JP2002326043A - Method and apparatus for jetting powder in powder jet machining - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the machining efficiency of powder jet machining by uniformalizing the powder concentration in a nozzle in the powder jet nozzle using a long sideways nozzle. SOLUTION: A powder supply roller 16 provided with recessed parts such as grooves or holes on the outer circumference of the roller is installed close to the powder jet nozzle 20, a powder layer 12, in which powder is filled to be contact with a part of the outer circumference of the powder supply roller, and the flow of a gas flowing to the powder jet nozzle are provided in a part of the outer circumference of the powder supply roller, the powder filled in the recessed parts 11 of the outer circumference of the powder supply roller is taken out with the flow of the gas by rotating the powder supply roller 16 to be jetted from the powder jet nozzle 20 close to the powder supply roller and the powder jet machining having the excellent machining efficiency is performed by changing the depth or the size of the recessed parts 11 of the powder supply roller corresponding to the gap of the powder jet nozzle to make the concentration of powder in the powder jet nozzle 20 constant and changing the number of rotations of the powder supply roller 16 to jet in a jet concentration suitable for the powder jet machining.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION A powder injection processing apparatus for performing various surface treatments by spraying various powders onto a processing material using a powder injection apparatus is used, for example, alumina or silicon carbide. Dry etching processing to cut the workpiece and form holes and grooves in the workpiece by spraying powder of high hardness onto the workpiece material such as silicon wafer, glass, ceramic, compound semiconductor, metal, etc. By spraying powder such as glass beads or high-speed steel beads onto the metal, the powder collides with the workpiece to increase the hardness of the metal surface due to collision heat. Using a powder such as a thermoplastic resin powder, the surface of the powder is melted by the impact heat of the powder colliding with the workpiece, and a thin film of these materials is formed on the glass or the like. Various processes are performed, such as powder deposition processing for adhering to the surface of the workpiece such as ceramic and resin, and cleaning processing for removing dirt attached to the surface of the workpiece by spraying powder on the surface of the workpiece. .

The present invention relates to a powder injection method and a powder injection method using a powder injection processing apparatus for performing uniform processing efficiently using a horizontally long nozzle in these processing using a powder injection apparatus. It relates to an injection device.

[0003]

2. Description of the Related Art Conventionally, as a method of performing processing using a powder injection processing apparatus, for example, an abrasive is used as a powder, and the powder is sprayed on a processing substrate using high-pressure air to form a partition of a plasma display. Sandblasting for performing cutting such as polishing of the surface of a silicon wafer is performed, and an apparatus as shown in FIG. 11 is used as a powder injection processing apparatus used for the sandblasting.

The powder is supplied to a powder supply device 1 together with the high-pressure gas 1.
From 0 to a powder supply pipe 28 such as a powder supply hose,
The abrasive and the high-pressure gas are mixed and injected onto the processing substrate 7 from the horizontally long powder injection nozzle 20 attached to the powder supply pipe 28.

[0005] The powder injected from the powder injection nozzle 20 is supplied from the hopper 33 to the main conduit 3 by the negative pressure of the dust collector 35.
4, only the powder which is classified into a classifier 32 such as a cyclone and used for processing enters the abrasive tank 21, and is again supplied from the powder supply device 10 to the powder injection nozzle 20 via the powder supply pipe 28. It is injected.

[0006] Dust that has shaved the processed substrate and dust that has been crushed and cannot be used are collected in a dust collector 35.

As described above, the powder is circulated and injected from the powder injection nozzle 20, and can be processed continuously.

The powder injection nozzle 20 uses a horizontally long nozzle in order to improve the uniformity of processing. The substrate to be processed is sent slowly from left to right in the main body of the powder injection processing apparatus. It moves back and forth to process the substrate.

[0009] In the powder injection processing apparatus currently used for forming the partition of the plasma display, the moving speed of the nozzle is about 20 m per minute, and the moving speed of the processing substrate is about 200 to 400 mm per minute. is there.

[0010]

In powder injection processing in which powder is injected by high-pressure gas for processing, when the amount of powder is large relative to the amount of high-pressure gas, powder is applied on the injected powder. A phenomenon occurs in which the body is sprayed, and the processing efficiency is reduced. In addition, when the amount of the powder is reduced, the number of particles hitting the processing substrate 7 is reduced, and the processing efficiency is similarly reduced.

In order to perform efficient powder injection processing,
It is necessary that the concentration of the powder injected from the powder injection nozzle 20 be substantially the same at any location in the nozzle.

In the conventional powder injection processing apparatus, the powder injection nozzle 2 is connected to the powder injection nozzle
Since the powder is supplied to the nozzle 0, when a horizontally long nozzle is used, the powder concentration near the center of the nozzle increases, and the powder concentration decreases with distance from the center. However, there is a problem that efficient processing cannot be performed.

Since powder is supplied from the powder supply device 10 to the powder supply nozzle 20 via the powder supply tube 28, the powder is supplied from the powder supply device to the powder supply tube stably. Even when the powder flow fluctuates inside the powder supply pipe, the powder is not supplied stably inside the nozzle when the powder is injected from the powder injection nozzle, and uniform processing cannot be performed. There was a problem.

