JP2003062495A - Rotary liquid treatment apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rotary liquid treatment apparatus which can homogeneously treat the surface of a work at a high speed. SOLUTION: An upper-side roller mechanism 20, a lower-side roller mechanism 40, and a lower-side spray apparatus 60 are located below an upper-side spray apparatus 10. The upper-side and lower-side spray apparatuses 10 and 60 are constructed by spirally arranging a number of spray nozzles 14 and 64 on a plurality of branch pipes extending radially from rotors 12 and 62, respectively.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary liquid processing apparatus, and more particularly, to a rotary liquid processing apparatus for uniformly and continuously performing a liquid processing such as etching on a whole surface of a work having a relatively large area such as a printed circuit board. The present invention relates to a liquid processing device.

[0002]

2. Description of the Related Art In a printed circuit board, a photoresist film is formed on a copper foil attached to one side or both sides of an insulating substrate, the photoresist film is exposed and developed, the copper foil exposed from the resist film is etched, and the photoresist is used. It is manufactured through various processes such as film peeling, copper foil micro-etching, and water washing, and its development, etching, peeling, water washing, etc.
It is carried out by using various processing solutions such as a developing solution, an etching solution, a stripping solution, and washing water.

In the wet treatment using such a treatment liquid, generally, a treatment liquid is stored in a treatment tank, and a dipping method of immersing a printed circuit board in the treatment liquid for treatment is performed. Although the overflow processing tank is used because the printed circuit board is contaminated by the generated foreign matter, etc., it is inevitable that the processing solution will be contaminated and the processing efficiency will be reduced, so printing with a fine pattern will occur. There is a problem that it is not suitable for manufacturing substrates.

Therefore, a spray type liquid processing apparatus has been used in which a processing liquid is sprayed from a spray nozzle arranged above a printed circuit board. As such a spray type liquid processing apparatus, for example, there is one that sprays the processing liquid from a nozzle while rotating a rotary table that holds a printed circuit board by suction. However, such a single-wafer processing apparatus has a small throughput,
Moreover, in the case of a double-sided printed circuit board, it is necessary to perform processing on each side, which is not suitable for mass production.

Therefore, a continuous liquid processing apparatus has been used in which a printed circuit board is carried by a carrying conveyor and a processing solution is sprayed from a spray nozzle arranged above the printed board. Initially, such a continuous type liquid processing apparatus used a fixed type spray nozzle, but for a printed circuit board with a relatively large area, if the number of spray nozzles is small, the processing liquid will be spread over the entire surface of the printed circuit board. It is difficult to evenly supply the same to perform uniform liquid treatment.On the other hand, when the number of spray nozzles is increased, the treatment liquids sprayed from adjacent spray nozzles interfere with each other and Since the processing liquid stays on the printed circuit board, the processing speed of the interference portion becomes low, and the in-plane uniform processing property of the printed circuit board is poor.

Further, in the case of a swing type in which the spray nozzle swings back and forth, the supply direction of the processing liquid to the printed circuit board becomes oblique. For example, in the case of etching processing, the side of the conductive pattern under the resist film is formed. Etching progresses and the cross-sectional shape of the conductive pattern becomes unstable,
Moreover, since the dead point (line) is generated when the swinging reciprocating motion is turned back, the amount of the processing liquid supplied to that portion is increased, the etching is partially progressed, and the uniform processing property on the printed circuit board surface is also poor. There was a problem.

[0007]

Therefore, the applicant of the present invention is
First, a horizontal disc is fixedly held at the lower end of the rotary shaft, and a spray type continuous liquid treatment device (actual flat plate 6) is provided on the lower surface of the disc with spray nozzles spraying vertically downward. No. 2739) or a spray nozzle group installation body in which a plurality of spray nozzles directed to the conveyance surface of the printed circuit board at a right angle to this surface are arranged on a specific surface parallel to the conveyance surface. And a supporting and guiding means for guiding the spray nozzle group installation body so as to be displaced along a circular orbit of an appropriate radius parallel to the printed circuit board conveying surface, and a driving device therefor (JP-A-7- 1
No. 42842).

Each of these continuous type liquid processing devices is
Compared to the conventional continuous liquid processing device with a fixed spray nozzle and the continuous liquid processing device with a swinging spray nozzle, the in-plane uniform processing property and processing speed of the printed circuit board are improved, but There was still room for improvement in the in-plane uniform processability of. In particular, recently, in order to improve mass productivity, the number of printed circuit boards to be divided from one printed circuit board in the final process has increased, and the printed circuit board tends to have a larger area. There is a strong demand for improvement in uniform processability.

Therefore, an object of the present invention is to provide a rotary liquid processing apparatus which has improved in-plane uniform processing property and high-speed processing property by spraying the liquid processing on a work such as a printed circuit board.

