JP2003025114A - Aluminium oxide coated cutting tool - Google Patents
Aluminium oxide coated cutting toolInfo
- Publication number
- JP2003025114A JP2003025114A JP2001214733A JP2001214733A JP2003025114A JP 2003025114 A JP2003025114 A JP 2003025114A JP 2001214733 A JP2001214733 A JP 2001214733A JP 2001214733 A JP2001214733 A JP 2001214733A JP 2003025114 A JP2003025114 A JP 2003025114A
- Authority
- JP
- Japan
- Prior art keywords
- film
- aluminum oxide
- coated
- cutting
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は超硬合金基材また
はサーメット基材の表面に物理蒸着法および／または化
学蒸着法により形成された金属化合物のいずれか一種の
単層膜または二種以上からなる多層膜であって、少なく
とも一層のα型酸化アルミニウムを主とする酸化膜から
なる被膜を被覆した耐欠損性に優れた酸化アルミニウム
被覆工具に関する。TECHNICAL FIELD The present invention relates to a single-layer film or two or more kinds of metal compounds formed on a surface of a cemented carbide substrate or a cermet substrate by a physical vapor deposition method and / or a chemical vapor deposition method. The present invention relates to an aluminum oxide-coated tool excellent in fracture resistance, which is a multi-layered film formed of at least one layer of an oxide film mainly containing α-type aluminum oxide.
【０００２】[0002]
【従来の技術】被覆工具のなかでも酸化アルミニウム被
覆切削工具は広く実用されている。高速、高送りで切削
する領域では超硬合金を基材に用い、下層にチタン化合
物膜を被覆し、上層に酸化アルミニウム被膜を被覆した
被覆切削工具が使用されてきた。近年、鋳鉄切削に対し
てκ型酸化アルミニウム被覆切削工具よりもα型酸化ア
ルミニウム被覆切削工具が耐摩耗性に優れることが明ら
かになった。α型酸化アルミニウム被覆切削工具の切削
性能向上を目的に特開平６−３１６７５８、特開平７−
２１６５４９、特表平９−５０７５２８が開示されてい
る。2. Description of the Related Art Among the coated tools, aluminum oxide coated cutting tools are widely used. In the region of cutting at high speed and high feed, a coated cutting tool has been used in which a cemented carbide is used as a substrate, a lower layer is coated with a titanium compound film, and an upper layer is coated with an aluminum oxide film. In recent years, it has been revealed that α-type aluminum oxide-coated cutting tools are superior in wear resistance to κ-type aluminum oxide-coated cutting tools for cutting cast iron. For the purpose of improving the cutting performance of an α-type aluminum oxide-coated cutting tool, JP-A-6-316758 and JP-A-7-
216549 and Japanese Patent Publication No. 9-507528 are disclosed.
【０００３】[0003]
【発明が解決しようとする課題】特開平６−３１６７５
８には、α型酸化アルミニウム層が１．３より大きな集
合組織化係数ＴＣ（０１２）を呈することを特徴とする
被覆物体が開示され、その実施例にＴＣ（０１２）が
２．１であるα型酸化アルミニウム膜を示している。特
開平７−２１６５４９にはクーリングクラックが存在し
ないα型酸化アルミニウム層であり、その層が１．５よ
り大きな集合組織化係数ＴＣ（１１０）を呈することを
特徴とする被覆硬質物品が開示されている。特表平９−
５０７５２８には結晶粒径Ｓが０．５μm＜Ｓ＜４μmの
α型酸化アルミニウム層であり、その層が１．５より大
きな集合組織化係数ＴＣ（１０４）を呈することを特徴
とする耐火物層被覆ボディーが開示されている。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
No. 8 discloses a coated article characterized in that the α-type aluminum oxide layer exhibits a textured coefficient TC (012) of greater than 1.3, in which example TC (012) is 2.1. The α-type aluminum oxide film is shown. Japanese Unexamined Patent Publication (Kokai) No. 7-216549 discloses a coated hard article which is an α-type aluminum oxide layer having no cooling cracks, and the layer exhibits a texture organization coefficient TC (110) of more than 1.5. There is. Special table flat 9-
Reference numeral 507528 is a refractory layer characterized by being an α-type aluminum oxide layer having a crystal grain size S of 0.5 μm <S <4 μm, and the layer exhibits a texture organization coefficient TC (104) of greater than 1.5. A coated body is disclosed.
