JP2003057476A - Tool for manufacturing optical waveguide device, method for manufacturing optical waveguide device by using the tool, and optical waveguide device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tool for easily manufacturing an optical waveguide device and a method for manufacturing the device. SOLUTION: An interference filter 25 as optical parts is preliminarily disposed in the optical path in a transparent container 20 and the container is filled with a photosetting resin solution 23. A tool for the manufacture of an optical waveguide device is prepared by forming a hole 11 and a plurality of holes 12 in a chassis 10. The position of the holes is determined in such a manner that the light entering the hole 11 passes through the interference filter 25 to reach the holes 12. Optical fibers 21, 22 are fitted to the holes 11, 12 of the chassis 10, and the chassis 10 is attached to the transparent container 20 (Process (a)). Then light at specified wavelength is introduced into the optical fibers 11, 12 to grow an optical waveguide 24 in the photosetting resin solution 23. (process (b) and (c)). Then the solution is replaced by a low refractive index photosetting resin solution 26 and the whole body is solidified by UV rays (process (d)). At last, the body is provided with, for example, an optical fiber 31, a light accepting element 29a or the like (process (e)).

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical waveguide device manufacturing jig for manufacturing an optical waveguide device with high precision, an optical waveguide device manufacturing method using the jig, and an optical waveguide device therefor. In particular, the optical components are inserted into the container and the container is filled with the photocurable resin solution,
Introduce a predetermined wavelength light from a predetermined position set in the jig,
The present invention relates to a jig for easily and accurately manufacturing an optical waveguide device, a method for manufacturing an optical waveguide device using the jig, and the optical waveguide device. INDUSTRIAL APPLICABILITY The present invention can be applied to manufacture of an inexpensive and low-loss optical transceiver, optical interconnection, optical demultiplexer or multiplexer in optical fiber communication.

[0002]

2. Description of the Related Art In recent years, a technique for forming an optical waveguide device by introducing a light beam having a predetermined wavelength into a photocurable resin solution and utilizing a self-focusing phenomenon (self-focusing phenomenon) has attracted attention. The self-focusing phenomenon is a phenomenon in which the divergent irradiation light is confined in the solid phase region due to the increase in the refractive index in the solid phase when the photocurable resin undergoes a phase change from the liquid phase to the solid phase by light irradiation. is there. An optical waveguide formed by utilizing this phenomenon is called a self-forming optical waveguide. Hereinafter, it is simply referred to as an optical waveguide. As a specific example, Japanese Patent Laid-Open No. 8-32
There is a method for producing an optical waveguide system and an optical device using the method disclosed in Japanese Patent No. 0422. This is to install light components such as a light receiving element, a lens, a prism, and a mirror in a photocurable resin solution, introduce light of a single or a plurality of predetermined wavelengths from a single or a plurality of locations, and use each self-focusing effect. This is a method of connecting optical components with an optical waveguide. This is characterized by forming an optical device in which various optical components are coupled by an optical waveguide. For example, if various interference filters are erected along the optical axis, an optical waveguide type demultiplexing filter is formed. If, for example, a half mirror is installed in a photocurable resin solution and the entrance and the exit are connected by an optical waveguide, an optical waveguide type branching device or an optical waveguide type multiplexer is formed. In particular, in the manufacturing method in the above example, it is possible to reduce the loss at the coupling point by introducing light from both directions and pulling and coupling the optical waveguides from both sides at the intermediate point to each other, that is, the so-called self-alignment effect. It has a feature.

[0003]

However, in the above conventional example, there is only one type of photocurable resin solution. When one type of photocurable resin solution is cured, it becomes difficult to form a clad for the optical waveguide. That is, there is a problem in that transmission loss occurs due to slight scratches and dust on the surface of the optical waveguide. or,
The optical waveguide is only supported by the entrance, the exit, or the optical component, and there is a problem that the optical waveguide device is not robust against mechanical vibration or the like. In the conventional example, there is an example in which a semiconductor laser is incorporated as an optical component. That is, the wavelength used for forming the optical waveguide is the same as the wavelength used for actual use (for example, optical communication). In this case, the optical waveguide obtained from the relationship between the predetermined wavelength and the absorptance has a problem that the transmission loss becomes large.

Further, the feature of the conventional example is that light is introduced from different directions to grow an optical waveguide from different directions, and axis alignment is performed by a self-alignment effect at an intermediate point. Then, a low-loss optical waveguide device is manufactured. However, in order to achieve the self-alignment effect when the optical waveguide diameter is one hundred and several tens of μm, it is necessary to perform alignment of about several tens of microns at the midpoint. When the optical component is installed in the photocurable resin solution, the positional deviation and the angular deviation of the optical component are major factors that reduce the self-alignment effect, and are not always manufactured efficiently.

The present invention has been made to solve the above problems, and its purpose is to provide N light introducing portions corresponding to optical components at predetermined positions in the housing of a jig for producing an optical waveguide device. A high-precision optical waveguide device is easily manufactured by forming and introducing light of a predetermined wavelength from the N light introducing portions that are positioned. Further, a jig for manufacturing an optical waveguide device with good workability by forming holes in the N light introducing portions, fitting an optical fiber into the holes, and emitting light of a predetermined wavelength from the optical fibers, It is to provide the manufacturing method. Another object of the present invention is to provide a method of manufacturing an optical waveguide device in which a step index type optical waveguide is formed by embedding the periphery of the optical waveguide in a low refractive index resin solution, and the transmission loss is small. Yet another purpose is
An object of the present invention is to provide a jig capable of adjusting optical components, improve work efficiency, and provide a method of manufacturing an optical waveguide device with higher accuracy. Another object is to provide the optical waveguide device. It should be noted that the above object is an object that each invention individually achieves, and should not be construed as an individual invention that achieves all the above objects.

[0006]

In order to achieve this object, an optical waveguide device manufacturing jig according to a first aspect of the present invention has a single or a plurality of optical components inserted therein and has N input / output ends. A jig for manufacturing an optical waveguide device having the optical waveguide device manufacturing jig, wherein a single or a plurality of optical components are inserted into a transparent container in which a photocurable resin solution is injected, and the optical component is mounted in the transparent container. In addition, it is composed of a housing and N light introducing portions provided in the housing in a predetermined positional relationship. Light of a predetermined wavelength is introduced from any light introducing portion of the N light introducing portions. Curing the photocurable resin solution, their optical axis direction,
Alternatively, an optical waveguide is grown in the optical axis direction converted by one or a plurality of optical components installed in a photocurable resin solution, and N light introducing portions and one or a plurality of optical components are formed by the optical waveguide. The optical waveguide device having N input / output terminals is manufactured by connecting the optical waveguide devices.

