JP2003066456A - Method and device for manufacturing liquid crystal device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing a liquid crystal device wherein appropriate rubbing treatment can be realized by promptly removing a foreign matter generated by rubbing. SOLUTION: A groove or a hole is formed at a table for placing and rubbing a substrate for the liquid crystal device along the edge of the substrate or along the edge of a pallet on which the substrate is mounted to perform rubbing. A sucking hole is provided at the groove or the hole or in the vicinity of the groove or the hole.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a liquid crystal device, and more particularly to a method and an apparatus for manufacturing a liquid crystal device relating to a rubbing process.

[0002]

2. Description of the Related Art A liquid crystal device such as a liquid crystal light valve is constructed by enclosing a liquid crystal between two substrates such as a glass substrate and a quartz substrate. In a liquid crystal light valve, for example, a thin film transistor (Thin Film Transi) is provided on one substrate.
store. Hereinafter, active elements such as TFTs) are arranged in a matrix, and a counter electrode is arranged on the other substrate.
Image display is performed by changing the optical characteristics of the liquid crystal layer sealed between both substrates according to an image signal.

The TFT substrate on which the TFTs are arranged and the counter substrate arranged so as to face the TFT substrate are manufactured separately, and are bonded together with high precision in the panel assembling process, and then, between the TFT substrate and the counter substrate. Liquid crystal is sealed in.

In the panel assembling process, first, in each substrate process, an alignment film is formed on the facing surfaces of the TFT substrate and the counter substrate, respectively, that is, on the surfaces of the counter substrate and the TFT substrate in contact with the liquid crystal layer. Then, a rubbing process is performed. Next, a seal portion serving as an adhesive is formed on the edge of one of the substrates. The TFT substrate and the counter substrate are attached to each other using the seal portion, and pressure-bonded and cured while performing alignment. A notch is provided in a part of the seal portion, and the liquid crystal is sealed through this notch.

By rubbing the surface of the alignment film,
The alignment of liquid crystal molecules when no voltage is applied is determined. The alignment film is formed by applying, for example, polyimide (PI) with a thickness of about several tens of nanometers. By forming the alignment films on the surfaces of both substrates facing the liquid crystal layer, the liquid crystal molecules can be aligned along the surfaces of the substrates. The rubbing treatment is to form a fine groove on the surface of the alignment film or to align the polymer side chains in one direction to form a film having orientation anisotropy. , The alignment of liquid crystal molecules can be defined. Figure 2
1 is a schematic view showing a normal rubbing apparatus.

A plurality of liquid crystal substrates 10 are placed on the pallet 100.
1 is placed. The pallet 100 mounted on the mounting table 105 moves in the horizontal direction indicated by the arrow to move the substrate 101.
To transport. A rubbing roll 102 is arranged above the transportation path of the pallet 100. Rubbing roll 10
2 is provided with a rayon rubbing cloth 103 on the peripheral surface. The rubbing roll 1 is moved by rotating the rubbing roll 102 in the direction indicated by the arrow to convey the pallet 100.
By the rotation of 02 and the conveyance of the pallet 100, the entire surface of the substrate is rubbed with the rubbing cloth 103 to perform rubbing processing.

[0007]

On the surface of the rubbing cloth 103, the rayon tips 104 are, for example, 1.
It extends from 0 to 2.0 mm. The rubbing roll 102 and the substrate 1 are placed at a distance required to apply an appropriate rubbing pressure.
When the pallet 100 is conveyed while setting the interval to 01 and rotating the rubbing cloth, the bristle tips 104 contact the substrate 101 or the pallet 100 to perform rubbing.

However, since the hair tips 104 contact the substrate 101 and the like, shavings of the alignment film during rubbing and foreign matter 106 such as fibers of the hair tips 104 are pallet 10 on the mounting table 105.
It may be deposited on the periphery of 0. When the rubbing process is continuously performed on the plurality of substrates, the next substrate is mounted on the foreign matter 106 generated by the rubbing process of the previous substrate. FIG. 22 is a diagram for explaining a case where a problem occurs in the rubbing device of FIG. That is, as shown in FIG. 22, the pallet 100 is placed on the foreign matter 106. As a result, the so-called roll pushing amount of the rubbing roll 102 with respect to the substrate 101 is different on the same substrate, and the portion on the foreign matter 106 has a higher rubbing strength than the portion without the foreign matter.

The difference in the rubbing intensity on the substrate surface causes not only the occurrence of reverse twist domains but also variations in display quality such as transmittance, contrast and TV characteristics.

Further, when the foreign matter itself floats or the like, it adheres to the liquid crystal substrate to cause a foreign matter defect, or the foreign matter is sandwiched between the substrates to cause a gap defect, or adheres to the rubbing roll to cause uneven rubbing strength. As a result, uneven streaks occur, and the rubbing process is not properly performed, resulting in defective display.

[0011]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and a method of manufacturing a liquid crystal device capable of realizing a proper rubbing treatment by promptly eliminating foreign substances generated by rubbing and a rubbing process. An object is to provide a manufacturing apparatus.

According to the method of manufacturing a liquid crystal device of the present invention, a groove or hole is formed on a table on which a substrate for a liquid crystal device is mounted and rubbed, along the edge of the substrate or along the edge of a pallet on which the substrate is mounted. Then rub.

The liquid crystal device manufacturing apparatus according to the present invention has a groove or hole formed along the edge of the substrate or along the edge of a pallet on which the substrate is mounted on a table on which the substrate for the liquid crystal device is mounted and rubbed. Have.

With such a structure, it is possible to promptly remove the foreign matter generated by rubbing and realize an appropriate rubbing process.

The method of manufacturing a liquid crystal device according to the present invention further comprises:
It is desirable to provide a suction port in the groove or hole or in the vicinity of the groove or hole.

