JP4388268B2

JP4388268B2 - Continuous fine powder abrasive supply and injection method and apparatus

Info

Publication number: JP4388268B2
Application number: JP2002324096A
Authority: JP
Inventors: 恵二間瀬; 祥一高橋
Original assignee: Fuji Manufacturing Co Ltd
Current assignee: Fuji Manufacturing Co Ltd
Priority date: 2002-11-07
Filing date: 2002-11-07
Publication date: 2009-12-24
Anticipated expiration: 2022-11-07
Also published as: JP2004154901A

Description

【０００１】
【発明の属する技術分野】
ブラスト加工において、研磨材回収タンク内の研磨材を噴射ノズルから被加工物へ定量的に噴射する、すなわち噴射量を一定に維持することは、良好で安定したブラスト加工を行うための重要なブラスト加工条件の１つであり、とくに、近年ブラスト加工が伝統的な単なるスケール除去やバリ取り等以外に数μmから数百μmの微細な切削加工を行う用途が増加している。例えば、半導体、ファインセラミック、ＰＤＰ（プラズマディスプレイ）その他の薄膜面の微少切削、又、金属部品等の機械加工、レーザー加工、超音波加工に代替するものとして、ブラスト加工による微少切削が行われている。とくにこれらの加工が自動化ラインによって行われる場合には、噴射量の制御は重要な要素となる。
【０００２】
本発明は、かようなニーズに対応するものとして、研磨材タンク内の微粉研磨材を定量的に噴射ノズルへ連続して安定的に供給し、且つ、噴射するための微粉研磨材の連続供給・噴射方法及び装置に関する。
【０００３】
【従来の技術】
伝統的な直圧式のサンドブラスト装置（例えば特許文献１参照）は、エネルギー効率が高く、強烈なブラスト噴射が得られるが、研磨材を加圧タンク内において加圧して吐出するために一度研磨材を加圧タンクに入れる必要があり、連続噴射ができなかった。すでにこの問題点を解消すべく新たな提案がなされている。この種の直圧式ブラスト装置は、図６に示すように、研磨材回収タンク２６内の研磨材を、水平回転する研磨材供給盤２０の円周上の空間３５で圧密状態で画成される研磨材供給孔２４に落下装填し、前記研磨材供給孔２４の回転軌跡に臨む送受口２２から前記研磨材を前記空間３５内で射出圧縮空気３１により吹き上げて送受管２９を介して研磨材供給管３０に研磨材との加圧混合流体として圧送すると共に、加圧圧縮空気３２により圧送して噴射ノズル１１へ加圧供給し、前記研磨材３４が被加工物に噴射される（特許文献１参照）。
【０００４】
この発明の先行技術文献情報としては次のものがある。
【特許文献１】
実公平３−９９７８号公報（第１−２頁、図１，図４）
【特許文献２】
特開平１１−３４７９４６号公報（第２−６頁、図１−図１０）
【０００５】
【発明が解決しようとする課題】
上記従来のブラスト加工装置にあっては、研磨材を加圧タンク内において加圧して吐出するために研磨材を加圧タンクに入れる必要がなく、又、微粉研磨材であっても配管系に研磨材が蓄積されることなく、連続噴射が可能となったが、エネルギーコストの削減が課題となっていた。
【０００６】
本発明は、この問題を解決するためになされたもので、エネルギーコストの低廉な且つ上記従来技術に対しても適用可能な、従って、伝統的な直圧式の問題点を除去し研磨材回収タンクないしはこれに連通する研磨材収容部から噴射ノズルへ定量の研磨材を安定した状態で、且つ連続的に供給し、噴射することができ、さらに研磨材の種類に応じて所望の研磨材供給・噴射量を容易に設定でき、微細加工、微少切削に対応し、且つ加工ラインの自動化が可能で、研磨材供給・噴射方法及び装置を提供することを目的とする。
【０００７】
【課題を解決するための手段】
上記目的を達成するために、本発明の微粉研磨材供給・噴射方法は、研磨材供給盤を回転させ、この研磨材供給盤の外周もしくは側面の複数の研磨材供給孔で研磨材回収タンク内の微粉研磨材を装填ないし捕集し、前記研磨材供給孔の回転軌跡に、前記研磨材供給孔に連通する空間であると共に噴射ノズルへ連通する研磨材供給管を前記噴射ノズルの上流側で分岐して形成した空間を画成し、この空間に圧縮機又は、送風機からの０．１MPa以下の射出空気を注入し、前記微粉研磨材を噴射ノズルへ連通する前記研磨材供給管に供給すると共に、前記射出空気より低圧で、且つ前記微粉研磨材を圧送する０．０２〜０．０６MPaの加圧空気を送風機から前記研磨材供給管に供給することにより、前述特許文献２の直圧式サンドブラスト工程に対応できる（請求項１）。
【０００８】
又、本発明装置は、微粉研磨材を収容する研磨材回収タンク下部に装填口を設け、該装填口に臨み複数の研磨材供給孔を形成した研磨材供給盤を回転駆動手段で回転自在に設けると共に、前記研磨材供給孔の回転軌跡に臨み、前記研磨材供給孔に連通する空間であると共に噴射ノズルへ連通する研磨材供給管を前記噴射ノズルの上流側において分岐して形成した空間を配置し、この空間に０．１MPa以下の射出空気を導入する導管を設けると共に、該導管を圧縮機又は、送風機から成る射出空気供給源に連通すると共に前記研磨材供給管に前記射出空気より低圧の０．０２〜０．０６MPaの加圧空気を供給する送風機から成る加圧空気供給源を連通したことを特徴とする（請求項２）。
【０００９】
【発明の実施の形態】
以下は、本願発明の実施形態である。
【００１０】
前記研磨材供給孔は、研磨材供給盤の外周に形成した複数列を成す研磨材供給孔もしくは側面に形成した複数列を成す、例えば、該研磨材供給盤の回転中心に対して同心円状に複数列を成す、例えば、同一の回転軌跡を描く環状に複数の研磨材供給孔を形成したものとし、これに加え又は噴射ノズルの射出口内径が大きく空気消費量が大きくなるときは、前記研磨材を射出空気により研磨材供給管に供給すると共に、前記研磨材を圧送する加圧空気を前記研磨材供給管に供給することが有効である。
【００１１】
前記研磨材供給盤を、前記研磨材回収タンク内で回転させて前記研磨材を、例えば、前記研磨材供給盤外周に形成した研磨材供給孔で捕集し、前記研磨材供給管を介して噴射ノズルへ供給することもできる。
【００１２】