[0010]

In order to solve the above-mentioned problems, a rotary liquid processing apparatus according to a first aspect of the present invention includes a conveyor for conveying a plate-like work in a predetermined direction, and the conveyor. A spray device for spraying a treatment liquid onto the surface of a work conveyed along a conveyor is provided, wherein the spray device includes a rotary head that is driven to rotate in a predetermined direction, and a plurality of radial heads that extend radially from the periphery of the rotary head. A branch pipe and a plurality of spray nozzles respectively provided in the branch pipes are provided, and the processing liquid supplied to the branch pipes through the rotary head is directed in the vertical direction from the spray nozzles toward the surface of the work. The plurality of spray nozzles as a whole are formed on the surface of the work as the rotary head and the branch pipe rotate. And it is characterized in that it is arranged in a spiral form to flow toward the periphery of the play has been treated liquid from the center section.

According to the above rotary liquid processing apparatus, since the spray nozzles are spirally arranged on the plurality of rotating branch pipes, the number of spray nozzles is smaller than that of the conventional spray nozzle stationary type liquid processing apparatus. As a result of the processing liquid being uniformly supplied to the entire surface of the work such as the printed circuit board in number, the in-plane uniform processing property of the work is improved, and the processing liquid supplied to the work such as the printed circuit board is Since the solution flows from the central portion toward the peripheral portion, new processing liquid is always supplied onto the work, the used processing liquid does not stay, and the processing speed is improved. Further, compared with the conventional swing type liquid processing apparatus, since the processing liquid is supplied at a right angle to the work, side etching of the conductive pattern under the resist film is eliminated in etching processing of a printed circuit board or the like. As a result, the cross-sectional shape of the conductive pattern becomes stable, and it becomes possible to manufacture a higher-precision and high-quality printed circuit board.

In the present invention, the term "spiral" means not only a case where the spray nozzles are arranged on one virtual spiral winding centering on the rotating body, but also a plurality of spraying nozzles centering on the rotating body. This also includes the case where spray nozzles are arranged on the virtual spiral.

The rotary liquid treatment apparatus according to a second aspect of the present invention is characterized in that the plurality of spray nozzles are composed of two or more kinds of spray nozzles having different spray diameters.

Here, as for two or more kinds of spray nozzles having different spray diameters, in principle, the spray diameters of the spray nozzles arranged on the outer peripheral portion of the branch pipe are the nozzles arranged on the inner peripheral portion of the branch pipe. The spray diameter is larger than the spray diameter. However, in order to make the spraying state of the processing liquid more uniform within the surface of the workpiece by actually observing the spraying state of the processing liquid in such an arrangement, the outer peripheral portion of the branch pipe is appropriately changed as necessary. It does not mean that the case of additionally arranging a spray nozzle having the same spray diameter as the inner peripheral portion or the case of arranging a spray nozzle having a smaller spray diameter than the spray nozzle of the inner peripheral portion is excluded. The number of spray nozzles may be two or three or more.

According to the above apparatus, the distance between the branch pipes extending radially from the rotating body becomes larger as the distance to the outer peripheral portion of the branch pipe increases, but in principle, the spray nozzles arranged on the outer peripheral portion of the branch pipe. By setting the spray diameter of the larger than the spray diameter of the spray nozzles arranged on the inner peripheral part of the branch pipe, the processing liquid can be easily and reliably sprayed onto the entire surface of the work, The uniform processability and high-speed processability of are improved.

In the rotary liquid treatment apparatus according to the third aspect, the spray distance of each of the spray nozzles is 80 to 1.
It is characterized in that it is set within the range of 00 mm.

According to the above apparatus, compared with the conventional spray nozzle having a spray distance of 150 mm or more,
The attack force of the processing liquid is increased, and the processing speed is improved. However, if the spray distance is less than 80 mm, the attack force by the treatment liquid becomes excessive, which may cause new problems such as peeling of the resist film. Therefore, the spray distance is within the range of 80 to 100 mm. Limited.

In the rotary liquid processing apparatus according to a fourth aspect of the present invention, the transport conveyor includes an upper roller mechanism and a lower roller mechanism for sandwiching and transporting the work, and the upper roller mechanism and the lower roller mechanism. At least one of the mechanisms includes a first roller shaft unit having a plurality of narrow rollers mounted on the first rotation shaft at predetermined intervals, and a plurality of rollers mounted on the second rotation shaft at predetermined intervals. A second roller shaft unit having a plurality of narrow rollers, wherein the roller of the first roller shaft unit and the roller of the second roller shaft unit are not in contact with each other. It is characterized in that they overlap each other in the conveying direction of the work.

According to the above-described rotary liquid processing apparatus, the ratio of the projected area of the rotary shaft and the roller is small compared to the projected area of the transfer conveyor, and therefore the transfer conveyor has many gaps. Is good. Moreover, the rollers of the first roller shaft unit and the rollers of the second roller shaft unit are arranged so as to enter between the rollers of the other party without contacting each other. Since the work can be lifted and conveyed, not only a large-area work, but also a small-area work or a thin work such as a flexible printed circuit board can be smoothly carried.