The liquid crystal device manufacturing apparatus of the present invention further comprises:
It is desirable to have a suction port near the groove or hole or in the vicinity of the groove or hole.

With such a structure, the foreign matter can be more surely removed by suction.

In the method of manufacturing a liquid crystal device according to the present invention, it is desirable that the groove or the hole is formed at least on the side opposite to the rubbing roll conveyance direction of the substrate.

In the liquid crystal device manufacturing apparatus of the present invention, it is desirable that the groove or the hole be formed at least on the side opposite to the rubbing roll conveyance direction of the substrate.

According to this structure, the foreign matter can be sufficiently removed at the portion where the foreign matter is most likely to be deposited.

In the method of manufacturing a liquid crystal device according to the present invention, it is desirable that the groove or the hole is provided over the entire circumference of the edge of the substrate or the pallet.

In the liquid crystal device manufacturing apparatus of the present invention, it is desirable that the grooves or holes are provided over the entire circumference of the edge of the substrate or pallet.

According to such a structure, the foreign matter can be eliminated all around the substrate or pallet on which the foreign matter is deposited.

In the method for manufacturing a liquid crystal device of the present invention, the side wall surface of the groove or hole formed along the edge, which is closer to the edge side, is flush with the edge surface. desirable.

In the liquid crystal device manufacturing apparatus of the present invention, the side wall surface of the groove or hole formed along the edge, which is closer to the edge side, is flush with the edge surface. desirable.

According to this structure, the foreign matter can be surely dropped into the groove without being deposited on the table.

According to the method of manufacturing a liquid crystal device of the present invention, a suction port is formed near the edge of the substrate or the edge of the pallet on which the substrate is mounted on the table on which the substrate for the liquid crystal device is mounted and rubbed. Rub while sucking from.

The liquid crystal device manufacturing apparatus of the present invention has a suction port formed on the table on which the substrate for the liquid crystal device is mounted and rubbed, near the edge of the substrate or near the edge of the pallet on which the substrate is mounted.

According to such a structure, it is possible to reliably eliminate the foreign matter generated in the vicinity of the substrate or the pallet caused by rubbing.

According to the method of manufacturing a liquid crystal device of the present invention, the edge of the table for mounting and rubbing the substrate for the liquid crystal device is formed along the edge of the substrate or along the edge of the pallet on which the substrate is mounted, and the table is Rubbing is performed by providing a capture plate around the.

In the liquid crystal device manufacturing apparatus of the present invention, the edge of the table on which the substrate for the liquid crystal device is mounted and which is rubbed is formed along the edge of the substrate or the edge of the pallet on which the substrate is mounted. Has a capture plate provided around the.

According to such a structure, it is possible to reliably eliminate the foreign matter generated by the rubbing, which is generated in the vicinity of the substrate or the pallet.

[0033]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

Hereinafter, with reference to FIGS. 1 to 16,
The first embodiment according to the present invention will be described in detail.

In the present embodiment, when the liquid crystal device substrate is rubbed, a groove is formed along the edge of the substrate on the table on which the liquid crystal device substrate is mounted and rubbed to perform rubbing. It is the one.

First, the structure of the liquid crystal panel will be described with reference to FIGS.

FIG. 2 is an equivalent circuit diagram of various elements, wirings, etc. in a plurality of pixels forming the pixel region of the liquid crystal device according to the first embodiment of the present invention. FIG. 3 is a plan view of an element substrate such as a TFT substrate according to the first embodiment of the present invention as viewed from the counter substrate side together with the respective constituent elements formed thereon. FIG. 4 is a sectional view of the liquid crystal device after the assembly process of bonding the element substrate and the counter substrate according to the first embodiment of the present invention and sealing the liquid crystal at the position of line HH ′ in FIG. FIG. FIG. 5 is a cross-sectional view showing in detail the liquid crystal device according to the first embodiment of the present invention. FIG. 6 is a flowchart showing a panel assembling process according to the first embodiment of the present invention.

As shown in FIGS. 3 and 4, the liquid crystal panel is constructed by enclosing the liquid crystal 50 between the element substrate 10 such as a TFT substrate and the counter substrate 20. Pixel electrodes that form pixels are arranged in a matrix on the element substrate 10. FIG. 2 shows an equivalent circuit of the elements on the element substrate 10 which form the pixels.

As shown in FIG. 2, in the pixel area,
The plurality of scanning lines 3a and the plurality of data lines 6a are arranged so as to intersect with each other, and the pixel electrodes 9a are arranged in a matrix in a region partitioned by the scanning lines 3a and the data lines 6a. A TFT 30 is provided corresponding to each intersection of the scanning line 3a and the data line 6a, and the pixel electrode 9a is connected to this TFT 30.

The TFT 30 is turned on by the ON signal of the scanning line 3a, whereby the image signal supplied to the data line 6a is supplied to the pixel electrode 9a. This pixel electrode 9
A voltage between a and the counter electrode 21 provided on the counter substrate 20 is applied to the liquid crystal 50. Further, a storage capacitor 70 is provided in parallel with the pixel electrode 9a, and the storage capacitor 70 enables the voltage of the pixel electrode 9a to be retained for a time that is, for example, three digits longer than the time when the source voltage is applied. The storage capacitor 70 improves the voltage holding characteristic and enables image display with a high contrast ratio.

FIG. 5 is a schematic sectional view of a liquid crystal panel focusing on one pixel.

The element substrate 10 made of glass or quartz is provided with an LD.
A TFT 30 having a D structure is provided. TFT30
Is provided with a scanning line 3a forming a gate electrode via an insulating film 2 in a semiconductor layer in which a channel region 1a, a source region 1d and a drain region 1e are formed. A data line 6a is laminated on the TFT 30 via the first interlayer insulating film 4,
The data line 6a is electrically connected to the source region 1d through the contact hole 5. A pixel electrode 9a is stacked on the data line 6a via a second interlayer insulating film 7, and the pixel electrode 9a is electrically connected to the drain region 1e via a contact hole 8.

