JP2003076022A5 - - Google Patents

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Publication number
JP2003076022A5
JP2003076022A5 JP2001267428A JP2001267428A JP2003076022A5 JP 2003076022 A5 JP2003076022 A5 JP 2003076022A5 JP 2001267428 A JP2001267428 A JP 2001267428A JP 2001267428 A JP2001267428 A JP 2001267428A JP 2003076022 A5 JP2003076022 A5 JP 2003076022A5
Authority
JP
Japan
Prior art keywords
group
alicyclic hydrocarbon
general formula
alkyl group
hydrogen atom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001267428A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003076022A (ja
JP4240857B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001267428A priority Critical patent/JP4240857B2/ja
Priority claimed from JP2001267428A external-priority patent/JP4240857B2/ja
Publication of JP2003076022A publication Critical patent/JP2003076022A/ja
Publication of JP2003076022A5 publication Critical patent/JP2003076022A5/ja
Application granted granted Critical
Publication of JP4240857B2 publication Critical patent/JP4240857B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001267428A 2001-09-04 2001-09-04 ポジ型レジスト組成物 Expired - Fee Related JP4240857B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001267428A JP4240857B2 (ja) 2001-09-04 2001-09-04 ポジ型レジスト組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001267428A JP4240857B2 (ja) 2001-09-04 2001-09-04 ポジ型レジスト組成物

Publications (3)

Publication Number Publication Date
JP2003076022A JP2003076022A (ja) 2003-03-14
JP2003076022A5 true JP2003076022A5 (https=) 2006-01-19
JP4240857B2 JP4240857B2 (ja) 2009-03-18

Family

ID=19093561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001267428A Expired - Fee Related JP4240857B2 (ja) 2001-09-04 2001-09-04 ポジ型レジスト組成物

Country Status (1)

Country Link
JP (1) JP4240857B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4145075B2 (ja) * 2002-05-27 2008-09-03 富士フイルム株式会社 感放射線性樹脂組成物
JP4498690B2 (ja) * 2002-05-30 2010-07-07 ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. 新規樹脂およびそれを含有するフォトレジスト組成物
US8722306B2 (en) 2007-06-05 2014-05-13 Jsr Corporation Radiation-sensitive resin composition
JP6596306B2 (ja) * 2015-11-02 2019-10-23 株式会社カネカ ポジ型硬化性組成物、硬化物および薄膜トランジスタ

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