JP2003051249A - Plasma display panel and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress that yellowing phenomenon is generated on the front face substrate and a dielectric layer of a region between transparent electrodes, and to realize a plasma display panel having a superior display quality. SOLUTION: After having formed the first transparent electrode film 18, composed of ITO on the front face substrate 2 by means of a vacuum vapor deposition method, a photosensitive paste is coated on the first transparent electrode film 18, and patterning and calcining are carried out to form a bus electrode layer 16. Next, after the second transparent electrode film 20 composed of the ITO is formed on the first transparent electrode film 18 and the bus electrode 10 by means of the vacuum vapor deposition method, by simultaneously etching the first transparent electrode film 18 and the second transparent electrode film 20, patterning is carried out in a desired shape, and the first transparent electrode 21 and the second transparent electrode 22 are formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel used for a display device and a manufacturing method thereof.

[0002]

2. Description of the Related Art A typical plasma display panel as a thin display device includes a glass front substrate 2 arranged facing each other so as to form a discharge space 1 therebetween, as shown in FIG. The rear substrate 3 is provided. A plurality of display electrode pairs composed of two display electrodes 4 and 5 are arranged on the front substrate 2, and a light shielding layer 6 is formed between the display electrode pairs. Then, the dielectric layer 7 is formed so as to cover the display electrodes 4 and 5 and the light shielding layer 6, and the protective layer 8 made of magnesium oxide (MgO) is formed on the dielectric layer 7.
Are formed. The display electrodes 4 and 5 are composed of a transparent electrode 9 made of indium tin oxide (ITO) and silver (A).
g) and the like, and the bus electrode 10 is formed on the transparent electrode 9 formed on the front substrate 2.
Are formed.

A plurality of address electrodes 11 are formed on the rear substrate 3, and a dielectric layer 12 is formed so as to cover the address electrodes 11. Partition walls 13 are formed on the dielectric layer 12 so as to be located between the address electrodes 11, and a phosphor layer 14 is applied to the surface of the dielectric layer 12 and the side surfaces of the partition walls 13.

In the actual panel, the display electrodes 4, 5 are
The front substrate 2 and the rear substrate 3 are arranged so as to oppose each other so that the longitudinal direction of the address electrodes 11 and the longitudinal direction of the address electrodes 11 are orthogonal to each other. In FIG. 6, for convenience, front side members (the front substrate 2, the display electrodes 4). 5, the light-shielding layer 6, the dielectric layer 7 and the protective layer 8) on the back side (back substrate 3, address electrode 11, dielectric layer 12, partition wall 13 and phosphor layer 14).
Are shown rotated by 90 ° in a plane parallel to the back substrate 3. Further, in FIG. 6, hatching is omitted for the transparent electrode 9. In the following drawings, hatching is omitted for the part related to the transparent electrode.

In the discharge space 1, a discharge gas consisting of a mixed gas of neon (Ne) and xenon (Xe), for example, 53
It is sealed at a pressure of -80 kPa (400-600 Torr). This discharge gas causes the phosphor layer 14 to emit light by ultraviolet rays generated when a display discharge is generated between the display electrode 4 and the display electrode 5 forming the display electrode pair to display a color image.

Next, a method of forming display electrodes and the like on the front substrate 2 will be described with reference to FIGS. First, FIG.
As shown in (a), the transparent electrode film 15 is formed on the front substrate 2 by the vacuum evaporation method. Then, the transparent electrode 9 having a predetermined pattern is formed by patterning by etching (FIG. 7B). Next, a photosensitive silver (Ag) paste is printed on the entire display area on the transparent electrode 9 by a screen printing method or the like and dried to form the bus electrode layer 16 (FIG. 7C). Then, the bus electrode layer 16 is patterned into a strip shape by performing exposure and development using a photomask, and then baked to form the bus electrode 10 made of Ag on the transparent electrode 9 (FIG. 7D). ).