When the ON signal is supplied to the scanning line 3a (gate electrode), the channel region 1a becomes conductive,
The source region 1d and the drain region 1e are connected to each other, and the image signal supplied to the data line 6a is applied to the pixel electrode 9a.

A storage capacitor electrode 1f extending from the drain region 1e is formed in the semiconductor layer. The storage capacitance electrode 1f is connected to the capacitance line 3b via the insulating film 2 which is a dielectric film.
Are arranged so as to face each other, and thereby a storage capacitor 70 is formed. An alignment film 16 made of a polyimide-based polymer resin is laminated on the pixel electrode 9a, and is rubbed in a predetermined direction.

On the other hand, the counter substrate 20 is provided with the first light-shielding film 23 in a region opposed to the data line 6a, the scanning line 3a and the TFT 30 forming region of the TFT array substrate, that is, in the non-display region of each pixel. . Due to the first light-shielding film 23, incident light from the counter substrate 20 side allows the channel region 1a, the source region 1d and the drain region 1e of the TFT 30 to be incident.
Is prevented from entering. A counter electrode (common electrode) 21 is formed on the first light-shielding film 23 over the entire surface of the substrate 20. An alignment film 22 made of a polyimide-based polymer resin is laminated on the counter electrode 21 and rubbed in a predetermined direction.

Liquid crystal 50 is sealed between the element substrate 10 and the counter substrate 20. As a result, the TFT3
0 writes the image signal supplied from the data line 6a to the pixel electrode 9a at a predetermined timing. Depending on the written potential difference between the pixel electrode 9a and the counter electrode 21, the orientation or order of the molecular assembly of the liquid crystal 50 is changed to modulate light and enable gradation display.

As shown in FIGS. 3 and 4, the counter substrate 20
A second light-shielding film 42 is provided as a frame for partitioning the display area. The second light shielding film 42 is, for example, the first light shielding film 2
It is made of the same or different light-shielding material as 3.

A sealing material 41 for enclosing the liquid crystal in a region outside the second light-shielding film 42 is formed between the element substrate 10 and the counter substrate 20. The sealing material 41 is arranged so as to substantially match the contour shape of the counter substrate 20, and fixes the element substrate 10 and the counter substrate 20 to each other. The sealing material 41 is the element substrate 1
A part of one side of 0 is missing, and the liquid crystal 5 is provided in a gap between the bonded element substrate 10 and counter substrate 20.
A liquid crystal injection port 78 for injecting 0 is formed. After the liquid crystal is injected from the liquid crystal injection port 78, the liquid crystal injection port 78 is sealed with a sealing material 79.

A data line driving circuit 61 and mounting terminals 62 are provided along one side of the element substrate 10 in a region outside the sealing material 41 of the element substrate 10, and along two sides adjacent to the one side. , A scanning line drive circuit 63 is provided. A plurality of wirings 64 for connecting the scanning line drive circuits 63 provided on both sides of the screen display area are provided on the remaining side of the element substrate 10. The element substrate 1 is provided at least at one corner of the counter substrate 20.
A conductive material 65 is provided to electrically connect 0 and the counter substrate 20.

Next, the panel assembling process will be described with reference to FIG. The element substrate 10 (TFT substrate) and the counter substrate 20 are manufactured separately. In the next steps S2 and S7, the alignment films 16 and 22 are formed by applying polyimide (PI) to be the alignment films 16 and 22 to the TFT substrate and the counter substrate 20 prepared in steps S1 and S6, respectively. To do. Next, in steps S3 and S8, the element substrate 10 is
A rubbing process is performed on the alignment film 16 on the surface and the alignment film 22 on the surface of the counter substrate 20.

Next, in steps S4 and S9, a cleaning process is performed. This cleaning step is for removing dust generated by the rubbing process.

After the cleaning process is completed, the seal material 41 and the conductive material 65 (see FIG. 3) are formed in step S5. Note that the sealing material and the conductive material may be formed on the counter substrate side. Next, in step S10, the element substrate 10 and the counter substrate 20 are bonded together, and in step S11, they are pressure-bonded while being aligned, and the sealing material 41 is cured. Finally, in step S12, the liquid crystal is sealed from the notch provided in a part of the sealing material 41, and the notch is closed to seal the liquid crystal. Then, the mother glass substrate on which the plurality of liquid crystal devices are mounted is divided for each liquid crystal device (S13).

In S3 and S8 of FIG. 6, each liquid crystal device substrate is rubbed, and the device configuration will be described with reference to FIG. FIG. 1 is a configuration diagram showing a configuration of a liquid crystal device manufacturing apparatus according to a first embodiment of the present invention.

In FIG. 1, 11 is a rubbing roll, which rotates in the direction indicated by the arrow. Reference numeral 12 is a liquid crystal substrate, and 13 is a pallet on which the liquid crystal substrate 12 is placed. The pallet 13 is placed on a table 14 which is a placing table, sucked from holes (not shown) provided on the table 14 and adsorbed on the surface of the table 14. The table 14 is horizontally conveyed in a direction indicated by an arrow (hereinafter, also referred to as a conveyance direction) and is rotated by the rubbing roll 1.
1, the surface of the liquid crystal substrate 12 is rubbed. The table 14 may be fixed and the rubbing roll 11 may be conveyed in a direction opposite to the direction indicated by the arrow. Furthermore, both the table 14 and the rubbing roll 11 may move so that the table 14 is relatively conveyed in the direction shown in FIG.