前記研磨材の噴射量は、前記研磨材供給盤を設定回転数又は速度において回転し、あるいは、前記研磨材供給孔の数、密度、体積、容量、又は開口部の面積を変更し、任意設定量に調整できる。さらに、前記研磨材回収タンクに振動を加えるか、又は研磨材回収タンク内の研磨材を攪拌して、前記研磨材供給盤に落下する研磨材の設定量をより確実に一定に維持することもできる。
【００１３】
前記研磨材供給孔は、内径に対して深さが８倍以内が実験の結果好ましいことが判明した。
【００１４】
又、複数列条形成した研磨材供給孔の回転軌跡に臨み、それぞれ、研磨材供給管を設け、該研磨材供給管を介して複数の噴射ノズルに連通するよう設けることができ、加工効率を向上させることができる。
【００１５】
さらに、本発明の研磨材供給・噴射装置は、研磨材回収タンクあるいは、これに連通する研磨材収容部（２６）内に、外周に研磨材供給孔２４を有する研磨材供給盤２０を回転駆動手段で回転自在に設け、且つ、前記研磨材供給盤２０の前記研磨材供給孔２４の少なくとも一部を研磨材収容部（２６）内の研磨材３４内へ埋没させると共に、前記研磨材供給孔２４の回転軌跡に臨み、前記研磨材供給孔及び噴射ノズルへ連通する研磨材供給管に連通する空間３５を配置し、この空間３５に射出空気の導管２８を設けると共に、該導管を圧縮機又は、送風機から成る射出空気供給源に連通することができる。
【００１６】
前記研磨材供給孔２４は、平面矩形又は円形を成す多数の凹痕又は前記研磨材供給盤外周幅方向に至り形成された凹溝から形成することができる。
【００１７】
以下に図を参照して本発明の研磨材供給・噴射方法及び装置の実施の形態について説明する。
【００１８】
本発明の研磨材供給・噴射装置を設置するブラスト加工装置５０は、前記被加工物へ研磨材を噴射する噴射ノズル１１を備え、且つ被加工物を投入するキャビネット５１と噴射ノズル１１から噴射された研磨材から粉塵を分離して再使用可能な研磨材を回収し、貯溜する研磨材回収タンク２６と管を介して連通し、このようなブラスト加工装置にブロワないし送風機・排風機、圧縮機などの気流発生手段を連通して、気流をキャビネット５１から研磨材回収タンク２６へ発生させ、この気流に研磨材あるいは粉塵を乗せて移送する。前記研磨材回収タンク２６はそれ自体が所謂サイクロンであってもよく、あるいはサイクロン１３の下部に連通し、当該サイクロン１３の研磨材を単に貯溜するタンクであってもよい。
【００１９】
なお、本明細書において、各種研磨材噴射方式における噴射ノズルに研磨材供給管を介して研磨材を供給するタンクとして機能する研磨材収容部を総称して「研磨材回収タンク」という。
【００２０】
図１〜図３において、前記サイクロン１３の下部に連通する研磨材回収タンク２６は、下部に研磨材供給孔２４に連通する装填口２７を設け、前記研磨材回収タンク２６内に貯溜した研磨材３４が前記研磨材供給孔２４に落下して流入し、充填ないし装填されるようになっている。
【００２１】
好ましくは、前記研磨材回収タンク２６に図示せざるバイブレーターなどの振動発生手段又は圧縮空気などによるタンク内研磨材の攪拌手段を連結し、研磨材供給孔２４への研磨材３４の流入を確実にし、つまり、前記振動発生手段及び攪拌手段により、研磨材回収タンク２６内の研磨材３４のブリッジを防ぐことにより、研磨材供給孔２４への研磨材供給量が一定量となる。
【００２２】
前記研磨材供給孔２４を有する研磨材供給盤２０はモータ２１等の回転駆動手段の回転力で等速度に水平回転する好ましくは、例えば合成樹脂製の平板円盤状であり、前記装填口２７と前記研磨材供給孔２４が連通するように、前記装填口２７の下部に近接して設ける。なお、研磨材供給盤２０の厚さは、研磨材の供給・噴射量に対応して任意に設定でき、厚く形成すれば、研磨材供給孔２４の容積も大きく形成でき、多くの研磨材３４を効率よく供給できる。
【００２３】
又、前記研磨材供給孔２４は、前記研磨材供給盤２０の厚さ方向に穿設形成され、その形状は、装填ないし捕集された研磨材が研磨材供給孔２４を保持できるものである必要がある。つまり、研磨材供給孔２４に装填ないし捕集された研磨材が、研磨材供給管３０の端縁もしくはこの研磨材供給管３０を分岐した送受管２９の好ましくは金属製の送受口２２の下部に移送され、該部に画成される、前記研磨材供給孔及び該研磨材供給孔に臨む研磨材供給管に連通する空間３５において、研磨材を射出空気３１を成す、ここでは圧縮空気で射出され吹き上げることができればどのような形状でもよいが、例えば、紡錘形状の前記研磨材供給孔２４の（最大）内径を、３ mmとし、深さ１５ mm程度に形成すれば、微粉研磨材でも、研磨材が落下せずに射出空気３１による前記空間内に発生する乱流で研磨材供給孔２４より前記送受管２９内の空間３５内へ舞い上げられ該空間３５から射出される。
【００２４】
研磨材供給孔２４は、内径に対して深さが８倍以内であることが好ましく、深さが上記範囲外では、研磨材が残留することがあった。
【００２５】
又、研磨材供給孔２４は、複数の挿孔をそれぞれ研磨材供給盤２０の回転中心に対して同心円状に配置された同一の回転軌跡を描く複数の、図１〜図３の第１実施例では、３本の環状に形成し、又、１又は２本以上の複数列条に形成することができる。なお、この際前記複数の環状の研磨材供給孔２４列は、内周側及び外周側の各列において研磨材供給盤２０の直径方向において互いに重ならない位置に設ければ、各複数の研磨材供給孔２４は、研磨材供給盤２０の回転中常に、前記研磨材供給管３０の端縁もしくはこの研磨材供給管３０を分岐した送受管２９の送受口２２の下部に移送され、送受管２９に画成される一端が閉鎖され他端が前記研磨材供給孔２４及び該研磨材供給孔に臨む研磨材供給管２９に連通する空間３５内に複数位置することとなり、前記送受口２２への研摩材３４の供給が途切れることがない。
【００２６】
噴射ノズル１１に連通する研磨材供給管３０は、これを分岐して送受管２９とし、この送受管２９の端部に形成した送受口２２は、前記複数列の研磨材供給孔２４の回転軌跡、実施例では、複数の前記研磨材供給孔２４のすべての回転軌跡に臨ませて形成されることになる。
【００２７】
前記空間３５は、図２、図３（Ａ）に示すように、前記送受管２９の外壁を２重構造とし、前記送受管２９内及び２重構造外壁内空間に画成される。
【００２８】
したがって、研磨材供給孔２４は、図示せざる圧縮機又は、送風機から成る射出空気供給源に、送受口２２、空間（３５）を成す送受管２９、送受管２９の２重構造外壁内空間３５そして導管２８を介して連通している。
【００２９】