[0014]

As a means for solving the above-mentioned problems, as shown in FIG. 1, a powder 5 is filled in a concave portion 11 of a powder supply roller in which a concave portion such as a groove or a hole is formed on the circumference of the roller. Thereafter, the powder filled in the powder supply roller recess 11 is taken out by the flow of the gas, and the cross section of the powder injection unit of the powder injection nozzle which is close to and parallel to the outer periphery of the powder supply roller 16 is
Powder injection nozzle 2 whose long side is 5 times or more longer than the short side
By injecting powder directly from 0, the concentration distribution of powder in the nozzle is made uniform, and by not using a powder supply pipe, there is no change in powder flow generated inside the powder supply pipe, and processing efficiency is improved. To perform stable and stable powder injection processing.

A powder layer 12 filled with powder so as to be in contact with a part of the circumference of a powder supply roller 16 having a concave portion such as a groove or a hole formed on the circumference, and a gas due to a gas pressure difference. A powder take-out section 19 for taking out the powder filled in the powder supply roller concave portion 11 by the flow of the powder is provided, and the powder supply roller 16 is rotated in the powder layer 12 by rotating the powder supply roller 16 by a driving force of a motor or the like. The powder is continuously filled in the concave portion 11 formed in the above, the powder is continuously taken out from the powder take-out section 19, and the powder is ejected from the powder ejecting nozzle in parallel with the outer periphery of the powder supply roller 16 in parallel. The powder is injected from the powder injection nozzle 20 having a section whose cross section is five or more times longer than the short side.

Powder supply roller 16 and powder injection nozzle 2
The distance from 0 is set to 100 mm or less, preferably 50 mm.
When the diameter is set to be equal to or less than millimeter, the powder is supplied directly from the powder supply roller 16 to the powder injection nozzle 20, so that stable powder injection becomes possible.

As a method of producing a gas flow formed by the gas pressure difference, as shown in FIG. 4, the powder injection device 26 and the powder supply pressure tank 22 are sealed except for the powder injection nozzle 20 and the high-pressure gas supply section 4. Then, by introducing the high-pressure gas 1 into the powder injection device 26, the inside of the powder injection device 26 is set to a high pressure compared to the atmospheric pressure, and the powder introduction unit 37 of the powder injection nozzle 20 is set in the powder injection device. And the powder injection unit 38 of the powder injection nozzle 20 is installed in an atmosphere at a pressure lower than the atmospheric pressure to create a flow of gas flowing from the powder supply unit of the powder injection device 26 to the powder injection nozzle 20. 3, the inside of the processing chamber 31 is set to a negative pressure compared to the atmospheric pressure by a vacuum pump or the like, the inside of the powder supply device is set to an atmosphere higher than the atmospheric pressure, and the powder injection port 38 of the injection nozzle 20 is set. Is installed in the processing chamber and the powder injection nozzle A method for creating a flow of gas flowing from the inside of the powder injection device to the powder injection nozzle by installing the powder introduction unit 37 of the zero in the powder injection device 26, as shown in FIG. The high-pressure gas injection nozzle 25 is installed, and the high-pressure gas injection nozzle 2 is
There is a method of creating a flow of gas flowing from the powder supply unit in the powder injection device 26 to the powder injection nozzle 20 by the negative pressure generated by injecting the high pressure gas 1 from 5.

The powder in the powder supply roller 16 is caused to flow by the flow of gas generated by these methods.
0, but it is possible to change the amount of powder supplied to the nozzle by changing the size and depth of the concave portion 11 of the powder supply roller, so that the powder is supplied to a narrow portion of the gap in the nozzle. Reduce the size of the concave portion of the powder supply roller in the part or reduce the depth to reduce the amount of powder supply, and the size of the concave portion in the powder supply roller of the part to supply to the wide part of the gap in the nozzle It is possible to increase the powder supply amount by increasing the depth or to increase the depth, to uniformly adjust the powder concentration in the nozzle, and to perform efficient powder injection processing.

Further, by setting the gap between the nozzles of the horizontally elongated powder injection nozzle 20 uniformly from end to end, and setting the depth and size of the recess 11 of the powder supply roller also uniform. The length of the injection portion of the powder injection nozzle 20 and the length of the concave portion 11 of the powder supply roller are set to be larger than the width of the processing substrate 7 because the concentration and the gas amount of the powder in the inside can be made uniform. By doing, the processing substrate 7
Alternatively, the processing substrate can be uniformly and efficiently processed only by moving one of the powder injection devices 26.

Since the effective injection density changes depending on the particle size, material and processing purpose of the powder, it is necessary to change the density of the powder to be injected. Is changed, the rotation of the powder supply roller 16 can be freely changed using an inverter or the like, so that the injection amount can be adjusted to the optimum injection amount for processing.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a powder injection method and apparatus in powder injection processing according to the present invention will be described below with reference to the drawings.