Grooves 15 are formed on the upper surface of the table 14 along the edge of the pallet 13 on which the liquid crystal substrate 12 is mounted, that is, along the peripheral shape. Groove 15
Is formed on the side opposite to the direction in which the liquid crystal substrate is conveyed with respect to the rubbing roll. The groove 15 has two side walls 15a and 15c in the transport direction of the table 14. The surface of the side wall 15c of the groove 15 on the conveyance direction side of the table 14,
The surface of the side wall 13a of the pallet 13 on the side opposite to the carrying direction of the table 14 is flush with the table 1 by a carrying means (not shown) such as a robot arm.
4. In other words, the side wall surface of the side wall of the groove near the edge of the pallet 13 is flush with the side wall surface of the pallet 13.

With such a structure, the rubbing roll 1
Foreign matter such as rayon hair tips 104 generated by rubbing 1 on the liquid crystal substrate 12 falls into the groove 15 from the surface of the liquid crystal substrate 12 and the surface of the pallet 13, and the bottom surface 15b of the groove 15 is formed.
Deposit on top. Therefore, when the next liquid crystal substrate is rubbed, the foreign matter is accumulated in the groove 15, so that the foreign matter does not remain on the surface of the table 14. In particular, since the groove is formed on the opposite side of the substrate or pallet carrying direction where foreign matter is most likely to be deposited, the foreign matter can be sufficiently removed from the table surface.

By increasing the depth of the groove 15, the amount of foreign matter that can be deposited on the bottom surface 15b can be increased.
By further deepening the groove and penetrating to the bottom surface of the table 14, the foreign matter can be dropped on a foreign matter tray (not shown) under the table 14. Figure 7
It is a block diagram which shows the other structure of the manufacturing apparatus of the liquid crystal device which concerns on 1st embodiment of this invention. FIG. 7 shows an example in which the groove is further deepened to form a hole penetrating the table.

The table 16, which is a mounting table, is provided with holes 17 formed along the edge of the pallet 13 on which the liquid crystal substrate 12 is mounted, that is, along the peripheral shape of the pallet. The hole 17 has side wall surfaces 17c and 17d which are two inner peripheral surfaces in the transport direction of the table 16. The surface of the side wall 17d of the table 16 on the transport direction side and the table 16
The pallet 13 is placed on the table 14 by a transporting means (not shown) such as a robot arm so that the surface of the side wall 13a of the pallet 13 on the side opposite to the transporting direction is parallel. In other words, the pallet 1 on the side wall of the groove of the hole
The side wall surface near the edge of 3 is flush with the side wall surface of the pallet 13.

With this structure, the rubbing roll 1
Foreign matter such as rayon hair tips 104 generated by rubbing the liquid crystal substrate 12 by 1 enters from the surface of the liquid crystal substrate 12 and the surface of the pallet 13 through an inlet 17a, which is one opening of the hole 17, and through an outlet 17b of the other. Is discharged. Therefore, when the next liquid crystal substrate is rubbed, the foreign substances fall into the holes 17, so that the foreign substances do not remain on the surface of the table 16. In particular, since the holes are formed on the side opposite to the transport direction of the substrate or the pallet where foreign matter is most likely to be deposited, the foreign matter can be sufficiently removed from the table surface.

Instead of depositing foreign matter on the bottom surface of the groove in the groove as shown in FIG. 1, a suction port may be provided to suck and discharge all or part of the deposited foreign matter. FIG. 8 is a configuration diagram showing still another configuration of the liquid crystal device manufacturing apparatus according to the first embodiment of the present invention. Figure 8
Shows an example in which a suction port is provided in the groove.

Grooves 19 are formed on the upper surface of the table 18 along the edges of the pallet 13 on which the liquid crystal substrate 12 is mounted, that is, along the peripheral shape of the pallet.
The groove 19 is formed on the opposite side of the rubbing roll from the direction in which the liquid crystal substrate is conveyed. Groove 19 is table 1
8 has two side walls 19a and 19c in the transport direction. The surface of the side wall 19c of the groove 19 on the table 18 in the carrying direction and the pallet 13 on the side opposite to the table 18 in the carrying direction.
The pallet 13 is placed on the table 18 by a transfer means (not shown) such as a robot arm so that the surface of the side wall 13a of the pallet 13 is flush. In other words, of the side walls of the groove, the side wall surface on the side closer to the edge of the pallet 13 is the pallet 13
It is flush with the side wall surface of.

Further, the bottom surface 19b of the groove 19 is provided with a suction hole 25 which is a hole for suction. Suction hole 2
5 is an outlet 25b which is an opening on the lower surface of the table 18.
Is sucked by suction means (not shown). Therefore, the foreign matter is dropped into the groove 19 and then sucked into the suction hole 25 through the suction port 25a, which is the upper opening of the suction hole 25, and discharged through the discharge port 25b on the lower surface of the suction hole 25. Suction may be performed constantly during the rubbing process, or may be performed when necessary, such as from the time when the rubbing roll comes into contact with the substrate or the pallet to the time when the rubbing roll comes off.

With such a structure, the rubbing roll 1
The foreign matter such as the ray tips 104 of the rayon generated by rubbing the liquid crystal substrate 12 by 1 drops into the groove 19 from the surface of the liquid crystal substrate 12 and the surface of the pallet 13, and further the suction port 25
a through the suction hole 25 and the discharge port 25b on the lower surface.
And is stored in a foreign matter container (not shown). Therefore, when the next liquid crystal substrate is rubbed, the foreign matter is removed from the groove 1.
No foreign matter remains on the surface of the table 14 because it is sucked after dropping to 9. The suction port of the suction hole 25 is
It may be provided on the side surface of the groove instead of the bottom surface of the groove. In particular, since the groove is formed on the opposite side of the substrate or pallet carrying direction where foreign matter is most likely to be deposited, the foreign matter can be sufficiently removed from the table surface.