According to a fifth aspect of the present invention, there is provided the rotary liquid treatment device in which the spray devices are arranged so as to face each other in the vertical direction with the transport conveyor interposed therebetween.

According to the above apparatus, for example, a double-sided work such as a double-sided printed circuit board having a pattern on the front and back sides can be simultaneously sprayed with the processing liquid from the upper and lower spraying devices to perform liquid processing on both the front and back sides at the same time. it can. At that time, the upper roller mechanism also serves to prevent the work from being floated or blown off by the processing liquid sprayed from the lower spray device.

Here, in the case of a thin work such as a flexible printed circuit board, the upper roller mechanism serves to prevent the printed circuit board from being lifted or deformed by the spray of the processing liquid from the lower spray device during transportation. It is desirable to have the same structure as the mechanism. However, when the work is a thick printed circuit board or the like that is not easily deformed, the rollers may be arranged so that the rollers are separated from each other between the roller shaft units in which the rollers are attached to the rotary shaft. .

According to a sixth aspect of the present invention, in the rotary liquid processing apparatus, the work is a printed circuit board and the processing liquid is an etching liquid.

According to the above apparatus, not only the entire surface of the printed board can be uniformly etched by etching the copper foil of the printed board with the etching liquid that is uniformly supplied to the entire surface of the printed board, but also the spray device. Since the etching solution is vertically sprayed onto the printed circuit board from the side, side etching of the conductive pattern under the resist film does not occur, so that the width dimension and shape of the conductive pattern are stable and a highly accurate conductive pattern can be obtained. .

[0025]

BEST MODE FOR CARRYING OUT THE INVENTION A rotary liquid processing apparatus according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic front view of the rotary liquid processing apparatus 1, FIG.
(A) is a bottom view of the upper spray device (and a plan view of the lower spray device), FIG. 2 (b) is an explanatory view of the spray nozzle arrangement, and FIG. 2 (c) is an explanatory view of the spray diameter of the treatment liquid by the spray nozzle. is there.

1 and 2 (a) (b) (c), the rotary liquid treatment device 1 is roughly divided into an upper spray device 10, an upper roller mechanism 20 arranged below the upper spray device 10, and a lower part thereof. Lower roller mechanism 40 arranged at
And a lower spray device 60 disposed therebelow. The upper roller mechanism 20 and the lower roller mechanism 40 form a conveyor.

The upper spray device 10 includes a processing liquid supply pipe 11 and a rotating body 1 connected to the processing liquid supply pipe 11.
2, a plurality of branch pipes 13 radially extending from the periphery of the rotating body 12, and a plurality of spray nozzles 14 of a plurality of types mounted below the respective branch pipes 13 in an arrangement described later. The rotating body 12 is configured to be rotatable by a drive motor 17 via a drive bevel gear 15 and a passive bevel gear 16, and the rotation speed thereof is variable in the range of 0 to 30 rpm, for example. .

As shown in FIG. 2 (a), the branch pipes 13 are provided so that, for example, twelve pipes project radially from the circumferential surface of the rotating body 12 at equal intervals.
A spray nozzle 14 is attached at a right angle to each branch pipe 13.

As shown in FIG. 2B, the spray nozzles 14 are spirally arranged along the rotary direction. That is, FIG. 2B shows a case where the rotating body 12 rotates counterclockwise (left) in a bottom view, and the three virtual spiral windings 18a, 18b, and 18c having the rotating body 12 as a central portion.
In principle, three types of spray nozzles 14a, 14b, 14c are arranged so that the spray diameter increases from the inner peripheral portion to the outer peripheral portion of the branch pipe 13.

In the illustrated example, one spray nozzle 14a having a small spray diameter is also attached to the rotating body 12 in order to make the spray state of the processing liquid uniform on the surface of the work. Further, as shown by a white circle in the drawing, a plug portion to which a spray nozzle can be attached may be provided at an arbitrary position of the rotary body 12 or an arbitrary branch pipe 13.

Each spray nozzle 14a, 14b, 14c
As shown in FIG. 3, the basic structure of No. 1 is such that the spacer portion 1 is attached to the nozzle portion 140 which is connected to the branch pipe 13 with one touch.
The nozzle portion 142 is connected via 41. Therefore, it can be used even if the spacer portion 141 and the nozzle portion 142 are removed according to the application.

