JP2003042932A - Method and instrument for measuring suspended particulate matter - Google Patents

Method and instrument for measuring suspended particulate matter

Info

Publication number
JP2003042932A
JP2003042932A JP2001229151A JP2001229151A JP2003042932A JP 2003042932 A JP2003042932 A JP 2003042932A JP 2001229151 A JP2001229151 A JP 2001229151A JP 2001229151 A JP2001229151 A JP 2001229151A JP 2003042932 A JP2003042932 A JP 2003042932A
Authority
JP
Japan
Prior art keywords
filter
particulate matter
suspended particulate
particle size
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001229151A
Other languages
Japanese (ja)
Other versions
JP3961244B2 (en
Inventor
Shinichiro Totoki
慎一郎 十時
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2001229151A priority Critical patent/JP3961244B2/en
Publication of JP2003042932A publication Critical patent/JP2003042932A/en
Application granted granted Critical
Publication of JP3961244B2 publication Critical patent/JP3961244B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To measure a particulate size distribution of a suspended particulate matter(SPM) or a microfine particulate matter (PM2.5) in the atmosphere, over a wide particulate size range, including 10 μm or larger for particulate size, at a high resolution. SOLUTION: The atmospheric air is sucked by a pump 3 to be supplied to a filter 1, the suspended particulate matter P in the atmosphere is deposited thereby on the filter 1, the spatial intensity distribution of diffracted/scattered light provided by being irradiated with a laser beam is measured under the condition, of the filter 1 being deposited with the suspended particulate matter P brought into a transparent state by a liquid, and the particle size distribution of the suspended particulate matter P is found, based on a measured result therein. The density of the suspended particulate matter P on the filter 1 is brought to a degree, capable of adopting a laser diffraction/scattering type particle size distribution measurement.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、大気中に存在する
浮遊粒子状物質の粒度分布を測定する方法および装置に
関し、更に詳しくは、浮遊粒子状物質の粒度分布を広い
粒度範囲にわたって高分解能のもとに測定することので
きる浮遊粒子状物質の測定方法および装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for measuring the particle size distribution of suspended particulate matter existing in the atmosphere, and more particularly, to a method for measuring the particle size distribution of suspended particulate matter with high resolution over a wide particle size range. The present invention relates to a method and apparatus for measuring suspended particulate matter that can be originally measured.

【0002】[0002]

【従来の技術】大気中に浮遊している粉じんのうち、粒
径が10μm以下のものは浮遊粒子状物質(SPM)と
称される。この浮遊粒子状物質は、巻き上げられた土な
ども含まれるが、ディーゼル車が排出する黒煙や未燃焼
燃料、硫黄化合物などが多くを占め(関東では35%が
ディーゼル車からのもの)、これらは有害性もより高い
と言われている。このディーゼル車からの排気ガスが原
因の粒子状物質は、特にDEPと称される。また、より
粒径の小さい2.5μm以下のものは微小粒子状物質
(PM2.5)と称され、欧米では調査・研究が盛んに
なってきている。このPM2.5の場合、その排出原因
はディーゼル車の排ガスである割合がより高くなると言
われている。
2. Description of the Related Art Among dust particles floating in the atmosphere, those having a particle size of 10 μm or less are called suspended particulate matter (SPM). This suspended particulate matter includes rolled up soil, but black smoke, unburned fuel, and sulfur compounds emitted by diesel vehicles account for a large proportion (35% in the Kanto region are from diesel vehicles). Is said to be more harmful. The particulate matter caused by the exhaust gas from this diesel vehicle is especially called DEP. Further, particles having a particle size of 2.5 μm or less, which are smaller, are called fine particulate matter (PM2.5), and investigations and studies have become popular in Europe and America. In the case of PM2.5, it is said that the cause of the emission is a higher proportion of exhaust gas from diesel vehicles.

【0003】以上のような大気中の浮遊粒子状物質(S
PM)や微小粒子状物質(PM2.5)の粒度分布を測
定する装置として、従来、カスケードインパクタ方式に
基づく装置が実用化されている。このカスケードインパ
クタ方式に基づく測定装置は、流体を捕集板に衝突させ
てその流れの方向を急変させることによって粒子を流体
から分離するインパクタ法を利用したものであり、50
%捕集効率の粒径を順次変化させたインパクタを多段に
直列接続して、各段における50%捕集効率の粒径をそ
れぞれの段の代表径として、それぞれの段における捕集
量の測定結果から、流体中の粒度分布を求めるものであ
る。
Suspended particulate matter (S
As a device for measuring the particle size distribution of PM and fine particulate matter (PM2.5), a device based on the cascade impactor system has been put into practical use. The measuring device based on the cascade impactor method uses an impactor method in which particles are separated from a fluid by colliding the fluid with a collecting plate to suddenly change the flow direction thereof.
Measuring the amount of trapping in each stage by connecting in series multiple impactors with varying particle size of% trapping efficiency in series and using the particle size of 50% trapping efficiency in each stage as the representative diameter of each stage. The particle size distribution in the fluid is determined from the results.