FIG. 9 is a perspective view of the configuration example of FIG. 1 when the groove 15 is provided. Here, the liquid crystal substrate mounted on the pallet 13, for example, the counter substrate is not shown. In the following description of FIG. 10, the liquid crystal substrate on the pallet is not shown for the sake of simplicity. In FIG. 9, the groove 15 is a groove longer than the width length of the pallet 13 in the direction perpendicular to the transport direction, and is formed along the edge of the pallet 13. The width of the groove is wide enough for foreign matter to fall. The width is preferably larger than the size (maximum length) of the fibers or the like of the bristle tips 104 generated by rubbing.

Since the groove is formed at least on the side of the rubbing roll in the direction opposite to the conveying direction of the substrate, the foreign matter can be sufficiently removed at the portion where the foreign matter is most likely to be deposited.

FIG. 10 is a perspective view of another example of the apparatus configuration of FIG. In FIG. 10, the groove 15 is formed not only on the side of the side wall 13a of the pallet 13 opposite to the conveying direction of the pallet 13 but also in the direction perpendicular to the conveying direction.
In this example, the side wall surfaces 13b and 13c are also provided. Here, the grooves 15B and 15A are formed along the edge of the pallet 13 so as to correspond to half of the side walls 13b and 13c, that is, the side wall on the half side in the opposite direction to the transport direction. The surfaces of the side walls 13b and 13c and the inner surface of the groove are
It's flush.

With such a structure, the rubbing roll 1
The foreign matter such as the ray tips 104 of the rayon generated by the rubbing of the liquid crystal substrate 12 with the grooves 1 and 15 on the rear side in the transport direction from the surface of the liquid crystal substrate 12 and the surface of the pallet 13.
It falls into A and 15B and is deposited on the bottom surface 15b of the groove 15. Therefore, when the next liquid crystal substrate is rubbed, the foreign matter is accumulated in the groove 15, so that the foreign matter does not remain on the surface of the table 14.

The grooves 15A and 15B are formed on the side wall surface 13b of the pallet 13 in the direction perpendicular to the carrying direction.
It may be formed over the entire width of 13c. Further, grooves may be formed over the entire circumference of the side wall surface of the pallet 13, that is, around the pallet 13. The groove is also provided on the side wall surface side 13d of the pallet 13 on the transfer direction side of the pallet 13, and in this case as well, the surface of the side wall 13d and the side wall surface on the side opposite to the transfer direction of the groove are flush with each other. . When the groove is provided on the entire circumference, the foreign matter can be eliminated over the entire circumference of the substrate or pallet on which the foreign matter is deposited.

As described above, in the groove provided on the side wall surface side 13d of the pallet 13 on the conveying direction side of the pallet 13, the rayon tips 104 hitting the side wall 13d of the pallet 13 are deposited. Become.

FIG. 11 is a perspective view of the apparatus configuration of FIG. In FIG. 11, the hole 17 is a long hole whose length in the longitudinal direction is longer than the width of the pallet 13 in the direction perpendicular to the transport direction, and is formed along the edge of the pallet 13. The width of the long hole is wide enough for foreign matter to fall. The width is, for example, a hair tip 1 generated by rubbing.
It is desirable that the length is larger than the size (maximum length) of the fiber No. 04.

With such a structure, the rubbing roll 1
Foreign matter such as rayon hair tips 104 generated by rubbing the liquid crystal substrate 12 by 1 falls from the surface of the liquid crystal substrate 12 and the surface of the pallet 13 into the hole 17 on the rear side in the transport direction. Therefore, when the next liquid crystal substrate is rubbed,
Since the foreign matter falls into the hole 17, the foreign matter does not remain on the surface of the table 16. In particular, since the holes are formed on the side opposite to the transport direction of the substrate or the pallet where foreign matter is most likely to be deposited, the foreign matter can be sufficiently removed from the table surface.

Although not shown here, as in the case of FIG. 10, the holes 17 are formed not only on the side of the side wall 13a of the pallet 13 opposite to the conveying direction of the pallet 13 but also in the direction perpendicular to the conveying direction. Side wall surface 13 of pallet 13 in
It may also be provided in b and 13c. Holes may be formed in the half of the side walls 13b and 13c, corresponding to the side wall on the half side in the opposite direction to the transport direction, or over the entire width of the side wall surface sides 13b and 13c. Also in that case, the side wall 13
The surfaces of b and 13c are flush with the inner wall surface of the hole on the transport direction side.

Further, holes may be formed over the entire side wall surface of the pallet 13, that is, around the pallet 13. The hole is also provided on the side wall surface side 13d of the pallet 13 on the transport direction side of the pallet 13, and in this case as well, the surface of the side wall 13d and the side wall surface on the side opposite to the transport direction of the hole are flush with each other. .

As described above, foreign matter generated when the tip 104 of rayon hits the side wall 13d of the pallet 13 enters the hole in the side wall surface side 13d of the pallet 13 on the conveying direction side of the pallet 13. Become.

FIG. 12 is a perspective view of the apparatus configuration of FIG. In FIG. 12, the groove 19 and the hole 25 correspond to the pallet 1
It is formed around 3. The groove 19 is formed and provided along the edge of the pallet 13, that is, along the peripheral shape of the pallet 13. The width of the groove 19 is wide enough for foreign matter to fall. The width is preferably larger than the size (maximum length) of the fibers or the like of the bristle tips 104 generated by rubbing. A suction port 25a, which is an opening of the suction hole 25, is provided on the bottom surface of the groove. The suction port of the suction hole 25 may be provided not on the bottom surface of the groove but on the side wall surface of the groove.