【０００４】近年、切削工程の短縮化に対する要求が強
く、これに伴い過酷な条件下での断続切削が強いられる
傾向にある。以上のような従来の酸化アルミニウム被膜
を含む被膜が被覆された切削工具はこれら過酷な条件下
では切れ刃の耐欠損性が不十分であり、さらに寿命増加
が望まれるようになった。また酸化アルミニウム被膜を
含む複合硬質膜が被覆された金型に代表される耐摩耗工
具についても生産性向上のため寿命増加が望まれるよう
になった。本発明は酸化アルミニウム被覆工具の耐欠損
性向上と寿命増加を目的とする。In recent years, there has been a strong demand for shortening the cutting process, and along with this, there is a tendency for intermittent cutting under severe conditions to be forced. Under the severe conditions, the cutting tool coated with the coating including the conventional aluminum oxide coating as described above has insufficient fracture resistance of the cutting edge, and it has been desired to further increase the life. Further, wear resistance tools represented by molds coated with a composite hard film containing an aluminum oxide film are also required to have a longer life in order to improve productivity. The present invention aims to improve the fracture resistance and increase the life of an aluminum oxide coated tool.
【０００５】[0005]
【課題を解決するための手段】酸化アルミニウム被覆部
材の研究において、α型酸化アルミニウムの（０１２）
結晶面が最強のＸ線回折強度であり、（０１２）面の集
合組織化係数ＴＣ（０１２）が、２．５以上、好ましく
は３．０以上を呈すると耐欠損性が向上するという知見
を得た。α型酸化アルミニウムのＴＣ（０１２）が高い
被膜は（０１２）面が優先成長したことを示している。
（０１２）面に優先成長した被膜は組織が柱状を示すよ
うになり被膜自身にクラックが入りやすいことが分かっ
た。コーティング時の基材と被膜の熱膨張率の差によっ
て被膜には残留応力が生じるが、被膜にクラックが入る
ことによって被膜の引張残留応力が解放される。そのた
めクラックが入りやすい被膜を持つ被覆部材は入りにく
い被膜を持つ被覆部材に比べて引張残留応力が低減する
ため耐欠損性に優れる。クラックの入りやすさは結晶粒
界接合強度が低いことを示すと考えられる。発明者は
（０１２）面に優先成長した被膜は結晶粒界の接合強度
が低い柱状晶からなる組織を持つため被膜自身にクラッ
クが入りやすいことを見出した。ＴＣ（０１２）が本発
明よりも低くなると被膜にクラックが入りにくくなり、
この被膜を被覆した部材は耐欠損性が低下した。まとめ
ると酸化アルミニウム被膜のＴＣ（０１２）と耐欠損性
が関係し、α型酸化アルミニウムのＴＣ（０１２）が
２．５以上になると耐欠損性が向上するという知見を得
た。[Means for Solving the Problems] In the research of aluminum oxide coated members, α-type aluminum oxide (012)
It has been found that the crystal plane has the strongest X-ray diffraction intensity and the texture resistance coefficient TC (012) of the (012) plane is 2.5 or more, preferably 3.0 or more, to improve the fracture resistance. Obtained. The film of α-type aluminum oxide having a high TC (012) shows that the (012) plane was preferentially grown.
It was found that the preferentially grown coating on the (012) plane became columnar in structure and cracked easily in the coating itself. Residual stress is generated in the coating due to the difference in the coefficient of thermal expansion between the base material and the coating during coating, but the tensile residual stress of the coating is released by cracking the coating. Therefore, a coated member having a coating film that is prone to cracking has a lower tensile residual stress than a coated member having a coating film that is hard to enter, and thus is excellent in fracture resistance. The ease with which cracks are formed is considered to indicate that the grain boundary bonding strength is low. The inventor has found that the film preferentially grown on the (012) plane has a structure composed of columnar crystals with low bonding strength of crystal grain boundaries, and thus the film itself is apt to be cracked. When TC (012) is lower than that of the present invention, the coating is less likely to crack,
The fracture resistance of the member coated with this coating was lowered. In summary, it was found that the TC (012) of the aluminum oxide film is related to the fracture resistance, and that the TC (012) of α-type aluminum oxide is 2.5 or more, the fracture resistance is improved.
【０００６】[0006]
【発明の実施の態様】酸化アルミニウムを被覆する方法
として物理蒸着法（以後ＰＶＤ法と表示する）、化学蒸
着法（以後ＣＶＤ法と表示する）を用いることができる
が、特に高温で被覆するＣＶＤ法によって作製された酸
化アルミニウムについて効果が高い。用途としてはスロ
ーアウェイチップに代表される切削工具や金型に代表さ
れる耐摩耗工具が挙げられる。こうした応力がかかりや
すい工具に今回発明した酸化アルミニウム被膜を応用す
ると効果が高く、例えば切削工具の場合、初期欠損が減
少し、耐摩耗工具に応用すると寿命が増加する。BEST MODE FOR CARRYING OUT THE INVENTION Physical vapor deposition (hereinafter referred to as PVD method) and chemical vapor deposition (hereinafter referred to as CVD method) can be used as a method for coating aluminum oxide, but CVD for coating at a particularly high temperature can be used. The effect is high for aluminum oxide produced by the method. Applications include cutting tools typified by throw-away tips and wear-resistant tools typified by dies. Applying the aluminum oxide coating of the present invention to such a tool that is likely to be stressed is highly effective. For example, in the case of a cutting tool, the initial damage is reduced, and when it is applied to a wear resistant tool, the life is increased.