Each spray nozzle 14a, 14b, 14c
Is appropriately set according to the size of the work W to be handled. For example, the maximum workable size W that can be handled is 6
For 00 mm x 600 mm, upper and lower conveyors 2
When the width dimension of 0, 40 is set to about 800 mm, and the spacer portion 141 and the nozzle portion 142 are attached, the spray distance from the nozzle portion 140 to the work W is set to about 90 mm. As shown in, the spray diameter of the processing liquid by the spray nozzles 14a, 14b, 14c is, for example, φ114, φ123, φ1.
It is set to be 38. Further, in a state where the spacer portion 141 and the nozzle portion 142 are removed,
The spray distance from the nozzle part 140 to the work W is about 1
It is set to 40 mm, and as shown in the lower part of FIG.
The spray diameter of the treatment liquid by the spray nozzles 14a, 14b, 14c is, for example, φ177, φ195, φ213.
Is set to.

FIG. 4 is a partial plan view of the upper roller mechanism 20. The upper roller mechanism 20 includes the first roller shaft unit 2
The first roller shaft unit 22 and the second roller shaft unit 22 are arranged alternately along the workpiece conveying direction.

FIG. 5 is an exploded perspective view of the first roller shaft unit 21 (and the second roller shaft unit 22) in FIG. In the first roller shaft unit 21, a large number of narrow rollers 24 are attached to the rotating shaft 23 at predetermined intervals,
Each roller 24 has a large coefficient of friction with the work to prevent slippage during conveyance, and in order to prevent the surface of the work W from being scratched, ethylene propylene rubber, polytetrafluoroethylene, or the like is used. An elastic friction member 25 made of polymer resin is attached. Also,
In order to support the work, each roller 24 is provided with a plurality of pins (six in the illustrated example, six at intervals of 60 degrees) projectingly provided in the axial direction thereof. Further, at one end of the rotary shaft 23, a passive spur gear 27 for rotating the rotary shaft 23 by a drive spur gear of a lower roller mechanism described later.
Is attached.

The second roller shaft unit 22 includes a rotary shaft 28.
Attach a large number of narrow rollers 29 at a predetermined interval to
An elastic friction member 30 similar to the above is attached to each roller 29. Further, a plurality of rollers (six in the illustrated example) are provided in the axial direction of each roller 29 so as to support the work.
The pin 31 is formed to project. Further, a passive spur gear 32 for rotating the rotary shaft 28 by a drive spur gear of a lower roller mechanism described later is attached to one end of the rotary shaft 28.

Then, a large number of first roller shaft units 21
The second roller shaft unit 22 and the second roller shaft unit 22 are alternately arranged along the traveling direction of the work, and the roller 24 of the first roller shaft unit 21 and the roller 29 of the second roller shaft unit 22 are not in contact with each other. To the other roller 24, 24
Between the rollers 24, 29 along the traveling direction of the work, and the rollers 24, 29 are slightly displaced in the width direction. The lower end heights of the elastic friction members 25 and 30 of the rollers 24 and 29 are set to be the same.

FIG. 6 is a partial plan view of the lower roller mechanism 40. The lower roller mechanism 40 includes the first roller shaft unit 4
7, which is composed of 1 and the second roller shaft unit 42, is an exploded perspective view of the first roller shaft unit 41 (and the second roller shaft unit 42) in FIG. In the first roller shaft unit 41, a large number of narrow rollers 44 are attached to the rotating shaft 43 at predetermined intervals, and each roller 44 has a large coefficient of friction with the work and slips during conveyance as in the above. An elastic friction member 45 made of a polymer resin such as ethylene propylene rubber or polytetrafluoroethylene is attached in order to prevent scratches from occurring on the surface of the work W as well as to prevent scratches. Further, a plurality of (six in the illustrated example) pins 46 are provided in the axial direction on each roller 44 so as to support the work.
Further, a passive screw gear 47 for rotating the rotary shaft 43 by a drive screw gear described later is attached to one end of the rotary shaft 43, and the first roller shaft of the upper roller mechanism 20 is attached to the other end. A drive spur gear 48 that meshes with a passive spur gear 27 attached to the rotary shaft 23 of the unit 21 is attached.

The second roller shaft unit 42 includes a rotary shaft 49.
A large number of narrow rollers 50 are attached to the roller 50 at predetermined intervals, and the elastic friction member 51 is attached to each roller 50 in the same manner as described above. 4 pins 52 are provided in a protruding manner. Further, at one end of each rotary shaft 49, the rotary shaft 49
Is attached with a passive screw gear 53 that is rotated by a driving screw gear described later, and the rotary shaft 2 of the second roller shaft unit 22 of the upper roller mechanism 20 is attached to the other end.
The drive spur gear 54 is meshed with the passive spur gear 32 mounted on the drive shaft 8.

The lower roller mechanism 40 includes a large number of the first roller shaft unit 41 and the second roller shaft unit 42.
The rollers 44 of the first roller shaft unit 41 and the rollers 50 of the second roller shaft unit 42 are arranged alternately in the traveling direction and are in mutual contact with each other, so that the rollers 44, Between 44 or rollers 50,5
The rollers 44 and 50 are configured so as to be inserted between 0 and along the traveling direction of the work, and are gradually displaced in the width direction. The heights of the upper ends of the elastic friction members 45 and 51 of the rollers 44 and 50 are set to be the same.