Although not shown here, FIG. 1 and FIG.
Similarly, the groove 19 and the suction hole 25 may be provided only on the side of the side wall 13a of the pallet 13 opposite to the conveying direction of the pallet 13. Alternatively, it may be provided on the surface side of the side wall 13a of the pallet 13 opposite to the carrying direction and on the side wall surface sides 13b and 13c of the pallet 13 in the direction perpendicular to the carrying direction. When the grooves and holes are provided on the side wall surfaces 13b and 13c, half of the side walls 13b and 13c, corresponding to the side wall on the half side opposite to the transport direction, or the entire width of the side wall surfaces 13b and 13c. Grooves and holes may be formed over the entire length. Also in that case, the side walls 13b and 13c
And the inner wall surface inside the groove in the direction perpendicular to the transport direction are flush with each other.

Here, the groove 19 and the suction hole 25 are also provided on the side wall surface side 13d of the pallet 13 on the conveying direction side of the pallet 13. Also in this case, the surface of the side wall 13d and the side wall surface of the groove 19 on the side opposite to the conveying direction are flush with each other.

With this structure, the rubbing roll 1
The foreign matter such as the rayon hair tips 104 generated by rubbing the liquid crystal substrate 12 by 1 drops into the groove 19 from the surface of the liquid crystal substrate 12 and the surface of the pallet 13, and further the suction hole 25
Sucked by. Therefore, when the next liquid crystal substrate is rubbed, no foreign matter remains on the surface of the table 18.

FIG. 13 is a perspective view of still another example of the apparatus configuration of FIG. FIG. 13 is a perspective view showing an example of a groove formed on the table when the liquid crystal substrate has a disk shape. Since the element substrate such as the TFT substrate is formed in a wafer shape, an example of forming the groove in the case of the disk-shaped liquid crystal substrate will be described.

In FIG. 13, the groove 15 of FIG. 1 is formed so as to match the shape of the side wall surface 12a of the disk-shaped liquid crystal substrate 12, that is, along the edge of the liquid crystal substrate 12. In FIG. 13, the groove 15 is a groove formed according to the shape of the side wall surface 12a of the liquid crystal substrate 12 in the direction opposite to the transport direction. Here, a groove having a length half the circumference of the disk-shaped liquid crystal substrate 12 is formed on the table. The width of the groove is wide enough for foreign matter to fall. The width is, for example, the tip 104 formed by rubbing.
It is desirable that the length is larger than the size (maximum length) of the fibers or the like.

FIG. 14 is a perspective view of another example of the device configuration of FIG. In FIG. 14, the groove 15 is formed not only on the side of the side surface of the side wall 12a opposite to the transport direction of the liquid crystal substrate 12 but also on the side surface 12 of the liquid crystal substrate 12 in the same direction as the transport direction.
This is also an example in which b is also formed in conformity with the peripheral shape of the side wall surfaces 12a and 12b of the liquid crystal substrate 12, that is, along the edge of the liquid crystal substrate 12. The surfaces of the side wall surfaces 12a and 12b and the inner surface 15c of the groove 15 are flush with each other.

With this structure, the rubbing roll 1
Foreign matter such as rayon tips 104 generated by rubbing the liquid crystal substrate 12 by 1 drops into the groove 15 from the surface of the liquid crystal substrate 12 and is deposited on the bottom surface 15b of the groove 15. Therefore,
When the next liquid crystal substrate is rubbed, the foreign matter is accumulated in the groove 15, so that the foreign matter does not remain on the surface of the table 14.

FIG. 15 is a perspective view of still another example of the apparatus configuration of FIG. It is a perspective view showing an example of a hole formed on a table when a liquid crystal substrate is disk-shaped.

In FIG. 15, the holes 17 of FIG. 7 are formed so as to match the shape of the side wall surface of the disk-shaped liquid crystal substrate 12, that is, along the edge of the liquid crystal substrate 12. Figure 15
In the above, the hole 17 is an example of a hole formed in conformity with the entire peripheral shape of the side wall surface of the liquid crystal substrate 12. Note that, as in the case of FIG. 13, holes may be formed on the table for half the length of the circumference of the disk-shaped liquid crystal substrate 12. The width of the hole is wide enough for foreign matter to fall. The width is preferably larger than the size (maximum length) of the fibers or the like of the bristle tips 104 generated by rubbing. The surface of the side wall surface of the liquid crystal substrate 12 and the surface of the inner wall surface on the inner peripheral side of the hole 17 are flush with each other.

With this structure, the rubbing roll 1
A foreign substance such as the ray tip 104 of the rayon generated by rubbing the liquid crystal substrate 12 by 1 drops into the hole 17 from the surface of the liquid crystal substrate 12 and drops from the opening 17a on the lower surface of the table 16 and can be collected. . Therefore, when the next liquid crystal substrate is rubbed, the foreign matters fall from the holes 17,
No foreign matter remains on the surface of the table 16.

FIG. 16 is a perspective view of still another example of the apparatus configuration of FIG. FIG. 16 is a perspective view showing an example in which a groove and a hole are formed on a table when the liquid crystal substrate has a disk shape.

In FIG. 16, the groove 19 and the hole 25 of FIG. 8 are provided so as to match the shape of the side wall surface of the disk-shaped liquid crystal substrate 12, that is, along the edge of the liquid crystal substrate 12. In FIG. 16, the groove 19 is an example of a groove formed in conformity with the entire peripheral shape of the side wall surface of the liquid crystal substrate 12. In addition,
As in the case of FIG. 13, a groove having a length half the circumference of the disk-shaped liquid crystal substrate 12 may be formed on the table. The width of the groove is wide enough for foreign matter to fall. The width is, for example, the tip 104 formed by rubbing.
It is desirable that the length is larger than the size (maximum length) of the fibers or the like. Further, the bottom surface 19b of the groove 19 has holes 2
A plurality of 5 are provided. The suction port 25a for suction of the suction hole 25 may be provided on the side surface of the groove instead of the bottom surface of the groove. Each hole 25 is a discharge port 25b on the lower surface of the table 18.
Is sucked by suction means (not shown).