【０００７】酸化アルミニウム被覆工具に用いられる基
材としては硬さと靱性を兼ね備えた部材、セラミック
ス、合金鋼、超硬合金、サーメットがある。その中でも
超硬合金、サーメットが好ましい。超硬合金、サーメッ
トはＴｉ、Ｚｒ、Ｈｆ、Ｖ、Ｎｂ、Ｔａ、Ｃｒ、Ｍｏ、
Ｗ、Ａｌ、Ｓｉの炭化物、窒化物、炭窒化物、酸化物、
炭酸化物、窒酸化物、炭窒酸化物、ホウ化物を含む硬質
相とＣｏ，Ｎｉ，Ｆｅを含む結合相と不可避不純物から
なる部材である。基材として用いられる超硬合金は靱性
を持たせるため表面近傍に（Ｗ，Ｔｉ）Ｃ，（Ｗ，Ｔ
ｉ，Ｔａ）Ｃなどのβ相が消失した層を設けることは好
ましい。これらの部材に対して工具形状の精密さを持た
せるため、湿式研削加工、乾式研削加工、ブラスト加工
に代表される機械的加工や電解研磨に代表される化学的
加工をすることは好ましい。超硬合金、サーメットなど
の基材に対して、直接酸化膜を被覆しても良いが、基材
側に金属化合物を被覆した後、酸化膜を被覆しても良
い。前記金属化合物としてはＴｉ、Ｚｒ、Ｈｆ、Ｖ、Ｎ
ｂ、Ｔａ、Ｃｒ、Ｍｏ、Ｗ、Ａｌ、Ｓｉの一種または二
種以上の炭化物、窒化物、炭窒化物、酸化物、炭酸化
物、窒酸化物、炭窒酸化物、ホウ化物が挙げられる。超
硬合金、サーメットなどの基材に前記金属化合物を下層
膜として被覆する場合、基材から下層膜中に結合相の成
分、例えばＷ、Ｃ、Ｃｏ、Ｍｏ、Ｃｒ、Ｖが拡散する場
合もあるが、この場合でも本発明のα型酸化アルミニウ
ム被膜の本質的な効果は変わらない。なお、酸化アルミ
ニウム被膜の上には耐凝着性改善のため前記金属化合物
を被覆することもよい。Substrates used for aluminum oxide coated tools include members having both hardness and toughness, ceramics, alloy steel, cemented carbide and cermet. Of these, cemented carbide and cermet are preferable. For cemented carbide and cermet, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo,
W, Al, Si carbides, nitrides, carbonitrides, oxides,
It is a member composed of a hard phase containing carbon dioxide, oxynitride, oxycarbonitride, and boride, a binding phase containing Co, Ni, and Fe, and inevitable impurities. The cemented carbide used as the base material has (W, Ti) C, (W, T) near the surface in order to have toughness.
It is preferable to provide a layer in which the β phase such as i, Ta) C has disappeared. In order to provide these members with precision in tool shape, it is preferable to perform mechanical processing represented by wet grinding, dry grinding, blasting, or chemical processing represented by electrolytic polishing. The base material such as cemented carbide or cermet may be directly coated with an oxide film, but the base material side may be coated with a metal compound and then coated with an oxide film. Examples of the metal compound include Ti, Zr, Hf, V and N.
Examples thereof include carbides, nitrides, carbonitrides, oxides, carbonates, oxynitrides, oxycarbonitrides, and borides of one or more of b, Ta, Cr, Mo, W, Al, and Si. When a base material such as cemented carbide or cermet is coated with the metal compound as an underlayer film, components of a binder phase such as W, C, Co, Mo, Cr, V may diffuse from the substrate into the underlayer film. However, even in this case, the essential effect of the α-type aluminum oxide coating of the present invention does not change. The aluminum oxide coating may be coated with the metal compound to improve the adhesion resistance.