図３（Ｂ）は、前記導管２８から空間３５を成す射出空気の通路を、送受管２９の中央に立設し、研磨材供給管３０上に突設して圧縮機又は、送風機から成る射出空気供給源に連通し、直接前記導管２８の先端が研磨材供給孔２４へ臨むように構成したもので、図３（Ａ）における空間３５を有しない構造となっている。
【００３０】
又、前記送受管２９に、圧縮機又は、送風機から成る射出空気供給源に連通する導管２８の端部に形成した送受口２２が研磨材供給盤２０が回転可能に可及的接近あるいは摺接して設けられている。
【００３１】
研磨材供給孔２４に装填ないし捕集された研磨材は、前記研磨材供給盤２０の回転により、前記送受口２２の下部に移送され、導管２８からの射出空気３１により前記送受管２９を含む空間３５において研磨材が吹き上げられて前記研磨材供給管３０に送られる。
【００３２】
送受管２９に送られた研磨材は、この射出空気３１とは別に図示せざる送風機から成る加圧空気供給源からの加圧された空気を研磨材供給管３０に連結し、この加圧空気３２、ここでは、送風機からの０．０２ＭＰａ〜０．０６ＭＰａ好ましくは、約０．０５ＭＰａの空気により研磨材を被加工物に噴射することにより、所望の圧力での噴射が可能となる。
【００３３】
同一条件で、研磨材供給孔の深さを２５ mmとしたとき若干の研磨材の残留が認められた。
【００３４】
又、前記研磨材供給孔２４を複数列条に形成した場合、それぞれの研磨材供給孔２４の回転軌跡に臨ませて、複数の送受口２２を設け、該複数の送受口２２それぞれに対して連通した噴射ノズル１１を備えると、被加工物に複数の噴射ノズル１１から研磨材を安定して噴射することができる。
【００３５】
２０は研磨材供給盤で、本実施例では図１〜図３に示すように、研磨材供給盤２０の厚さ方向に、研磨材供給盤の回転中心に対して同心円状にすなわちそれぞれ同一回転軌跡で、その回転方向に連続する円形の孔である研磨材供給孔２４を３列平行に形成している。
【００３６】
一例として、前記供給孔２４内径を３ mm、深さ１５ mmとした。深さ２５ mmでは、若干の研磨材の残留が認められた。
【００３７】
研磨材供給盤２０は、モータ２１の回転駆動手段に連結されているが、回転駆動手段の回転速度は既知の手段により回転数が調整自在に構成されている。
【００３８】
なお、研磨材供給盤２０の回転速度を調整することにより回転数の増減を図り、噴射ノズル１１への研磨材供給量を調整することができる。例えば、研磨材供給盤２０の回転速度を速くすることにより研磨材が多く供給され、研磨材供給盤２０の回転速度を遅くすることにより研磨材が少なく供給される。なお、研磨材供給盤２０の回転速度を一定に維持することにより、常時安定した状態で一定量の研磨材が噴射ノズル１１へ供給され、定量の研磨材が噴射ノズル１１から連続して安定的に被加工物へ噴射される。したがって、他の研磨材供給孔２４の容積あるいは、送受口２２の開口面積などが一定のとき、研磨材供給盤２０の回転速度と研磨材供給量は相関関係にあるので、この関係式を求めて研磨材供給量を研磨材供給盤２０の回転速度でデジタル化することにより所望の研磨材供給量を容易に調整できる。
【００３９】
研磨材供給盤２０が回転駆動手段により等速度で回転すると、研磨材供給孔２４内に装填された研磨材が送受口２２下部に移送される。フットスイッチあるいはマイクロスイッチの作動により図示せざる電磁弁を開放して射出空気供給源から前記導管２８を介して射出空気３１を送ると、研磨材供給孔２４内の研磨材が送受口２２及び送受管２９を介して研磨材供給管３０内に射出され吹き上げられる。同時に、前記研磨材供給管３０は図示せざる送風機から成る加圧空気供給源に連通し、送受管２９を介して送られてきた研磨材を加圧空気３２もあいまって、高圧で噴射ノズル１１へ供給される。
【００４０】
さらに、前記研磨材回収タンク２６にバイブレイター又は撹拌手段を連結し、研磨材回収タンク２６に振動を与えるか又は研磨材回収タンク２６内の研磨材３４を撹拌することにより、研磨材３４が装填口２７より研磨材供給孔２４内に十分に装填され、研磨材供給孔２４に流入する研磨材の量は常時、定量になり、より一層安定した状態で一定量の研磨材が供給される。
【００４１】
キャビネット５１内で研磨材を噴射ノズル１１から被加工物へ噴射して被加工物をブラスト加工すると、研磨材は再使用可能な研磨材と、破損した再使用不可能な研磨材になり、これらの研磨材と被加工物が剥離して生じた粉塵等が共に導管５２を介して気流に乗ってサイクロン１３へ給送される。このサイクロン１３で再使用可能な研磨材から再使用不可能な研磨材と粉塵が分離され、再使用不可能な研磨材や粉塵はダストコレクタ５３へ給送され、ダストコレクタ５３内の下部に集積され、清浄な空気がダストコレクタ５３の排風機５４から外気へ放出される。一方、再使用可能な研磨材は研磨材回収タンク２６の底部へ貯溜した後、前述した動作が繰り返される。
【００４２】
上述の研磨材供給・噴射方法及び装置を用いて以下の加工条件にて、ブラスト加工した。
【００４３】
実施例
【表１】

加工圧力は、ノズルにおける加工圧力（射出圧＋加圧空気圧）、射出空気31圧力及び加圧圧縮空気３２圧力は機器の調整圧力、上記空気使用量は、ノズルにおける加工空気量（射出空気量＋加圧空気量）を示す。
【００４４】
上記実施例による加工で研磨材供給孔２４内に研磨材の残留はなく、ガラス基板に微細加工をしたところ、３０ cm^２あたりの均一性（加工の強い部分と弱い部分の差）は、２％以内で加工できた。
【００４５】
次に、図３〜図６の実施態様について、上述実施態様と異なる点につき、説明する。
【００４６】
図３（Ａ）において、２６は研磨材回収タンクで、略直方体を成す好ましくは密閉型のタンクで、研磨材回収タンク２６内の下部に流入した研磨材で成る研磨材層１７が下方に形成され、当該研磨材層１７の上方に空気層１８が形成される。
【００４７】
２０は研磨材供給盤で、本実施例では図３（Ａ）及び図６に示すように、研磨材供給盤２０の円周面に円周方向に連続する一連の断面コ字状の条溝で成る研磨材供給孔２４を円周面幅方向に平行に複数形成している。研磨材供給盤２０は研磨材回収タンク２６内の研磨材層１７中で垂直方向に回転自在に回転軸２５で軸承され、研磨材供給盤２０の上部又は上部の一部分が空気層１８に露出する位置に設けている。
【００４８】
図３（Ｂ）は、前述したように、直接前記導管２８の先端が研磨材供給孔２４へ臨むように構成したもので、図３（Ａ）における空間３５を有しない構造である。
【００４９】