In the powder injection processing apparatus shown in FIGS. 6 and 8, the powder is discharged from the powder injection nozzle 38 of the powder injection nozzle toward the processing substrate 7 in the processing chamber 30 by the gas emitted from the powder injection nozzle 20. The body is injected. The powder injection device 26 does not need to be in the processing chamber 30, and may be outside the processing chamber, inject powder into the processing chamber from the powder injection nozzle 20, or may be installed in the processing chamber 30. Alternatively, only the powder injection port 38 of the injection nozzle 20 may be installed in the processing chamber.

The powder injected from the powder injection nozzle 20 is sprayed on the processing substrate 7, passes through the main conduit 34 by the negative pressure of the dust collector 35, and classifies cyclones and the like connected to the dust collector 35 and the dust collection conduit 39. Enter the machine 32.

In the classifier 32, the powder that can be used again for processing, the powder that has been crushed and cannot be used, and the dust obtained by shaving the processed substrate are separated and only the powder that can be used for processing is transferred from the classifier 32 to the powder tank 21. The unusable powder that has entered and crushed and the dust that has shaved the processed substrate are collected by the dust collector 35 and discarded. The powder that has entered the powder tank 21 is again supplied to the powder injection device 2.
6, powder injection nozzle 20 from powder supply roller 16
The powder 5 is supplied to the nozzle and the powder is injected from the powder injection nozzle 26 to perform powder injection processing.

As a method of injecting powder, as shown in FIGS. 4 and 8, the inside of the powder injection device 26 is pressurized by the high-pressure gas 1 and is injected from the injection nozzle 20 into an atmosphere below atmospheric pressure. As shown in FIG. 3, the inside of the processing chamber 31 is brought into a negative pressure state by a vacuum pump or the like, and the inside of the powder injection device 26 is electrically connected to the atmospheric pressure or an atmosphere higher than the atmospheric pressure to inject the powder into the processing chamber in the negative pressure state. The powder injection device 26 as shown in FIG.
A high-pressure gas injection nozzle 25 is installed in the inside, and the powder is supplied from the powder supply roller 16 to the powder injection nozzle 20 by the negative pressure generated by injecting the high-pressure gas from the high-pressure gas injection nozzle 25 to the powder injection nozzle 20. There is a method in which the powder is injected from the powder injection nozzle 20 with the high-pressure gas 1 supplied from the high-pressure gas injection nozzle 25. In the method in which the inside of the powder injection device 26 is pressurized with the high-pressure gas 1, Injection device 26
In order to maintain the inside of the powder injection device 26 in a pressurized state, only the powder injection unit 38 of the powder injection nozzle 20 is open to the outside air with the inside of the powder injection device 26 being a closed structure. In order to supply the powder to the powder supply device 10 while holding the powder, a powder supply pressure tank 22 that is in communication with the powder injection device 26 through the high-pressure gas conduit 23 is provided above the powder injection device 26. , Powder tank 21 and powder supply pressure tank 2
A powder supply valve 24 capable of holding the pressure of the powder supply pressure tank between the two is provided.

The powder supply valve 24 is opened while the inside of the powder injection device 26 is not pressurized, and the powder is supplied to the powder tank 2.
1 to the powder supply pressure tank 22 and the powder layer of the powder injection device, and when the powder is injected from the powder injection nozzle 20, the powder supply valve 24 is closed and the powder in the powder injection device 26 The pressure can be maintained, and when the powder has run out in the powder supply pressure tank 22, the injection is stopped and the powder injection device 2
The powder supply valve 24 is opened so that the inside of the container 6 becomes the atmospheric pressure, and the powder is supplied from the powder tank 21 to the powder supply pressure tank 22.

By arranging two powder supply valves 24 in series and providing another powder supply tank 22 between the powder supply valves 24, the inside of the powder injection device 26 is pressurized even during powder supply. The state can be maintained, and the powder can be continuously injected from the powder injection nozzle 20 without stopping the injection from the powder injection nozzle 20.

In the method of creating a negative pressure in the processing chamber 31 with a vacuum pump or the like, or in the method of forming a negative pressure with the high-pressure gas 1 injected from the high-pressure gas injection nozzle 25 and supplying powder, the inside of the powder injection device 26 is used. Therefore, the powder is directly supplied from the powder tank to the powder layer in the powder injection device 26 without using the powder supply pressure tank 21 and the powder supply valve 24.

A powder supply unit and a powder injection nozzle 20 are provided inside the powder injection unit 26. The powder supply unit 1 includes a powder supply roller 1 having a recess 11 such as a groove or a hole formed on the surface of the roller.
There are six.

The concave portion 11 of the powder supply roller is formed, for example, by forming a V-shaped groove on the circumference at regular intervals substantially in parallel with the circumference of the roller, and forming the V-shaped groove substantially perpendicular to the circumference of the roller. Whatever, such as those formed on the circumference at regular intervals, those formed with a V-shaped groove in the shape of a screw around the roller, those formed with a large number of circular holes, and those formed with a large number of elliptical holes Alternatively, a concave portion may be provided on the outer periphery of the roller, and the powder may be filled in the concave portion.

The powder layer 12 is provided on a part of the circumference of the powder supply roller 16, and the powder supply roller 16 is rotated by a driving force of a motor or the like, so that the powder Is filled, and the concave portion 1 of the powder supply roller is filled.
The powder 5 entering 1 is taken out, and the powder is injected from the powder injection nozzle 20.