【０００８】本発明においてα型酸化アルミニウムを主
とする酸化膜とは、α型酸化アルミニウムを主とする酸
化膜のＸ線回折強度の総計の５０％以上が前記α型酸化
アルミニウムのＸ線回折強度からなり、残りがＡｌ，Ｓ
ｉ，Ｚｒ，Ｃｒ，Ｔｉ、Ｙの一種または二種以上からな
る酸化物と１ａｔ％以下の微量添加物と１ａｔ％以下の
不可避不純物によって構成される酸化膜をいう。α型酸
化アルミニウムを主とする酸化膜は単層膜あるいは複層
膜にする場合でもよく他の元素を含む被膜と複層膜にし
た場合も同様の効果がある。酸化膜はα型酸化アルミニ
ウムに限るものではなく他の結晶型酸化アルミニウム、
例えばκ型酸化アルミニウム、γ型酸化アルミニウム、
θ型酸化アルミニウム、δ型酸化アルミニウム、χ型酸
化アルミニウム等やアモルファスの酸化アルミニウムを
含有してもよく、酸化アルミニウム以外の酸化膜、例え
ば酸化シリコン、酸化ジルコニウム、酸化クロム、酸化
チタン、酸化イットリウムとの混合膜でも同様な効果が
得られる。また酸化アルミニウムの２０ａｔ％以下が、
シリコン原子、ジルコニウム原子、クロム原子、チタン
原子、イットリア原子に置換された固溶体からなる被膜
でも同様な効果が得られ、α型酸化アルミニウムを主と
する酸化膜には１ａｔ％以下の微量添加物として炭素、
炭化物、窒化物、ホウ化物を含んでもよく、１ａｔ％以
下の不可避不純物として硫黄、硫化物、セレン、テル
ル、チタン、塩素を含んでも良い。In the present invention, the oxide film mainly composed of α-type aluminum oxide means that 50% or more of the total X-ray diffraction intensity of the oxide film mainly composed of α-type aluminum oxide is X-ray diffraction of the α-type aluminum oxide. Strength, the rest is Al, S
An oxide film composed of an oxide composed of one or more of i, Zr, Cr, Ti, and Y, a trace additive of 1 at% or less, and an unavoidable impurity of 1 at% or less. The oxide film mainly composed of α-type aluminum oxide may be a single layer film or a multilayer film, and the same effect can be obtained when it is formed as a film containing other elements and a multilayer film. The oxide film is not limited to α-type aluminum oxide, but other crystalline aluminum oxide,
For example, κ-type aluminum oxide, γ-type aluminum oxide,
It may contain θ-type aluminum oxide, δ-type aluminum oxide, χ-type aluminum oxide or the like and amorphous aluminum oxide, and oxide films other than aluminum oxide, such as silicon oxide, zirconium oxide, chromium oxide, titanium oxide and yttrium oxide. The same effect can be obtained with the mixed film of. 20 at% or less of aluminum oxide is
A similar effect can be obtained with a film made of a solid solution substituted with silicon atoms, zirconium atoms, chromium atoms, titanium atoms, and yttria atoms. As a trace additive of 1 at% or less for an oxide film mainly containing α-type aluminum oxide, carbon,
Carbides, nitrides and borides may be contained, and sulfur, sulfide, selenium, tellurium, titanium and chlorine may be contained as inevitable impurities of 1 at% or less.
【０００９】α型酸化アルミニウム被膜のＸ線回折強度
を測定するため、通常のＣｕ管球を装備したＸ線回折装
置を用いた。測定範囲は２０度〜６０度であり、Ｋα１
によるＸ線回折強度を測定した。測定した面は（０１
２）面から（１１６）面であった。表１はα型酸化アル
ミニウムの結晶面に対する面間隔ｄ、２θ値、標準Ｘ線
回折強度Ｉ0をまとめたものである。面間隔と標準Ｘ線
回折強度Ｉ0はＪＣＰＤＳカードのＮｏ．１０−１７３
から転記し、２θ値はＣｕのＫα１線を用いた時に測定
される値を面間隔ｄから計算により求めたものである。In order to measure the X-ray diffraction intensity of the α-type aluminum oxide coating, an X-ray diffractometer equipped with a usual Cu tube was used. The measurement range is 20 to 60 degrees, and Kα1
X-ray diffraction intensity was measured. The measured surface is (01
It was from (2) plane to (116) plane. Table 1 summarizes the interplanar spacing d, 2θ value, and standard X-ray diffraction intensity I 0 with respect to the crystal plane of α-type aluminum oxide. The plane spacing and the standard X-ray diffraction intensity I 0 are the same as those of the JCPDS card No. 10-173
The 2θ value is obtained by calculating the value measured when the Cu Kα1 ray is used from the interplanar spacing d.
【表１】 [Table 1]
【００１０】得られたα型酸化アルミニウムの（０１
２）面から（１１６）面までのＸ線回折強度から１式で
定義される（０１２）面の集合組織化係数ＴＣ（０１
２）を求めた。このとき、１式のＩ（ｈｋｌ）は（ｈｋ
ｌ）面を測定したＸ線回折強度を表し、Ｉ0（ｈｋｌ）
はＪＣＰＤＳカード番号１０−１７３の標準Ｘ線回折強
度を表す。The obtained α-type aluminum oxide (01
From the X-ray diffraction intensities from the (2) plane to the (116) plane, the texture organization coefficient TC (01
2) was calculated. At this time, I (hkl) of the equation 1 is (hk
l) represents the X-ray diffraction intensity measured on the plane, I 0 (hkl)
Represents the standard X-ray diffraction intensity of JCPDS card number 10-173.
