JP2003023161A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2003023161A5 JP2003023161A5 JP2002108720A JP2002108720A JP2003023161A5 JP 2003023161 A5 JP2003023161 A5 JP 2003023161A5 JP 2002108720 A JP2002108720 A JP 2002108720A JP 2002108720 A JP2002108720 A JP 2002108720A JP 2003023161 A5 JP2003023161 A5 JP 2003023161A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- insulating film
- contact
- thin film
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims 171
- 239000004065 semiconductor Substances 0.000 claims 102
- 239000010409 thin film Substances 0.000 claims 75
- 230000015572 biosynthetic process Effects 0.000 claims 27
- 239000012535 impurity Substances 0.000 claims 10
- 239000004973 liquid crystal related substance Substances 0.000 claims 9
- 210000002858 crystal cell Anatomy 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 6
- 238000000034 method Methods 0.000 claims 6
- 238000005530 etching Methods 0.000 claims 4
- 238000005498 polishing Methods 0.000 claims 3
- 239000000126 substance Substances 0.000 claims 3
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002108720A JP4338937B2 (ja) | 2001-04-16 | 2002-04-11 | 半導体装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001116307 | 2001-04-16 | ||
JP2001-116307 | 2001-04-16 | ||
JP2002108720A JP4338937B2 (ja) | 2001-04-16 | 2002-04-11 | 半導体装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2003023161A JP2003023161A (ja) | 2003-01-24 |
JP2003023161A5 true JP2003023161A5 (enrdf_load_stackoverflow) | 2005-09-22 |
JP4338937B2 JP4338937B2 (ja) | 2009-10-07 |
Family
ID=26613614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002108720A Expired - Fee Related JP4338937B2 (ja) | 2001-04-16 | 2002-04-11 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4338937B2 (enrdf_load_stackoverflow) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7078322B2 (en) | 2001-11-29 | 2006-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a thin film transistor |
US7528643B2 (en) * | 2003-02-12 | 2009-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic device having the same, and driving method of the same |
US8760374B2 (en) | 2004-05-21 | 2014-06-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device having a light emitting element |
JP5152448B2 (ja) * | 2004-09-21 | 2013-02-27 | カシオ計算機株式会社 | 画素駆動回路及び画像表示装置 |
JP4926426B2 (ja) | 2005-08-12 | 2012-05-09 | 株式会社半導体エネルギー研究所 | 電子機器 |
JP2008216542A (ja) * | 2007-03-02 | 2008-09-18 | Seiko Epson Corp | 有機半導体素子の駆動方法、電気光学装置、電気光学装置の駆動方法及び電子機器 |
KR102095625B1 (ko) | 2008-10-24 | 2020-03-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
JP2010224033A (ja) * | 2009-03-19 | 2010-10-07 | Toshiba Corp | 表示装置及び表示装置の駆動方法 |
KR102443297B1 (ko) | 2009-09-24 | 2022-09-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막 및 반도체 장치 |
CN105609509A (zh) * | 2009-12-04 | 2016-05-25 | 株式会社半导体能源研究所 | 显示装置 |
US9754971B2 (en) * | 2013-05-18 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US20140374744A1 (en) * | 2013-06-19 | 2014-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP2016066788A (ja) * | 2014-09-19 | 2016-04-28 | 株式会社半導体エネルギー研究所 | 半導体膜の評価方法および半導体装置の作製方法 |
US10186618B2 (en) | 2015-03-18 | 2019-01-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9685368B2 (en) | 2015-06-26 | 2017-06-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structure having an etch stop layer over conductive lines |
JP6920785B2 (ja) * | 2015-08-19 | 2021-08-18 | 株式会社ジャパンディスプレイ | 表示装置 |
-
2002
- 2002-04-11 JP JP2002108720A patent/JP4338937B2/ja not_active Expired - Fee Related
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2003051599A5 (enrdf_load_stackoverflow) | ||
US12253780B2 (en) | Electronic device comprising substrate assembly including two types of transistors | |
JP4480968B2 (ja) | 表示装置 | |
US9660060B2 (en) | Thin film transistor and fabricating method thereof | |
JP4602466B2 (ja) | 半導体装置の作製方法 | |
JP2003023161A5 (enrdf_load_stackoverflow) | ||
JP4678933B2 (ja) | 半導体装置の作製方法 | |
US8378404B2 (en) | Semiconductor structure of a display device and method for fabricating the same | |
CN106920802B (zh) | 薄膜晶体管基板和使用该薄膜晶体管基板的显示器 | |
WO2019148886A1 (zh) | 阵列基板及其制备方法以及对应的显示装置 | |
US20230086999A1 (en) | Gate driving circuit and manufacturing method therefor, array substrate, and display device | |
US7973317B2 (en) | Array substrate for liquid crystal display and method for fabricating the same | |
US9177970B2 (en) | Semiconductor device, method of manufacturing the same, method of manufacturing display unit, and method of manufacturing electronic apparatus | |
TWI569421B (zh) | 畫素結構及其製作方法 | |
US20160329360A1 (en) | Low temperature poly-silicon thin film transistor, fabricating method thereof, array substrate and display device | |
US20150380530A1 (en) | Method of manufacturing semiconductor device | |
JP2000236097A5 (enrdf_load_stackoverflow) | ||
CN100394295C (zh) | 薄膜半导体装置及其制造方法、电光装置和电子机器 | |
JP4558121B2 (ja) | 半導体装置及びその作製方法 | |
JP5177923B2 (ja) | 半導体装置および電子機器 | |
JP2000243975A5 (enrdf_load_stackoverflow) | ||
CN103681870B (zh) | 阵列基板及其制造方法 | |
JP2000039606A (ja) | 液晶表示装置 |