As a method for supplying the powder to the powder supply roller 16, the powder layer 12 is provided on the powder supply roller 16 as shown in FIGS. 16 and the powder layer 12 as shown in FIGS.
Is provided below the powder supply roller 16, and the lower portion of the powder supply roller 16 is buried in the powder layer 12 so that the powder is lifted by the concave portion 11 of the powder supply roller.

When the powder in the powder injection device 26 is pressurized and the powder is injected from the powder injection nozzle 20, the powder injection device 2
When the gas pressure in the powder injection device 26 rises, the pressurization in the powder injection device 26 is released, and the injection from the powder injection nozzle 20 stops, the gas between the powder in the powder injection device 26 expands. Phenomena occur.

Therefore, when the powder layer 12 is located below the powder supply roller 16 as shown in FIGS. 8 and 9, the powder level of the powder supply pressure tank 22 and the powder level of the powder supply roller are controlled. When the level difference easily changes and the level of the powder surface of the powder supply roller changes, the powder supply roller 16
Because the amount of powder supplied to the powder changes and stable injection is not performed, the powder that is close to the outer periphery of the powder supply roller within 5 mm above the powder surface level of the powder layer 12 to be set A level holding unit 27 is provided so that the powder surface level of the powder layer 12 in contact with the powder supply roller 16 does not change.

FIG. 8 shows a configuration in which block-shaped powder level holders 27 are installed on both sides of the powder supply roller 16 inside the powder injection device, and FIG. It is a body level holding unit 27.

When the powder layer 12 is located above the powder supply roller 16 as shown in FIG. 4, the amount of powder in contact with the powder supply roller 16 does not change even if the pressure in the powder injection device 26 changes. Therefore, there is no need to provide a powder level holding unit.

As a method of supplying the powder filled in the concave portion 11 on the surface of the powder supply roller to the powder injection nozzle 20, the powder of the powder injection nozzle 20 is supplied to the powder supply roller 16 as shown in FIGS. The introduction part 37 is moved closer to within 5 mm, and the pressure difference between the inside of the powder injection device 26 and the atmosphere around the powder injection port 38 of the injection nozzle is changed from the high pressure gas layer 17 in the powder injection device 26 to the powder injection nozzle. Due to the flow of gas flowing between the powder introduction part 37 of the powder injection nozzle 20 and the powder supply roller 16 adjacent to the powder introduction part, the concave part 11 of the powder supply roller is formed by the gas flow to the powder injection nozzle 20. A method of taking out the filled powder 5 and injecting the powder from a powder injection nozzle 20 and installing a gap adjusting plate 18 in parallel with the outer periphery of the powder supply roller 16 as shown in FIG. Inside and powder of injection nozzle Due to a pressure difference from the atmosphere around the outlet 38, the powder 5 flows in parallel with the outer periphery of the powder supply roller flowing through the powder take-out section 19 formed by the gap adjustment plate 18 and the powder supply roller 16. There is a method in which the powder is taken out from the powder supply roller concave portion 11 and injected from the powder injection nozzle 20.

From the powder layer 12 to the powder supply roller recess 11
It is desirable to apply vibration to the powder supply pressure tank 22 and the powder injection device 26 with a vibrator 36 or the like to fill the powder into the recesses 11 of the powder supply roller so that the powder can easily enter.

The powder supply roller 16 adjusts the number of revolutions by using an inverter or the like so that the powder injection nozzle 2
It becomes possible to adjust the injection amount of the powder injected from 0.

[0040]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific examples of the embodiments of the above-described powder injection method and apparatus in the powder injection processing apparatus of the present invention will be described below with reference to the drawings.

[First Embodiment] An example of a powder injection device 26 in which the powder layer 12 in the powder injection device 26 is above the powder supply roller 16 in a device that pressurizes and injects the inside of the powder injection device 26. This will be described with reference to FIGS.

The powder supply valve 24 is opened, and the powder 5 is supplied from the powder tank 21 into the powder supply pressure tank 22 so as to be in contact with a part of the circumference of the powder supply roller 16. The powder layer 12 to which the powder is supplied from the upper part of the supply roller 16 is installed, and the powder 5 is supplied to the powder layer 12.

The vibrator 36 applies vibrations to the powder supply pressure tank 22 and the powder injection device 26 so that the powder layer 12
Then, the powder easily enters the concave portion 11 formed on the outer periphery of the powder supply roller.

A high-pressure gas layer 17 is provided so as to be in contact with a part of the outer periphery of the powder supply roller 16, and the high-pressure gas layer 17 and the inside of the powder supply pressure tank 22 are connected by a high-pressure gas conduit 23 so as to have the same pressure. .

The gap adjusting plate 1 is connected in parallel with the outer periphery of the powder supply roller 16 to the conductive portion between the high-pressure gas layer 17 and the powder injection nozzle 20.
8 is installed to adjust the speed of the gas flowing parallel to the outer periphery of the powder supply roller 16.

The powder supply valve 24 is closed, the high-pressure gas 1 is supplied from the high-pressure gas supply port 4, and the high-pressure gas layer 17 and the powder supply pressure tank connected to the high-pressure gas layer 17 by the high-pressure gas conduit 23. 22 is pressurized.