The jig for manufacturing an optical waveguide device according to a second aspect of the present invention is the jig for manufacturing an optical waveguide device according to the first aspect, in which a hole is formed in an arbitrary light introducing portion. The optical fiber is fitted into the hole. The jig for manufacturing an optical waveguide device according to claim 3 of the present invention is the jig for manufacturing an optical waveguide device according to claim 1 or 2, which is a light introducing part for introducing light of a predetermined wavelength. Is provided with a condensing optical system.
An optical waveguide device manufacturing jig according to claim 4 of the present invention is the optical waveguide device manufacturing jig according to any one of claims 1 to 3, wherein the optical axis of the introduced light is It has an adjusting means for adjusting the position and / or the angle of the optical component with respect to. The jig for manufacturing an optical waveguide device according to claim 5 of the present invention is the jig for manufacturing an optical waveguide device according to any one of claims 1 to 4, wherein N optical guides are provided. A case having a part can be separated into a plurality of parts.

A method for manufacturing an optical waveguide device according to a sixth aspect of the present invention is any one of the first to fifth aspects.
A method for manufacturing an optical waveguide device formed by using the optical waveguide device manufacturing jig of item 1, wherein a single or a plurality of optical components are inserted into a transparent container at a predetermined position, and the photocurable resin solution is placed in the transparent container. Filling, mounting the optical waveguide device manufacturing jig according to any one of claims 1 to 5 in a transparent container, introducing light of a predetermined wavelength from an arbitrary light introducing part, and a photocurable resin inside An optical waveguide is formed by curing a solution, and N light introducing portions and one or a plurality of optical components are connected by the optical waveguide to form an optical waveguide device having N input / output ends. To do.

A method for manufacturing an optical waveguide device according to a seventh aspect of the present invention is the method for manufacturing an optical waveguide device according to the sixth aspect, wherein a hole is formed in an arbitrary light introducing portion. An optical fiber that emits light of a predetermined wavelength is fitted in the hole. The method for manufacturing an optical waveguide device according to claim 8 of the present invention is the method for manufacturing an optical waveguide device according to claim 6 or 7, wherein at least both ends of the optical waveguide are fixed to a transparent container. It is characterized by

A method for manufacturing an optical waveguide device according to a ninth aspect of the present invention is the method for manufacturing an optical waveguide device according to any one of the sixth to eighth aspects, wherein The arranged optical components can be position-adjusted and / or angle-adjusted from the outside of the transparent container, and the light-curable resin solution is injected from one light introduction part at a wavelength at which the photo-curable resin solution does not cure after injection. It is characterized in that the position adjustment and / or the angle adjustment of the optical component are performed so that the light is emitted from another light introducing portion.

A method of manufacturing an optical waveguide device according to a tenth aspect of the present invention is any one of the sixth to ninth aspects.
The method for manufacturing an optical waveguide device according to the item 1, wherein after the formation of the optical waveguide, the uncured photocurable resin solution around the optical waveguide is removed, and then the low refractive index lower than the refractive index of the optical waveguide. It is characterized in that the optical waveguide is embedded and solidified with a resin solution.

The method of manufacturing an optical waveguide device according to claim 11 of the present invention is the method of manufacturing an optical waveguide device according to claim 10, wherein the low refractive index resin solution is a photocurable resin used for forming an optical waveguide. It is characterized by being a photocurable resin solution or a thermosetting resin solution having high compatibility with the resin solution.

A method of manufacturing an optical waveguide device according to a twelfth aspect of the present invention is any one of the sixth to ninth aspects.
The method for producing an optical waveguide device according to the item, wherein the photocurable resin solution is a mixed solution of a high-refractive-index photocurable resin solution and a low-refractive-index photocurable resin solution having different curing initiation wavelengths. When the optical waveguide is formed, the first predetermined wavelength light that cures only the high refractive index photocurable resin solution is introduced from an arbitrary light introducing portion, and after the optical waveguide is formed, the high refractive index photocurable resin solution and the low refractive index light are introduced. It is characterized in that the entire uncured mixed solution around the optical waveguide is irradiated with the second predetermined wavelength light that cures both of the curable resin solutions to solidify.

A method for manufacturing an optical waveguide device according to a thirteenth aspect of the present invention is the method for manufacturing an optical waveguide device according to any one of the sixth to twelfth aspects, which is used for forming an optical waveguide. The predetermined wavelength light to be used is characterized by having a wavelength different from that of the optical signal used after the optical waveguide device is formed.

An optical waveguide device according to a fourteenth aspect of the present invention is the optical waveguide device manufacturing jig according to any one of the first to fifth aspects, and the sixth to thirteenth aspects. An optical waveguide device manufactured by using the method for manufacturing an optical waveguide device according to any one of 1., wherein an optical element and / or a photoelectric conversion element is coupled to an input / output end of the optical waveguide device. It is characterized by

[0016]

FUNCTION AND EFFECT The optical waveguide device manufacturing jig according to claim 1 of the present invention is a jig comprising a housing and N light introducing portions provided in the housing in a predetermined positional relationship. . The predetermined positional relationship means a positional relationship that corresponds to the positional relationship between a single optical component or a plurality of optical components with high accuracy. When manufacturing an optical waveguide device, first, a transparent container in which one or more optical components are inserted is filled with a photocurable resin solution. Then, this jig is attached to a transparent container, and light of a predetermined wavelength is introduced from an arbitrary light introducing portion of the N light introducing portions provided at a predetermined position of the housing of the jig. The arbitrary light introducing unit may be a light introducing unit having a number smaller than N or all the light introducing units. Including both. Introducing light of a predetermined wavelength from all the light introducing portions means curing the photocurable resin solution in both directions. That is, the photocurable resin solution is cured in one direction or in both directions, and the optical waveguide is formed in the optical axis direction thereof and in the optical axis direction converted by one or a plurality of optical components installed in the photocurable resin solution. Grow. In particular, when light of a predetermined wavelength is introduced from both directions, the optical waveguides are connected at a predetermined intermediate point. As a result, an optical waveguide device in which N light introducing portions and one or a plurality of optical components are connected by an optical waveguide is obtained. As described above, if the optical waveguide device is manufactured by using the jig in which the positional relationship between the light introducing portion and the optical component is preset, the worker does not need to perform axis alignment one by one. That is, the optical waveguide device can be efficiently manufactured. Further, since the optical waveguide device is manufactured by using the jig in which the positional relationship of the light introducing portion is maintained, the quality of the manufactured optical waveguide device has little variation. That is, an optical waveguide device with stable quality can be manufactured.