In the upper roller mechanism 20 and the lower roller mechanism 40, as shown in FIGS. 8, 9 and 10, the respective rotary shafts 23, 28, 43 and 49 are arranged on both sides in the traveling direction of the work. The bearing members 55, 55 are supported in a vertical arrangement. Here, the upper roller mechanism 20
The passive spur gear 27 attached to the rotary shaft 23 of the first roller shaft unit 21 of
The spur gear 48 for driving, which is attached to the rotary shaft 43 of the roller shaft unit 41, is meshed and coupled. Further, the passive spur gear 32 attached to the rotary shaft 28 of the second roller shaft unit 22 of the upper roller mechanism 20 is for driving attached to the rotary shaft 49 of the second roller shaft unit 42 of the lower roller mechanism 40. Of the spur gear 54.

Here, as is apparent from FIG. 8, the first roller shaft units 21, 21 ... Of the upper roller mechanism 20,
The second roller shaft units 22, 22, ...
29 are slightly displaced in the axial direction, and similarly, the first roller shaft units 41, 41 ... Of the lower roller mechanism 40 and the second roller shaft units 42, 42 ...
0 is shifted in the axial direction little by little,
The elastic friction members 25 and 30 of the rollers 24 and 29 and the elastic friction member 4 of the rollers 44 and 50 are provided at the same position on the work.
It is designed so that 5,51 are not in contact with each other. As a result, the liquid treatment on the entire surface of the work is made uniform.

Then, the rollers 24 of the first and second roller shaft units 21, 22 in the upper roller mechanism 20,
The elastic friction members 25 and 30 of 29 are the lower roller mechanism 40.
In contact with the elastic friction members 45, 51 of the rollers 44, 50 of the first and second roller shaft units 41, 42, and face each other.

Further, the first and the first in the lower roller mechanism 40
The rotary shaft 43 in the second roller shaft units 41, 42,
The screw gears 47 and 53 attached to one end of 49 are
It is meshed and coupled with screw gears 57 and 58 attached to the drive shaft 56. Therefore, by rotating the drive shaft 56 by a drive motor (not shown),
The respective screw gears 57 and 58 are rotated. Along with that, the lower roller mechanism 4 meshingly coupled with each other.
The passive screw gears 47, 53 of the first and second roller shaft units 41, 42 of 0 are rotated to rotate the rotary shafts 43, 49.
Is rotated. When the rotary shafts 43 and 49 rotate, the rollers 44 and 50 attached to the rotary shafts 43 and 49 rotate.

Further, the first and second roller shaft units 41,
When the rotary shafts 43 and 49 of 42 are rotated, the spur gears 48 and 54 for driving attached to the other ends of these rotary shafts 43 and 49 rotate. Then, this spur gear 4
Passive spur gear 2 attached to the ends of the rotary shafts 23 and 28 in the first and second roller shaft units 21 and 22 of the upper roller mechanism 20 meshingly coupled with
7, 32 rotate in synchronization. Thereby, the rollers 2 attached to the rotary shafts 23 and 28 of the first and second roller shaft units 21 and 22 of the upper roller mechanism 20.
4, 29 rotate in synchronization.

Therefore, the drive shaft 56 is rotationally driven so that the rollers 24, 29 and 44, 50 of the upper and lower roller mechanisms 20, 40 are synchronously rotated, and one end side of the upper and lower roller mechanisms 20, 40 is rotated. When a work such as a printed circuit board is supplied, the work is handled by the upper and lower roller mechanism 2
It is sandwiched by 0, 40 elastic friction members 25, 30 and 45, 51 and conveyed from one end side to the other end side.

The lower spray device 60 basically has the same structure as the upper spray device 10. That is,
As shown in FIG. 1, the lower spray device 60 includes a processing liquid supply pipe 61, a rotating body 62 connected to the processing liquid supply pipe 61, and a plurality of branch pipes radially extending from the periphery of the rotating body 62. 63, and a plurality of spray nozzles 64 mounted above each branch pipe 63 in an arrangement described later.
The rotating body 62 is rotatable by a drive motor 67 via a driving bevel gear 65 and a passive bevel gear 66, and the number of rotations thereof is variable in a range of 0 to 30 rpm, for example. There is.

The structure, arrangement, and spray diameter of each spray nozzle 64 in the branch pipe 63 of the lower spray device 60 are the same as those shown in FIGS. 2 (a) (b) (c) and FIG. Therefore, illustration and description are omitted.

Next, the operation of the rotary liquid processing apparatus 1 will be described. First, the drive shaft 56 of the lower roller mechanism 40 is rotationally driven to rotate the screw gears 47 and 53 via the screw gears 57 and 58. Then, the rotary shafts 43 and 49 of the first and second roller shaft units 41 and 42 of the lower roller mechanism 40 are rotationally driven, whereby the rotary shafts 4 and 4 are driven.
The rollers 44, 50 fixed to 3, 49 rotate.