図４は、研磨材供給盤２０の外周面に円周方向に連続する一連の円筒状の凹部で成る研磨材供給孔２４を円周面幅方向に複数形成している。この際前記複数の環状の研磨材供給孔２４列は、研磨材供給盤２０の外周の幅方向の各列において互いに重ならない位置に設けたものである。
【００５０】
したがって、研磨材供給盤２０の円周のほぼ下半部全体は研磨材層１７内に確実に没し、且つ研磨材供給盤２０の円周の上半部の一部が空気層１８に露出している。研磨材供給盤２０が回転する時、研磨材供給盤２０の円周の上半部の一部分が研磨材層１７内に没しているので研磨材が研磨材供給孔２４内に入り込み易くなり、研磨材層１７の研磨材が確実に空気層１８へ移送される。
【００５１】
前記回転軸２５は研磨材回収タンク２６の外部で、軸受により軸支され、回転軸２５の軸端に図示せざるプーリを設け、このプーリにモータ２１等の回転駆動手段に回転力を伝達するＶベルトを介して連結する。なお、前記回転駆動手段の回転速度は既知の手段により容易に調整自在に構成されている。
【００５２】
研磨材供給盤２０が回転駆動手段により等速度で図３（Ａ）、（Ｂ）の紙面上時計回り方向に回転すると、研磨材供給盤２０の円周面の研磨材供給孔２４内に入り込んで補集された研磨材層１７の研磨材が空気層１８へ移送される。前記研磨材供給盤２０を等速度で回転し、研磨材供給盤２０の円周面で補集される研磨材の量は定量となるので、噴射ノズル１１へ供給される研磨材の量が定量になる。
【００５３】
【発明の効果】
本発明は、以上説明したように構成されているので、研磨材供給盤の研磨材供給孔に装填ないし捕集された研磨材を、圧縮機からの例えば約０．１ＭＰａの射出空気にて研磨材供給管内に射出し、吹き上げ、さらに送風機からの例えば約０．０６ＭＰａの加圧空気で研磨材を噴射ノズルへ供給して噴射するので、射出空気の供給量は加圧空気供給量に比べ小さく、したがって、一定量の所望の噴射密度及び圧力で噴射でき、さらに被加工物に対して均一なブラスト加工が可能となった。
【００５４】
上述実施形態に見るように、同一性能のノズルにより、上記構成で加工圧力（ノズル加圧空気圧力）例えば約０．０５ MPaのとき空気使用量は、６．５Ｎm^３/minで、これを圧縮機のみで供給した場合の動力は４５Kw、圧縮機と送風機による場合は１１．５ Kwとなり、７０％強のエネルギーコストの削減が可能である。
【００５５】
又、本発明（請求項３）は、たとえ微粉性質を示す研磨材に対しても一定量の研磨材を安定的に連続して噴射ノズルへ供給・噴射することができた。
【００５６】
さらに、本願発明の実施形態において、以下に記載されるような効果を奏する。
【００５７】
本発明は研磨材供給盤の回転速度を変化させて、回転数を増減させることにより研磨材供給量の増減を図ることができ、又研磨材供給盤の回転速度に応じて研磨材を連続して安定した状態で一定量に供給することができる。したがって、研磨材供給盤の回転速度を自在に調整することにより、研磨材の種類に応じて所望の研磨材供給量に確実且つ容易に調整できる。しかも、研磨材供給量に対応する研磨材供給盤の回転速度をデジタル化することにより所望の研磨材供給量、したがって、噴射量を容易に調整できる。
【００５８】
あるいは、前記研磨材供給孔の数、密度、体積、容量、開口部の面積又は前記送受口の開口面積を変更し、任意設定量の研磨材を供給し噴射することができる。
【図面の簡単な説明】
【図１】本発明が適用可能な研磨材供給・噴射装置を備えたブラスト加工装置の正面図である。
【図２】本発明が適用可能な研磨材供給・噴射装置の要部を示す斜視図である。
【図３】（Ａ）本発明が適用可能な研磨材供給・噴射装置の他の実施態様における要部断面図である。
（Ｂ）本発明が適用可能な研磨材供給・噴射装置のさらに他の実施態様における要部断面図である。
【図４】本発明が適用可能な研磨材供給・噴射装置のさらに他の実施態様における要部断面を示す要部斜視図である。
【図５】本発明が適用可能な研磨材供給・噴射装置のさらに他の実施態様における要部断面を示す要部斜視図である。
【図６】従来技術及び本発明が適用可能な図２の装置における要部断面図。
【符号の説明】
１１噴射ノズル（ノズル本体）
１２研磨材ホース
１３サイクロン
１４ノズルチップ
１７研磨材層
１８空気層
２０研磨材供給盤
２１回転モータ
２２送受口
２４研磨材供給孔
２５回転軸
２６研磨材回収タンク
２７装填口
２８導管
２９送受管
３０研磨材供給管
３１射出（圧縮）空気
３２加圧空気
３４研磨材
３５空間
５０ブラスト加工装置
５１キャビネット
５２導管
５３ダストコレクタ
５４排風機[0001]
BACKGROUND OF THE INVENTION
In blasting, the abrasive in the abrasive recovery tank is quantitatively injected from the injection nozzle to the work piece, that is, maintaining the injection amount constant is an important blasting for good and stable blasting. This is one of the processing conditions, and in particular, in recent years, blasting has been increasingly used for performing fine cutting of several μm to several hundred μm in addition to traditional simple scale removal and deburring. For example, micro cutting of semiconductor, fine ceramic, PDP (plasma display) and other thin film surfaces, and micro cutting by blasting are performed as an alternative to machining, laser processing, and ultrasonic processing of metal parts. Yes. Especially when these processes are performed by an automated line, the control of the injection amount is an important factor.
