JP2003035682A5 - - Google Patents

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JP2003035682A5
JP2003035682A5 JP2001223167A JP2001223167A JP2003035682A5 JP 2003035682 A5 JP2003035682 A5 JP 2003035682A5 JP 2001223167 A JP2001223167 A JP 2001223167A JP 2001223167 A JP2001223167 A JP 2001223167A JP 2003035682 A5 JP2003035682 A5 JP 2003035682A5
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sample
fine
tip
pair
piece
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【発明の名称】試料ホルダ、試料分析方法及び荷電粒子線装置 Patent application title: Sample holder , sample analysis method and charged particle beam apparatus

Claims (12)

試料を取り付けた試料台を保持する手段を備え、試料台に取り付けられた試料が荷電粒子線装置の光軸上に位置するように荷電粒子線装置内に装着される試料ホルダにおいて、
試料の所定箇所に電圧を印加するための先端が自由に移動できる一対の微細導線を有することを特徴とする試料ホルダ。A sample holder mounted in a charged particle beam apparatus, comprising: means for holding a sample table on which the sample is mounted, the sample mounted on the sample table being positioned on the optical axis of the charged particle beam apparatus,
What is claimed is: 1. A sample holder comprising a pair of fine conducting wires whose free end for applying a voltage to a predetermined part of a sample is freely movable. 請求項１記載の試料ホルダにおいて、当該試料ホルダの軸部を通り外部の電源と接続される一対の導線と、前記一対の導線の端部に前記一対の微細導線をそれぞれ着脱自在に接続する手段とを備えることを特徴とする試料ホルダ。The sample holder according to claim 1, wherein the pair of lead wires connected through the shaft of the sample holder and connected to an external power source, and the pair of fine lead wires are detachably connected to the ends of the pair of lead wires. And a sample holder characterized by comprising: 請求項１又は２記載の試料ホルダにおいて、前記微細導線は一部がコイル状になっていることを特徴とする試料ホルダ。The sample holder according to claim 1, wherein a part of the fine conductive wire is coiled. 試料から微小試料片を摘出する工程と、
前記微小試料片を試料ホルダに固定する工程と、
前記試料ホルダに固定した前記微小試料片の所定箇所に一対の微細導線を通電可能に取り付ける工程と、
前記一対の微細導線に電圧を印加する工程と、
前記一対の微細導線を介して前記微小試料片の前記所定箇所に流れる電流を測定する工程とを含むことを特徴とする試料分析方法。Extracting a minute sample piece from the sample;
Fixing the minute sample piece to a sample holder;
Attaching a pair of fine conductive wires to a predetermined position of the minute sample piece fixed to the sample holder so as to be conductive;
Applying a voltage to the pair of fine wires;
Measuring the current flowing to the predetermined portion of the minute sample piece via the pair of minute wires. 試料から微小試料片を摘出する工程と、
前記微小試料片を試料ホルダに固定する工程と、
前記試料ホルダに固定した前記微小試料片の所定箇所に一対の微細導線を通電可能に取り付ける工程と、
前記一対の微細導線が取り付けられた前記微小試料片が固定された前記試料ホルダを荷電粒子線装置に装着する工程と、
前記一対の微細導線を介して前記微小試料片の前記所定箇所に電圧を印加しながら、前記荷電粒子線装置によって、前記微小試料片の前記所定箇所を観察する工程とを含むことを特徴とする試料分析方法。Extracting a minute sample piece from the sample;
Fixing the minute sample piece to a sample holder;
Attaching a pair of fine conductive wires to a predetermined position of the minute sample piece fixed to the sample holder so as to be conductive;
Mounting the sample holder to which the micro sample piece to which the pair of micro leads are attached is fixed to a charged particle beam apparatus;
Observing the predetermined part of the micro sample piece by the charged particle beam device while applying a voltage to the predetermined part of the micro sample piece via the pair of micro conductive wires. Sample analysis method. 請求項４又は５記載の試料分析方法において、前記試料から微小試料片を摘出する工程は、集束イオンビームを用いた加工により前記試料から微小試料片を摘出する工程であることを特徴とする試料分析方法。The sample analysis method according to claim 4 or 5, wherein the step of extracting the micro sample piece from the sample is a step of extracting the micro sample piece from the sample by processing using a focused ion beam. Analysis method. 請求項４又は５記載の試料分析方法において、前記試料から微小試料片を摘出する工程は、機械加工により前記試料から微小試料片を摘出する工程であることを特徴とする試料分析方法。The sample analysis method according to claim 4 or 5, wherein the step of extracting the micro sample piece from the sample is a step of extracting the micro sample piece from the sample by machining. 請求項５記載の試料分析方法において、前記荷電粒子線装置は透過電子顕微鏡であり、前記微細導線を介して前記微小試料片の前記所定箇所に電圧を印加しながら前記所定箇所の電子線透過像を観察することを特徴とする試料分析方法。6. The sample analysis method according to claim 5, wherein the charged particle beam device is a transmission electron microscope, and an electron beam transmission image of the predetermined portion is applied while applying a voltage to the predetermined portion of the minute sample piece through the fine wire. A sample analysis method characterized by observing. 請求項４〜８のいずれか１項記載の試料分析方法において、前記微小試料片に前記一対の微細導線を通電可能に取り付ける工程は、前記微細導線の先端部あるいは前記微細導線に固定されたチップの先端部を集束イオンビームにより細く加工する工程と、細く加工された前記微細導線あるいはチップの先端部を前記微小試料片上の所定位置に移動させる工程と、細く加工された前記微細導線あるいはチップの先端部を前記微小試料片上の所定位置に固定する工程とを含むことを特徴とする試料分析方法。The sample analysis method according to any one of claims 4 to 8, wherein the step of attaching the pair of fine wires to the fine sample piece so as to be conductive includes a tip fixed to the tip of the fine wire or the fine wire. A step of processing the tip of the tip with a focused ion beam, a step of moving the tip of the fine lead or tip processed to a predetermined position on the micro sample piece, and a step of Fixing the tip portion at a predetermined position on the micro sample piece. 請求項９記載の試料分析方法において、細く加工された前記微細導線あるいはチップの先端部を前記微小試料片上の所定位置に移動させる工程は、集束イオンビーム装置に備えられた３軸（Ｘ，Ｙ，Ｚ）駆動可能なマニュピレータ先端部をビームアシストデポジションにより前記微細導線あるいはチップの一部に固定し、前記マニュピレータを移動させることにより行うことを特徴とする試料分析方法。The sample analysis method according to claim 9, wherein the step of moving the tip portion of the finely processed fine wire or tip to a predetermined position on the small sample piece comprises three axes (X, Y) provided in a focused ion beam apparatus. , Z) A sample analysis method characterized in that the tip of a drivable manipulator is fixed to a part of the fine wire or chip by beam assisted deposition, and the manipulator is moved. 集束イオンビーム装置に備えられた３軸（Ｘ，Ｙ，Ｚ）駆動可能なマニュピレータ先端部をビームアシストデポジションにより第１の微細導線あるいは前記第１の微細導線に固定された第１のチップの一部に固定する工程と、
前記マニュピレータを移動させることにより前記第１の微細導線あるいは第１のチップの先端部を試料上の所定位置に移動させる工程と、
ビームアシストデポジションにより試料中の所定箇所に前記第１の微細導線あるいは第１のチップの先端部を取り付ける工程と、
前記工程を反復して試料中の所定箇所に第２の微細導線あるいは前記第２の微細導線に固定された第２のチップの先端部を取り付ける工程と、
前記第１の微細導線と第２の微細導線の間に電圧を印加する工程と、
前記第１の微細導線と第２の微細導線を介して前記試料に流れる電流を測定する工程とを含むことを特徴とする試料分析方法。A tip of a 3-axis (X, Y, Z) drivable manipulator provided in a focused ion beam apparatus is attached to a first fine wire or the first fine wire by beam-assisted deposition. Fixing to a part, and
Moving the tip of the first fine lead or first tip to a predetermined position on a sample by moving the manipulator;
Attaching the tip of the first fine conductive wire or the first tip to a predetermined place in a sample by beam assisted deposition;
Attaching the tip of a second fine lead wire or a second tip fixed to the second fine lead wire at a predetermined place in a sample by repeating the above steps;
Applying a voltage between the first microwire and the second microwire;
Measuring the current flowing through the sample through the first fine wire and the second fine wire. 請求項１〜３のいずれか１項記載の試料ホルダが装着可能であることを特徴とする荷電粒子線装置。A charged particle beam device characterized in that the sample holder according to any one of claims 1 to 3 can be mounted.
JP2001223167A 2001-07-24 2001-07-24 Sample holder and charged particle beam apparatus using the same Expired - Fee Related JP4012705B2 (en)