The powder injection port 38 of the powder injection nozzle 20 is in the processing chamber, and the interior of the processing chamber is at or below atmospheric pressure due to the negative pressure of the dust collector 35. Is introduced and pressurized, a high-pressure gas flows from the high-pressure gas layer 17 to the powder injection nozzle 20 through the powder take-out portion 19 formed in the gap between the gap adjusting plate 18 and the powder supply roller 16.

When the powder supply roller 16 is rotated by using a motor, the concave portion 11 on the powder supply roller is filled with the powder from the powder layer 12, and the high-pressure gas flowing through the powder take-out section 19 flows. The powder 5 filled in the concave portion 11 of the powder injection roller is taken out and rides on the flow of high-pressure gas, and the powder is injected from the powder injection nozzle 20 into the processing substrate 7 in the processing chamber.
Injected to.

The width of the powder supply roller is 260 mm, and the concave portion in the powder supply roller is a powder supply roller in which 1.5 mm vertical grooves are formed continuously in a length of 240 mm. The injection port cross section of the body injection nozzle used was a nozzle with a longitudinal direction of 240 mm and a nozzle gap of 0.5 mm.

The powder used was alumina particles having an average particle size of 8 μm, and the pressure of the high-pressure gas layer in the powder injection device was 0.2 MPa.
Set to a, and use a photosensitive dry film for sandblasting manufactured by Nippon Synthetic Chemical Industry for masking, fix the powder injection device, and move a glass substrate 200 mm square and 0.45 mm thick to the left and right. Then, through holes having a diameter of 0.5 mm were formed in the glass substrate at a pitch of 10 mm.

[Embodiment 2] FIG. 8 shows an example of a powder injection device in which the inside of the powder injection device 26 is pressurized and the powder layer 12 inside the powder injection device 26 is located below the powder supply roller 16. It is explained using.

The powder layer 12 of the powder injection device 26 is installed so as to be located below the powder supply roller 16, and the powder injection nozzle is provided above the powder supply roller 16 in close proximity to the powder supply roller 16. 20 powder introduction parts 37 are installed.

The concave portion 11 of the powder supply roller has a V-shaped groove formed in a screw shape on the outer periphery of the roller so that the powder is filled inside the powder supply roller.

In order to prevent the powder from flowing due to the expansion phenomenon of the gas in the powder due to the change in pressure in the powder injection device 26 and the powder level in the powder injection device 26 from changing, 26, a powder level holding unit 27 is installed within 5 mm from the outer periphery of the powder supply roller 16, but in this embodiment, the powder level holding unit 27 is used.
Is placed so that there is a gap of 1 mm from the outer periphery of the powder supply roller 16 having an outer shape of 200 mm, and a powder level holding unit 27 having a thickness of 30 mm is provided at a height 30 mm above the center of the powder supply roller 16. installed.

An electrostatic capacitance type level sensor 42 for detecting powder is installed in the powder supply pressure tank 22. The electrostatic capacitance level sensor is a sensor after 10 seconds or more from the opening of the powder supply valve 24. Operates and the sensor does not operate while the powder supply device is closed. The sensor operates only when the powder is supplied to the powder supply pressure tank 22 after processing. When the sensor is no longer detecting the powder due to a decrease, the lamp is notified to supply the powder.

A vibrator 36 is attached to the powder ejecting apparatus, and the powder ejecting apparatus 26 and the powder supply pressure tank 22 vibrate during processing so that the powder is supplied to the powder ejecting apparatus 26 and the powder supply in the powder ejecting apparatus. It is easy to be supplied to the roller recess 11,
A motor is directly connected to the powder supply roller 26 so that the rotation of the powder supply roller 26 can be changed by an inverter so that the amount of powder supply to the powder injection nozzle 20 can be set.

Powder injection device 26 and powder supply pressure tank 2
2 is connected by a high-pressure gas conduit 23 so that the powder supply pressure tank 22 and the inside of the powder injection device 26 have the same pressure.

The powder supply valve 24 is opened to supply the powder to the processing chamber 30. The powder enters the powder tank 21 from the cyclone 32, passes through the powder supply pressure tank 22, and stores the powder in the powder injection device. The powder is supplied to the processing chamber 3 until the powder level is filled in the lower part of the powder level holding unit and the electrostatic level sensor 42 in the powder supply pressure tank 22 is hidden.
0.

Using a vacuum pump, the processing substrate 7 is attracted to the substrate suction plate 8 and the processing substrate 7 is set in the processing chamber 30.

The powder supply valve 24 is closed and the high pressure gas supply port 4 is closed.
The high-pressure gas 1 is supplied into the powder injection device 26 and the powder supply pressure tank 22, and the vibrator 36 applies vibration to the powder injection device 26 and the powder supply pressure tank 22 to rotate the powder supply roller 16. Let it.