Therefore, the foreign matter deposited on the bottom surface 19b of the groove 19 is sucked from the suction port 25a, passes through the hole 25, and is discharged from the discharge port 25b. The side wall surface of the liquid crystal substrate 12 and the side wall surface on the inner peripheral side of the groove 19 are flush with each other.

With such a structure, the rubbing roll 1
Foreign matter such as rayon hair tips 104 generated by rubbing 1 on the liquid crystal substrate 12 falls into the groove 19 from the surface of the liquid crystal substrate 12, is further sucked and passes through the hole 25, and the table 1
It can also be discharged and collected from the discharge port 25b on the lower surface of No. 8. Therefore, when the next liquid crystal substrate is rubbed,
No foreign matter remains on the surface of the table 18.

Next, a second embodiment will be described.

In the second embodiment, a suction means for sucking foreign matter when rubbing the liquid crystal substrate is provided on the table.

FIG. 17 is a perspective view showing the structure of a liquid crystal device manufacturing apparatus according to the second embodiment of the present invention. The liquid crystal substrate 12 to be rubbed is placed on a table 24 as shown in FIG. 17 by a transport means such as a robot arm (not shown), and the liquid crystal substrate 12 is vacuum-sucked to the table 24. In FIG. 17, a plurality of suction ducts 27 are provided around the element substrate 12 placed on the table 24. The suction port 27 a of the suction duct 27 is provided close to the vicinity of the element substrate 12. Since foreign matter is sucked through the discharge port 27b by a suction means (not shown), the foreign matter is sucked through the suction port 27a and discharged through the discharge port 27b. 18 is a partial side view of the device of FIG. As shown in FIG. 18, the height d1 of the duct is lower than the height of the liquid crystal substrate 12. It should be noted that here, although the description has been given with respect to the element substrate, in the case of the liquid crystal substrate mounted on the pallet, the height d1 of the duct provided in the vicinity of the pallet.
Is lower than the height of the liquid crystal substrate mounted on the pallet. Suction may be performed constantly during the rubbing process, or may be performed when necessary, such as from the time when the rubbing roll contacts the substrate or the pallet to the time when the rubbing roll leaves the substrate or pallet.

The suction port 27a of the suction duct 27 is
The liquid crystal substrate 12 may be provided only on the side opposite to the transport direction. In addition, the suction port 27a of the suction duct 27 may be provided in the direction perpendicular to the transport direction. In order to ensure suction, the shape of the suction port 27a is formed in conformity with the shape of the liquid crystal substrate or pallet, that is, along the edge of the liquid crystal substrate or pallet, and is provided near the liquid crystal substrate or pallet.

With this structure, the rubbing roll 1
The foreign matter such as the rayon tips 104 generated by rubbing the liquid crystal substrate 12 by 1 is sucked from the surface of the liquid crystal substrate 12 by the suction duct. Therefore, when the next liquid crystal substrate is rubbed, no foreign matter remains on the surface of the table 18, and the foreign matter is reliably removed.

Next, a third embodiment will be described.

In the third embodiment, the peripheral shape of the table is made to be the same as or substantially the same as the edge of the pallet or the liquid crystal substrate, that is, the peripheral shape, and a trapping means for trapping foreign matters is provided around the table. .

FIG. 19 is a block diagram showing the structure of a liquid crystal device manufacturing apparatus according to the third embodiment of the present invention. Figure 1
9, the side surface of the table 28, which is a mounting table, is formed according to the peripheral shape of the pallet 13. Around the side surface of the table 28, there is provided a trap plate for trapping foreign matter, which is open upward. Foreign matter generated during rubbing falls from the periphery of the table 28, is captured by the capture plate 26, and is discharged from below between the table 28 and the capture plate 26. In addition, the capture plate is placed on the table 2 so as to surround the pallet.
It may be provided over the entire circumference of 6. Or a capture plate,
It may be provided only on the side surface opposite to the carrying direction. further,
The capture plates may be provided on the side surface on the side opposite to the carrying direction and on the side surfaces on both sides perpendicular to the carrying direction.

FIG. 20 is a configuration diagram showing another example of the configuration of the liquid crystal device manufacturing apparatus according to the third embodiment of the present invention. In FIG. 20, the side surface of the table 28, which is a mounting table, is formed in accordance with the peripheral shape of the pallet 13, but the shape of the upper surface of the table 28 is slightly, here, d.
It is formed larger than the shape of the pallet 13 by the amount indicated by 3. d3 is an offset amount such that most foreign matter falls off the table 28. The other configuration is the same as that of FIG. 19, and thus the description is omitted.

With such a structure, foreign matter such as the ray tips 104 of rayon generated by rubbing the liquid crystal substrate 12 by the rubbing roll 11 falls off the table and the capturing plate 2
Captured at 6. Therefore, when the next liquid crystal substrate is rubbed, no foreign matter remains on the surface of the table 18,
Foreign matter is reliably eliminated.

In order to further ensure the capture of foreign matter, in FIG. 19 and FIG. 20, suction may be performed from the lower part of the capture plate by suction means. Suction may be performed constantly during the rubbing process, or may be performed when the rubbing roll comes into contact with the substrate or the pallet and is released when necessary.

As described above, by forming the side surface of the table in conformity with the edge of the liquid crystal substrate or the pallet, that is, the peripheral shape, the foreign matter generated during rubbing is reliably captured.

Although the preferred embodiments of the present invention have been described above, various improvements and changes can be made within the spirit and scope of the present invention at present and in the future. Therefore, equivalent improvements made by those skilled in the art are also within the scope of the present invention.

[0103]

As described above, according to the present invention,
It is possible to realize a liquid crystal device manufacturing method and a manufacturing apparatus that can appropriately remove foreign matter generated by rubbing and can realize an appropriate rubbing process.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a configuration of a liquid crystal device manufacturing apparatus according to a first embodiment of the present invention.