【0004】[0004]

【発明が解決しようとする課題】ところで、SPMやP
M2.5の測定に供されているカスケードインパクタ方
式に基づく測定装置においては、その原理上、粒径の測
定上限値が10μm程度に限定されてしまうという問題
があるとともに、粒径の分解能が捕集板の数によって決
まってしまうために、高い分解能で粒度分布を測定する
ことは望めないという欠点もある。
By the way, SPM and P
In the measuring device based on the cascade impactor method used for the measurement of M2.5, there is a problem that the upper limit of the particle size measurement is limited to about 10 μm and the resolution of the particle size is trapped. Since it depends on the number of collecting plates, it is not possible to measure the particle size distribution with high resolution.

【0005】本発明はこのような実状に鑑みてなされた
もので、大気中の浮遊粒子状物質(SPM)や微小粒子
状物質(PM2.5)の粒度分布を、粒子径10μm以
上を含むより広い粒径範囲において高い分解能のもとに
測定することのできる浮遊粒子状物質の測定方法および
装置の提供を目的としている。
The present invention has been made in view of the above circumstances, and the particle size distribution of suspended particulate matter (SPM) and fine particulate matter (PM2.5) in the atmosphere is more than that including a particle diameter of 10 μm or more. It is an object of the present invention to provide a method and apparatus for measuring suspended particulate matter that can be measured with a high resolution in a wide particle size range.

【0006】[0006]

【課題を解決するための手段】上記の目的を達成するた
め、本発明の浮遊粒子状物質の測定方法は、大気中に含
まれる浮遊粒子状物質を測定する方法であって、大気を
ポンプにより吸引してフィルタに供給することによって
当該フィルタに大気中の浮遊粒子状物質を付着させて捕
集するとともに、その浮遊粒子状物質が付着したフィル
タに対し、当該フィルタを液体を用いて光学的に透明化
した状態で、レーザ光を照射して得られる回折・散乱光
の空間強度分布を測定し、その測定結果から浮遊粒子状
物質の粒度分布を求めることによって特徴づけられる
(請求項1)。
In order to achieve the above object, the method for measuring suspended particulate matter of the present invention is a method for measuring suspended particulate matter contained in the atmosphere, wherein the atmosphere is pumped. By aspirating and supplying it to the filter, airborne particulate matter in the atmosphere is attached to and collected by the filter, and for the filter to which the airborne particulate matter is attached, the filter is optically used with a liquid. In the transparent state, the spatial intensity distribution of the diffracted / scattered light obtained by irradiating the laser beam is measured, and the particle size distribution of the suspended particulate matter is obtained from the measurement result (claim 1).

【0007】また、本発明の浮遊粒子状物質の測定装置
は、上記した本発明方法を用いて大気中に含まれる浮遊
粒子状物質を測定する装置であって、大気中の浮遊粒子
状物質を付着させるためのフィルタと、大気を吸引して
そのフィルタに供給するポンプと、大気の供給により浮
遊粒子状物質が付着したフィルタを液体を用いて透明化
した状態で保持する保持手段と、その保持手段により保
持されているフィルタに対してレーザ光を照射する照射
光学系と、そのレーザ光のフィルタに付着している浮遊
粒子状物質による回折・散乱光の空間強度分布を測定す
る測定光学系と、その測定された回折・散乱光の空間強
度分布からフィルタに付着している浮遊粒子状物質の粒
度分布を算出する演算手段を備えていることによって特
徴づけられる(請求項2)。
The airborne particulate matter measuring apparatus of the present invention is an apparatus for measuring airborne particulate matter contained in the atmosphere using the above-described method of the present invention. A filter for adhering, a pump for sucking the air and supplying it to the filter, a holding means for holding the filter to which the suspended particulate matter adheres by the air supply in a transparent state using a liquid, and the holding thereof An irradiation optical system for irradiating the filter held by the means with laser light, and a measurement optical system for measuring the spatial intensity distribution of the diffracted / scattered light by the suspended particulate matter adhering to the filter of the laser light , Characterized in that it comprises a computing means for calculating the particle size distribution of the suspended particulate matter adhering to the filter from the measured spatial intensity distribution of the diffracted / scattered light. Section 2).

【0008】ここで、以上の各請求項において言うポン
プとは、大気を吸引して圧送できる空気機械を言い、具
体的には圧縮機もしくは送風機である。
Here, the pump referred to in each of the above claims refers to an air machine capable of sucking air and sending it by pressure, and more specifically, it is a compressor or a blower.

【0009】また、本発明において、浮遊粒子状物質を
付着させるフィルタと、そのフィルタを光学的に透明化
する液体としては、メンブレンフィルタと、そのメンブ
レンフィルタと略同等の屈折率を有するイマージョンオ
イルなどを好適に採用することができる。
Further, in the present invention, the filter to which the suspended particulate matter is attached and the liquid for optically making the filter transparent are a membrane filter and an immersion oil having a refractive index substantially equal to that of the membrane filter. Can be suitably adopted.