The high-pressure gas layer is pressurized by the high-pressure gas supplied to the high-pressure gas layer 17 of the powder injection device 26, and the powder injection port 38 of the powder injection nozzle in the processing chamber is enlarged by the dust collector 35. Since the pressure is set to be lower than the atmospheric pressure, a high-pressure gas flows from the high-pressure gas layer 17 inside the powder injection device 26 to the powder injection nozzle 20, and when the powder injection nozzle 20 is brought closer to the powder supply roller 16, Powder supply roller 1
A high-pressure gas flow is generated between the powder supply roller 6 and the powder introduction portion 37 of the powder injection nozzle, and the powder supply roller recess 1 is formed in the powder layer 12.
The powder 5 filled in 1 is taken out by the flow of the high-pressure gas, is injected from the powder injection nozzle 20, is injected to the processing substrate 7, and the powder injection processing is performed.

In this embodiment, the sectional length of the powder injection nozzle is set to 150 mm, the gap is set to 0.5 mm, the width of the powder supply roller is set to 170 mm, and the length of the groove in the powder injection nozzle is set to 150 mm. Was set to be 150 mm.

The gap between the injection nozzle and the injection supply roller is 1
It was set in millimeters, and the pressure in the powder injection device during powder injection was set to 0.05 MPa.

The oxide on the surface of the silicon wafer was removed using alumina powder having an average particle diameter of 6 μm.

[Embodiment 3] Using FIG. 7, the powder is taken out from the powder supply roller recessed part 11 by the negative pressure generated by injecting the high-pressure gas 1 from the high-pressure gas injection nozzle 25 to the powder injection nozzle 20, and the powder is taken out. An embodiment in which powder is supplied to the body injection nozzle 20 and the powder is sprayed on the processing substrate 7 by high-pressure gas from the high-pressure gas injection nozzle 25 will be described.

The powder supply roller 16 having a concave portion formed on the outer periphery of the roller inside the powder injection device 26 and the powder layer 1 filled with the powder so as to be in contact with a part of the outer periphery of the powder supply roller.
2 and an atmospheric pressure layer 14 connected to the atmospheric pressure, and a high-pressure gas supply nozzle 25 is installed to inject a high-pressure gas to the powder injection nozzle 20.

A gap adjusting plate 18 is provided in parallel with the outer periphery of the powder supply roller.
And a powder take-out section 19 for forming a gas flow in a gap between the powder feed roller and the powder supply roller concave section 11 to take out the powder 5.

The atmospheric pressure layer 14 and the powder injection nozzle 20 are connected by a powder take-out section 19, and a negative pressure is generated by injecting the high-pressure gas 1 from the high-pressure gas injection nozzle 25 to the powder injection nozzle 20. A gas flows from the atmospheric pressure layer 14 through the powder take-out section 19 to the powder injection nozzle 20.

A powder tank 21 is provided above the powder injection device, and a vibrator is attached to the powder tank 21. When the fluidity of the powder is poor, the powder is deposited on the powder layer 12 and the concave portion 11 of the powder supply roller. Vibration is applied so that the body is easily filled, and powder is supplied to the powder layer 12.

The powder supply roller 1 in the powder injection device 26
The powder 5 is filled into the powder supply roller recess 11 by rotation of the powder 6, and the powder 5 filled in the powder supply roller recess 11 is taken out by the flow of gas in the powder take-out section 19, and the powder 5 is removed from the atmospheric pressure layer 14. The powder is supplied to the powder injection nozzle 20 by the flow of the gas flowing to the powder injection nozzle 20, and the powder is injected from the powder injection nozzle 20 to the processing substrate 7 by the high-pressure gas 1 injected from the high-pressure gas injection nozzle 25. .

A thread-like groove having a pitch of 1.5 mm is formed as a recess in the powder supply roller, and high-pressure air having a pressure of 0.5 MPa is supplied from a high-pressure gas injection nozzle having a gap of 0.3 mm to a powder having a gap of 2 mm. The powder was sprayed to the spray nozzle, and the powder was sprayed from the powder spray nozzle to the processing substrate to perform powder spray processing.

The injected powder enters the cyclone from the processing chamber 30 and is classified, and only usable powder enters the powder tank 21 below the cyclone 32 and is again supplied to the powder layer 12 and is injected from the powder injection nozzle 20. Injection processing was continuously performed so that the uncrushed unusable powder and the dust obtained by shaving the processing material were collected in the dust collector 35.

The powder used was a glass bead having an average particle diameter of 30 μm, and was sprayed on a high-speed steel plate made of SKH-9 to heat-treat the surface of the material by the heat of collision when the powder collides with the material. The hardness was increased.

The size of the material used was a cylinder having a diameter of 30 mm. The length of the injection port of the high-pressure gas injection nozzle and the length of the injection section of the powder injection nozzle were both set to 50 mm. The length of the groove was also set to 50 mm.

[Embodiment 4] An example of a powder injection device 26 for injecting powder from atmospheric pressure to negative pressure will be described with reference to FIG.

The processing chamber is set at a negative pressure by a vacuum pump,
The powder injection port 38 of the powder injection nozzle 20 is installed in the processing chamber 30.

Inside the powder injection device 26, there is a powder supply roller 16 having a concave portion formed on the outer periphery of the roller, and the powder supply roller 16 is rotated by a driving force of a motor.