FIG. 2 is an equivalent circuit diagram of various elements, wirings, etc. in a plurality of pixels forming a pixel region of the liquid crystal device according to the first embodiment of the present invention.

FIG. 3 is a plan view of an element substrate such as a TFT substrate according to the first embodiment of the present invention, as viewed from the counter substrate side together with the respective constituent elements formed thereon.

FIG. 4 is a cross-sectional view of the liquid crystal device after the assembly process of bonding the element substrate and the counter substrate according to the first embodiment of the present invention to seal the liquid crystal, and cutting the liquid crystal device at the position of line HH ′ in FIG. FIG.

FIG. 5 is a cross-sectional view showing in detail the liquid crystal device according to the first embodiment of the present invention.

FIG. 6 is a flowchart showing a panel assembly process according to the first embodiment of the present invention.

FIG. 7 is a configuration diagram showing another configuration of the liquid crystal device manufacturing apparatus according to the first embodiment of the present invention.

FIG. 8 is a configuration diagram showing still another configuration of the liquid crystal device manufacturing apparatus according to the first embodiment of the present invention.

1. FIG. 9 is a perspective view of the device configuration of FIG.

FIG. 10 is a perspective view of another example of the apparatus configuration of FIG.

11 is a perspective view of the device configuration of FIG. 7. FIG.

12 is a perspective view of the device configuration of FIG.

FIG. 13 is a perspective view of still another example of the apparatus configuration of FIG.

14 is a perspective view of another example of the device configuration of FIG.

FIG. 15 is a perspective view of still another example of the apparatus configuration of FIG.

16 is a perspective view of still another example of the apparatus configuration of FIG.

FIG. 17 is a perspective view showing a configuration of a liquid crystal device manufacturing apparatus according to a second embodiment of the present invention.

FIG. 18 is a partial side view of the device of FIG.

FIG. 19 is a configuration diagram showing a configuration of a liquid crystal device manufacturing apparatus according to a third embodiment of the present invention.

FIG. 20 is a configuration diagram showing another example of the configuration of the liquid crystal device manufacturing apparatus according to the third embodiment of the invention.

FIG. 21 is a schematic view showing a normal rubbing device.

22 is a diagram for explaining a case where a problem occurs in the rubbing device in FIG. 21.

[Explanation of symbols]

11 ... Rubbing roll 12 ... Liquid crystal substrate 14, 16, 18, 24, 28 ... Table 15, 19 ... Groove 17 ... hole 25 ... Suction hole 25a, 27a ... Suction port 25b, 27b ... Discharge port 26 ... Capture plate 27 ... Suction duct

Claims (14)

[Claims] 1. A method of manufacturing a liquid crystal device, comprising: a table on which a substrate for the liquid crystal device is mounted and which is rubbed.
A method of manufacturing a liquid crystal device, comprising forming a groove or a hole along an edge of the substrate or along an edge of a pallet on which the substrate is mounted and performing rubbing. 2. The method of manufacturing a liquid crystal device according to claim 1, further comprising a suction port provided in the groove or the hole or in the vicinity of the groove or the hole. 3. The groove or the hole is formed at least on the side of the rubbing roll opposite to the conveying direction of the substrate.
A method for manufacturing a liquid crystal device according to item 1. 4. The method of manufacturing a liquid crystal device according to claim 1, wherein the groove or the hole is provided over the entire circumference of the edge of the substrate or the pallet. 5. A surface of a side wall of the groove or the hole formed along the edge, the side wall being closer to the edge side, is flush with the edge surface. A method for manufacturing a liquid crystal device according to claim 1. 6. A method of manufacturing a liquid crystal device, comprising: a table on which a substrate for the liquid crystal device is mounted and which is rubbed.
A method for manufacturing a liquid crystal device, comprising forming a suction port near an edge of the substrate or near an edge of a pallet on which the substrate is mounted, and performing rubbing while performing suction from the suction port. 7. A method of manufacturing a liquid crystal device, wherein an edge of a table for mounting and rubbing a substrate for the liquid crystal device is formed along an edge of the substrate or an edge of a pallet on which the substrate is mounted. Then, a capture plate is provided around the table to perform rubbing, and a method for manufacturing a liquid crystal device. 8. A liquid crystal device manufacturing apparatus, comprising: a table on which a substrate for a liquid crystal device is mounted and which is rubbed,
An apparatus for manufacturing a liquid crystal device, comprising a groove or a hole formed along an edge of the substrate or along an edge of a pallet on which the substrate is mounted. 9. The apparatus for manufacturing a liquid crystal device according to claim 8, further comprising a suction port provided in the groove or the hole or in the vicinity of the groove or the hole. 10. The manufacturing of a liquid crystal device according to claim 8, wherein the groove or the hole is formed at least on a side of the rubbing roll opposite to a conveying direction of the substrate. apparatus. 11. The manufacturing apparatus of a liquid crystal device according to claim 8, wherein the groove or the hole is provided over the entire circumference of the edge of the substrate or the pallet. 12. A surface of a side wall of the groove or the hole formed along the edge, which is closer to the edge side, is flush with the edge surface. Claim 8
An apparatus for manufacturing a liquid crystal device according to claim 11. 13. A liquid crystal device manufacturing apparatus, comprising: a table on which a substrate for a liquid crystal device is mounted and which is rubbed.
An apparatus for manufacturing a liquid crystal device, having a suction port formed near an edge of the substrate or an edge of a pallet on which the substrate is mounted. 14. A liquid crystal device manufacturing apparatus, wherein an edge of a table on which a substrate for a liquid crystal device is mounted and rubbed is formed along an edge of the substrate or an edge of a pallet on which the substrate is mounted. And a capture plate provided around the table, the apparatus for manufacturing a liquid crystal device.