【0010】本発明は、広い粒径範囲において高い分解
能のもとに粒度分布を測定することのできるレーザ回折
・散乱法に基づく粒度分布測定を、大気中の浮遊粒子状
物質の粒度分布の測定に利用するとともに、その利用に
当たって、レーザ光の照射時に十分な強度の回折・散乱
光が得られるように、直接的に大気中の浮遊粒子状物質
に対してレーザ光を照射するのではなく、浮遊粒子状物
質を効率的にフィルタで捕集して付着させ、そのフィル
タを液体を用いて光学的に透明化した状態でレーザ光を
照射することによって、所期の目的を達成しようとする
ものである。
The present invention uses a particle size distribution measurement based on a laser diffraction / scattering method capable of measuring a particle size distribution with a high resolution in a wide particle size range, and a particle size distribution measurement of suspended particulate matter in the atmosphere. In addition to irradiating directly to the suspended particulate matter in the atmosphere with laser light in order to obtain diffracted / scattered light of sufficient intensity when irradiating with laser light, Achieving the intended purpose by efficiently collecting and adhering suspended particulate matter with a filter and irradiating laser light in a state where the filter is optically transparent using a liquid Is.

【0011】すわなち、レーザ回折・散乱式の粒度分布
測定装置においては、一般に、分散状態の被測定粒子群
にレーザ光を照射して得られる回折・散乱光の空間強度
分布を測定し、その光強度分布がミーの散乱理論ないし
はフラウンホーファの回折理論に則ることを利用し、回
折・散乱光の空間強度分布の測定結果からミーの散乱理
論ないしはフラウンホーファの回折理論に基づく演算に
よって被測定粒子群の粒度分布を求める。このレーザ回
折・散乱式粒度分布測定装置装置によれば、被測定粒子
群を適度な濃度範囲で媒体中に分散させることによっ
て、広い粒径範囲において高い分解能で粒度分布を求め
ることができる。すなわち、濃度が低すぎると回折・散
乱光の空間強度分布を正確に測定することができず、ま
た、濃度が高すぎると多重散乱などを生じて正確な空間
強度分布の測定ができない。
That is, in the laser diffraction / scattering type particle size distribution measuring apparatus, generally, the spatial intensity distribution of the diffracted / scattered light obtained by irradiating the measured particle group in the dispersed state with laser light is measured. By utilizing that the light intensity distribution is based on Mie's scattering theory or Fraunhofer's diffraction theory, the measured particles can be calculated from the measurement results of the spatial intensity distribution of diffracted / scattered light by Mie's scattering theory or Fraunhofer's diffraction theory. Determine the particle size distribution of the group. According to this laser diffraction / scattering type particle size distribution measuring apparatus, the particle size distribution can be obtained with high resolution in a wide particle size range by dispersing the measured particle group in the medium in an appropriate concentration range. That is, if the concentration is too low, the spatial intensity distribution of the diffracted / scattered light cannot be accurately measured, and if the concentration is too high, multiple scattering occurs and the spatial intensity distribution cannot be accurately measured.

【0012】ここで、大気中の浮遊粒子状物質に直接的
にレーザ光を照射して回折・散乱光を測定しようとして
も、大気中における浮遊粒子状物質の濃度が低すぎる関
係上、粒度分布を求めるに十分な回折・散乱光を得るこ
とができない。
Here, even if an attempt is made to measure the diffracted / scattered light by directly irradiating the suspended particulate matter in the atmosphere with a laser beam, the particle size distribution is considered because the concentration of the suspended particulate matter in the atmosphere is too low. It is not possible to obtain enough diffracted and scattered light to obtain

【0013】そこで、本発明においては、大気をポンプ
によって吸引してフィルタに供給することにより、大気
中に含まれている浮遊粒子状物質をそのフィルタに付着
させて捕集し、その浮遊粒子状物質が付着したフィルタ
を、液体を用いて光学的に透明化した状態でレーザ光を
照射して回折・散乱光を測定する。フィルタに付着する
浮遊粒子状物質の密度を、レーザ回折・散乱光の空間強
度分布の正確な測定が可能な範囲とすることによって、
通常のレーザ回折・散乱式の粒度分布測定と同等の広い
粒子径範囲、つまりサブミクロンオーダーから10μm
を越える広い粒子径範囲において、高い分解能のもとに
浮遊粒子状物質の粒度分布を求めることができる。
Therefore, in the present invention, the atmospheric air is sucked by the pump and supplied to the filter, so that the suspended particulate matter contained in the atmosphere is attached to the filter and collected, and the suspended particulate matter is collected. Diffracted / scattered light is measured by irradiating laser light on a filter to which a substance is attached and making it optically transparent with a liquid. By setting the density of suspended particulate matter adhering to the filter to a range that allows accurate measurement of the laser diffraction / scattered light spatial intensity distribution,
Wide particle diameter range equivalent to that of ordinary laser diffraction / scattering particle size distribution measurement, that is, from submicron order to 10 μm
It is possible to obtain the particle size distribution of suspended particulate matter with a high resolution in a wide particle size range exceeding the above.

