JP2003045219A5 - - Google Patents

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Publication number
JP2003045219A5
JP2003045219A5 JP2001227187A JP2001227187A JP2003045219A5 JP 2003045219 A5 JP2003045219 A5 JP 2003045219A5 JP 2001227187 A JP2001227187 A JP 2001227187A JP 2001227187 A JP2001227187 A JP 2001227187A JP 2003045219 A5 JP2003045219 A5 JP 2003045219A5
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JP
Japan
Prior art keywords
mercury lamp
mounting member
fixing means
fixing
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001227187A
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English (en)
Japanese (ja)
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JP4522024B2 (ja
JP2003045219A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001227187A priority Critical patent/JP4522024B2/ja
Priority claimed from JP2001227187A external-priority patent/JP4522024B2/ja
Publication of JP2003045219A publication Critical patent/JP2003045219A/ja
Publication of JP2003045219A5 publication Critical patent/JP2003045219A5/ja
Application granted granted Critical
Publication of JP4522024B2 publication Critical patent/JP4522024B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001227187A 2001-07-27 2001-07-27 水銀ランプ、照明装置及び露光装置 Expired - Fee Related JP4522024B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001227187A JP4522024B2 (ja) 2001-07-27 2001-07-27 水銀ランプ、照明装置及び露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001227187A JP4522024B2 (ja) 2001-07-27 2001-07-27 水銀ランプ、照明装置及び露光装置

Publications (3)

Publication Number Publication Date
JP2003045219A JP2003045219A (ja) 2003-02-14
JP2003045219A5 true JP2003045219A5 (enExample) 2008-09-04
JP4522024B2 JP4522024B2 (ja) 2010-08-11

Family

ID=19059889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001227187A Expired - Fee Related JP4522024B2 (ja) 2001-07-27 2001-07-27 水銀ランプ、照明装置及び露光装置

Country Status (1)

Country Link
JP (1) JP4522024B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170018113A (ko) 2003-04-09 2017-02-15 가부시키가이샤 니콘 노광 방법 및 장치, 그리고 디바이스 제조 방법
TWI609409B (zh) 2003-10-28 2017-12-21 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造方法
TWI385414B (zh) 2003-11-20 2013-02-11 尼康股份有限公司 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法
TWI505329B (zh) 2004-02-06 2015-10-21 尼康股份有限公司 光學照明裝置、曝光裝置、曝光方法以及元件製造方法
EP2660854B1 (en) 2005-05-12 2017-06-21 Nikon Corporation Projection optical system, exposure apparatus and exposure method
JP4497146B2 (ja) * 2006-02-13 2010-07-07 ウシオ電機株式会社 放電ランプ保持機構
JP4501915B2 (ja) * 2006-03-20 2010-07-14 ウシオ電機株式会社 放電ランプ保持機構
KR20160009104A (ko) * 2006-09-01 2016-01-25 가부시키가이샤 니콘 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
JP4807337B2 (ja) * 2007-08-07 2011-11-02 ウシオ電機株式会社 放電ランプ保持機構
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
JP6029387B2 (ja) 2012-08-30 2016-11-24 株式会社オーク製作所 放電ランプ着脱機構
CN113687574A (zh) * 2020-05-18 2021-11-23 长鑫存储技术有限公司 光刻设备及其光源位置监控方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60181804U (ja) * 1984-05-14 1985-12-03 スタンレー電気株式会社 ハウジングとソケツトホルダ−との取付構造
JPH03669Y2 (enExample) * 1985-03-01 1991-01-11
JPH054684Y2 (enExample) * 1986-02-19 1993-02-05
JPH0638358Y2 (ja) * 1989-06-05 1994-10-05 ウシオ電機株式会社 放電灯
JP3377347B2 (ja) * 1995-10-05 2003-02-17 大日本スクリーン製造株式会社 基板の周辺部露光装置
JP2000031050A (ja) * 1999-06-22 2000-01-28 Nikon Corp 露光装置、リソグラフィシステム、及び半導体デバイス製造方法

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