recovery tank 26 is formed below. The air layer 18 is formed above the abrasive layer 17.

Reference numeral 20 denotes an abrasive supply plate. In this embodiment, as shown in Figs. 4A and 6, the abrasive supply hole is formed in a series of cross-sectional grooves in the circumferential direction on the circumferential surface of the abrasive supply plate 20. Many of 24 are formed in parallel to the circumferential surface width direction. The abrasive feed plate 20 is supported by the axis of rotation in the rotary shaft 25 vertically upward in the abrasive layer 17 in the abrasive recovery tank 26, the upper portion or part of the abrasive feed plate 20 is the air layer It is provided in the position exposed to 18.

As shown in FIG. 4B, the front end of the electrical conduit 28 is configured to face the abrasive supply hole 24, so that the structure does not have the space 35 in FIG. 4A.

5, a plurality of abrasive supply holes 24 formed of a series of cylindrical recesses continuous in the circumferential direction on the outer circumferential surface of the abrasive supply plate 20 are formed in the circumferential surface width direction. At this time, the plurality of annular abrasive supply holes 24 rows are installed at positions not overlapping with each other in the width direction of the outer circumference of the abrasive supply plate 20.

Therefore, almost the entire lower half of the circumference of the abrasive feed plate 20 is reliably buried in the abrasive layer 17, and a part of the upper half of the circumference of the abrasive feed plate 20 is exposed to the air layer 18. When the abrasive feed plate 20 rotates, a portion of the upper half of the circumference of the abrasive feed plate 20 is buried in the abrasive layer 17, so that the abrasive is easily introduced into the abrasive feed hole 24, and the abrasive layer The abrasive of 17 is surely transferred to the air layer 18.

The electric rotary shaft 25 is supported by a bearing outside the abrasive recovery tank 26 and is provided with a pulley (not shown) at the shaft end of the rotary shaft 25, and the pulley has a rotational force on a rotation driving means such as a motor 21. Connect through the V-belt to transmit. In addition, the rotational speed of the electric rotary drive means is easily constituted by adjusting means by known means.

When the abrasive feed plate 20 is rotated clockwise on the surface of Figs. 4A and 4B at a constant speed by the rotation driving means, the abrasive layer enters into the abrasive feed hole 24 on the circumferential surface of the abrasive feed plate 20 and is collected. The abrasive of 17 is transferred to the air layer 18. Since the amount of the abrasive collected on the circumferential surface of the abrasive feed plate 20 by rotating the electric abrasive feed plate 20 at a constant speed is quantitative, the amount of abrasive supplied to the injection nozzle 11 is quantitative.

Example 3 (FIGS. 4A, 6)

Nozzle nozzle ø5mm Injection Compressed Air Pressure (31) 4kg / ㎠ Compressed Air Pressure (32) 3.0kg / ㎠ Abrasives (34) Carbon Randham ＃ 600 (Material SiC) Abrasive feed slit 3 x 15 mm Abrasive Supply Hole (24) Depth 15 mm

60 abrasive feed holes, abrasive feed plate size: ø200

The rotation speed: 80rpm injection quantity: 100-500 / min.

In Example 2 and Example 3 described above, the injection amount of Example 6.5 was about 6.5 times at the same rotation speed of the abrasive feed plate.

Since this invention is comprised as demonstrated above, it shows an effect as described below.

The present invention can stably supply and spray a predetermined amount of abrasive to the injection nozzle stably even for an abrasive having a fine powder property.

The present invention can increase or decrease the amount of abrasive supply by changing the rotational speed of the abrasive supply board to increase and decrease the rotation speed, and can supply the abrasive in a constant amount in a stable state continuously according to the rotational speed of the abrasive supply board. Therefore, by adjusting the rotational speed of the abrasive supply board freely, it is possible to reliably and easily adjust the appropriate abrasive supply amount according to the type of abrasive. In addition, by appropriately digitizing the rotational speed of the abrasive feed plate in accordance with the abrasive feed amount, it is possible to easily adjust the appropriate abrasive feed amount and injection amount.

Alternatively, the number, density, volume, capacity, opening area, or opening area of the electric water inlet of the electric abrasive supply hole can be changed, and the abrasive of any set amount can be supplied and sprayed.

In the present invention, when the abrasive loaded or collected in the abrasive supply hole of the abrasive supply plate is injected into the abrasive supply pipe with injection air, blown up, and when the abrasive is supplied with the pressurized air to the injection nozzle and injected, the supply amount of the injection air is pressurized air. Less than the amount supplied, it was injected with a certain amount of appropriate injection density and pressure, thereby enabling uniform blasting on the workpiece.