Next, as shown in FIG. 8A, a photosensitive light shielding material layer 17 is formed. Then, the light-shielding material layer 17 is patterned by performing exposure and development using a photomask, and then baked to form the light-shielding layer 6 (FIG. 8B). Subsequently, a dielectric material layer is formed on the front substrate 2 so as to cover the transparent electrodes 9, the bus electrodes 10 and the light shielding layer 6 and fired to form a dielectric layer 7a (FIG. 8).
(C)) A dielectric material layer is formed on the dielectric layer 7a and fired to form the dielectric layer 7b (FIG. 8).
(D)). Next, a protective layer 8 made of MgO is formed on the dielectric layer 7b by a vacuum evaporation method and baked (FIG. 8).
(E)).

[0008]

However, in the conventional manufacturing method, the periphery of the display electrodes 4 and 5, that is, the transparent electrode 9 is formed.
In the area between them, the surface portion of the front substrate 2 is colored yellow (yellowing phenomenon), and when the image is displayed on the panel, a desired color cannot be obtained or the brightness is lowered. . This problem becomes remarkable in a high-definition panel having a narrow width between electrodes.

The yellowing phenomenon is caused by the material of the bus electrode A.
When g colloids and moves, the alkali ions (Na ⁺ ) contained in the front substrate 2 and the colloidal Ag generate a substitution action. In particular, each time the front substrate 2 was fired, the surface portion of the front substrate 2 was colored yellow, and the more the number of firings, the deeper the degree of coloring. The same yellowing phenomenon occurred in the dielectric layer 7 on the bus electrode 10.

The present invention has been made in order to solve such a problem, and suppresses the occurrence of yellowing phenomenon in the front substrate and the dielectric layer between the transparent electrodes, and the plasma of excellent display quality is obtained. The purpose is to realize a display panel.

[0011]

In order to achieve this object, a method of manufacturing a plasma display panel according to the present invention comprises forming a first transparent electrode film on a substrate and forming the first transparent electrode film with the first transparent electrode film. After forming a bus electrode of a predetermined pattern on the second transparent electrode film is formed on the first transparent electrode film to cover the bus electrode, and then the first transparent electrode film and the By patterning the second transparent electrode film, the first transparent electrode and the second transparent electrode having a predetermined pattern are formed. By this method, it is possible to prevent the metal colloid, which is the material of the bus electrode, from moving to the surface of the substrate.

According to another method of manufacturing a plasma display panel of the present invention, a first transparent electrode having a predetermined pattern and a bus electrode are laminated and formed on a substrate, and then the bus electrode is covered. The second transparent electrode having a predetermined pattern shape is formed. By this method, it is possible to prevent the metal colloid, which is the material of the bus electrode, from further moving to the substrate surface after the bus electrode is formed.

The plasma display panel of the present invention comprises:
A display electrode was formed by laminating a first transparent electrode and a bus electrode having a predetermined pattern on a substrate and forming a second transparent electrode so as to cover a predetermined portion of the bus electrode. It is a thing. With this configuration, it is possible to obtain a plasma display panel having excellent display quality without the substrate being colored yellow.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings of FIGS. 1 to
5, the same parts as those shown in FIGS. 6 to 8 are designated by the same reference numerals.

FIG. 1 is a cross-sectional view of an essential part showing a method of manufacturing a plasma display panel according to a first embodiment of the present invention, which is a diagram illustrating a step of forming display electrodes and the like on a front substrate.

First, as shown in FIG. 1A, a first transparent electrode film 18 made of ITO is formed on almost the entire surface of a glass front substrate 2 by a vacuum evaporation method. Subsequently, a photosensitive paste containing Ag particles is applied onto the first transparent electrode film 18 by a screen printing method to form the bus electrode layer 16 (FIG. 1B).