【１式】 [1 set]
【００１１】α型酸化アルミニウム被膜の（０１２）面
のＸ線回折強度が最強であり、集合組織化係数ＴＣ（０
１２）が２．５以上では耐欠損性が向上する。このよう
なＴＣ（０１２）を示すα型酸化アルミニウム被膜の組
織は柱状晶を示した。この場合の柱状晶とは基材表面に
対して平行な方向で測定した粒径より基材表面に対して
垂直な方向で測定した粒径の方が長い結晶のことをい
う。今回の発明品を切削工具に用いた場合、応力が集中
するエッジ部の初期欠損が生じにくく、耐摩耗工具に用
いた場合エッジ付近の欠けが生じにくくなった。The X-ray diffraction intensity of the (012) plane of the α-type aluminum oxide film is the strongest, and the texture organization coefficient TC (0
When 12) is 2.5 or more, fracture resistance is improved. The structure of the α-type aluminum oxide film exhibiting such TC (012) showed columnar crystals. The columnar crystal in this case means a crystal in which the grain size measured in the direction perpendicular to the substrate surface is longer than the grain size measured in the direction parallel to the substrate surface. When the invention product of this time was used for a cutting tool, initial damage of the edge portion where stress was concentrated was less likely to occur, and when used for a wear resistant tool, chipping near the edge was less likely to occur.
【００１２】通常のＣＶＤ法で原料ガスＡｌＣｌ3−Ｃ
Ｏ2−ＣＯ−Ｈ2−ＨＣｌ系を用いた場合、本発明品はコ
ーティング温度を上げるほどまたはＨＣｌ分圧を上げる
ほど得られやすい。なお、原料ガスＡｌＣｌ3−ＣＯ2−
ＣＯ−Ｈ2−ＨＣｌ系に成膜速度を上げるためＨ2Ｓ，Ｓ
Ｏ2などの硫化物やセレン、テルルを加えてもよく、添
加物としてＣＨ4、Ｎ2、ＴｉＣｌ4を加えてもよい。Ａ
ｌ2Ｏ3合成にＣＯ2のほかにＮＯ2を使用してもよい。し
かしながら、ＰＶＤ法、ＣＶＤ法とも被膜の生成は使用
する炉の大きさや炉内でのガスの流れ方、ガス純度など
各種要因によって微妙に影響を受けるため、炉に応じて
各種パラメーターを調整する。Raw material gas AlCl 3 --C by the usual CVD method
When the O 2 —CO—H 2 —HCl system is used, the product of the present invention is more likely to be obtained as the coating temperature is raised or the HCl partial pressure is raised. The source gas AlCl 3 --CO 2-
CO-H 2 -HCl system H 2 for increasing the deposition rate to S, S
Sulfides such as O 2 and selenium and tellurium may be added, and CH 4 , N 2 and TiCl 4 may be added as additives. A
In addition to CO 2 , NO 2 may be used in the synthesis of l 2 O 3 . However, in both the PVD method and the CVD method, the formation of the coating film is slightly affected by various factors such as the size of the furnace used, the flow of gas in the furnace, and the gas purity, so various parameters are adjusted according to the furnace.
【００１３】被覆部材の被膜に存在するクラックは高倍
率のＳＥＭ観察でも観察できるが、被膜表面を鏡面研磨
したのちフッ化水素と硝酸を含んだ水溶液で数分間腐食
するとクラックが広がり観察しやすくなる。今回の発明
は被膜に応力がかかった場合にその効果が明確になるた
め、切削試験前後のクラック間隔を調べた。Although cracks existing in the coating film of the coating member can be observed by SEM observation at high magnification, if the surface of the coating film is mirror-polished and then corroded with an aqueous solution containing hydrogen fluoride and nitric acid for several minutes, the cracks spread and become easy to observe. . Since the effect of the present invention becomes clear when stress is applied to the coating, the crack spacing before and after the cutting test was examined.
