JP2003007879A - Vessel for housing electronic component - Google Patents

Vessel for housing electronic component

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Publication number
JP2003007879A
JP2003007879A JP2001194272A JP2001194272A JP2003007879A JP 2003007879 A JP2003007879 A JP 2003007879A JP 2001194272 A JP2001194272 A JP 2001194272A JP 2001194272 A JP2001194272 A JP 2001194272A JP 2003007879 A JP2003007879 A JP 2003007879A
Authority
JP
Japan
Prior art keywords
insulating base
lid
weight
electronic component
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001194272A
Other languages
Japanese (ja)
Inventor
Yoshiaki Ito
吉明 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2001194272A priority Critical patent/JP2003007879A/en
Publication of JP2003007879A publication Critical patent/JP2003007879A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To solve the problem of reliability in air-tight sealing which is induced, as the vessel for housing an electronic component becomes smaller and thinner, related to the vessel for housing an electronic component composed of a plate- like lid which houses air-tightly, using a glass sealing material, an electronic component in the space before an insulating base board. SOLUTION: The vessel for housing an electronic component comprises an insulating base body 1 provided with, on its upper part, a recessed part in which an electronic component 3 is mounted, and a lid 2 which is jointed to the upper surface of insulating base body 1 through a glass sealing material 6 to house the electronic component 3 in air-tight manner in the space before the insulating base body 1. The lid 2 is composed of a flat plate of 0.3 mm or less in thickness. The outside dimension of it is less than the insulating base body 1 by 0.1-0.3 mm, while the outer sides of it are positioned inside the outer sides of the insulating base body 1 across the entire periphery of it by 0.02-0.3 mm.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は半導体素子や圧電振
動子等の電子部品を気密に封止して収納するための電子
部品収納用容器に関し、特に封止材にガラスを用いて封
止を行う電子部品収納用容器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component storage container for hermetically sealing and storing electronic components such as semiconductor elements and piezoelectric vibrators, and in particular, glass is used as a sealing material for sealing. The present invention relates to a container for storing electronic components.

【0002】[0002]

【従来の技術】従来、半導体集積回路素子をはじめとす
る半導体素子あるいは水晶振動子、弾性表面波素子とい
った圧電振動子等の電子部品を収容するための電子部品
収納用容器は、例えば酸化アルミニウム質焼結体等の電
気絶縁材料から成り、その上面の略中央部に電子部品を
搭載するための搭載部およびその周辺から下面にかけて
導出されたタングステンやモリブデン等の高融点金属か
ら成る複数個のメタライズ配線層を有する絶縁基体と、
それに対向する面の略中央部に電子部品を収容するため
の凹部を有する蓋体とから構成されている。
2. Description of the Related Art Conventionally, a container for storing electronic parts such as a semiconductor device including a semiconductor integrated circuit device, or a piezoelectric vibrator such as a crystal resonator or a surface acoustic wave element is made of, for example, aluminum oxide. A plurality of metallizations made of an electrically insulating material such as a sintered body, and a mounting portion for mounting electronic components on the substantially central portion of the upper surface, and a refractory metal such as tungsten or molybdenum led from the periphery to the lower surface. An insulating substrate having a wiring layer,
It is composed of a lid body having a concave portion for accommodating an electronic component in a substantially central portion of a surface facing it.

【0003】そして、電子部品が例えば圧電振動子の場
合には、絶縁基体の搭載部に圧電振動子の一端を導電性
エポキシ樹脂等から成る導電性樹脂を介して接着固定す
るとともに圧電振動子の各電極をメタライズ配線層に電
気的に接続し、しかる後、絶縁基体の上面に蓋体を低融
点ガラスから成る封止材を介して接合させ、絶縁基体と
蓋体とから成る容器内部に圧電振動子を気密に収容する
ことによって最終製品としての電子部品装置と成る。
When the electronic component is, for example, a piezoelectric vibrator, one end of the piezoelectric vibrator is bonded and fixed to the mounting portion of the insulating substrate via a conductive resin such as a conductive epoxy resin, and Each electrode is electrically connected to the metallized wiring layer, and then a lid is bonded to the upper surface of the insulating base through a sealing material made of low-melting glass, and a piezoelectric element is formed inside the container made of the insulating base and the lid. By housing the oscillator airtightly, an electronic component device as a final product is obtained.