A jig for manufacturing an optical waveguide device according to a second aspect of the present invention is the jig for manufacturing an optical waveguide device according to the first aspect, wherein a hole is formed in an arbitrary light introducing portion. And an optical fiber is fitted into the hole. That is, since the optical fiber is fitted into the hole of the light introducing portion to introduce the light of the predetermined wavelength, the optical waveguide can be formed easily and accurately. Further, since the optical fiber is excellent in flexibility, workability in the manufacturing process can be improved.

The jig for manufacturing an optical waveguide device according to claim 3 of the present invention is the jig for manufacturing an optical waveguide device according to claim 1 or 2, in which light having a predetermined wavelength is introduced. A condenser optical system is attached to the introduction part. This condensing optical system may be provided on the transparent container side or the light source side. When light of a predetermined wavelength is introduced into the light introduction part of the housing, for example, the light is condensed through the transparent container and near the transparent container wall by the condensing optical system (for example, a convex lens) on the transparent container side. When the light is collected, the light intensity per unit area increases, and the photocurable resin solution in the transparent container is fixed to the inner wall of the transparent container more quickly and firmly. Therefore, it is possible to manufacture an optical waveguide device that is robust against disturbance such as vibration. Incidentally, this condensing optical system may be installed on the light source side as long as the light introduction part of the jig is transparent.

An optical waveguide device manufacturing jig according to a fourth aspect of the present invention is the optical waveguide device manufacturing jig according to any one of the first to third aspects, It has adjusting means for adjusting the position and / or angle of the optical component with respect to the optical axis. The adjusting means is, for example, a soft magnetic material attached to the bottom of the optical component and a magnet attached to the outside of the bottom of the housing. Both of them are fixed, for example, by magnetic force so that the bottom of the transparent container and the bottom of the housing are sandwiched. At the time of adjusting the optical component, for example, light having a wavelength that does not cure the photocurable resin solution is introduced. If the optical component has a position shift with respect to the optical axis, the magnet is translated from the outside by moving the magnet in parallel. Further, if the angle of the optical component has an angular deviation with respect to the optical axis, the magnet is rotated to adjust. That is, the optical component can be adjusted while the photocurable resin solution is being filled. Therefore, the optical waveguide device can be manufactured with higher accuracy.

A jig for manufacturing an optical waveguide device according to a fifth aspect of the present invention is the jig for manufacturing an optical waveguide device according to any one of the first to third aspects, wherein N jigs are provided. The housing having the light introduction part can be separated into a plurality of parts.
Since the case is separable, it is possible to support various shapes of transparent containers. For example, light having a predetermined wavelength may be introduced from the light introduction section of one of the separated housings, and their positions may be set so that the introduced light is emitted from the light introduction section of the other housing. It can be used for transparent containers of various shapes. That is, the optical waveguide device manufacturing jig can manufacture optical waveguide devices of various shapes.

A method for manufacturing an optical waveguide device according to a sixth aspect of the present invention is any one of the first to fifth aspects.
Is a method for manufacturing an optical waveguide device, which is formed by using the jig for manufacturing an optical waveguide device of the above item. First, a single or a plurality of optical components are inserted in a predetermined position in a transparent container and filled with a photocurable resin solution. Then, the container is provided with any one of claims 1 to 5.
The jig for manufacturing an optical waveguide device according to any one of 1. Next, light of a predetermined wavelength is introduced from an arbitrary light introducing part of the jig for manufacturing an optical waveguide device. The predetermined wavelength light is, for example, a short wavelength laser light. The predetermined wavelength light sequentially causes a photopolymerization reaction with respect to the photocurable resin solution in the optical axis direction. As a result, an optical waveguide device is formed in which N light introducing portions and one or a plurality of optical components are connected by an optical waveguide. Here, the N light introducing portions mean an entrance and / or an exit in the completed optical waveguide device. By using the jig of the present invention, since the light introducing portion, that is, the entrance and the exit are accurately positioned in advance, it is possible to form an optical waveguide device with high accuracy. Also, it can be easily formed.

The optical waveguide manufacturing method according to claim 7 is the optical waveguide device manufacturing method according to claim 6, wherein the optical waveguide device manufacturing jig mounted on the outer side of the transparent container is used. A hole is formed in the introduction portion, and an optical fiber that emits light of a predetermined wavelength is fitted into this hole. That is, by inserting an optical fiber into this light introducing portion and introducing light, an optical waveguide device can be easily and accurately formed. Further, the optical fiber has excellent flexibility. Therefore, it is a method of improving workability in the manufacturing process.

An optical waveguide manufacturing method according to claim 8 is the optical waveguide device manufacturing method according to claim 6 or 7, wherein at least both ends of the optical waveguide are fixed to a transparent container. . Generally, the photocurable resin solution has adhesiveness and solidifies when cured. That is, the optical waveguide is fixed to the medium in contact with the photocurable resin solution. In the present invention,
A photocurable resin solution is injected into a transparent container, and light of a predetermined wavelength is input and output from all N light introducing parts installed in a jig for manufacturing an optical waveguide device. Therefore, the formed optical waveguide is fixed to at least the transparent container. Since both ends of the optical waveguide are fixed to the transparent container, the optical waveguide device is robust against vibration and the like. That is, it is a manufacturing method for manufacturing a robust optical waveguide device.

The method of manufacturing an optical waveguide according to claim 9 is the method of manufacturing an optical waveguide device according to any one of claims 6 to 8, which is inserted in a transparent container. The position and / or the angle of the optical component can be adjusted from the outside of the transparent container. The adjusting means is, for example, a soft magnetic material attached to the bottom of the optical component and a magnet attached to the outside of the bottom surface of the housing. Both are fixed by magnetic force between the transparent container and the housing so as to be adjustable. Then, after the injection of the photocurable resin solution, the position of the optical component is adjusted by the adjusting means so that the light incident from one light introducing section at a wavelength at which the photocurable resin solution does not cure is emitted from the other light introducing section. Adjust and / or adjust angle. For example, if the displacement of the emission position is the displacement of the optical component with respect to the optical axis, the magnet is translated and adjusted. If the positional deviation is an angular deviation with respect to the optical axis of the optical component, the magnet is rotated to adjust. That is, the optical component can be adjusted while the photocurable resin solution is being filled. Therefore, the manufacturing method can easily manufacture a highly accurate optical waveguide device.

The optical waveguide manufacturing method according to claim 10 is the optical waveguide device manufacturing method according to any one of claims 6 to 9, wherein after the optical waveguide is formed, first the optical waveguide is formed. The uncured photocurable resin solution around the waveguide is removed. Next, the optical waveguide is embedded and solidified with a low refractive index resin solution having a refractive index lower than that of the formed optical waveguide.
At this time, the low refractive index resin solution is, for example, a photocurable resin solution or a thermosetting resin solution. In the case of a photocurable resin solution, it is solidified by, for example, ultraviolet rays, and in the case of a thermosetting resin solution, it is solidified by heat.