Next, the bus electrode layer 16 is patterned into a predetermined pattern shape by the photolithography method and then baked to form the bus electrode 10 (FIG. 1C).
At this time, since the colloidal Ag hardly penetrates into the first transparent electrode film 18 (ITO) covering the surface of the front substrate 2, the colloidal Ag is replaced with Na ⁺ contained in the front substrate 2. It can prevent the action.
That is, it is possible to prevent the yellowing phenomenon from occurring.

Next, the first transparent electrode film 18 and the bus electrode 1
A second transparent electrode film 20 made of ITO is formed on the substrate 0 by vacuum evaporation (FIG. 1 (d)). At this time, in order to surely deposit ITO on both side surfaces of the bus electrode 10, vacuum deposition is performed with the front substrate 2 tilted in the opposite direction and tilted in the opposite direction. Then, the first transparent electrode film 18 and the second transparent electrode film 20 are simultaneously etched to be patterned into a predetermined pattern shape to form the first transparent electrode 21 and the second transparent electrode 22 ( Figure 1
(E)). In this way, the display electrode in a state in which the periphery of the bus electrode 10 is covered with the first transparent electrode 21 and the second transparent electrode 22 is formed.

The steps after the display electrodes are formed on the front substrate 2 are the same as the steps described with reference to FIG. 8. The light-shielding layer 6 is formed, and then the two dielectric layers 7 are formed. By forming the protective layer 8 thereon, the formation of display electrodes and the like on the front substrate 2 is completed. The front substrate 2 on which the display electrodes and the like are formed as described above is used as a member on the front side (front substrate 2, display electrodes 4, 5, light shielding layer 6, dielectric layer 7 and protective layer 8) shown in FIG. A plasma display panel is obtained by using it instead.

Although the front substrate 2 is fired as described above even in the step after the display electrodes are formed on the front substrate 2, the bus electrode 10 made of Ag is used in any firing.
Is covered with the first transparent electrode 21 and the second transparent electrode 22 made of ITO. Since ITO is a material in which colloidal Ag is extremely hard to penetrate as compared with, for example, the material (low melting point glass) of the dielectric layer 7,
When the front substrate 2 is baked in the manufacturing process shown in FIG. 8, the colloidal Ag remains in the region surrounded by the first transparent electrode 21 and the second transparent electrode 22. Therefore, the yellowing phenomenon of the front substrate 2 and the dielectric layer 7 can be prevented even in the manufacturing process after the display electrodes are formed on the front substrate 2.

2 to 5 are schematic cross-sectional views showing the structure of the display electrodes in the panel according to another embodiment of the present invention, in which the light shielding layer 6, the dielectric layer 7 and the protective layer 8 are omitted. Is shown.

FIG. 2 is a schematic sectional view showing the structure of the display electrodes in the panel according to the second embodiment. The first transparent electrode 23 and the bus electrode 10 have the same width, and the second transparent electrode 24 covers the first transparent electrode 23 and the bus electrode 10.

Next, a method of forming this display electrode will be described. First, a first transparent electrode film and a bus electrode layer are sequentially formed on the front substrate 2, and then patterned and baked at the same time to form a first transparent electrode 2 having a predetermined pattern shape.
3 and the bus electrode 10 are formed. Then, a second transparent electrode film having a predetermined pattern is formed by forming a second transparent electrode film to cover them and patterning. By this method, the structure of the display electrode shown in FIG. 2 is obtained. The subsequent manufacturing process is the same as the process described with reference to FIG.

FIG. 3 is a schematic sectional view showing the structure of display electrodes in the panel according to the third embodiment. The bus electrode 10 is formed on the first transparent electrode 21, and the second transparent electrode 2
5 has a structure in which only the bus electrode 10 is covered.

Next, a method of forming this display electrode will be described. After forming a first transparent electrode film having a predetermined pattern by forming a first transparent electrode film on the front substrate 2 and patterning it, a bus electrode layer is formed and patterned and baked to perform a predetermined process. The patterned bus electrode 10 is formed. Then, the second transparent electrode 25 having a predetermined pattern is formed by the lift-off method so as to cover the bus electrode 10, whereby the configuration of the display electrode shown in FIG. 3 is obtained. The subsequent manufacturing process is the same as the process described with reference to FIG.

