JP4217783B2 - Carbon nanotube cutting method and cutting apparatus - Google Patents
Carbon nanotube cutting method and cutting apparatus Download PDFInfo
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- JP4217783B2 JP4217783B2 JP2003292816A JP2003292816A JP4217783B2 JP 4217783 B2 JP4217783 B2 JP 4217783B2 JP 2003292816 A JP2003292816 A JP 2003292816A JP 2003292816 A JP2003292816 A JP 2003292816A JP 4217783 B2 JP4217783 B2 JP 4217783B2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 50
- 239000002041 carbon nanotube Substances 0.000 title claims description 49
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims description 49
- 238000000034 method Methods 0.000 title claims description 7
- 239000000523 sample Substances 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
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Description
本発明は、カーボンナノチューブの切断方法および切断装置に関する。 The present invention relates to a carbon nanotube cutting method and cutting apparatus.
これまで、走査型プローブ顕微鏡のプローブ先端にカーボンナノチューブを付着させる際、バルク状態のカーボンナノチューブを電子顕微鏡で観察しながら付着させ、その後、引き抜くことによりカーボンナノチューブ付きプローブは製作される。このため、長さ方向伸び調節は殆ど不可能であった。
また、走査型顕微鏡プローブに付着させてプローブとして使用していたカーボンナノチューブは、先端に不純物が付着することにより、必要な先鋭度が得られなくなり廃棄されていた。
Until now, when carbon nanotubes are attached to the probe tip of a scanning probe microscope, the carbon nanotubes in a bulk state are attached while observing them with an electron microscope, and then pulled out to produce a probe with carbon nanotubes. For this reason, it was almost impossible to adjust the elongation in the length direction.
In addition, carbon nanotubes that have been attached to a scanning microscope probe and used as a probe have been discarded due to impurities adhering to the tip, resulting in a lack of necessary sharpness.
走査型プローブ顕微鏡あるいはカーボンナノチューブピンセットなどのハンドリング機器のプローブ先端部に付着させたカーボンナノチューブの長さを揃えるために、またはカーボンナノチューブの先端部に付着した不純物を除去するためにカーボンナノチューブを任意の長さや位置で切断することが求められることがある。 In order to align the length of carbon nanotubes attached to the probe tip of a handling instrument such as a scanning probe microscope or carbon nanotube tweezers, or to remove impurities attached to the tip of carbon nanotubes It may be required to cut at length or position.
本発明は、プローブ先端部に付着させたカーボンナノチューブについて任意の長さや位置（任意の長さという）で切断する方法および装置を提供することを目的とする。 An object of the present invention is to provide a method and apparatus for cutting a carbon nanotube attached to a probe tip at an arbitrary length or position (referred to as an arbitrary length).
本発明は、走査型プローブ顕微鏡あるいはハンドリング機器のプローブ先端部などの基材に近接して外部電源装置の照射先鋭ロッドを配置し、放出されたエネルギによって基材に付着したカーボンナノチューブを数μの長さに切断するようにした。例えば、プローブ先端部に残されたカーボンナノチューブはプローブとして機能する。 In the present invention, an irradiation sharpened rod of an external power supply device is arranged close to a substrate such as a scanning probe microscope or a probe tip of a handling device, and carbon nanotubes attached to the substrate by the released energy are several μm. Cut to length. For example, the carbon nanotube left at the probe tip functions as a probe.
本発明は、走査型プローブ顕微鏡あるいはハンドリング機器のプローブ先端部などの基材に近接して外部電源装置の照射先鋭ロッドを配置し、放出されたエネルギによって基材に付着したカーボンナノチューブを数μの長さに切断するようにした。例えば、プローブ先端部に残されたカーボンナノチューブはプローブとして機能する。 In the present invention, an irradiation sharpened rod of an external power supply device is arranged close to a substrate such as a scanning probe microscope or a probe tip of a handling device, and carbon nanotubes attached to the substrate by the released energy are several μm. Cut to length. For example, the carbon nanotube left at the probe tip functions as a probe.
カーボンナノチューブを任意の場所で切断できるため、必要な長さに揃えることや、常に新しい先端状態で測定やピンセットとして部材を操作できる。また、カーボンナノチューブの機械、電気電子特性を個別に測定する際、長さ方向を自由に制御できることは大きな意味を持つ。 Since the carbon nanotube can be cut at an arbitrary place, it can be aligned to the required length, and the member can be operated as a measurement or tweezers always in a new tip state. In addition, when measuring the mechanical and electrical / electronic properties of carbon nanotubes individually, it is of great significance that the length direction can be freely controlled.
走査型プローブ顕微鏡もしくはハンドリング機器のプローブの先端部に近接して外部電源装置の照射先鋭ロッドを配置し、放出された照射エネルギにより基材に付着したカーボンナノチューブを数μの長さに切断するカーボンナノチューブ切断方法および切断装置が最良の形態として構成される。 A carbon that cuts the carbon nanotubes attached to the substrate to a length of several μm by disposing the sharpened rod of the external power supply near the tip of the scanning probe microscope or the probe of the handling device. A nanotube cutting method and a cutting apparatus are configured as the best mode.