As described above, the rotary shafts 43, 4 of the first and second roller shaft units 41, 42 of the lower roller mechanism 40.
The drive spur gears 48, 54 attached to the first and second roller shaft units 21, 21
Since the passive spur gears 27 and 32 attached to the rotary shafts 23 and 28 of the gear 22 are meshed with each other, the rotary motion of the rotary shafts 43 and 49 of the lower roller mechanism 40 causes the first and second rotary rollers of the upper roller mechanism 20 to rotate. Second roller shaft unit 21,2
The two rotary shafts 23 and 28 are also driven to rotate, and
The rollers 24 and 29 attached to the rollers 3 and 28 also rotate in synchronization.

Therefore, when a work W such as a printed circuit board is supplied from one end side of the upper and lower roller mechanisms 20 and 40,
The work W is sandwiched by a transfer conveyor including upper and lower roller mechanisms 20 and 40, and is transferred from one end side to the other end side. And, the work W is the upper and lower spray devices 10, 60.
At the position, the treatment liquid is sprayed by the upper and lower spray devices 10 and 60, and both sides of the work can be treated at the same time. Since the elastic friction members 25, 30, 45, 51 are in contact with the work W during this work transfer, the work W is not damaged. Further, even if the work is a thin flexible printed board, the work is not lifted or deformed by the spray of the processing liquid from the lower spray device 60 due to the presence of the upper roller mechanism 20.

Here, while rotating the rotating bodies 11, 61 of the upper and lower spray devices 10, 60 by the motors 17, 67, a processing liquid such as an etching liquid is supplied to the processing liquid supply pipes 11, 61. Then, this processing liquid is
From 62, it is guided to the branch pipes 13 and 63, and the treatment liquid is sprayed from the spray nozzles 14 and 64 to the upper surface and the lower surface of the work, respectively.

Since the spray nozzles 14 and 64 are spirally arranged as described above, the rotating bodies 12 and 62 are
In combination with the rotating operation of, even with a small number of spray nozzles,
The treatment liquid can be spray-supplied onto the entire surface of the work W.

Further, since the spray nozzles 14 and 64 are arranged in a spiral shape, the treatment liquid supplied to the upper and lower surfaces of the work W is sequentially swept toward the outer peripheral portion of the work W. A new processing liquid is constantly supplied to the work W, the interference between the processing liquids is eliminated, and the uniform processing property in the surface of the work W is improved.

Further, since the treatment liquid is sprayed vertically from the spray nozzles 14 and 64 toward the work W, in the case of etching the copper foil on the printed board, side etching of the conductive pattern under the resist film is performed. Since the conductive pattern has a stable cross-sectional shape, a high-quality printed circuit board can be manufactured.

FIG. 11A is a bottom view of the upper spray device 10A when the work W such as a printed circuit board is enlarged, and FIG. 11B is an explanatory view of the arrangement of the spray nozzles 14,
FIG. 11C is an explanatory diagram of the spray diameter of the processing liquid by the spray nozzle 14. The basic structure is shown in Figure 1 (a).
(B) Similar to (c), but in this case, the rotary rotation direction is the clockwise (right) direction in the drawing, and the maximum work W corresponds to a size of 1,000 mm × 1,000 mm. Each of the spray nozzles 14a, 14b,
The spray distance from 14c to the work W is, for example, about 90 mm when the spacer portion 141 and the nozzle portion 142 are attached (see FIG. 3), and the spray diameter of the treatment liquid is as shown in the upper part of 11 (c). , For example, φ18
2, φ197 and φ221 are set.
Further, when the spacer portion 141 and the nozzle portion 142 are removed, the spray distance from the nozzle portion 140 to the work W is about 140 mm.
The spray diameter of the treatment liquid from 40 is, for example, φ283, φ312, and φ341 as shown in the lower part of FIG.
Is set to.

FIG. 12 shows the rotary liquid processing apparatus 1 described above.
The front view of the rotary liquid processing apparatus 100 which connected three (1a, 1b, 1c) in series is shown. As described above, when a plurality of rotary liquid processing apparatuses 1 are connected in series, assuming that the liquid processing speeds of the rotary liquid processing apparatuses 1 are equal,
The total liquid processing speed can be tripled as compared with the case where a single rotary liquid processing apparatus 1 is used, and mass production can be realized. The number of units in series may be arbitrary, but as will be described later, if there are three units, various correspondences are possible.

That is, when the three rotary liquid treatment apparatuses 1a, 1b, 1c are connected in series in this manner, the upper and lower spray apparatuses 10, 60 are rotated in the clockwise direction, and the first apparatus 1a is rotated in the clockwise direction. The spray device 10, the third device 1b is rotated counterclockwise, and the third device 1c is rotated clockwise. The tendency due to the direction of rotation of 60 can be eliminated.