【0014】また、本発明においては、大気をポンプで
吸引してフィルタに供給することによって、このフィル
タに大気中に含まれている浮遊粒子状物質を付着させて
捕集するので、ポンプの流量とその駆動時間によってフ
ィルタに供給した大気の量を容易に把握することがで
き、かつ、フィルタを適宜に選定することによって、ポ
ンプから供給された大気中の浮遊粒子状物質をほぼ漏れ
なく捕集することができ、従って一定量の大気中に存在
する浮遊粒子状物質の粒子径ごとの量を簡単に割り出す
ことができる。
Further, in the present invention, since the air is sucked by the pump and supplied to the filter, the suspended particulate matter contained in the air is adhered to and collected by the filter. The amount of atmospheric air supplied to the filter can be easily grasped by the driving time and its driving time, and by selecting the filter appropriately, suspended particulate matter in the atmospheric air supplied from the pump can be collected with almost no leakage. Therefore, it is possible to easily determine the amount of suspended particulate matter existing in the atmosphere for each particle size.

【0015】[0015]

【発明の実施の形態】以下、図面を参照しつつ本発明の
実施の形態について説明する。図1は本発明の実施の形
態の構成図であり、光学的構成並びに機械的構成を表す
模式図と、電気的構成を表すブロック図とを併記して示
す図である。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of an embodiment of the present invention, and is a diagram in which a schematic diagram showing an optical configuration and a mechanical configuration and a block diagram showing an electrical configuration are shown together.

【0016】フィルタ1は、この例においてサブミクロ
ンの細孔径を有するメンブレンフィルタであって、基体
21とその基体21に対して着脱自在の蓋体22とから
なるフィルタ保持部材2の内部に保持され、このフィル
タ保持部材2の内部を上下に仕切っている。フィルタ保
持部材2の基体21および蓋体22は、それぞれフィル
タ1を保持する大径部21a,22aと小径の開口部2
1b,22bを備えた漏斗状の形状を有しており、基体
21の開口部21bはポンプ(捕集用圧縮機)3の吸引
口に連通しているとともに、蓋体22の開口部22bは
大気に開放されて大気の流入口を形成している。
The filter 1 is a membrane filter having a submicron pore size in this example, and is held inside a filter holding member 2 comprising a base 21 and a lid 22 which is detachable from the base 21. The inside of the filter holding member 2 is partitioned vertically. The base 21 and the lid 22 of the filter holding member 2 have large diameter portions 21a and 22a for holding the filter 1 and a small diameter opening portion 2 respectively.
It has a funnel-like shape with 1b and 22b, the opening 21b of the base 21 communicates with the suction port of the pump (compression compressor) 3, and the opening 22b of the lid 22 has It is open to the atmosphere and forms an inlet for the atmosphere.

【0017】以上の構成において、ポンプ3を駆動する
と、大気が開口部22bを介してフィルタ保持部材2の
内部に吸引され、フィルタ1を通過した後に開口部21
bを介してポンプ3の吸引口に吸引される。このとき、
大気中に存在する浮遊粒子状物質Pは、細孔径がサブミ
クロンオーダーのメンブレンフィルタを用いたフィルタ
1を通過する際に、ほぼその全量が付着して捕集され
る。
In the above structure, when the pump 3 is driven, the atmosphere is sucked into the inside of the filter holding member 2 through the opening 22b, and after passing through the filter 1, the opening 21 is opened.
It is sucked into the suction port of the pump 3 via b. At this time,
The suspended particulate matter P existing in the atmosphere is almost entirely adhered and collected when passing through the filter 1 using a membrane filter having a pore size of submicron order.

【0018】適宜量の浮遊粒子状物質Pが付着したフィ
ルタ1は、フィルタ保持部材2から取り出されて、当該
フィルタ1と同じ屈折率を持つイマージョンオイルが染
み込まされ、これによってフィルタ1が透明化される。
The filter 1 to which an appropriate amount of the suspended particulate matter P is attached is taken out from the filter holding member 2 and impregnated with immersion oil having the same refractive index as the filter 1, whereby the filter 1 is made transparent. It

【0019】浮遊粒子状物質Pが付着し、かつ、透明化
されたフィルタ1は、例えば2枚の透明なガラス板41
a,41bとその支持材42からなるフィルタ保持具4
0によって保持された状態で、レーザ回折・散乱式粒度
分布測定装置50の回折・散乱光の測定に供される。す
なわち、浮遊粒子状物質Pが付着し、かつ、イマージョ
ンオイルの染み込みにより透明化されたフィルタ1は、
2枚のガラス板41a,41bの間に挟み込まれた状態
で、その全体が鉛直方向に沿うように支持具42で支持
されて、水平方向からレーザ光が照射されるレーザ回折
・散乱式粒度分布測定装置50の測定位置に配置され
る。
The filter 1 to which the suspended particulate matter P is attached and which is made transparent is, for example, two transparent glass plates 41.
Filter holder 4 comprising a and 41b and its supporting member 42
In the state of being held by 0, the laser diffraction / scattering type particle size distribution measuring device 50 is used to measure the diffracted / scattered light. That is, the filter 1 in which the suspended particulate matter P is attached and which is made transparent by the immersion of the immersion oil is
A laser diffraction / scattering particle size distribution in which a glass plate 41a, 41b is sandwiched between two glass plates 41a and 41b, and the whole is supported by a support tool 42 along a vertical direction and is irradiated with laser light from a horizontal direction. It is arranged at the measurement position of the measuring device 50.