[0002]
In order to meet such needs, the present invention continuously supplies a fine powder abrasive in an abrasive tank to a spray nozzle quantitatively and stably, and continuously supplies fine powder abrasive for injection. -It is related with the injection method and apparatus.
[0003]
[Prior art]
The traditional direct pressure sandblasting device (see, for example, Patent Document 1) is highly energy efficient and provides strong blast injection. In order to press and discharge the abrasive in a pressurized tank, the abrasive must be removed once. It was necessary to put in a pressurized tank, and continuous injection was not possible. New proposals have already been made to solve this problem. In this type of direct pressure blasting apparatus, as shown in FIG. 6, the abrasive in the abrasive recovery tank 26 is defined in a compacted state in a space 35 on the circumference of the abrasive supply board 20 that rotates horizontally. The abrasive material is dropped and loaded into the abrasive material supply hole 24, and the abrasive material is blown up by the injection compressed air 31 in the space 35 from the transmission / reception port 22 facing the rotation locus of the abrasive material supply hole 24, and the abrasive material is supplied through the transmission / reception tube 29. While being pumped to the pipe 30 as a pressurized mixed fluid with an abrasive, it is pumped by pressurized compressed air 32 and pressurized and supplied to the injection nozzle 11, and the abrasive 34 is jetted onto the workpiece (Patent Document 1). reference).
[0004]
Prior art document information of the present invention includes the following.
[Patent Document 1]
Japanese Utility Model Publication No. 3-9978 (page 1-2, FIGS. 1 and 4)
[Patent Document 2]
JP 11-347946 A (page 2-6, FIG. 1 to FIG. 10)
[0005]
[Problems to be solved by the invention]
In the conventional blasting apparatus, it is not necessary to put the abrasive in the pressurized tank in order to pressurize and discharge the abrasive in the pressurized tank. Although continuous injection became possible without accumulation of abrasives, reduction of energy costs was a problem.
[0006]
The present invention has been made to solve this problem, and is low in energy cost and applicable to the above-described prior art. Therefore, the problem of the conventional direct pressure type is eliminated and the abrasive recovery tank is removed. Or a fixed amount of abrasive can be supplied and sprayed in a stable state from the abrasive container communicating with this to the injection nozzle, and can be supplied according to the type of abrasive. An object of the present invention is to provide an abrasive supply / injection method and apparatus that can easily set the injection amount, can handle fine processing and micro-cutting, and can automate the processing line.
[0007]
[Means for Solving the Problems]
To achieve the above object, the fine abrasive supply and injection method of the present invention rotates the research Migakuzai supply board, abrasive recovery tank at a plurality of abrasive supply hole of the outer peripheral or side surface of the abrasive supplying Edition The fine powder abrasive is loaded or collected, and the abrasive supply pipe which is a space communicating with the abrasive supply hole and communicates with the injection nozzle on the rotation locus of the abrasive supply hole is provided upstream of the injection nozzle. A space formed by branching is defined, and injection air of 0.1 MPa or less from a compressor or blower is injected into this space, and the fine powder abrasive is supplied to the abrasive supply pipe communicating with the injection nozzle At the same time, by supplying 0.02 to 0.06 MPa of pressurized air , which is lower in pressure than the injection air and pumping the fine abrasive powder, from the blower to the abrasive supply pipe, Compatible with sandblasting process Kill (claim 1).
[0008]
Further, the apparatus of the present invention is provided with a loading port at the lower part of the polishing material recovery tank for storing the fine powdery polishing material , and a polishing material supply disk which has a plurality of polishing material supply holes facing the loading port and is rotatable by a rotation driving means. And a space formed by branching an abrasive supply pipe that communicates with the abrasive supply hole and communicates with the injection nozzle on the upstream side of the injection nozzle , facing the rotation trajectory of the abrasive supply hole. And a conduit for introducing an injection air of 0.1 MPa or less is provided in this space, and the conduit communicates with an injection air supply source including a compressor or a blower, and the abrasive supply pipe has a pressure lower than that of the injection air. A pressurized air supply source comprising a blower for supplying pressurized air of 0.02 to 0.06 MPa is communicated (claim 2 ).
[0009]
DETAILED DESCRIPTION OF THE INVENTION
The following are embodiments of the present invention.
[0010]
The abrasive supply holes are a plurality of rows of abrasive supply holes formed on the outer periphery of the abrasive supply plate or a plurality of rows formed on the side surfaces. For example, the abrasive supply holes are concentric with the rotation center of the abrasive supply plate. In a plurality of rows, for example, a plurality of abrasive supply holes are formed in an annular shape that draws the same rotation trajectory, and in addition to this or when the injection nozzle has a large injection port inner diameter and air consumption increases, It is effective to supply the material to the abrasive material supply pipe by the injection air and supply pressurized air for pumping the abrasive material to the abrasive material supply pipe.
[0011]
The abrasive supply board is rotated in the abrasive recovery tank to collect the abrasive, for example, in an abrasive supply hole formed on the outer periphery of the abrasive supply board, and through the abrasive supply pipe It can also be supplied to the injection nozzle.
[0012]
The abrasive injection amount is arbitrarily set by rotating the abrasive supply board at a set rotation speed or speed, or changing the number, density, volume, capacity, or area of the opening of the abrasive supply holes. Can be adjusted to the amount. Furthermore, the set amount of the abrasive falling to the abrasive supply board can be more reliably maintained constant by applying vibration to the abrasive recovery tank or stirring the abrasive in the abrasive recovery tank. it can.
[0013]
As a result of experiments, it has been found that the depth of the abrasive supply hole is preferably within 8 times the inner diameter.
[0014]
Also, facing the rotational trajectory of the abrasive supply holes formed in a plurality of rows, each can be provided with an abrasive supply pipe, and can be provided to communicate with a plurality of injection nozzles via the abrasive supply pipe. Can be improved.
[0015]
Further, the abrasive supply / injection apparatus of the present invention rotationally drives the abrasive supply board 20 having the abrasive supply holes 24 on the outer periphery thereof within the abrasive recovery tank or the abrasive accommodating portion (26) communicating therewith. And at least a part of the abrasive material supply hole 24 of the abrasive material supply board 20 is buried in the abrasive material 34 in the abrasive material accommodating portion (26) and the abrasive material supply hole. 24, a space 35 communicating with the abrasive supply pipe communicating with the abrasive supply hole and the injection nozzle is disposed, and a conduit 28 for injection air is provided in the space 35, and the conduit is connected to the compressor or , And can communicate with an injection air supply source comprising a blower.
[0016]
The abrasive material supply hole 24 can be formed from a number of concave marks having a planar rectangular shape or a circular shape or a concave groove formed so as to extend in the outer peripheral width direction of the abrasive material supply board.