【００１４】[0014]
【実施試験１】基材超硬合金としては８９．３ＷＣ−
２．２ＴｉＣ−３．１ＴａＣ−０．３ＮｂＣ−５．１Ｃ
ｏ合金（重量％）、その形状としてＪＩＳ規格ＣＮＭＧ
１２０４０８を用意した。基材表面を洗浄後、外熱式Ｃ
ＶＤ装置内に担時し、原料ガスは純度９９．５ｖｏｌ％
以上の高純度ガスを使用し、従来から用いられているＣ
ＶＤ法で基材表面に下層膜として０．６μmの厚さのＴ
ｉＮと８．０μmの厚さのＴｉＣＮをコーティング温度
８９０℃で被覆し、０．５μmの厚さのＴｉＡｌＣＯを
コーティング温度１０００℃で被覆した。次いで下層膜
の表面に表２に示したガス条件、温度、圧力および流量
で酸化膜を被覆した。次いで酸化膜の表面には０．５μ
mの厚さのＴｉＮをコーティング温度１０１５℃で被覆
して発明品１〜９、比較品１〜３を作製した。酸化膜を
Ｘ線回折したところ、α型酸化アルミニウム被膜であっ
た。[Practical test 1] 89.3 WC- as a base cemented carbide
2.2TiC-3.1TaC-0.3NbC-5.1C
o alloy (wt%), its shape is JIS standard CNMG
120408 was prepared. After cleaning the surface of the base material, external heat C
Carried in the VD equipment, the raw material gas has a purity of 99.5 vol%
Using the above high-purity gases, C that has been used conventionally
As a lower layer film on the substrate surface by the VD method, T having a thickness of 0.6 μm
iN and 8.0 μm thick TiCN were coated at a coating temperature of 890 ° C. and 0.5 μm thick TiAlCO at a coating temperature of 1000 ° C. Next, the surface of the lower layer film was coated with an oxide film under the gas conditions, temperature, pressure and flow rate shown in Table 2. Then 0.5μ on the surface of the oxide film
Inventive products 1 to 9 and comparative products 1 to 3 were produced by coating TiN having a thickness of m at a coating temperature of 1015 ° C. When the oxide film was subjected to X-ray diffraction, it was an α-type aluminum oxide film.
【００１５】[0015]
【表２】 [Table 2]
【００１６】表３にα型酸化アルミニウム被膜につい
て、最強のＸ線回折強度を示す結晶面、集合組織化係数
ＴＣ（０１２）、膜厚、切削試験前の刃先部クラック間
隔をそれぞれ記載した。発明品１〜９および比較品１〜
３を、円筒形にＶ型の４本の溝を入れたＦＣＤ６００
（２４９ＨＢ）を被削材に用いて、切削速度：Ｖ＝１４
０ｍ／ｍｉｎ、切り込み：ｄ＝２ｍｍ、送り：ｆ＝０．
３ｍｍ／ｒｅｖ．、水溶性切削油使用という切削条件で
断続試験を行い、切削試験後の刃先部のクラック間隔と
コーナー摩耗が０．４ｍｍに達するとき、または刃先部
分が欠損に至るまでの切削パス数の５回の平均値を表３
に記載した。α型酸化アルミニウム被膜のＴＣ（０１
２）と耐欠損性は非常によく対応していることが分か
る。切削試験結果と試験前のクラック間隔の相関はあま
り高くないが、切削試験後のクラック間隔およびＴＣ
（０１２）と試験結果は相関が高い。Table 3 shows the crystal plane showing the strongest X-ray diffraction intensity, the texture coefficient TC (012), the film thickness, and the crack interval between the cutting edges before the cutting test for the α-type aluminum oxide film. Invention products 1-9 and comparative products 1-
3 is an FCD600 with four V-shaped grooves in a cylindrical shape
Using (249HB) as the work material, cutting speed: V = 14
0 m / min, depth of cut: d = 2 mm, feed: f = 0.
3 mm / rev. Performing an intermittent test under cutting conditions using water-soluble cutting oil, and when the crack interval and corner wear of the cutting edge after the cutting test reach 0.4 mm, or the number of cutting passes until the cutting edge becomes defective, 5 times Table 3 shows the average value of
Described in. TC (01 of α-type aluminum oxide film
It can be seen that 2) and the fracture resistance correspond very well. Although the correlation between the cutting test result and the crack interval before the test is not so high, the crack interval and TC after the cutting test are not so high.
The correlation between (012) and the test result is high.
【００１７】[0017]
【表３】 [Table 3]
【００１８】[0018]
【実施試験２】基材超硬合金としては８９．１ＷＣ−
２．５ＴｉＣ−２．６ＴａＣ−０．３ＮｂＣ−Ｃｏ合金
（重量％）、その形状としてＪＩＳ規格ＣＮＭＧ１２０
４０８を用意した。基材表面を洗浄後、外熱式ＣＶＤ装
置内に担時し、原料ガスは純度９９．５ｖｏｌ％以上の
高純度ガスを使用し、従来から用いられているＣＶＤ法
で基材表面に下層膜として０．５μmの厚さのＴｉＮと
６．５μmの厚さのＴｉＣＮをコーティング温度９１０
℃で被覆し、０．５μmの厚さのＴｉＡｌＣＯをコーテ
ィング温度９９０℃で被覆した。次いで下層膜の表面に
コーティング温度を９９０℃、炉内圧力１２．０ｋＰ
ａ、ガス流量２５ ｌ／ｍｉｎ、原料ガス成分のＡｌＣ
ｌ3を２〜５ｍｏｌ％、ＣＯ2とＣＯを混合したガスを３
〜３０ｍｏｌ％、ＨＣｌを１〜６ｍｏｌ％、Ｈ2Ｓを０
〜１ｍｏｌ％、Ｈ2を９４〜５８ｍｏｌ％の範囲で変え
てα型酸化アルミニウム被膜を被覆した。α型酸化アル
ミニウム被膜表面には０．５μmの厚さのＴｉＮをコー
ティング温度９９０℃で被覆して発明品１０〜１４、比
較品４〜１０を作製した。[Practical test 2] As a base cemented carbide, 89.1 WC-
2.5TiC-2.6TaC-0.3NbC-Co alloy (wt%), its shape is JIS standard CNMG120
408 was prepared. After cleaning the surface of the substrate, the substrate is carried in an external heating type CVD device, a high-purity gas having a purity of 99.5 vol% or more is used as a raw material gas, and a lower layer film is formed on the substrate surface by a conventionally used CVD method. As a coating temperature 910, a TiN layer having a thickness of 0.5 μm and a TiCN layer having a thickness of 6.5 μm are used.