By appropriately opening and closing the on-off valves (not shown) provided in the processing liquid supply pipes 11a to 11c and 61a to 61c of the upper and lower spray devices 10 and 60, for example, three units are connected in series. Alternatively, two or only one can be used. With this configuration, it is possible to use the work W depending on the type of the work W such as a printed circuit board having a different copper foil thickness, or for the same work W by switching the processing speed.

In this case, if the etching amount by the single rotary liquid processing apparatus 1 is 4 μm, it is simply 2
It is possible to obtain an etching amount of 8 μm when using three units and 12 μm when using three units, but the transport speed of the transport rollers including the upper and lower roller mechanisms 20 and 40 can be varied between when using two units and when using three units. For example, the etching amount can be 6 to 10 μm when two units are used and 10 to 14 μm when three units are used. By doing this, the work W
It is possible to set the optimum liquid treatment conditions according to the above.

Although not shown, a plurality of rotary liquid processing apparatuses 1A and 1B may be installed in parallel along the conveyance direction of the work W to form a rotary liquid processing apparatus 200. By thus installing a plurality of rotary liquid processing apparatuses 1A and 1B in parallel, the throughput can be further improved.

In each of the above-described embodiments, the case where both surfaces of a work are processed at the same time is described assuming a work such as a double-sided and flexible thin printed circuit board. In this case, the structure of the upper roller mechanism 20 may be simplified. That is, in the case of a work such as a thick printed circuit board, even if the processing liquid is sprayed from the upper and lower spray devices 10 and 60, it is difficult for the work liquid to float or be deformed like a thin printed circuit board. May be configured by only one of the first roller shaft unit 21 and the second roller shaft unit 22. Also, in some cases,
The upper roller mechanism 20 may be omitted.

Further, in the above embodiment, the drive shaft 56 of the lower roller mechanism 40 is rotationally driven to drive the screw gears 57 and 58.
The screw gears 47, 53 are rotated through the rotary gears 47, 53 to rotationally drive the rotary shafts 43, 49 of the first and second roller shaft units 41, 42 of the lower roller mechanism 40.
Although the case where the rollers 44 and 50 fixed to 3, 49 are rotated has been described, the drive shaft 56 of the lower roller mechanism 40 is described.
The driving force transmission means for rotationally driving the rotating shafts 43, 49 of the first and second roller shaft units 41, 42 of the lower roller mechanism 40 by the rotational driving force of is a combination of screw gears 57, 58 and screw gears 47, 53. Not limited to this, any driving force transmission means such as bevel gears or a combination of bevel gears and a bevel gear rack can be adopted.

Further, in the above-described embodiment, the upper and lower spray devices 10 and 60 and the upper and lower roller mechanisms 20 and 60 are provided so that both double-sided and single-sided works can be handled.
However, the present invention does not necessarily need to be configured in this way, and the upper spray device 10 and the lower roller mechanism 40 may be used exclusively for single-sided work processing.

[0064]

As described above, the present invention comprises a conveyor for conveying a plate-shaped work in a predetermined direction, and a spray device for spraying a treatment liquid onto the surface of the workpiece conveyed along the conveyor. The spray device includes a rotary head that is rotationally driven in a predetermined direction, a plurality of branch pipes that radially extend from the periphery of the rotary head, and a plurality of spray nozzles that are provided in each of the branch pipes. A spraying process liquid supplied to the branch pipe through the rotary head in a vertical direction from the spray nozzle toward the surface of the work, and the plurality of spray nozzles as a whole include the rotary head. And as the branch pipe rotates, the treatment liquid sprayed on the surface of the work is spirally arranged so as to flow from the central portion to the peripheral portion. Therefore, the treatment liquid can be supplied to the entire surface of the work with a small number of spray nozzles, and the treatment liquid supplied to the work sequentially flows to the outer peripheral portion of the work. As a result, the used processing liquid does not stay on the work and new processing liquid can be constantly supplied to the work.
High-speed processing becomes possible. In addition, since the processing liquid is supplied vertically to the work, in the case of copper foil etching of printed circuit boards, there is no side etching and the cross-sectional shape of the conductive pattern is stable, making it possible to produce high-quality printed circuit boards and other products. The effect is obtained.

[Brief description of drawings]

FIG. 1 is a schematic front view of a rotary liquid processing apparatus according to an embodiment of the present invention.

2A is a bottom view of an upper spray device in the rotary liquid processing apparatus of FIG. 1, FIG. 2B is an explanatory view of the spray nozzle arrangement, and FIG. 2C is an explanatory view of a spray diameter of the processing liquid by the spray nozzle. .

FIG. 3 is an enlarged front view of a spray nozzle.