【0020】レーザ回折・散乱式粒度分布測定装置50
は、フィルタ保持具40によって鉛直方向に沿うように
保持されたフィルタ1に対して水平の光軸に沿ったレー
ザ光を照射する照射光学系51と、その照射光学系51
からのレーザ光の回折・散乱光の空間強度分布を測定す
る測定光学系52と、その測定光学系52の出力をサン
プリングするデータサンプリング回路53、およびその
データサンプリング回路53によりサンプリングされた
回折・散乱光の空間強度分布データを用いて、フィルタ
1に付着している浮遊粒子状物質Pの粒度分布を算出す
るコンピュータ54を主体として構成されている。
Laser diffraction / scattering type particle size distribution measuring device 50
Is an irradiation optical system 51 for irradiating the filter 1 held by the filter holder 40 along the vertical direction with laser light along a horizontal optical axis, and the irradiation optical system 51.
Measuring optical system 52 for measuring the spatial intensity distribution of the diffracted / scattered light of the laser light from the device, a data sampling circuit 53 for sampling the output of the measured optical system 52, and a diffracted / scattered sampled by the data sampling circuit 53. The computer 54 is mainly configured to calculate the particle size distribution of the suspended particulate matter P adhering to the filter 1 using the spatial intensity distribution data of light.

【0021】照射光学系51は、レーザ光源51a、集
光レンズ51b、空間フィルタ51c、コリメートレン
ズ51dによって構成され、レーザ光源51aから出力
されたレーザ光を平行光束としてフィルタ保持具40に
保持され、かつ、透明化されたフィルタ1に照射する。
このフィルタ1に照射されたレーザ光は、当該透明化さ
れたフィルタ1に付着している浮遊粒子状物質Pにより
回折・散乱を受ける。この回折・散乱光の空間強度分布
は測定光学系52によって測定される。
The irradiation optical system 51 is composed of a laser light source 51a, a condenser lens 51b, a spatial filter 51c, and a collimator lens 51d, and the laser light output from the laser light source 51a is held by the filter holder 40 as a parallel light beam. At the same time, the transparent filter 1 is irradiated.
The laser light applied to the filter 1 is diffracted and scattered by the suspended particulate matter P attached to the transparentized filter 1. The spatial intensity distribution of the diffracted / scattered light is measured by the measurement optical system 52.

【0022】測定光学系52は、照射光学系51の光軸
上にフィルタ1を挟んで配置された集光レンズ52aお
よびリングディテクタ52bと、その外側に配置された
前方広角度散乱光センサ群52cと、フィルタ1の側方
および後方(照射光学系51側)に配置された側方/後
方散乱光センサ群52dによって構成されている。リン
グディテクタ52bは、互いに異なる半径のリング状ま
たは1/2リング状もしくは1/4リング状の受光面を
有する光センサを同心上に配置した光センサアレイであ
って、集光レンズ52aにより集光された前方所定角度
以内の回折・散乱光の強度分布を検出することができ
る。従って、これらのセンサ群からなる測定光学系52
により、フィルタ1に付着している浮遊粒子状物質Pに
よる回折・散乱光の空間強度分布が、前方微小角度から
後方に至る広い範囲で測定される。
The measurement optical system 52 includes a condenser lens 52a and a ring detector 52b arranged on the optical axis of the irradiation optical system 51 with the filter 1 interposed therebetween, and a front wide-angle scattered light sensor group 52c arranged outside thereof. And a side / back scattered light sensor group 52d arranged on the side and the rear of the filter 1 (on the side of the irradiation optical system 51). The ring detector 52b is an optical sensor array in which optical sensors having ring-shaped, ½ ring-shaped, or ¼ ring-shaped light-receiving surfaces having different radii are concentrically arranged, and are condensed by a condenser lens 52a. It is possible to detect the intensity distribution of the diffracted / scattered light within the predetermined front angle. Therefore, the measurement optical system 52 including these sensor groups
Thus, the spatial intensity distribution of the diffracted / scattered light by the suspended particulate matter P attached to the filter 1 is measured in a wide range from the front minute angle to the rear side.

【0023】以上の測定光学系52による各回折・散乱
角度ごとの光強度検出信号は、それぞれのアンプ並びに
A−D変換器を有してなるデータサンプリング回路53
によって増幅された上でデジタル化され、回折・散乱光
の空間強度分布データとしてコンピュータ54に取り込
まれる。
The light intensity detection signal for each diffraction / scattering angle by the above measurement optical system 52 is a data sampling circuit 53 having respective amplifiers and AD converters.
Is amplified, digitized, and taken into the computer 54 as spatial intensity distribution data of diffracted / scattered light.

【0024】コンピュータ54では、その回折・散乱光
の空間強度分布を用いて、レーザ回折・散乱式の粒度分
布測定において公知の、ミーの散乱理論およびフラウン
ホーファの回折理論に基づく演算手法により、レーザ光
が回折・散乱した原因粒子である浮遊粒子状物質Pの粒
度分布を算出する。
The computer 54 uses the spatial intensity distribution of the diffracted / scattered light to calculate the laser light by a calculation method based on Mie's scattering theory and Fraunhofer's diffraction theory, which are known in the laser diffraction / scattering type particle size distribution measurement. The particle size distribution of the suspended particulate matter P, which is the causative particle that was diffracted and scattered, is calculated.