C. and 0.5 .mu.m thick TiAlCO was coated at a coating temperature of 990.degree. Next, the coating temperature on the surface of the lower layer film is 990 ° C., the furnace pressure is 12.0 kP
a, gas flow rate 25 l / min, source gas component AlC
2 to 5 mol% of L 3 and 3 to a mixed gas of CO 2 and CO
-30 mol%, HCl 1-6 mol%, H 2 S 0
To 1 mol%, it was coated with α-type aluminum oxide film by changing of H 2 in the range of 94~58mol%. The surface of the α-type aluminum oxide coating film was coated with TiN having a thickness of 0.5 μm at a coating temperature of 990 ° C. to produce invention products 10 to 14 and comparative products 4 to 10.
【００１９】表４にα型酸化アルミニウム被膜につい
て、最強のＸ線回折強度を示す結晶面、集合組織化係数
ＴＣ（０１２）、膜厚、切削試験前の刃先部クラック間
隔をそれぞれ記載した。発明品１０〜１４および比較品
４〜１０を、円筒形にＶ型の４本の溝を入れたＳ４５Ｃ
（２３９ＨＢ）を被削材に用いて、切削速度：Ｖ＝１３
０ｍ／ｍｉｎ、切り込み：ｄ＝２ｍｍ、送り：ｆ＝０．
３ｍｍ／ｒｅｖ．、水溶性切削油使用という切削条件で
断続試験を行い、切削試験後の刃先部のクラック間隔と
コーナー摩耗が０．４ｍｍに達するとき、または刃先部
分が欠損に至るまでの切削パス数の５回の平均値を表４
に記載した。α型酸化アルミニウム被膜のＴＣ（０１
２）と耐欠損性は非常によく対応していることが分か
る。切削試験結果と試験前のクラック間隔の相関はあま
り高くないが、切削試験後のクラック間隔およびＴＣ
（０１２）と試験結果は相関が高い。Table 4 shows the crystal plane showing the strongest X-ray diffraction intensity, the texture coefficient TC (012), the film thickness, and the crack interval between the cutting edges before the cutting test for the α-type aluminum oxide coating. Inventive products 10 to 14 and comparative products 4 to 10 are S45C in which four V-shaped grooves are cylindrically formed.
Using (239HB) as the work material, cutting speed: V = 13
0 m / min, depth of cut: d = 2 mm, feed: f = 0.
3 mm / rev. Performing an intermittent test under cutting conditions using water-soluble cutting oil, and when the crack interval and corner wear of the cutting edge after the cutting test reach 0.4 mm, or the number of cutting passes until the cutting edge becomes defective, 5 times Table 4 shows the average value of
Described in. TC (01 of α-type aluminum oxide film
It can be seen that 2) and the fracture resistance correspond very well. Although the correlation between the cutting test result and the crack interval before the test is not so high, the crack interval and TC after the cutting test are not so high.
The correlation between (012) and the test result is high.
【００２０】[0020]
【表４】 [Table 4]
【００２１】[0021]
【発明の効果】本発明の集合組織化係数ＴＣ（０１２）
が２．５以上であるα型酸化アルミニウム被膜を含む被
膜は被膜自身にクラックが入りやすく基材と被膜の熱膨
張率の差によって被膜に生じた残留応力が減少しやすい
という効果を有する。本発明のα型酸化アルミニウム被
覆工具を切削工具として用いた場合耐欠損性が向上し、
耐摩耗工具として用いた場合寿命が増加する。EFFECTS OF THE INVENTION The texture organization coefficient TC (012) of the present invention
A film containing an α-type aluminum oxide film having a ratio of 2.5 or more has the effect that the film itself is prone to cracking and the residual stress generated in the film is likely to decrease due to the difference in the coefficient of thermal expansion between the substrate and the film. When the α-type aluminum oxide coated tool of the present invention is used as a cutting tool, the fracture resistance is improved,
When it is used as a wear resistant tool, the life is increased.