FIG. 4 is a schematic sectional view showing the structure of display electrodes in the panel according to the fourth embodiment. The first transparent electrode 26 is formed to be smaller than the width of the display electrode and larger than the width of the bus electrode 10, and the second transparent electrode 27 covers the first transparent electrode 26 and the bus electrode 10. .

Next, a method of forming this display electrode will be described. After forming a first transparent electrode film having a predetermined pattern shape by forming a first transparent electrode film on the front substrate 2 and patterning it, a bus electrode layer is formed and patterned and baked to perform a predetermined process. The patterned bus electrode 10 is formed. Then, a second transparent electrode film having a predetermined pattern shape is formed by forming and patterning a second transparent electrode film which covers them. By this method, the structure of the display electrode shown in FIG. 4 is obtained. The subsequent manufacturing process is the same as the process described with reference to FIG.

FIG. 5 is a schematic sectional view showing the structure of display electrodes in a panel according to the fifth embodiment. The bus electrode 10 is formed on the first transparent electrode 21, and the second transparent electrode 2
The bus electrode 10 covers a predetermined portion of the bus electrode 10. That is, the bus electrode 1 is formed by the second transparent electrode 28.
The discharge gap 19 side of No. 0 is covered, and the light shielding layer 6 (not shown) side is not covered. Here, the region on the side of the discharge gap 19 is a region where display discharge is generated by the display electrodes, and the region on the side of the light shielding layer 6 is a region where display discharge is not generated.

Next, a method of forming this display electrode will be described. After forming a first transparent electrode film having a predetermined pattern by forming a first transparent electrode film on the front substrate 2 and patterning it, a bus electrode layer is formed and patterned and baked to perform a predetermined process. The patterned bus electrode 10 is formed. Then, by forming the second transparent electrode 28 by the lift-off method so as to cover the discharge gap 19 side of the bus electrode 10, the configuration of the display electrode shown in FIG. 5 is obtained. The subsequent manufacturing process is the same as the process described with reference to FIG.

Here, the second to fifth embodiments are described.
When manufacturing the panel according to the first aspect, since the bus electrode 10 is fired after the first transparent electrode is patterned, the Ag colloid in the bus electrode 10 diffuses to the surface of the front substrate 2 during the firing process. As a result, a slight yellowing phenomenon may occur. However, in the firing process after the bus electrode 10 is formed, the bus electrode 10 is in a state of being covered with ITO (first transparent electrode and second transparent electrode), so that the diffusion of Ag colloid can be suppressed. it can. Therefore, it is possible to prevent the front substrate 2 and the dielectric layer 7 from being colored and becoming more yellow.

Further, in the panel according to the fifth embodiment shown in FIG. 5, since the light-shielding layer 6 side of the bus electrode 10 is not covered with the transparent electrode, the effect of suppressing the movement of the Ag colloid is obtained in other embodiments. Although smaller than the form, the bus electrode 10
An image is displayed by light emission due to the display discharge on the side of the discharge gap 19 and the movement of Ag colloid can be suppressed in the region where the display discharge occurs, so that the yellowing phenomenon that affects the image quality is prevented. Can be suppressed.

Since Ag, which is the material of the bus electrode 10, is white, a black layer (such as ruthenium oxide) is formed between the transparent electrode 9 and the bus electrode 10 (see FIG. 6) so as to increase the contrast. (Not shown). The material of the black layer such as ruthenium oxide has a higher resistance than the transparent electrode 9 and the bus electrode 10, and it is necessary to form the black layer considerably thin in order to make the transparent electrode 9 and the bus electrode 10 conduct with low resistance. However, in each of the above-described embodiments, since conduction can be achieved by the second transparent electrode covering the bus electrode 10, not only is it unnecessary to form the black layer to be considerably thin, but also the black layer is formed. It is also possible to use an insulating material other than ruthenium oxide.