FIG. 4 is a partially enlarged plan view of an upper roller mechanism in the rotary liquid processing apparatus of the present invention.

5 is a first and second upper roller mechanism of FIG.
It is an exploded perspective view of a roller shaft unit.

FIG. 6 is a partially enlarged plan view of a lower roller mechanism in the rotary liquid processing apparatus of the present invention.

7 is a first and second bottom roller mechanism of FIG.
It is an exploded perspective view of a roller shaft unit.

FIG. 8 is a plan view in which a driving unit of the upper and lower roller mechanisms is removed.

FIG. 9 is a front view of the upper and lower roller mechanisms from which a driving unit is removed.

FIG. 10 is a front view of an upper and lower roller mechanism.

11A is a bottom view of an upper spray device according to another embodiment of the present invention, FIG. 11B is an explanatory view of the arrangement of spray nozzles, and FIG. 11C is an explanatory view of the spray diameter of the processing liquid by the spray nozzles. .

FIG. 12 is a schematic front view of a rotary liquid processing apparatus according to another embodiment of the present invention.

[Explanation of symbols]

1, 1a, 1b, 1c, 100 Rotary liquid processing device 10, 10A Upper spray device 11, 11a, 11b, 11c, 61, 61a, 61
b, 61c, processing liquid supply pipe 12, 62 rotating body 13, 63 branch pipe 14, 64 spray nozzle 17, 67 drive motor 20, 40 roller mechanism 21, 22, 41, 42 roller shaft unit 23, 28, 43, 49 Rotating shafts 24, 29, 44, 50 Rollers 25, 30, 45, 51 Elastic friction members 26, 31, 46, 52 Pins 27, 32 Passive spur gears 47, 53 Passive screw gears 48, 54 Drive Spur gear 55 Bearing member 56 Drive shafts 57, 58 Drive screw gears

[Procedure amendment]

[Submission date] September 5, 2001 (2001.9.5)

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0038

[Correction method] Change

[Correction content]

The second roller shaft unit 42 includes a rotary shaft 49.
A large number of narrow rollers 50 are attached to the roller 50 at predetermined intervals, and the elastic friction member 51 is attached to each roller 50 in the same manner as described above. 6 pins 52 are protrudingly provided. Further, at one end of each rotary shaft 49, the rotary shaft 49
A passive screw gear 53 rotated by a driving screw gear described later is attached to the other end, and a passive screw gear 53 attached to the rotary shaft 28 of the second roller shaft unit 22 of the upper roller mechanism 20 is attached to the other end. A drive spur gear 54 that meshes with the spur gear 32 is mounted.

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3B201 AA02 AB16 BB24 BB33 BB43                       BB92                 4F033 AA14 CA01 DA05 EA05 NA01                 4F035 AA04 CA02 CA05 CB03 CB13                       CC01 CD08                 5E339 AB00 BE13 BE16 GG02

Claims (6)

[Claims] 1. A transport conveyor for transporting a plate-shaped work in a predetermined direction, and a spray device for spraying a treatment liquid onto the surface of the work transported along the transport conveyor, wherein the spray device is in a predetermined direction. A rotary head driven to rotate, a plurality of branch pipes radially extending from the periphery of the rotary head, and a plurality of spray nozzles respectively provided in the respective branch pipes, and the branch is provided via the rotary head. A process liquid supplied to a pipe is sprayed in a vertical direction from the spray nozzle toward the surface of the work, and the plurality of spray nozzles as a whole are accompanied by the rotation of the rotary head and the branch pipe. It is characterized in that it is arranged in a spiral so that the treatment liquid sprayed on the surface of the work flows from the center to the periphery. That rotary fluid processing apparatus. 2. The rotary liquid processing apparatus according to claim 1, wherein the plurality of spray nozzles are composed of two or more kinds of spray nozzles having different spray diameters. 3. The spray distance of each spray nozzle is 8
The rotary liquid processing apparatus according to claim 1 or 2, wherein the rotary liquid processing apparatus is set within a range of 0 to 100 mm. 4. The transport conveyor comprises an upper roller mechanism and a lower roller mechanism for sandwiching and transporting the work between them, and at least one of the upper roller mechanism and the lower roller mechanism has a first rotation mechanism. A first roller shaft unit having a plurality of narrow rollers mounted on a shaft at predetermined intervals, and a second roller shaft unit having a plurality of narrow rollers mounted on a second rotating shaft at predetermined intervals. And a roller of the first roller shaft unit,
4. The rotary liquid processing apparatus according to claim 1, wherein the rollers of the second roller shaft unit overlap each other in the conveyance direction of the work without contacting each other. . 5. The rotary liquid treatment apparatus according to claim 1, wherein the spray devices are arranged so as to face each other in the vertical direction with the transport conveyor interposed therebetween. 6. The rotary liquid processing apparatus according to claim 1, wherein the work is a printed circuit board, and the processing liquid is an etching liquid.