Claims (8)
覆された被覆工具において、該被膜は、少なくとも一層
がα型酸化アルミニウム（六方晶構造）を主とする酸化
膜からなり、該酸化膜をＸ線回折したときにおけるα型
酸化アルミニウムの結晶面は、（０１２）結晶面が最強
のＸ線回折強度であり、１式で定義される（０１２）結
晶面の集合組織化係数ＴＣ（０１２）が２．５以上を呈
する酸化アルミニウム被覆工具。 【１式】 ただし、１式において、Ｉ（ｈｋｌ）は（ｈｋｌ）結晶
面を測定したＸ線回折強度を表し、Ｉ0（ｈｋｌ）はＪ
ＣＰＤＳカード番号１０−１７３の標準Ｘ線回折強度を
表す。1. A coated tool in which a single-layer film or a multi-layer film is coated on the surface of a base material, and the coating has at least one layer made of an oxide film mainly composed of α-type aluminum oxide (hexagonal structure), The crystal plane of α-type aluminum oxide when the oxide film is subjected to X-ray diffraction has the strongest X-ray diffraction intensity in the (012) crystal plane, and the texture organization coefficient of the (012) crystal plane defined by the formula 1 An aluminum oxide coated tool having a TC (012) of 2.5 or more. [1 set] However, in Formula 1, I (hkl) represents the X-ray diffraction intensity measured on the (hkl) crystal plane, and I 0 (hkl) is J
The standard X-ray diffraction intensity of CPDS card number 10-173 is shown.
ことを特徴とする請求項１記載の酸化アルミニウム被覆
工具。2. The aluminum oxide coated tool according to claim 1, wherein at least one layer of the coating is columnar crystals.
とを特徴とする請求項１または２記載の酸化アルミニウ
ム被覆工具。3. The aluminum oxide coated tool according to claim 1, wherein the base material is made of cemented carbide or cermet.
Ｔａ、Ｃｒ、Ｍｏ、Ｗ、Ａｌ、Ｓｉの一種または二種以
上からなる炭化物、窒化物、炭窒化物、酸化物、炭酸化
物、窒酸化物、炭窒酸化物、ホウ化物のいずれかによっ
て構成される一種の単層膜または二種以上の多層膜が含
まれている請求項１〜３のいずれか記載の酸化アルミニ
ウム被覆工具。4. The coating comprises Ti, Zr, Hf, V, Nb,
Consists of any one of carbides, nitrides, carbonitrides, oxides, carbonates, oxynitrides, oxycarbonitrides, and borides made of one or more of Ta, Cr, Mo, W, Al, and Si. The aluminum oxide coated tool according to any one of claims 1 to 3, which comprises one kind of single-layer film or two or more kinds of multilayer film.
化物、ＡｌとＴｉを含む窒化物、炭窒化物、炭酸化物、
窒酸化物、炭窒酸化物の中の少なくとも一種の下層膜を
含み、該下層膜が前記基材と前記酸化膜との間に介在さ
れている請求項１〜４のいずれか記載の酸化アルミニウ
ム被覆工具。5. The coating film comprises Ti carbide, nitride, carbonitride, nitride containing Al and Ti, carbonitride, carbonate,
The aluminum oxide according to any one of claims 1 to 4, comprising an underlayer film of at least one of oxynitride and oxycarbonitride, the underlayer film being interposed between the base material and the oxide film. Coated tool.
に、Ｔｉの窒化物、炭窒化物、窒酸化物、炭酸化物、炭
窒酸化物の中の少なくとも一層でなる最外層を含み、該
酸化膜の表面に該最外層が被覆されている請求項１〜５
のいずれか記載の酸化アルミニウム被覆工具。6. The coating film includes, in addition to the lower layer film and the oxide film, an outermost layer of at least one layer of Ti nitride, carbonitride, nitrous oxide, carbonic oxide, and oxycarbonitride. The outermost layer is coated on the surface of the oxide film.
The aluminum oxide coated tool according to any one of 1.
る請求項１〜６のいずれか記載の酸化アルミニウム被覆
工具。7. The aluminum oxide coated tool according to claim 1, wherein the oxide film is a columnar crystal.
に用いられることを特徴とする請求項１〜７のいずれか
記載の酸化アルミニウム被覆工具。8. The aluminum oxide coated tool according to claim 1, wherein the aluminum oxide coated tool is used as a cutting tool.
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|---|---|---|---|
| JP2001214733A JP2003025114A (en) | 2001-07-16 | 2001-07-16 | Aluminium oxide coated cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001214733A JP2003025114A (en) | 2001-07-16 | 2001-07-16 | Aluminium oxide coated cutting tool |
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| Publication Number | Publication Date |
|---|---|
| JP2003025114A true JP2003025114A (en) | 2003-01-29 |
Family
ID=19049498
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001214733A Pending JP2003025114A (en) | 2001-07-16 | 2001-07-16 | Aluminium oxide coated cutting tool |
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| Country | Link |
|---|---|
| JP (1) | JP2003025114A (en) |
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