【0025】以上の構成において、ポンプ3の単位時間
当たりの流量とその駆動時間から、フィルタ1に供給し
た大気の総量を把握することができ、このフィルタ1に
供給する空気の総量を適宜に設定することにより、フィ
ルタ1に付着する浮遊粒子状物質Pの密度を、測定光学
系52によって十分に回折・散乱光の空間強度分布を測
定できる程度とすることができる。
In the above structure, the total amount of the air supplied to the filter 1 can be grasped from the flow rate of the pump 3 per unit time and its driving time, and the total amount of the air supplied to the filter 1 can be set appropriately. By doing so, the density of the suspended particulate matter P adhering to the filter 1 can be set to such an extent that the measurement optical system 52 can sufficiently measure the spatial intensity distribution of the diffracted / scattered light.

【0026】このレーザ回折・散乱式粒度分布測定装置
50による粒度分布の測定によれば、サブミクロンオー
ダーから10μmを越える広い粒径範囲において高い分
解能でその粒度分布の測定が可能である。
According to the measurement of the particle size distribution by the laser diffraction / scattering type particle size distribution measuring device 50, the particle size distribution can be measured with a high resolution in a wide particle size range from the submicron order to over 10 μm.

【0027】また、以上のように所定量の大気をフィル
タ1に供給して浮遊粒子状物質Pを当該フィルタ1に付
着させ、その付着させたフィルタ1をイマージョンオイ
ルなどによって透明化してレーザ光を照射し、その回折
・散乱光の空間強度分布を測定して粒度分布を求めてそ
のフィルタ1を廃棄した後、または同時に、フィルタ保
持部材2に新たなフィルタ1をセットして上記と同様に
そのフィルタ1に大気を供給して浮遊粒子状物質Pを付
着させ、透明化したうえで次回の回折・散乱光の空間強
度分布の測定を行う、という動作を一定時間ごとに繰り
返し行えば、連続的に大気中に浮遊粒子状物質Pの状況
を監視することができる。
Further, as described above, a predetermined amount of air is supplied to the filter 1 to attach the suspended particulate matter P to the filter 1, and the attached filter 1 is made transparent with immersion oil or the like to emit laser light. After irradiating, measuring the spatial intensity distribution of the diffracted / scattered light to obtain the particle size distribution and discarding the filter 1, or at the same time, a new filter 1 is set on the filter holding member 2 and the filter 1 is set in the same manner as above. If the operation of supplying the atmosphere to the filter 1 to attach the suspended particulate matter P to make it transparent and then measuring the spatial intensity distribution of the diffracted / scattered light next time is repeated at regular intervals, Moreover, it is possible to monitor the state of the suspended particulate matter P in the atmosphere.

【0028】更に、各回の測定動作においてフィルタ1
に供給する大気の総量を一定とすると、その各回の測定
において得られる回折・散乱光の絶対強度は、大気中の
浮遊粒子状物質Pの濃度に相関するので、その絶対強度
の変化から大気中の浮遊粒子状物質Pの濃度の経時的変
化を監視することができる。
Further, the filter 1 is used in each measurement operation.
Assuming that the total amount of the atmosphere supplied to the air is constant, the absolute intensity of the diffracted / scattered light obtained in each measurement is correlated with the concentration of the suspended particulate matter P in the atmosphere. It is possible to monitor the time-dependent change in the concentration of the suspended particulate matter P.

【0029】更にまた、フィルタ1の単位面積中に付着
する個数が既知の標準粒子を用いてキャリブレーション
を行っておけば、実際の測定時にフィルタ1に供給され
た大気の総量と、そのフィルタ1にレーザ光を照射して
得られた回折・散乱光の空間強度分布とから、単位体積
の大気に含まれる浮遊粒子状物質Pの粒度分布と、その
各粒子径の粒子の個数との関係を計算することもでき
る。
Furthermore, if calibration is performed using standard particles of which the number adhered to the filter 1 per unit area is known, the total amount of the atmosphere supplied to the filter 1 during the actual measurement and the filter 1 From the spatial intensity distribution of the diffracted / scattered light obtained by irradiating the laser beam on the above, the relationship between the particle size distribution of the suspended particulate matter P contained in the unit volume of the atmosphere and the number of particles of each particle size It can also be calculated.

【0030】なお、フィルタ1に大気中を供給して浮遊
粒子状物質Pを付着させるに当たって当該フィルタ1を
保持するフィルタ保持部材2の構造については、以上の
実施の形態で用いたものに限られることなく、吸引した
大気を余すところなくフィルタ1に導くことができさえ
すれば、任意の構造のものを用いることができる。
The structure of the filter holding member 2 that holds the filter 1 when the air is supplied to the filter 1 to attach the suspended particulate matter P is limited to that used in the above-described embodiments. Any structure having an arbitrary structure can be used as long as it can guide the sucked air to the filter 1 completely.