Further, for example, when the resin solution forming the optical waveguide is a high-refractive-index photocurable resin solution and the solution for solidifying the entire is a low-refractive-index photocurable resin solution, after curing the high-refractive-index photocurable resin solution, A low refractive index resin solution is selected according to the refractive index. That is, for example, the low refractive index resin solution is set so as to form a low-index step index type optical waveguide. Since it is a step index type optical waveguide, the transmission loss is reduced. Further, since the whole is solidified, it becomes a robust optical waveguide device. That is, it is possible to manufacture a robust optical waveguide device that is not affected by disturbance such as vibration and has low loss.

The method for manufacturing an optical waveguide according to claim 11 is the method for manufacturing an optical waveguide device according to claim 10, wherein the low refractive index resin solution contains a photocurable resin used for forming the optical waveguide. A photocurable resin solution or a thermosetting resin solution having high compatibility with the solution is used. When the optical waveguide is formed by the photocurable resin solution, the photocurable resin solution remains on the surface even after the photocurable resin solution is removed. Usually, this residual liquid causes the transmission loss of the optical waveguide. In the present invention, a low refractive index resin solution having compatibility is injected in this state. Because of the compatibility, the photocurable resin solution remaining on the surface of the optical waveguide is melted in the injected low refractive index resin solution. That is, the surface of the optical waveguide becomes smooth and substantially uniform. Propagation (total reflection) if the surface becomes uniform
The loss due to That is, a low loss optical waveguide device can be manufactured. Incidentally, a cleaning step is usually required after removing the photocurable resin solution, but in the present invention, a compatible low refractive index resin solution is used. Therefore,
There is also an effect that the cleaning step can be omitted.

The method of manufacturing an optical waveguide according to claim 12 is the method of manufacturing an optical waveguide device according to any one of claims 6 to 9, wherein the photocurable resin solution is cured. A mixed liquid of a high refractive index photocurable resin solution and a low refractive index photocurable resin solution having different starting wavelengths is used. Then, when forming the optical waveguide, the first wavelength parallel light that cures only the high-refractive-index photocurable resin solution is introduced from an arbitrary light introduction part. After the formation of the optical waveguide, the second wavelength light that cures both the high-refractive-index photocurable resin solution and the low-refractive-index photocurable resin solution is applied to the entire uncured liquid mixture around the optical waveguide to be solidified. .

For example, a high refractive index photocurable resin is added to the mixed solution.
Wavelength λ to cure only solution_w(Λ ₂<Λ_w<Λ₁)of
Introduce light. Where wavelength λ₁Is a high refractive index photocurable tree
The wavelength at which the oil solution begins to cure₂Is a low refractive index light hard
It is a curing start wavelength of the chemical resin solution. Also, the above wavelength λ_w
Is a short wavelength laser such as an argon ion laser.
Light. This enables high refractive index photocurability in mixed solutions.
Only the resin solution is cured by the photopolymerization reaction, and the optical waveguide is shaped.
Is made. At this time, two kinds of photo-curable resin are provided on the outer circumference of the optical waveguide.
The mixed solution consisting of the fat solution remains. next,
Cure both photo-curable resin solutions from around this mixed solution.
Wavelength band λ_c(Λ_c<Λ₂) Light, for example, ultraviolet rays
Irradiation from a pump, etc.
Solidify the combined solution. As a result, the optical waveguide (core) circumference
A clad portion will be formed in the surrounding area.
An index type optical transmission line is formed. Also formed
The optical waveguide, the optical component, and the entire container are solidified. Therefore,
This also produces a robust optical waveguide device.
According to the manufacturing method of the present invention, replacement of the photocurable resin solution
No process is required. Therefore, work efficiency was improved.
It is also a manufacturing method.

A method for manufacturing an optical waveguide device according to a thirteenth aspect of the present invention is the method for manufacturing an optical waveguide device according to any one of the sixth to twelfth aspects, which is used for forming an optical waveguide. The predetermined wavelength light used is set to have a wavelength different from that of the optical signal used after the optical waveguide device is formed. The photocurable resin solution forming the optical waveguide absorbs light energy having a predetermined wavelength and is solidified. That is, as the light having the predetermined wavelength, a wavelength which is easily absorbed by the photocurable resin solution at the time of forming the optical waveguide is selected. this is,
This means that the formed optical waveguide also easily absorbs the predetermined wavelength although it is weak. Therefore, light having a wavelength other than the predetermined wavelength is used for the completed optical waveguide device. In other words, light having a predetermined wavelength different from the wavelength of the optical signal used after the optical waveguide device is formed is used for forming the optical waveguide. For example, light having a shorter wavelength than the wavelength used for the optical signal (infrared to visible light) is used. As a result, a low loss optical waveguide device can be obtained.

An optical waveguide device according to a fourteenth aspect of the present invention is the optical waveguide device manufacturing jig according to any one of the first to fifth aspects, and the sixth to thirteenth aspects. An optical waveguide device manufactured by using the method for manufacturing an optical waveguide device according to any one of 1, wherein an optical element and / or a photoelectric conversion element is coupled to an input / output end of the optical waveguide device. . The optical element is an element such as a lens, a filter, or an optical fiber. These elements are fixed with, for example, a transparent adhesive. As a result, the optical waveguide device can be made smaller and easier to handle. The photoelectric conversion element is a light emitting element such as a laser diode and a light receiving element such as a photodiode. By connecting these elements to the input / output terminals, various transmitting / receiving devices can be formed. For example, if a light receiving element is combined, it can be used as a receiving device in optical communication. Further, by combining the light emitting elements, a communication device in optical communication can be obtained.

[0032]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below based on specific embodiments. The present invention is not limited to the examples below. (First Embodiment) FIG. 1 shows a jig for manufacturing an optical waveguide device of this embodiment. An optical waveguide device described later is manufactured by this jig. 1A is a top view and FIG. 1B is a front view. The jig for manufacturing an optical waveguide device according to the present embodiment includes a housing 10 and holes 11 and 12 provided in a light introducing portion 13 of the housing 10. At this time, the holes 11 and 12 are processed with high precision according to the position of the photoelectric conversion element described later. That is, the positional relationship between the holes 11 and 12 and the squareness thereof are highly accurate. For example, holes 11, 12
The error of the Y coordinate of the center coordinate of is set to within several μm to several tens of microns by precision processing. Also, the hole 11
And the perpendicularity of the hole 12, that is, the angle at which the center line of the hole 11 and the center line of the hole 12 intersect is set to, for example, several tens of seconds to several hundreds of seconds. This allows, for example, an optical fiber to be attached to each hole 1
In the case of fitting in Nos. 1 and 12, the light emitted from the tip (for example, laser light) intersects at exactly 90 degrees. The optical waveguide device of this embodiment is formed using such a jig. Therefore, an operator does not need to adjust the positional relationship and angle of each optical fiber, for example. An optical waveguide device with high accuracy can be created by fitting an optical fiber into this jig, introducing light of a predetermined wavelength from each optical fiber, and performing a predetermined manufacturing process described later.