[0017]
Embodiments of an abrasive material supply / injection method and apparatus according to the present invention will be described below with reference to the drawings.
[0018]
The blast processing apparatus 50 in which the abrasive material supply / injection apparatus of the present invention is installed includes an injection nozzle 11 for injecting the abrasive material to the workpiece, and is injected from the cabinet 51 and the injection nozzle 11 for injecting the workpiece. Dust is separated from collected abrasives, and reusable abrasives are collected and communicated with the abrasive collection tank 26 for storage through a tube. Such a blasting apparatus is connected to a blower, a blower, a blower or a compressor. The air flow generating means such as the above is communicated to generate an air flow from the cabinet 51 to the abrasive recovery tank 26, and this air flow is transferred with the abrasive or dust. The abrasive recovery tank 26 itself may be a so-called cyclone, or may be a tank that communicates with the lower part of the cyclone 13 and simply stores the abrasive of the cyclone 13.
[0019]
In this specification, an abrasive container that functions as a tank that supplies an abrasive to an injection nozzle in various abrasive injection methods via an abrasive supply pipe is collectively referred to as an “abrasive recovery tank”.
[0020]
1 to 3, the abrasive recovery tank 26 communicating with the lower part of the cyclone 13 is provided with a loading port 27 communicating with the abrasive supply hole 24 at the lower part, and the abrasive stored in the abrasive recovery tank 26. 34 falls and flows into the abrasive material supply hole 24, and is filled or loaded.
[0021]
Preferably, a vibration generating means such as a vibrator (not shown) or an agitating means for the abrasive in the tank by compressed air is connected to the abrasive recovery tank 26 to ensure that the abrasive 34 flows into the abrasive supply hole 24. That is, by preventing the bridge of the abrasive 34 in the abrasive recovery tank 26 by the vibration generating means and the agitating means, the amount of abrasive supplied to the abrasive supply hole 24 becomes a constant amount.
[0022]
The abrasive material supply board 20 having the abrasive material supply holes 24 preferably rotates horizontally at a constant speed by the rotational force of a rotational drive means such as a motor 21 and is preferably a flat plate disk made of, for example, synthetic resin. The abrasive supply hole 24 is provided close to the lower portion of the loading port 27 so as to communicate with each other. The thickness of the abrasive material supply board 20 can be arbitrarily set according to the amount of supply and injection of the abrasive material. If the abrasive material supply plate 20 is formed thick, the volume of the abrasive material supply hole 24 can be increased, and many abrasive materials 34 can be formed. Can be supplied efficiently.
[0023]
The abrasive supply hole 24 is formed in the thickness direction of the abrasive supply board 20 so that the loaded or collected abrasive can hold the abrasive supply hole 24. There is a need. That is, the abrasive loaded or collected in the abrasive supply hole 24 is the lower end of the end of the abrasive supply tube 30 or the metal receiving / receiving port 22 of the transmission / reception tube 29 branched from the abrasive supply tube 30. In the space 35 communicating with the abrasive material supply hole and the abrasive material supply pipe facing the abrasive material supply hole defined in the portion, the abrasive material forms the injection air 31. Any shape can be used as long as it can be injected and blown up. For example, if the spindle-shaped abrasive supply hole 24 has a (maximum) inner diameter of 3 mm and is formed to a depth of about 15 mm, a fine powder abrasive can be used. The abrasive material does not fall, and is blasted into the space 35 in the transmission / reception tube 29 from the abrasive material supply hole 24 by the turbulent flow generated in the space by the injection air 31 and is ejected from the space 35.
[0024]
The abrasive supply hole 24 preferably has a depth of 8 times or less with respect to the inner diameter. When the depth is outside the above range, the abrasive may remain.
[0025]
Further, the abrasive supply hole 24 is a plurality of the first implementations of FIGS. 1 to 3 that draw the same rotation locus in which a plurality of insertion holes are concentrically arranged with respect to the rotation center of the abrasive supply board 20. In the example, it can be formed in three rings, or in one or more rows. At this time, if the plurality of annular abrasive material supply hole 24 rows are provided at positions that do not overlap with each other in the diameter direction of the abrasive material supply board 20 in each of the inner circumferential side and outer circumferential side rows, the plurality of abrasive materials are provided. The supply hole 24 is always transferred to the edge of the abrasive supply pipe 30 or the lower part of the transmission / reception port 22 of the transmission / reception pipe 29 branched from the abrasive supply pipe 30 during the rotation of the abrasive supply board 20. One end is defined as being closed, and the other end is located in a plurality of spaces 35 communicating with the abrasive supply hole 24 and the abrasive supply pipe 29 facing the abrasive supply hole. The supply of the abrasive 34 is not interrupted.
[0026]
The abrasive material supply pipe 30 communicating with the injection nozzle 11 is branched into a transmission / reception tube 29, and the transmission / reception port 22 formed at the end of the transmission / reception tube 29 is a rotation locus of the plurality of rows of the abrasive material supply holes 24. In the embodiment, the plurality of abrasive supply holes 24 are formed so as to face all the rotation trajectories.
[0027]
As shown in FIGS. 2 and 3A, the space 35 has a double structure on the outer wall of the transmission / reception tube 29, and is defined in the inner space of the transmission / reception tube 29 and the outer wall of the double structure.
[0028]
Therefore, the abrasive supply hole 24 is connected to an injection air supply source composed of a compressor or a blower (not shown), a transmission / reception port 22, a transmission / reception tube 29 forming a space (35), and an inner space 35 of the double structure outer wall of the transmission / reception tube 29. And it communicates via the conduit 28.
[0029]
In FIG. 3B, an injection air passage that forms a space 35 from the conduit 28 is erected at the center of the transmission / reception pipe 29 and protrudes on the abrasive supply pipe 30 so as to be an injection composed of a compressor or a blower. It is configured to communicate with an air supply source so that the tip of the conduit 28 directly faces the abrasive supply hole 24, and does not have the space 35 in FIG.
[0030]
Further, a transmission / reception opening 22 formed at an end portion of a conduit 28 communicating with an injection air supply source composed of a compressor or a blower is brought close to or in sliding contact with the transmission / reception tube 29 as much as possible so that the abrasive supply plate 20 can rotate. Is provided.
[0031]
The abrasive material loaded or collected in the abrasive material supply hole 24 is transferred to the lower part of the transmission / reception port 22 by the rotation of the abrasive material supply plate 20, and includes the transmission / reception tube 29 by the injection air 31 from the conduit 28. In the space 35, the abrasive is blown up and sent to the abrasive supply pipe 30.