In each of the above embodiments,
Similar effects can be obtained even when one or both of the first transparent electrode and the second transparent electrode are formed of transparent tin oxide. The same effect can be obtained even when a chromium-copper-chromium laminate is used as the bus electrode.

Further, the method of forming the transparent electrode film is not limited to the vacuum vapor deposition method, but may be a sputtering method or a method of laminating a sheet-like transparent electrode material film. The bus electrode may be formed by a pattern printing method instead of the screen printing method and the photolithography method using the photosensitive paste.

[0035]

As described above, according to the present invention, it is possible to prevent the front substrate and the dielectric layer from being colored due to the yellowing phenomenon, and it is possible to realize a plasma display panel with excellent display quality. Becomes

[Brief description of drawings]

1A to 1E are cross-sectional views of a main part showing a manufacturing process of a plasma display panel according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view of a main part showing a configuration of display electrodes of a plasma display panel according to a second embodiment of the present invention.

FIG. 3 is a cross-sectional view of essential parts showing the configuration of display electrodes of a plasma display panel according to a third embodiment of the present invention.

FIG. 4 is a cross-sectional view of an essential part showing the configuration of display electrodes of a plasma display panel according to a fourth embodiment of the present invention.

FIG. 5 is a cross-sectional view of an essential part showing the configuration of display electrodes of a plasma display panel according to a fifth embodiment of the present invention.

FIG. 6 is a sectional view of a main part of a conventional plasma display panel.

7 (a) to 7 (d) are cross-sectional views of a main part showing a step of forming a display electrode of a conventional plasma display panel.

8A to 8E are cross-sectional views of a main part showing a step of forming a light shielding layer and the like on a front substrate of a conventional plasma display panel.

[Explanation of symbols]

1 discharge space 2 Front substrate 3 back substrate 4, 5 display electrodes 6 Light-shielding layer 7,12 Dielectric layer 8 protective layer 9 Transparent electrode 10 bus electrodes 11 address electrodes 13 partitions 14 Phosphor layer 15 Transparent electrode film 16 Bus electrode layer 18 First transparent electrode film 19 discharge gap 20 Second transparent electrode film 21, 23, 26 First transparent electrode 22, 24, 25, 27, 28 Second transparent electrode

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Hiroyuki Yonehara             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Junichi Hibino             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. F-term (reference) 5C027 AA01 AA03                 5C040 FA01 FA04 GB03 GB14 GC05                       GC06 GC19 JA07 JA12 JA15                       LA12 MA10                 5C094 AA04 AA31 AA43 AA48 BA12                       BA31 CA19 DA13 DA14 DB01                       DB04 EA05 EB02 FA01 FA02                       FB12 GB10

Claims (4)

[Claims] 1. A first transparent electrode film is formed on a substrate, a bus electrode having a predetermined pattern is formed on the first transparent electrode film, and the first transparent electrode film is covered with the first transparent electrode film. Forming a second transparent electrode film on the transparent electrode film, and then patterning the first transparent electrode film and the second transparent electrode film to form a first transparent electrode and a first transparent electrode having a predetermined pattern shape. A method of manufacturing a plasma display panel, comprising forming a second transparent electrode. 2. A first transparent electrode having a predetermined pattern and a bus electrode are laminated and formed on a substrate, and then a second transparent electrode having a predetermined pattern is formed so as to cover the bus electrode. A method for manufacturing a plasma display panel, comprising: 3. A region where a display discharge is generated by a display electrode composed of the first transparent electrode, the bus electrode and the second transparent electrode when the bus electrode is covered with the second transparent electrode. The method for manufacturing a plasma display panel according to claim 2, wherein a portion on the side of is covered. 4. A first transparent electrode having a predetermined pattern and a bus electrode are laminated on a substrate, and a second transparent electrode is formed so as to cover a predetermined portion of the bus electrode. A plasma display panel with display electrodes.