【0031】また、以上の実施の形態においては、フィ
ルタ1としてメンブレンフィルタを用いるとともに、そ
のフィルタ1を透明化するのにイマージョンオイルを用
いた例を示したが、本発明はこれに限定されることな
く、サブミクロンオーダーから10μmを越える粒子を
付着させることができ、また、適宜の液体により透明化
することのできるフィルタであれば任意のものを用いる
ことができる。
Further, in the above-described embodiments, the example in which the membrane filter is used as the filter 1 and the immersion oil is used to make the filter 1 transparent is shown, but the present invention is not limited to this. Any filter can be used as long as it can adhere particles of submicron order to more than 10 μm and can be made transparent with an appropriate liquid.

【0032】[0032]

【発明の効果】以上のように、本発明によれば、ポンプ
によって大気をフィルタに供給し、そのフィルタに対し
て大気中に含まれている浮遊粒子状物質を付着させ、そ
の浮遊粒子状物質が付着したフィルタを液体によって透
明化した状態でレーザ光を照射することにより、フィル
タに付着している浮遊粒子状物質による回折・散乱光の
空間強度分布を測定し、その測定結果からレーザ回折・
散乱式粒度分布測定の原理に基づいて浮遊粒子状物質の
粒度分布を求めるので、従来のカスケードインパクタに
よる粒度分布の測定に比して、粒子径の分解能を大幅に
向上させることができると同時に、10μm以上の粒径
範囲の粒度分布をも測定することができるようになっ
た。
As described above, according to the present invention, the air is supplied to the filter by the pump, and the suspended particulate matter contained in the atmosphere is adhered to the filter. By irradiating laser light with the filter that has adhered to it made transparent by the liquid, the spatial intensity distribution of the diffracted / scattered light by the suspended particulate matter adhering to the filter is measured, and the laser diffraction /
Since the particle size distribution of suspended particulate matter is obtained based on the principle of scattering type particle size distribution measurement, it is possible to significantly improve the particle size resolution compared to the conventional particle size distribution measurement using a cascade impactor. It has become possible to measure the particle size distribution in the particle size range of 10 μm or more.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施の形態の構成図であり、光学的構
成並びに機械的構成を表す模式図と、電気的構成を表す
ブロック図とを併記して示す図である。
FIG. 1 is a configuration diagram of an embodiment of the present invention, in which a schematic diagram showing an optical configuration and a mechanical configuration and a block diagram showing an electrical configuration are shown together.

【符号の説明】[Explanation of symbols]

1 フィルタ 2 フィルタ保持部材 21 基体 22 蓋体 21a,22a 大径部 21b,22b 開口部 3 ポンプ 40 フィルタ保持具 41a,41b ガラス板 42 支持材 50 レーザ回折・散乱式粒度分布測定装置 51 照射光学系 52 測定光学系 53 データサンプリング回路 54 コンピュータ P 浮遊粒子状物質 1 filter 2 Filter holding member 21 Base 22 Lid 21a, 22a Large diameter part 21b, 22b openings 3 pumps 40 filter holder 41a, 41b glass plate 42 Support material 50 Laser Diffraction / Scattering Particle Size Analyzer 51 Irradiation optical system 52 Measurement optical system 53 Data sampling circuit 54 Computer P Suspended particulate matter

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 大気中に含まれる浮遊粒子状物質を測定
する方法であって、大気をポンプにより吸引してフィル
タに供給することによって当該フィルタに大気中の浮遊
粒子状物質を付着させて捕集するとともに、その浮遊粒
子状物質が付着したフィルタに対し、当該フィルタを液
体を用いて光学的に透明化した状態で、レーザ光を照射
して得られる回折・散乱光の空間強度分布を測定し、そ
の測定結果から浮遊粒子状物質の粒度分布を求めること
を特徴とする浮遊粒子状物質の測定方法。
1. A method for measuring airborne particulate matter contained in the atmosphere, wherein air is sucked by a pump and supplied to a filter so that airborne airborne particulate matter is adhered to the filter and trapped. Measure the spatial intensity distribution of the diffracted / scattered light obtained by irradiating laser light on the filter to which the suspended particulate matter adheres, while the filter is optically transparent using a liquid Then, the particle size distribution of the suspended particulate matter is obtained from the measurement result, and the suspended particulate matter is measured.
【請求項2】 大気中に含まれる浮遊粒子状物質を測定
する装置であって、大気中の浮遊粒子状物質を付着させ
るためのフィルタと、大気を吸引してそのフィルタに供
給するポンプと、大気の供給により浮遊粒子状物質が付
着したフィルタを液体を用いて透明化した状態で保持す
る保持手段と、その保持手段により保持されているフィ
ルタに対してレーザ光を照射する照射光学系と、そのレ
ーザ光のフィルタに付着している浮遊粒子状物質による
回折・散乱光の空間強度分布を測定する測定光学系と、
その測定された回折・散乱光の空間強度分布からフィル
タに付着している浮遊粒子状物質の粒度分布を算出する
演算手段を備えていることを特徴とする浮遊粒子状物質
の測定装置。
2. An apparatus for measuring suspended particulate matter contained in the atmosphere, comprising: a filter for adhering suspended particulate matter in the atmosphere; and a pump for sucking the atmosphere and supplying it to the filter. Holding means for holding the filter to which the suspended particulate matter is attached by the supply of the air in a transparent state using a liquid, and an irradiation optical system for irradiating the filter held by the holding means with a laser beam, A measurement optical system that measures the spatial intensity distribution of the diffracted / scattered light by the suspended particulate matter attached to the laser light filter,
An apparatus for measuring suspended particulate matter, comprising an arithmetic means for calculating a particle size distribution of suspended particulate matter adhering to a filter from the measured spatial intensity distribution of diffracted / scattered light.
JP2001229151A 2001-07-30 2001-07-30 Method and apparatus for measuring suspended particulate matter Expired - Lifetime JP3961244B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001229151A JP3961244B2 (en) 2001-07-30 2001-07-30 Method and apparatus for measuring suspended particulate matter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001229151A JP3961244B2 (en) 2001-07-30 2001-07-30 Method and apparatus for measuring suspended particulate matter