FIG. 2 shows a method of manufacturing the optical waveguide device of this embodiment. The figure is a process drawing. The basic manufacturing method is a so-called stereolithography method in which a short wavelength laser is introduced into a photocurable resin and the resin is cured by a photopolymerization reaction. The difference from the stereolithography is that there is no moving part and the optical waveguide grows autonomously. First, in the step (a), for example, a core diameter of 100 μm is added to the housing 10 of the optical waveguide device manufacturing jig.
An optical fiber 21 made of quartz with a clad diameter of 140 μm,
22 is provided. That is, the optical fiber 2 is inserted into the hole 11 of the housing 10.
1 and the optical fiber 22 in the hole 12. or,
On the other hand, for example, an interference filter 25, which is an optical component, is inserted in a predetermined position of the transparent container 20 and filled with an acrylic photocurable resin solution 23 having a high refractive index and exhibiting a radical polymerization reaction by light irradiation. Then, the housing 10 including the optical fibers 11 and 12 is mounted in the transparent container 20. Transparent container,
For example, it is a rectangular parallelepiped acrylic container having a wall thickness of 0.5 mm. And it transfers to a process (b).

In step (b), for example, a short wavelength laser (wavelength λ _W ) having a predetermined wavelength is introduced into the optical fibers 21 and 22. A short wavelength laser is, for example, wavelength λ _w = 488.
nm argon ion laser. Then, the light with a predetermined wavelength (wavelength λ _W ) from the tip is output with an intensity of about 150 mW.
And the photocurable resin solution 23 is polymerized and cured. At this time, the refractive index rises at the tip of the optical waveguide 24 due to the curing of the photocurable resin solution 23, and the optical waveguide 24 continues to grow while confining the guided light by the self-focusing effect (self-forming optical waveguide). Then, as shown in the step (c), for example, an interval of 5 m
The interference filter 25 erected at m is reached. The interference filter 25 is a semi-transparent mirror for wavelengths other than the interference wavelength. That is, if the predetermined wavelength of the introduced light is set to be different from the interference wavelength, part of the light is reflected and part of the light is transmitted. That is,
The optical waveguide 24 is sequentially formed on the reflection path and the transmission path. Then, the optical waveguides 24 grown from different paths are pulled into each other by the self-alignment effect and the optical waveguides 24 are coupled to each other. When all the optical waveguides 24 are coupled, the laser irradiation by the optical fibers 11 and 12 is stopped. At this time, the diameter of the formed optical waveguide 24 is
It is about 120 μm, and the transmission loss for a wavelength of 850 nm is about 0.8 dB / cm. The loss at the interference filter 25 is about 0.5 dB / cm. Then, the process proceeds to step (d).

In the step (d), the photocurable resin solution 23 is removed from the transparent container 20, and the fluorinated acrylic low refractive index photocurable resin solution 26 having a refractive index lower than that of the optical waveguide 24. Inject. At this time, the end portion of the optical waveguide 24 is fixed to the transparent container 20, and the central portion is fixed by the interference filter 25. Therefore, the optical waveguide 24 is not deformed and detached even when the solution is replaced. It is also robust against mechanical vibration. At this time, it is desirable that the low-refractive-index photocurable resin solution 26 to be replaced is compatible with the photocurable resin solution 23 for forming the optical waveguide. When a compatible photocurable resin solution solution is used, part of the photocurable resin solution 23 does not remain on the surface of the optical waveguide when the solutions are replaced, and the surface of the optical waveguide 24 can be formed smoothly. As a result, an optical waveguide with reduced transmission loss is formed. Also, when the solution is replaced, a washing step with a solvent is usually required, which increases the manufacturing cost. In the step (d) of this embodiment, the low-refractive-index photocurable resin solution 26 having a high compatibility with the photocurable resin solution 23 is injected, so that the cleaning step can be omitted. Therefore,
Its manufacturing cost also becomes cheaper.

Next, for example, an ultraviolet lamp or the like is used to irradiate the entire surface with ultraviolet light (wavelength λc). That is, the low refractive index photocurable resin solution 26 is cured to solidify the whole. As a result, a clad is formed around the optical waveguide 24 to form a step index type optical waveguide. At this time, as described above, the surface of the optical waveguide 24 is smooth, and the refractive index changes sharply in the radial direction. That is, a more complete step index type optical waveguide is formed, resulting in lower loss (about 0.5 dB / cm). Also, since the whole is solidified, a robust optical waveguide is formed. In order to minimize the transmission loss of the optical waveguide 24, the difference between the refractive index of the optical waveguide 24 after curing (refractive index of the core portion) and the refractive index of the low refractive index solution after curing (refractive index of the cladding portion). The low-refractive-index photocurable resin solution 26 may be selected so that 1
As an example, when an acrylic resin is used for the photo-curable resin solution 23 (photo-curable resin solution for core), a low-refractive-index photo-curable resin solution 26 (photo-curable resin solution for clad material) is used. In addition to acrylic resin, epoxy resin, oxetane resin, and silicone resin can be used. If any low refractive index solution is used, an optical waveguide with low loss can be obtained. And it transfers to the last process (e).