The powder layer 12 and the atmospheric pressure layer 14 are formed so as to be in contact with a part of the outer periphery of the powder supply roller. It is connected by a powder take-out part 19 which is a gap between the adjustment plate 18 and the powder supply roller 16.

The powder supply roller 16 is rotated, and the powder layer 1 is rotated.
When the powder supply roller 16 passes through the powder supply roller 16, the concave portion 11 of the powder supply roller is filled with the powder 5. The powder filled in the roller recess 11 is taken out, and the powder is supplied to the powder injection nozzle 20 by the flow of the gas flowing to the powder injection nozzle 20 so that the powder injection nozzle 2
The powder is injected to the processing substrate 7 in the processing chamber from 0 to a negative pressure to perform powder injection processing.

The speed of the gas flowing into the powder supply section is adjusted by adjusting the gap of the powder take-out section 19 with the gap adjustment plate 19, and the energy for blowing the powder from the powder supply roller recess 11 is adjusted. I do.

In this embodiment, the pressure inside the processing chamber is set to -0.05 MPa by a vacuum pump, and the difference from the atmospheric pressure is set to 0.05 MPa.

The length of the powder injection nozzle injection section was set to 100 mm and the gap was set to 1 mm.
The groove length of the groove roller is 10 mm with a 5 mm pitch screw shape.
0 mm.

The powder used was silicon carbide 3 μm.
The powder was sprayed to reduce the surface roughness of the polished stainless steel plate, and the surface was polished.

A cyclone and a filter are installed between the processing chamber and the vacuum pump so that the powder does not flow into the vacuum pump as much as possible. For the vacuum pump, a roots vacuum pump which is hardly affected by the powder is used. .

[0085]

The effect of the present invention is as follows. In the conventional powder injection processing apparatus, the powder supply apparatus 10 and the powder injection nozzle 20 are separated, and the powder supply pipe 28 such as a powder supply hose is used. Since the supply device 10 and the powder injection nozzle 20 are connected, even if a certain amount of powder is sent from the powder supply device 10 to the powder injection nozzle 20, the flow of the powder is disturbed inside the powder supply pipe 28. Although uniform powder injection could not be performed, stable injection was enabled by eliminating the powder supply pipe and bringing the powder supply unit and the powder injection nozzle 20 close to and integrated with each other.

In addition, since powder is conventionally supplied from the powder supply pipe 28 to the horizontally elongated powder injection nozzle 20, the amount of powder is increased only at the center of the nozzle, and the powder concentration in the nozzle is controlled uniformly. However, the powder is supplied to the injection nozzle 20 close to the powder supply roller 16 by rotating the powder supply roller 16 having a concave portion such as a groove or a hole formed on the outer periphery as a powder supply portion. Therefore, by changing the size and depth of the concave portion on the outer periphery of the powder supply roller according to the width of the gap of the powder injection nozzle 20, it becomes possible to make the concentration of the powder supplied to the powder injection nozzle 20 constant. By changing the number of revolutions by the inverter of the powder supply roller 16, the powder having the optimum concentration for processing can be uniformly supplied to the entire surface of the powder injection nozzle 20 and the processing efficiency can be improved. It became.

Conventionally, since the concentration in the powder injection nozzle could not be made constant, in order to perform uniform processing, both the processing substrate 7 and the powder injection nozzle 20 were moved so as to be perpendicular to perform uniform processing. Although it was necessary to make the width of the horizontal nozzle and the size and depth of the concave portion 11 of the powder supply roller constant, the powder injection amount and the gas injection amount of each part of the powder injection nozzle were reduced. It is possible to make each part of the powder injection nozzle have the same processing capability, and the length of the powder injection port 38 of the powder injection nozzle and the concave portion 11 of the powder supply roller can be set to the processing substrate 7. By making the width larger than the width, it is possible to uniformly process the processing substrate 7 only by moving one of the powder injection device 26 and the processing substrate 7 in a certain direction. Smaller than before It is possible to also drive unit could be smaller than conventional.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an outline of a powder injection device of the present invention.

FIG. 2 is an explanatory view of a cross section showing an outline of a powder supply device of the present invention.

FIG. 3 is a side sectional view showing a powder injection device according to an embodiment of the present invention for injecting during negative pressure.

FIG. 4 is a side sectional view showing the powder injection device according to the embodiment of the present invention.

FIG. 5 is a perspective view showing a powder injection device according to the embodiment of the present invention.

FIG. 6 is a perspective view showing an outline of a powder injection processing apparatus using the powder injection apparatus of the present invention.

FIG. 7 is a side sectional view showing the powder injection device according to the embodiment of the present invention.

FIG. 8 is a side sectional view showing the powder injection device according to the embodiment of the present invention.

FIG. 9 is a side sectional view showing an outline of the powder injection device of the present invention.

FIG. 10 is a side perspective view showing an outline of a powder injection device of the present invention.