[0032]
Abrasive sent to handset tube 29 connects the pressurized air from the pressurized air supply source comprising forced air blower not shown separately from the injection air 31 this to the abrasive supplying pipe 30, the pressure Air 32, here 0.02 MPa to 0.06 MPa from a blower, preferably about 0.05 MPa of air is used to inject the abrasive material onto the work piece, thereby enabling injection at a desired pressure. Become.
[0033]
Under the same conditions, a slight amount of abrasive material was observed when the depth of the abrasive material supply hole was 25 mm.
[0034]
Further, when the abrasive supply holes 24 are formed in a plurality of rows, a plurality of transmission / reception ports 22 are provided so as to face the rotation trajectory of the respective abrasive supply holes 24, and each of the plurality of transmission / reception ports 22 is provided. When the communication injection nozzle 11 is provided, the abrasive can be stably injected from the plurality of injection nozzles 11 onto the workpiece.
[0035]
In this embodiment, as shown in FIGS. 1 to 3, 20 is an abrasive supply board, and is concentric with the center of rotation of the abrasive supply board in the thickness direction of the abrasive supply board 20. In the locus, abrasive supply holes 24 that are circular holes continuous in the rotation direction are formed in three rows in parallel.
[0036]
As an example, the supply hole 24 has an inner diameter of 3 mm and a depth of 15 mm. At a depth of 25 mm, some abrasive residue was observed.
[0037]
The abrasive material supply board 20 is connected to the rotational drive means of the motor 21. The rotational speed of the rotational drive means is configured such that the rotational speed can be adjusted by known means.
[0038]
In addition, by adjusting the rotational speed of the abrasive material supply board 20, the number of rotations can be increased and decreased, and the amount of abrasive material supplied to the injection nozzle 11 can be adjusted. For example, a large amount of abrasive is supplied by increasing the rotational speed of the abrasive material supply board 20, and a small amount of abrasive is supplied by reducing the rotational speed of the abrasive material supply board 20. In addition, by maintaining the rotational speed of the abrasive material supply board 20 constant, a constant amount of abrasive material is supplied to the injection nozzle 11 in a constantly stable state, and a fixed amount of abrasive material is continuously and stably supplied from the injection nozzle 11. To the workpiece. Therefore, when the volume of the other abrasive material supply holes 24 or the opening area of the transmission / reception port 22 is constant, the rotational speed of the abrasive material supply board 20 and the abrasive material supply amount are correlated, and this relational expression is obtained. By digitizing the abrasive supply amount at the rotational speed of the abrasive supply board 20, the desired abrasive supply amount can be easily adjusted.
[0039]
When the abrasive supply board 20 is rotated at a constant speed by the rotation driving means, the abrasive loaded in the abrasive supply hole 24 is transferred to the lower part of the transmission / reception port 22. When the solenoid valve (not shown) is opened by the operation of the foot switch or the micro switch and the injection air 31 is sent from the injection air supply source through the conduit 28, the abrasive in the abrasive supply hole 24 is transferred to the transmission / reception port 22 and the transmission / reception. It is injected into the abrasive supply pipe 30 through the pipe 29 and blown up. At the same time, the abrasive supply pipe 30 communicates with a pressurized air supply source composed of a blower (not shown), and the abrasive sent via the transmission / reception pipe 29 is combined with the pressurized air 32 so that the injection nozzle 11 is pressurized at high pressure. Supplied to.
[0040]
Further, a vibrator or agitation means is connected to the abrasive recovery tank 26, and the abrasive 34 is loaded by applying vibration to the abrasive recovery tank 26 or agitating the abrasive 34 in the abrasive recovery tank 26. The amount of abrasive material that is sufficiently loaded into the abrasive material supply hole 24 from the opening 27 and flows into the abrasive material supply hole 24 is always fixed, and a certain amount of abrasive material is supplied in a more stable state.
[0041]
When the abrasive is sprayed from the injection nozzle 11 to the workpiece in the cabinet 51 and the workpiece is blasted, the abrasive becomes a reusable abrasive and a damaged non-reusable abrasive. Both the dust and the like produced by the separation of the abrasive and the workpiece are fed to the cyclone 13 along the air flow through the conduit 52. The cyclone 13 separates the non-reusable abrasive and dust from the reusable abrasive, and the non-reusable abrasive and dust are fed to the dust collector 53 and accumulated in the lower part of the dust collector 53. Then, clean air is discharged from the exhaust fan 54 of the dust collector 53 to the outside air. On the other hand, after the reusable abrasive is stored in the bottom of the abrasive recovery tank 26, the above-described operation is repeated.
[0042]
Blasting was performed under the following processing conditions using the above-described abrasive supply / injection method and apparatus.
[0043]
Examples [Table 1]

The processing pressure is the processing pressure at the nozzle (injection pressure + pressurized air pressure), the injection air 31 pressure and the pressurized compressed air 32 pressure are the device adjustment pressure, and the amount of air used is the processing air amount at the nozzle (injection air amount + injection air amount + Pressure amount).
[0044]
In the processing according to the above embodiment, there was no abrasive remaining in the abrasive supply hole 24, and when the fine processing was performed on the glass substrate, the uniformity per 30 cm ² (difference between the strong and weak portions) was 2 % Could be processed.
[0045]
Next, the embodiment of FIGS. 3 to 6 will be described with respect to differences from the above-described embodiment.
[0046]
In FIG. 3A, reference numeral 26 denotes an abrasive recovery tank, which is preferably a sealed tank having a substantially rectangular parallelepiped shape, and an abrasive layer 17 made of abrasive that has flowed into the lower portion of the abrasive recovery tank 26 is formed below. Then, an air layer 18 is formed above the abrasive layer 17.
[0047]
In this embodiment, as shown in FIGS. 3 (A) and 6, a series of U-shaped cross-sections that are continuous with the circumferential surface of the abrasive supply board 20 in the circumferential direction. A plurality of abrasive supply holes 24 are formed in parallel to the circumferential surface width direction. The abrasive material supply board 20 is supported by a rotary shaft 25 so as to be rotatable in the vertical direction in the abrasive material layer 17 in the abrasive material recovery tank 26, and an upper part or a part of the upper part of the abrasive material supply board 20 is exposed to the air layer 18. Provided in position.
[0048]
FIG. 3B is a structure in which the tip of the conduit 28 directly faces the abrasive supply hole 24 as described above, and does not have the space 35 in FIG.
[0049]
In FIG. 4, a plurality of abrasive supply holes 24 each including a series of cylindrical concave portions continuous in the circumferential direction are formed on the outer peripheral surface of the abrasive supply board 20 in the circumferential surface width direction. At this time, the plurality of annular abrasive supply holes 24 are provided at positions that do not overlap each other in the width direction of the outer periphery of the abrasive supply board 20.