In step (e), an optical waveguide device is produced. This example is, for example, an optical waveguide type reception sensor. That is, a new optical fiber 31 is attached (bonded) to the entrance 27 of the optical waveguide 24, and light receiving elements (photodiodes) 29 _A , 29 _B , and 29 _C , which are photoelectric conversion elements, are attached to the exit 28 of the optical waveguide 24. To provide. Reference numeral 30 is a lead frame of the light receiving element 29. Thereby, the optical waveguide type reception sensor is formed. For example, an optical signal having λ _A , λ _B and λ _C as carriers is introduced into the optical fiber 31 of this optical waveguide type reception sensor. The optical signals of wavelengths λ _A , λ _B , and λ _C input from the optical fiber 31 are reflected by the respective interference filters 25, and the respective light receiving elements 29 are received.
It is received by _A , 29 _B and 29 _C. That is, it becomes an optical waveguide type reception sensor of optical frequency multiplexing. In this embodiment, FIG.
Since the optical waveguide device manufacturing jig 10 shown in is used, such a device can be manufactured easily and accurately. It is desirable that all of the three wavelengths λ _A , λ _B and λ _C are longer than the predetermined wavelength λ _W. λ
_{If A} , λ _B , and λ _C are at or near the optical waveguide formation wavelength (predetermined wavelength) λ _W, they are easily absorbed by the optical waveguide 24, resulting in a large transmission loss. For example, when the optical waveguide 24 is formed at 488 nm, the transmission loss at 488 nm is 5
dB / cm, but 1.3 dB / at a wavelength of 670 nm
It is 0.8 dB at cm and 850 nm. Therefore, 48
When the optical waveguide is formed with 8 nm, the applicable wavelength as an optical waveguide device (communication wavelength for communication devices)
Is preferably 600 nm to 1500 nm, for example. It becomes an optical waveguide device with little transmission loss.

(Second Embodiment) In the first embodiment, an optical waveguide (core portion) is formed from a photocurable resin solution, and the photocurable resin solution is replaced with a low refractive index photocurable resin solution. This is an example in which it is solidified to form a clad portion. The present embodiment is an example in which a mixed solution obtained by mixing two kinds of photocurable resin solutions having different curing start wavelengths and different refractive indexes after curing is used, and the solution replacement step is omitted. That is, this is an example in which after the step (c) of the first embodiment in FIG. 2, the solution is not replaced and the process immediately proceeds to the ultraviolet irradiation step (d). Further, the housing 10 of the optical waveguide manufacturing jig of the first embodiment is replaced with the housing 10a.
This is an example of manufacturing the optical waveguide device more efficiently by separating the optical waveguide device into 10 and 10b.

For that purpose, the curing start wavelength and the bending after curing are
Two kinds of photo-curable resin solutions with different folding rates, that is, high refractive index light
Mix curable resin solution and low refractive index photocurable resin solution,
It is used as a photo-curable resin solution for stereolithography. High refractive index light
The curable resin solution is, for example, an accelerator that exhibits a radical polymerization reaction.
It is a ril type photocurable resin solution. Also, low refractive index photocuring
Epoxy resin photo-curing that shows cationic polymerization reaction
Resin solution. Mix both at a ratio of 7: 3
To prepare a mixed solution 30. Figure 3 shows the spectral sensitivity characteristics of both.
Show. The horizontal axis represents wavelength and the vertical axis represents relative sensitivity. Curve A is high
It is the spectral sensitivity characteristic of the refractive index photocurable resin solution,
Is the spectral sensitivity characteristic of the low refractive index photocurable resin solution. Figure
As shown, each of the photocurable resin solutions
Curing start wavelength of (λ ₁, Λ₂) Is the short wavelength laser used
The wavelength λ_WIt is configured to sandwich. Since then, this refractive index
High refractive index photo-curable resin solution with a high solution A, low refractive index
Call it Solution B.

In this embodiment, an optical waveguide is manufactured using such a mixed solution 30. The manufacturing process will be described with reference to FIG. The optical waveguide forming jig 10, the optical fibers 21, 2
2. Since the optical components such as the interference filter 25 are installed in the same manner as in the first embodiment, detailed description will be omitted. Also, the housing 10
Shall be separated and used with a degree of freedom. First, in the step (a), the transparent container 20 is filled with the mixed solution 30. Next, the jigs separated in the step (b) are mounted respectively, and a predetermined wavelength (argon ion laser:
λ _W = 488 nm) is introduced. This wavelength is shorter than the curing start wavelength of the solution A and longer than that of the solution B as described above. Therefore, only the solution A is cured and the optical waveguide 24 is formed. At this time, the solution B on the optical axis is pushed to the surroundings. Then, the optical waveguide 24 from different directions
However, the continuous optical waveguide 24 is formed by being drawn into each other by the self-alignment effect. Then, in step (c), the introduction of light of a predetermined wavelength (wavelength λ _W ) is stopped, and the process proceeds to step (d).

In step (d), ultraviolet rays having a wavelength λ _C are uniformly irradiated from the surroundings by an ultraviolet lamp or the like. As shown in FIG. 3, this wavelength λ _C is shorter than the curing start wavelength of both solutions A and B. Therefore, both solutions are cured. As a result, the entire mixed solution 30 around the optical waveguide 24 is hardened and a clad portion is formed. At this time, the refractive index of the clad portion is smaller than that of the optical waveguide (core portion) 24. That is, a step index type optical waveguide is formed. Note that the next step (e) is the same as that of the first embodiment and is therefore omitted. In this way, a step index type optical waveguide can be easily formed by mixing two kinds of photocurable resin solutions having different curing start wavelengths and different refractive indexes after curing and irradiating light with different wavelengths in two steps. It is possible to manufacture an optical waveguide device.

(Modifications) Although the embodiments representing the present invention have been described above, various modifications are conceivable. For example, the first
In the embodiment and the second embodiment, the light having the predetermined wavelength is applied to all the holes 1
Although the method of introducing the optical waveguide 24 through the hole 12 and connecting the optical waveguide 24 at the intermediate point is adopted, the holes 11 and 12 may be adopted arbitrarily. That is, it is not necessary to introduce the light of the predetermined wavelength from both directions. It may be partially introduced only from one direction. For example, the light receiving element 2 shown in FIGS. 2 (e) and 4 (e)
When the light receiving area of 9 _C is large, or when the distance between the holes 11 and 12, that is, the optical path is short, it is sufficient to introduce light of a predetermined wavelength from the hole 11. You may do this.

In the second embodiment, the housing 10 of the first embodiment is used.
Was separated into housings 10a and 10b, and both were finely adjusted to determine the input / output position to grow the optical waveguide 24, but only one may be used. Further, for example, the housing 10a does not necessarily have to be used. That is, as shown in FIG. 5, a hole 41 corresponding to the hole 11 of the housing 10a may be provided on the side wall of the transparent container and the optical fiber 21 may be fitted therein. The jig for manufacturing the optical waveguide device may be only the housing 10b and the hole 12. Case 10b
It is also possible to easily set the input / output position by finely adjusting only the position. In this case, the optical waveguide 24 is extended from the tip of the optical fiber 21 to form a device in which the optical waveguide device and the optical fiber 21 are integrated. Therefore,
A device with less connection loss can be obtained. For example, the optical waveguide device can have an extremely small connection loss of 0.1 dB. In this way, the housing 10b
Using an optical waveguide device manufacturing jig consisting of only
A device in which the optical fiber 21 is integrated may be manufactured.