FIG. 11 is an explanatory view showing an outline of a conventional powder injection processing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 High pressure gas 2 Exhaust 3 Air flow by differential pressure between negative pressure layer and atmospheric pressure layer 4 High pressure gas supply port 5 Powder 6 Powder + high pressure gas 7 Processing substrate 8 Processing substrate adsorption plate 9 Suction by negative pressure 10 Powder Supply device 11 Abrasive material supply roller recess 12 Powder layer 13 Vacuum layer 14 Atmospheric pressure layer 15 Negative pressure layer 16 Powder supply roller 17 High pressure gas layer 18 Gap adjusting plate 19 Powder take-out part 20 Powder injection nozzle 21 Powder tank Reference Signs List 22 powder supply pressure tank 23 high-pressure gas conduit 24 powder supply valve 25 high-pressure gas injection nozzle 26 powder injection device 27 powder level holding unit 28 powder supply pipe (powder supply hose) 29 anti-vibration rubber 30 processing chamber 31 powder Body injection processing device main body 32 Classifier (cyclone) 33 Hopper 34 Main body conduit 35 Dust collector 36 Vibrator 37 Powder introduction part of powder injection nozzle 38 Body injection powder injection port 39 for dust collection conduit 40 nozzle driving unit 42 capacitive sensor of the nozzle

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (reference) B24C 5/06 B24C 5/06 Z F term (reference) 4D075 AA01 AA31 AA34 AA81 AA83 AA84 AA85 DA06 DB01 DB11 DB13 DB14 DC22 EA02 EB01 4F033 AA01 AA04 AA14 BA01 CA05 DA01 EA01 NA01 QA01 QA03 QA09 QB02Y QB05 QB11X QB12Y QC02 QC07 QC09 QD01 QD02 QD04 QD05 QD16 QE14 QE21 QF01X QF07X QF07Y QF11XQFY QF11XQFY QF11XQFY

Claims (12)

[Claims] In a powder injection process for performing a surface treatment by spraying a mixture of a gas and a powder from a powder injection nozzle using a powder, a powder supply installed in a powder injection device. Part and powder inlet of powder injection nozzle
A powder injection apparatus characterized in that powder is supplied from a powder supply portion to a powder injection nozzle in a distance of 0 mm or less, preferably 50 mm or less. 2. The powder injection device according to claim 1, wherein the powder is supplied to a powder injection nozzle by filling the powder into a recess such as a groove and a hole formed on the surface of the roller. Powder injection equipment. 3. A cross section of a powder injection section of a powder injection nozzle used in the powder injection device according to claim 1 or 2, wherein a long side is at least 5 times a short side, and A powder injection device characterized in that a part of the lower side is parallel. 4. The powder injection device according to claim 1, wherein the powder supply unit and the powder injection nozzle are integrated. 5. A powder injection device according to claim 1, wherein the powder is injected from a powder injection nozzle into an atmosphere below atmospheric pressure by pressurizing the inside of the powder injection device. Powder injection method. 6. The powder injection apparatus according to claim 1, wherein the pressure in the processing chamber is lower than the atmospheric pressure and the pressure inside the powder injection apparatus, and the inside of the powder injection apparatus is at least atmospheric pressure. A powder injection method, wherein the powder is injected from the powder injection device by a pressure difference between the processing chamber and the powder injection device, which is in conduction. 7. The powder injection device according to claim 1, wherein a high-pressure gas injection unit is provided in front of the powder injection nozzle, and high-pressure gas is injected from the high-pressure gas injection unit to the powder injection nozzle. A powder injection method characterized in that powder is taken in from a concave portion of a powder supply roller by a gas flow generated by a negative pressure generated thereby and the powder is injected from a powder injection nozzle. 8. The powder supply device according to claim 1, wherein the powder layer is provided below the powder supply roller so that a part of the powder supply roller is buried. A powder injection nozzle, which is provided at an upper part of the powder supply nozzle in close proximity to a powder supply roller of 5 mm or less. 9. The powder injection device according to claim 8, wherein the powder supply device is arranged such that the height of the powder surface relative to the powder supply roller of the powder supply device is constant, and the powder is positioned close to the outer peripheral surface of the powder supply roller by 5 mm or less. A powder injection device comprising a level holding unit. 10. A powder injection method according to claim 5, wherein a powder layer and a high-pressure layer having a pressure higher than the atmospheric pressure are provided on the circumference of the powder supply roller, and the powder supply roller is rotated to rotate the powder. The powder is filled into the concave portion of the powder supply roller with the layer, and the high-pressure gas flows from the high-pressure layer through the powder injection nozzle to the atmosphere below atmospheric pressure. A powder ejecting apparatus, wherein the powder is supplied to a powder ejecting nozzle by taking out the powder filled in a supply roller. 11. A powder injection device according to claim 6, wherein a powder layer and an atmospheric pressure layer are provided on the circumference of the powder supply roller, and the powder supply roller is rotated to rotate the powder layer. The powder was filled into the concave portion of the powder supply roller, and the powder was supplied to the powder supply roller by the flow of gas flowing from the atmospheric pressure layer due to the negative pressure generated by the powder injection nozzle or the negative pressure near the blowout portion of the powder injection nozzle. A powder ejecting apparatus characterized in that the powder is taken out to supply the powder to a powder ejecting nozzle. 12. The powder injection device according to claim 9, wherein a gap adjusting plate is provided in parallel with an outer periphery of the powder supply roller to remove a powder filled in the powder supply roller. A powder injection method comprising adjusting a speed.