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JP2007190890A Division JP4534235B2 (en) 2007-07-23 2007-07-23 Sample analysis method

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JP2003035682A JP2003035682A (en) 2003-02-07
JP2003035682A5 true JP2003035682A5 (en) 2005-01-20
JP4012705B2 JP4012705B2 (en) 2007-11-21

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JP4199629B2 (en) 2003-09-18 2008-12-17 株式会社日立ハイテクノロジーズ Internal structure observation method and apparatus
JP4570980B2 (en) * 2005-02-21 2010-10-27 エスアイアイ・ナノテクノロジー株式会社 Sample stage and sample processing method
JP4616701B2 (en) 2005-05-30 2011-01-19 日本電子株式会社 Sample holder for electron microscope
JP4489652B2 (en) * 2005-07-29 2010-06-23 アオイ電子株式会社 Small sample table assembly
US7511510B2 (en) * 2005-11-30 2009-03-31 International Business Machines Corporation Nanoscale fault isolation and measurement system
JP4923716B2 (en) 2006-05-11 2012-04-25 株式会社日立製作所 Sample analysis apparatus and sample analysis method
JP4795308B2 (en) * 2007-06-25 2011-10-19 株式会社日立ハイテクノロジーズ Sample holder for internal structure observation and electron microscope
JP4653148B2 (en) * 2007-08-10 2011-03-16 株式会社アタゴ Hand-held refractometer and manufacturing method thereof
JP5390945B2 (en) * 2009-06-09 2014-01-15 日本電子株式会社 Sample preparation method for transmission electron microscope
JP5094788B2 (en) * 2009-06-18 2012-12-12 株式会社日立製作所 Electron microscope and its sample holder

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