Claims (27)

The abrasive feed plate is rotated, and the abrasive in the abrasive recovery tank is loaded or collected in a plurality of abrasive feed holes on the outer circumference or side of the abrasive feed plate, and the electric abrasive feed hole and the abrasive feed hole are rotated to the rotational trajectory of the electric abrasive feed hole. A direct pressure continuous abrasive supply / injection method, characterized by forming a space communicating with an abrasive supply pipe, injecting injection air into the space, and supplying the electric abrasive to an abrasive supply pipe communicating with the injection nozzle. 2. The electric abrasive supply pipe according to claim 1, wherein the pressurized air for supplying electric abrasive to the abrasive supply pipe by injection air from the plurality of abrasive supply holes forming a plurality of rows formed on the outer circumference or side of the electric abrasive supply plate and simultaneously pressurizing the electric abrasive. A direct pressure continuous abrasive supply and injection method, characterized in that the supply to the. The direct pressure continuous abrasive supply / injection method according to claim 1, wherein the electric abrasive supply panel is rotated in the electric abrasive recovery tank to collect the electric abrasive, and is supplied to the injection nozzle through the electric abrasive supply pipe. 2. The abrasive according to claim 1, wherein the electric abrasive supply plate is rotated at a predetermined rotation speed or speed, or the abrasive, the density, the volume, the capacity, or the area of the opening is changed to supply and spray the abrasive of any predetermined amount. A direct pressure continuous abrasive supply and injection method, characterized in that. delete delete An abrasive device is provided in the lower part of the abrasive recovery tank, and an abrasive supply panel having a plurality of abrasive supply holes facing the charging device is installed as a rotating material by a rotation driving means, and faces the rotational trajectory of the electric abrasive supply hole. A space for communicating with the abrasive supply hole and the injection nozzle and communicating with the abrasive supply pipe is arranged, and a conduit of injection air is provided in this space, and the conduit is connected to the injection air supply source. Device. An abrasive supply plate having an abrasive supply hole on the outer periphery of the abrasive recovery tank is installed as a rotating material by rotating driving means, and at least a part of the electric abrasive supply hole of the electric abrasive supply board is embedded into the abrasive in the abrasive recovery tank, and the electric abrasive supply is performed. A space facing the rotational trajectory of the ball, communicating with the electric abrasive supply hole and the injection nozzle, and communicating with the abrasive supply pipe, a conduit of the injection air installed in the space, and the conduit connected to the injection air source. Direct continuous abrasive supply and injection device. The direct pressure continuous abrasive supply / injection apparatus according to claim 7, wherein the pressurized air supply source is connected to the electric abrasive supply pipe. The direct pressure continuous abrasive supply / injection apparatus according to claim 7, wherein a plurality of abrasive supply holes are formed on at least one side of the electric abrasive supply board in a plurality of rows concentrically with respect to the rotational center of the abrasive supply board. delete delete delete 9. The direct pressure continuous abrasive according to claim 8, wherein the electric abrasive supply hole is formed from a plurality of grooves formed in a plurality of rows, plane squares, or circles, or grooves formed in the outer circumferential direction of the electric abrasive supply plate. Supply and injection device. 3. The direct pressure continuous abrasive supply and injection method according to claim 2, wherein the electric abrasive supply panel is rotated in the electric abrasive recovery tank to collect the electric abrasive, and is supplied to the injection nozzle through the electric abrasive supply pipe. 3. The abrasive according to claim 2, wherein the electric abrasive feed plate is rotated at a predetermined rotation speed or speed, or the abrasive, the density, the volume, the capacity, or the area of the opening is changed to supply and spray the abrasive of any predetermined amount. Direct pressure continuous abrasive supply and spraying method characterized in that. 4. The abrasive according to claim 3, wherein the electric abrasive supply plate is rotated at a predetermined rotation speed or speed, or the abrasive, the density, the volume, the capacity, or the area of the opening is changed to supply and spray the abrasive of any predetermined amount. Direct pressure continuous abrasive supply and spraying method characterized in that. 16. The abrasive according to claim 15, wherein the electric abrasive feed plate is rotated at a set rotation speed or speed, or the number, density, volume, capacity, or area of the electric abrasive supply hole is changed to supply and spray the abrasive of any set amount. Direct pressure continuous abrasive supply and spraying method characterized in that. The direct pressure continuous abrasive supply / injection method according to claim 1, 2, 3, 4, 15, 16, 17, or 18, wherein vibration is applied to the electrical abrasive recovery tank. The direct pressure continuous abrasive supply / injection method according to claim 1, 2, 3, 4, 15, 16, 17, or 18, wherein the abrasive in the electric abrasive recovery tank is stirred. The direct pressure continuous abrasive supply and injection method according to claim 19, wherein the abrasive in the electric abrasive recovery tank is stirred. The direct pressure continuous abrasive supply / injection apparatus according to claim 8, wherein a pressurized air supply source is connected to the electric abrasive supply pipe. The direct pressure continuous abrasive supply / injection apparatus according to claim 7, 8, 9, 10 or 22, wherein the electric abrasive supply hole has a depth within 8 times the inner diameter. The direct pressure continuous abrasive according to claim 7, 8, 9, 10 or 22, wherein the electric abrasive supply holes are formed in one or a plurality of rows in an annular shape drawing the same rotational trajectory, respectively. Supply and injection device. The abrasive feed pipes of claim 7, 9, 10 or 22 face the rotational trajectories of the abrasive feed holes formed in the plurality of rows, and the abrasive feed pipes are provided, respectively, and are arranged to communicate with the plurality of spray nozzles through the abrasive feed pipes. Direct continuous abrasive supply and injection device. 24. The direct pressure continuous abrasive according to claim 23, wherein the electric abrasive supply hole is formed from a plurality of rows, planar squares or circular recesses or grooves formed in the outer circumferential direction of the electric abrasive supply plate. Supply and injection device. 25. The direct pressure continuous abrasive according to claim 24, wherein the electric abrasive supply hole is formed from grooves formed in a plurality of rows, plane rectangles or circles, or grooves formed in the outer circumferential direction of the electric abrasive supply plate. Supply and injection device.