Publications (2)

Publication Number Publication Date
JP2003042932A true JP2003042932A (en) 2003-02-13
JP3961244B2 JP3961244B2 (en) 2007-08-22

Family

ID=19061541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001229151A Expired - Lifetime JP3961244B2 (en) 2001-07-30 2001-07-30 Method and apparatus for measuring suspended particulate matter

Country Status (1)

Country Link
JP (1) JP3961244B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104280324A (en) * 2014-08-27 2015-01-14 北京市环境保护监测中心 Method for monitoring mass concentration of near-surface fine particulate matter by satellite remote sensing
CN104865175A (en) * 2015-05-20 2015-08-26 常州大学 Method for detecting concentration of PM2.5 (particulate matter) in air
CN105865994A (en) * 2016-04-22 2016-08-17 苏州翰霖汽车科技有限公司 Calibration device for PM2.5 sensors and calibrating method thereof
CN106501141A (en) * 2016-10-27 2017-03-15 合肥福瞳光电科技有限公司 A kind of atmosphere particle concentration on-line monitoring method
CN111006981A (en) * 2019-12-03 2020-04-14 北京航空航天大学 Human body microenvironment air quality detection and prediction system based on intelligent mobile terminal

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102608010B (en) * 2012-03-28 2014-08-20 姚水良 Particulate matter (PM) detecting method and equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104280324A (en) * 2014-08-27 2015-01-14 北京市环境保护监测中心 Method for monitoring mass concentration of near-surface fine particulate matter by satellite remote sensing
CN104865175A (en) * 2015-05-20 2015-08-26 常州大学 Method for detecting concentration of PM2.5 (particulate matter) in air
CN105865994A (en) * 2016-04-22 2016-08-17 苏州翰霖汽车科技有限公司 Calibration device for PM2.5 sensors and calibrating method thereof
CN106501141A (en) * 2016-10-27 2017-03-15 合肥福瞳光电科技有限公司 A kind of atmosphere particle concentration on-line monitoring method
CN111006981A (en) * 2019-12-03 2020-04-14 北京航空航天大学 Human body microenvironment air quality detection and prediction system based on intelligent mobile terminal

Also Published As

Publication number Publication date
JP3961244B2 (en) 2007-08-22

Similar Documents

Publication Publication Date Title
JP3622696B2 (en) Method and apparatus for measuring suspended particulate matter
US10345216B2 (en) Systems, devices, and methods for flow control and sample monitoring control
US6807874B2 (en) Collecting apparatus of floating dusts in atmosphere
US8760648B2 (en) Integrated microbial collector
JP4690789B2 (en) Atmospheric particulate measuring device
JP2008508527A (en) Pathogen and particulate detection system and detection method
JP2005514588A (en) Vehicle particulate matter analysis method and apparatus
MX2012014269A (en) Method and device for detecting biological material.
KR100554531B1 (en) Collecting and measuring method of yellow sand particles
JP3758577B2 (en) Device for collecting suspended particulate matter in the atmosphere and measuring method for collected suspended particulate matter
JP3961244B2 (en) Method and apparatus for measuring suspended particulate matter
JP2003035655A (en) Method and equipment for measuring floating particulate material
US11047787B2 (en) And method for optical bench for detecting particles
JP2002116134A (en) Measuring apparatus for suspended particulate matter
JP3758603B2 (en) Device for collecting suspended particulate matter in the atmosphere
JP2003254888A (en) Method for measuring suspended particulate matter
JP3786049B2 (en) Airborne particulate matter collection device
CN108120659A (en) A kind of particle concentration detecting system and method having from zero calibration
JP3758602B2 (en) Measuring device for pollen in the atmosphere
CN207730615U (en) A kind of outdoor constant current pump suction type laser dust detection device
CN104792735B (en) A kind of method and apparatus that image checking virus is scattered using surface phasmon
CN111504888A (en) Particle analysis and sorting device and method

Legal Events

Date Code Title Description
A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20040420

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040618

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20040628

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20040723

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070516

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 3961244

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100525

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110525

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110525

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120525

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130525

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130525

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140525

Year of fee payment: 7

EXPY Cancellation because of completion of term