Although the optical waveguide 24 is grown from the optical fibers 21 and 22 in the first and second embodiments, the optical fiber may not be used. For example, as shown in FIG. 6A, an argon ion laser (200 mW) having a predetermined full width at half maximum (FWHM) of light of a predetermined wavelength may be introduced through the hole 12. An optical waveguide 24 having a diameter of about 2 to 3 mm is obtained.
You may form such an optical waveguide device. The predetermined wavelength light need not be short wavelength laser light. For example, the ultraviolet lamp may be taken out with two or more apertures to make a substantially parallel light. This roughly parallel light is shown in FIG.
It may be introduced from. Equivalent results are obtained. Further, when such laser light or lamp light is used, it is not necessary to provide a hole in the jig, and if the light introducing part is transparent, the
The same optical waveguide can be formed by the irradiation system as shown in (b).

Further, in the first and second embodiments, the condensing optical system such as the convex lens is not provided in the holes 11 and 12 of the housing 10, but it is shown in FIGS. 7 (a) and 7 (b). As described above, the convex lens 43 (numerical aperture 0.25) may be provided on the transparent container 20 side of the hole 12. 7A shows the case where the optical fiber 22 is used, and FIG. 7B shows the case where the laser beam having the FWHM of about 3 mm is used. If this convex lens 43 is provided on the transparent container 20 side of the hole 12, the laser light emitted from the optical fiber 22 can be condensed, for example, near the wall of the transparent container 20 (FIG. 7A). Similarly, a laser beam having an FWHM of about 3 mm can be focused near the wall length of the transparent container 20 (FIG. 7B). By condensing the laser light in this way, the light intensity increases at the condensing portion, so that the photocurable resin solution can be solidified more rapidly and with higher hardness. Then, it can be more firmly fixed to the inner wall of the transparent container 20. Since the optical waveguide 24 is firmly fixed to the inner wall of the transparent container 20, an optical waveguide device that is robust against mechanical vibration can be obtained. If a lens having a long focal length is used, the lens may be installed on the opposite side of the container 20 side (light source side). Further, as described above, if it is a transparent light introducing portion, it is not necessary to provide a hole, and a lens may be installed at an arbitrary position on the path of laser light.

In the first and second embodiments, the optical frequency is
Multiplexing receiving device (3 wavelength multiplexing unidirectional receiving device
The example of manufacturing The present invention is applied to the reception device.
Not limited to chairs. For example, as shown in FIG.
It is also applicable to two-way communication devices. in this case,
The end faces 37 and 38 of the optical waveguide 24 are received as photoelectric conversion elements.
Signal sensor 29_AAnd the light emitting element 39 is attached. fiber
Wavelength λ input from 31 ₁Optical signal of the optical waveguide 24
Through the interference filter (wavelength selective filter) 35
Then, all the light receiving elements 29_AEntered in. That is, the signal is
Be received. On the other hand, the wavelength of light emitted from the light emitting element 39
λ₂Is transmitted to the optical waveguide through the interference filter 34.
It is reflected on the end face 27 side of 24 and output to the optical fiber 31.
Be done. That is, the optical signal is transmitted. That is, sending and receiving on a single line
A possible WDM device is formed. like this
Any device may be used.

Further, in the first and second embodiments, if the thickness of the interference filter 25 varies, the optical path of the transmitted light will shift. Further, if there is an angular error in the installation of the interference filter 25, the reflected light path will deviate from the predetermined light path. In preparation for such a case, as shown in FIG.
Adjustment means for adjusting the position and angle of the optical component may be provided below the optical component such as the interference filter. For example, a jig for manufacturing an optical waveguide device is used, in which the side wall of the housing 10 is L-shaped,
It is assumed that the bottom plate is attached to it. The adjusting means is composed of the soft magnetic material 13 provided under the optical component, the transparent container 20, and the magnet 14 provided so as to sandwich the bottom plate of the housing 10. Then, the optical component is erected directly on the soft magnetic material 13, or a column is provided on the soft magnetic material 13 to support the optical component by this column and also serve as a rotation axis of the optical component. 9A and 9B are diagrams in which the housing 10 of the jig for manufacturing an optical waveguide device is mounted on the transparent container 20 on which no optical component is mounted. FIG. 9A is a top view and FIG. It is a front view. At the time of use, an optical component (for example, an interference filter 25) is inserted into this container and the photocurable resin solution 23 is injected. After that, a wavelength (for example, 633 nm) at which the photocurable resin solution 23 is not cured is introduced from the optical fiber 21. Then, by moving the magnet 14 in parallel so that the introduced light is maximized in each of the output-side optical fibers 22, the arrangement position of the optical component can be changed, and by rotating the magnet 14, the optical component is moved. It can be rotated to adjust the reflection angle of light. In this way, the optical axis can be surely aligned. That is, a highly accurate optical waveguide device can be manufactured. You may do this.

Further, in the first embodiment, when the whole is solidified, the low refractive index photocurable resin solution 26, which is a photocurable resin solution, is injected into the transparent container 20 and the ultraviolet ray (λ
_Although solidified in _C ), the photocurable resin solution may be a thermosetting silicone resin. In that case, heating may be performed instead of irradiation with ultraviolet rays. Also in this case, the transmission loss is about 0.
It becomes 5 dB / cm. Further, when the thermosetting silicone resin is used, it is not necessary to use the transparent container 20 made of optical glass or the like. Therefore, it can be manufactured at low cost. still,
When an opaque container made of metal or the like is used, an optical component such as an optical sensor may be provided therein, or a hole may be provided in the opaque container so that the optical waveguide is directly connected to the optical sensor. Has the same effect.

[0049] The first embodiment, in the second embodiment uses an argon ion laser with a wavelength lambda _w = 488 nm to the short wavelength laser, the wavelength lambda _w depending photocurable resin solution
= 325 nm He-Cd (helium cadmium) laser may be used. Equivalent results can be obtained.
Further, an ultra-high pressure mercury lamp (λ = 380 nm) or the like can be applied as long as it is a substantially parallel light beam.

[Brief description of drawings]

FIG. 1 is a top view (a) and a front view (b) of an optical waveguide device manufacturing jig according to a first embodiment.

FIG. 2 is a manufacturing process diagram of the optical waveguide device according to the first embodiment.

FIG. 3 is a spectral sensitivity characteristic diagram of the mixed solution according to the second embodiment.

FIG. 4 is a manufacturing process diagram of an optical waveguide device according to a second embodiment.

FIG. 5 is a layout view of a jig for manufacturing an optical waveguide device according to a modification.

FIG. 6 is an optical waveguide formation diagram when a laser beam according to a modification is introduced.