以下、本発明の実施例を図面に基づいて説明する。
図１は、本発明を走査型プローブ顕微鏡のプローブ先端部に適用した実施例であるカーボンナノチューブ切断装置の概要を示す。
図１において、走査型プローブ顕微鏡（図示せず）のプローブ先端部１には、カーボンナノチューブ２が付着させられている。
Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 shows an outline of a carbon nanotube cutting apparatus as an embodiment in which the present invention is applied to a probe tip of a scanning probe microscope.
In FIG. 1, a carbon nanotube 2 is attached to a probe tip 1 of a scanning probe microscope (not shown).
外部電源装置３は、一対の放電先鋭ロッド４（４Ａ、４Ｂ）を備えており、放電先鋭ロッド４はプローブ先端部１の近傍において、カーボンナノチューブ２にその先端が向くようにして近接配置されている。すなわち、照射先鋭ロッド、例えば放電先鋭ロッド４の先端はカーボンナノチューブ２の切断しようとする部分に向けられる。外部電源装置には電磁場印加装置が含まれる。
The external power supply device 3 includes a pair of discharge sharpening rods 4 (4A, 4B), and the
一対の放電先鋭ロッド４（４Ａ、４Ｂ）間に電位差を与え、放電を起こし、放電先鋭ロッド４とカーボンナノチューブ２の切断すべき部分とを相対運動させる。この相対運動は、プローブもしくは放電先鋭ロッド４の移動操作により行う。照射の概念には、電位差による放電、レーザー、イオンビームあるいは電子ビームなどのビームを含んで使用する。要は、炭素結合解離エネルギを照射によって付与し、炭素間の結合を電気力によって切り離す。
A pair of discharge pointed rod 4 (4A, 4B) providing a potential difference between, cause discharge, relative movements cause the cutting to be part of the discharge
カーボンナノチューブ２は、例えば放電による作用によって、切断しようとする部分において容易に切断することができる。すなわち、カーボンナノチューブ２について任意の長さあるいは位置で切断することができる。カーボンナノチューブの長さを切り揃えることができる。残されたカーボンナノチューブの長さは数μ（数μ〜数１０μを含む。）の長さとされる。電極の材質、印加電位差の周期にもよるが、例えば、カーボンナノチューブ１に対する距離を１０μｍ位にして数十Ｖくらいの放電で切断可能である。
カーボンナノチューブピンセットなどのハンドリング機器のプローブに付着させたカーボンナノチューブについても同様にして切断することができる。
The carbon nanotube 2 can be easily cut at a portion to be cut, for example, by the action of electric discharge. That is, the carbon nanotube 2 can be cut at an arbitrary length or position. The length of the carbon nanotube can be cut and aligned. The length of the remaining carbon nanotube is several μ (including several μ to several 10 μ). Although depending on the material of the electrode and the period of the applied potential difference, for example, the distance to the carbon nanotube 1 can be about 10 μm, and it can be cut by a discharge of about several tens of volts.
Carbon nanotubes attached to probes of handling equipment such as carbon nanotube tweezers can be cut in the same manner.
以上の実施例によれば、走査型プローブ顕微鏡もしくはハンドリング機器のプローブの先端部などの基材に近接して外部電源装置の照射先鋭ロッドを配置し、放出された照射エネルギによりカーボンナノチューブを切断するカーボンナノチューブの切断方法および切断装置が構成される。
更に、前記照射先鋭ロッドとカーボンナノチューブとを切断を行う部分に対し相対運動させるようにしたカーボンナノチューブの切断方法および切断装置が構成される。
According to the above-described embodiment, the irradiation sharpened rod of the external power supply device is arranged close to the base material such as the tip of the scanning probe microscope or the probe of the handling device, and the carbon nanotube is cut by the emitted irradiation energy. A carbon nanotube cutting method and a cutting apparatus are configured.
Furthermore, a carbon nanotube cutting method and a cutting apparatus are provided in which the irradiation sharpened rod and the carbon nanotube are moved relative to a portion to be cut.
図２は、走査型プローブ顕微鏡のプローブ２の先端部にカーボンナノチューブ１が付着した状況を示す写真である。図３はカーボンナノチューブに放電による作用によりカーボンナノチューブを切断した状況を示す写真である。図３に示すように、放電によって任意の位置でカーボンナノチューブを切断できることが確認された。 FIG. 2 is a photograph showing a state in which the carbon nanotube 1 is attached to the tip of the probe 2 of the scanning probe microscope. FIG. 3 is a photograph showing a state in which the carbon nanotubes are cut by the action of electric discharge. As shown in FIG. 3, it was confirmed that the carbon nanotube can be cut at an arbitrary position by electric discharge.
１…プローブの先端部、２…カーボンナノチューブ、３…外部電源装置、４（４Ａ、４Ｂ）…一対の放電先鋭ロッド。 DESCRIPTION OF SYMBOLS 1 ... The front-end | tip part of a probe, 2 ... Carbon nanotube, 3 ... External power supply device, 4 (4A, 4B) ... A pair of discharge sharpening rod.
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| JP2007136557A (en) * | 2005-11-14 | 2007-06-07 | Univ Nihon | Carbon nanotube wiring, depositing device for carbon nanotube, semiconductor device, method for wiring carbon nanotube, and probe |
| WO2009060721A1 (en) * | 2007-11-05 | 2009-05-14 | Nec Corporation | Method for cutting carbon nonotube |
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