[0050]
Therefore, almost the entire lower half of the circumference of the abrasive supply board 20 is surely immersed in the abrasive layer 17, and a part of the upper half of the circumference of the abrasive supply board 20 is exposed to the air layer 18. is doing. When the abrasive supply board 20 rotates, a part of the upper half of the circumference of the abrasive supply board 20 is submerged in the abrasive layer 17, so that the abrasive easily enters the abrasive supply hole 24, The abrasive of the abrasive layer 17 is reliably transferred to the air layer 18.
[0051]
The rotary shaft 25 is supported by a bearing outside the abrasive recovery tank 26, and a pulley (not shown) is provided at the shaft end of the rotary shaft 25, and the rotational force is transmitted to a rotary drive means such as the motor 21 to the pulley. Connect via V-belt. The rotational speed of the rotational drive means is configured to be easily adjustable by known means.
[0052]
When the abrasive material supply board 20 is rotated in the clockwise direction on the paper surface of FIGS. 3A and 3B by the rotation drive means at a constant speed, the abrasive material supply board 20 enters the abrasive material supply holes 24 on the circumferential surface of the abrasive material supply board 20. The abrasive material of the abrasive material layer 17 collected in step 1 is transferred to the air layer 18. Since the abrasive supply board 20 is rotated at a constant speed and the amount of abrasive collected on the circumferential surface of the abrasive supply board 20 is fixed, the amount of abrasive supplied to the injection nozzle 11 is fixed. become.
[0053]
【The invention's effect】
Since the present invention is configured as described above, the abrasive material loaded or collected in the abrasive material supply hole of the abrasive material supply board is injected with, for example, about 0.1 MPa of injection air from the compressor. Since the abrasive is injected into the abrasive supply pipe, blown up, and further supplied with the abrasive to the injection nozzle with pressurized air of, for example, about 0.06 MPa from the blower, the supply amount of the injection air is set to the pressurized air supply amount. Therefore, it is possible to inject at a desired amount of injection density and pressure, and to perform uniform blasting on the workpiece.
[0054]
As seen in the above-described embodiment, when the processing pressure (nozzle pressurization air pressure), for example, about 0.05 MPa, is used in the above configuration by the nozzle having the same performance, the amount of air used is 6.5 Nm ³ / min. The power when supplied by the compressor alone is 45 Kw, and when the compressor and the blower are used, the power is 11.5 Kw, which can reduce the energy cost by more than 70%.
[0055]
Further, according to the present invention (Claim 3), a certain amount of abrasive material can be stably and continuously supplied and injected to the injection nozzle even for the abrasive material exhibiting fine powder properties.
[0056]
Furthermore, in the embodiment of the present invention, the following effects can be obtained.
[0057]
The present invention can increase or decrease the abrasive supply amount by changing the rotational speed of the abrasive supply board and increasing or decreasing the rotational speed, and the abrasive material can be continuously used according to the rotational speed of the abrasive supply board. In a stable and stable state. Therefore, by freely adjusting the rotational speed of the abrasive supply board, it is possible to reliably and easily adjust the desired abrasive supply amount according to the type of the abrasive. In addition, by digitizing the rotational speed of the abrasive material supply board corresponding to the abrasive material supply amount, the desired abrasive material supply amount, and hence the injection amount, can be easily adjusted.
[0058]
Alternatively, the number, density, volume, capacity, opening area, or opening area of the transmitting / receiving port of the abrasive supply holes can be changed, and an arbitrarily set amount of abrasive can be supplied and injected.
[Brief description of the drawings]
FIG. 1 is a front view of a blasting apparatus equipped with an abrasive supply / injection apparatus to which the present invention is applicable.
FIG. 2 is a perspective view showing a main part of an abrasive supply / injection apparatus to which the present invention is applicable.
FIG. 3A is a cross-sectional view of a main part in another embodiment of an abrasive material supply / injection apparatus to which the present invention is applicable.
(B) It is principal part sectional drawing in further another embodiment of the abrasive | polishing material supply / injection apparatus which can apply this invention.
FIG. 4 is a main part perspective view showing a cross section of a main part in still another embodiment of an abrasive material supply / injection apparatus to which the present invention is applicable.
FIG. 5 is a main part perspective view showing a cross section of a main part in still another embodiment of an abrasive material supply / injection apparatus to which the present invention is applicable.
6 is a cross-sectional view of the main part of the apparatus of FIG. 2 to which the prior art and the present invention can be applied.
[Explanation of symbols]
11 Injection nozzle (nozzle body)
12 Abrasive material hose 13 Cyclone 14 Nozzle tip 17 Abrasive material layer 18 Air layer 20 Abrasive material supply board 21 Rotating motor 22 Transmission / reception port 24 Abrasive material supply hole 25 Rotating shaft 26 Abrasive material recovery tank 27 Loading port 28 Conduit 29 Transmission / reception tube 30 Polishing Material supply pipe 31 Injection (compressed) air 32 Pressurized air 34 Abrasive material 35 Space 50 Blasting device 51 Cabinet 52 Conduit 53 Dust collector 54 Ventilator

Claims

Rotate the abrasive material supply board, and load or collect fine abrasive material in the abrasive material recovery tank at the outer periphery or the side surface of the abrasive material supply board. And a space formed by branching an abrasive material supply pipe communicating with the injection nozzle and at an upstream side of the injection nozzle, and communicating with the abrasive material supply hole , from the compressor or the blower. The injection air of 0.1 MPa or less is injected, the fine powder abrasive is supplied to the abrasive supply pipe communicating with the injection nozzle , and the fine powder abrasive is pumped at a lower pressure than the injection air. A method for supplying and injecting fine abrasive material, characterized in that compressed air of 0.02 to 0.06 MPa is supplied from a blower to the abrasive material supply pipe.

Provided with a loading port at the bottom of the abrasive recovery tank for storing the fine abrasive material , and provided with an abrasive material supply board having a plurality of abrasive material supply holes facing the loading port, which can be rotated by a rotational drive means. A space that faces the rotation trajectory of the hole and communicates with the abrasive supply hole and is formed by branching an abrasive supply pipe that communicates with the injection nozzle on the upstream side of the injection nozzle is disposed in this space. A conduit for introducing injection air of 1 MPa or less is provided, and the conduit communicates with an injection air supply source including a compressor or a blower , and 0.02 to 0.02 to 0.02 to 0 in the abrasive supply pipe having a pressure lower than that of the injection air. A continuous fine powder abrasive supply / injection apparatus characterized in that a pressurized air supply source comprising a blower for supplying pressurized air of .06 MPa is communicated.