FIG. 7 is an optical waveguide formation diagram in the case where a jig for manufacturing an optical waveguide device is provided with a convex lens according to the modification.

FIG. 8 is a configuration cross-sectional view of an optical waveguide type bidirectional communication device according to a modification.

FIG. 9 is a top view (a) and a front view (b) of an optical waveguide device jig according to a modified example.

[Explanation of symbols]

10 ... Casing 11, 12 ... Hole 13 ... Light introduction part 20 ... Transparent container 21, 22 ... Optical fiber 23 ... Photocurable resin solution 24 ... Optical waveguide 25 ... Interference filter 26 ... Low refractive index photocurable resin solution 29 _A , 29 _B , 29 _C ... Light receiving element 30 ... Mixed solution 34, 35 ... Interference filter 39 ... Light emitting element 43 ... Convex lens

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventors             Aichi Prefecture Nagachite Town Aichi District             Ground 1 Toyota Central Research Institute Co., Ltd. (72) Inventor Tatsuya Yamashita             Aichi Prefecture Nagachite Town Aichi District             Ground 1 Toyota Central Research Institute Co., Ltd. (72) Inventor Akari Kawasaki             Aichi Prefecture Nagachite Town Aichi District             Ground 1 Toyota Central Research Institute Co., Ltd. (72) Inventor Hiroshi Ito             Aichi Prefecture Nagachite Town Aichi District             Ground 1 Toyota Central Research Institute Co., Ltd. (72) Inventor, Yuri Toshi             Aichi Prefecture Kasuga-cho, Nishikasugai-gun Ochiai character Nagahata 1             Address within Toyoda Gosei Co., Ltd. (72) Inventor Kuniyoshi Kondo             Aichi Prefecture Kasuga-cho, Nishikasugai-gun Ochiai character Nagahata 1             Address within Toyoda Gosei Co., Ltd. F term (reference) 2H047 KA04 LA00 LA14 LA18 MA05                       MA07 PA15 PA22 PA28 QA05                       TA41

Claims (14)

[Claims] 1. A jig for manufacturing an optical waveguide device having N input / output ends by inserting a single or a plurality of optical parts, wherein the single or a plurality of optical parts are placed in a transparent container in which a photocurable resin solution is injected. A jig for manufacturing an optical waveguide device in which a plurality of optical components are installed and mounted in the transparent container, comprising: a housing and N light introducing portions provided in a predetermined positional relationship with the housing. The light having a predetermined wavelength is introduced from any of the N light introducing parts to cure the photocurable resin solution, and the optical axis direction and the light installed in the photocurable resin solution are set. An optical waveguide is grown in the optical axis direction converted by a single or a plurality of optical components, and the N light introducing portions and the single or a plurality of optical components are connected by the optical waveguide, and the N optical waveguides are connected. Optical waveguide characterized by manufacturing an optical waveguide device having an input / output end Device manufacturing jig. 2. The jig for manufacturing an optical waveguide device according to claim 1, wherein a hole is formed in the arbitrary light introducing portion, and an optical fiber is fitted into the hole. 3. The optical waveguide device manufacturing method according to claim 1, wherein a condensing optical system is provided to the arbitrary light introducing section into which the light of the predetermined wavelength is introduced. jig. 4. The optical waveguide device manufacturing jig comprises adjusting means for adjusting the position and / or angle of the optical component with respect to the optical axis of the introduced light. The jig for manufacturing an optical waveguide device according to any one of items. 5. The casing having the N light introducing portions,
The jig for manufacturing an optical waveguide device according to any one of claims 1 to 4, wherein the jig is separable into a plurality of pieces. 6. A method of manufacturing an optical waveguide device, which is formed by using the optical waveguide device manufacturing jig according to claim 1, wherein a transparent container is provided with one or a plurality of optical components. The transparent container is inserted at a predetermined position to fill the transparent container with a photo-curable resin solution, and the optical waveguide device manufacturing jig according to any one of claims 1 to 5 is attached to the transparent container and any one of them is attached. Light of a predetermined wavelength is introduced from a light introducing part, the light curable resin solution is cured to form an optical waveguide, and the N light introducing parts and the one or more optical parts are connected by an optical waveguide. A method of manufacturing an optical waveguide device, which comprises forming an optical waveguide device having N input / output terminals. 7. The light guide according to claim 6, wherein a hole is formed in the arbitrary light introducing portion, and an optical fiber for emitting the light of the predetermined wavelength is fitted into the hole. Method of manufacturing waveguide device. 8. The method of manufacturing an optical waveguide device according to claim 6, wherein at least both ends of the optical waveguide are fixed to the transparent container. 9. The optical component inserted in the transparent container,
Position adjustment and / or angle adjustment is possible from the outside of the transparent container, and after the injection of the photocurable resin solution, the light incident from one light introduction part at a wavelength at which the photocurable resin solution is not cured is 9. The manufacturing of the optical waveguide device according to claim 6, wherein the position adjustment and / or the angle adjustment of the optical component is performed so that the optical component is emitted from another light introducing portion. Method. 10. After the formation of the optical waveguide, the uncured photocurable resin solution around the optical waveguide is removed, and then the low refractive index resin solution having a refractive index lower than that of the optical waveguide is used. The method for manufacturing an optical waveguide device according to any one of claims 6 to 9, wherein the optical waveguide is embedded and solidified. 11. The method of manufacturing an optical waveguide device according to claim 10, wherein the low refractive index resin solution is a photocurable resin solution or a thermosetting resin solution having high compatibility with the photocurable resin solution. Method. 12. The photo-curable resin solution is a mixed solution of a high-refractive-index photo-curable resin solution and a low-refractive-index photo-curable resin solution having different curing start wavelengths. The first predetermined wavelength light that cures only the index photocurable resin solution is introduced from an arbitrary light introduction part of the N light introduction parts, and after the formation of the optical waveguide, the high refractive index photocurable resin solution 7. The second predetermined wavelength light that cures both the low refractive index photocurable resin solution and the low refractive index photocurable resin solution is irradiated onto the entire uncured mixed solution around the optical waveguide to solidify. 10. The method for manufacturing the optical waveguide device according to any one of items 9. 13. The light of the predetermined wavelength has a wavelength different from that of an optical signal used after the optical waveguide device is formed, according to any one of claims 6 to 12. Manufacturing method of optical waveguide device. 14. A jig for manufacturing an optical waveguide device according to any one of claims 1 to 5, and a method for manufacturing an optical waveguide device according to any one of claims 6 to 13. An optical waveguide device manufactured by using an optical element and / or an input / output terminal of the optical waveguide device.
Alternatively, an optical waveguide device in which a photoelectric conversion element is coupled.