【0004】なお、絶縁基体に蓋体を接合させる封止材
としては、例えば酸化鉛56〜66重量%、酸化ホウ素4〜
14重量%、酸化珪素1〜6重量%、酸化亜鉛 0.5〜3重
量%および酸化ビスマス0.5〜5重量%を含むガラス成
分に、フィラーとしてコージェライト系化合物を10〜20
重量%添加した鉛系のガラスが使用されている。
The sealing material for bonding the lid to the insulating substrate is, for example, 56 to 66% by weight of lead oxide and 4 to 4 of boron oxide.
A glass component containing 14% by weight, 1 to 6% by weight of silicon oxide, 0.5 to 3% by weight of zinc oxide and 0.5 to 5% by weight of bismuth oxide, and 10 to 20% of a cordierite compound as a filler.
Lead-based glass added by weight% is used.

【0005】しかしながら、この従来の電子部品収納用
容器においては、絶縁基体に蓋体を接合させる封止材で
あるガラスの軟化溶融温度が約 400℃程度と高温である
こと、近時の電子部品は高密度化・高集積化に伴って耐
熱性が低下してきたこと等から、絶縁基体と蓋体とを封
止材を介して接合し、絶縁基体と蓋体とから成る絶縁容
器の内部に電子部品を気密に収容した場合、封止材を溶
融させる熱が内部に収容する電子部品に作用して電子部
品の特性に劣化を招来させ、電子装置を正常に作動させ
ることができないという問題点を有していた。
However, in this conventional container for storing electronic parts, the softening melting temperature of glass, which is a sealing material for joining the lid to the insulating base, is as high as about 400 ° C. Since the heat resistance has decreased due to higher density and higher integration, the insulating base and lid are joined together via a sealing material, and the inside of the insulating container consisting of the insulating base and lid is When the electronic components are hermetically housed, the heat that melts the sealing material acts on the electronic components housed inside, causing deterioration in the characteristics of the electronic components, and the electronic device cannot operate normally. Had.

【0006】また、近年地球環境保護運動の高まりの中
で、酸化鉛は環境負荷物質に指定されており、例えば酸
化鉛を含む電子装置が屋外に廃棄・放置され風雨に曝さ
れた場合、環境中に鉛が溶けだし環境を汚染する可能性
があり、人体に対して有害である酸化鉛を用いない封止
材の開発が要求されるようになってきた。
[0006] In addition, in recent years, with the rise of the global environmental protection movement, lead oxide has been designated as an environmentally hazardous substance. For example, when an electronic device containing lead oxide is discarded and left outdoors and exposed to wind and rain, There is a need to develop a sealing material that does not use lead oxide, which is harmful to the human body because lead may melt into it and pollute the environment.

【0007】このような問題点を解決するために、銀燐
酸系ガラスや錫燐酸系ガラスを主成分とする酸化鉛を含
まない低融点ガラスが検討されている。
In order to solve such a problem, a low-melting glass containing no lead oxide, which contains silver phosphate glass or tin phosphate glass as a main component, has been studied.

【0008】[0008]

【発明が解決しようとする課題】しかしながら、近時の
携帯電子機器の普及に伴い電子部品収納用容器の小型化
・薄型化の要求が日増しに高まっており、ガラスを用い
て封止を行う電子部品収納用容器においても小型化・薄
型化を図る目的で上面に電子部品を搭載部するための凹
部を有する絶縁基体と、絶縁基体の上面に接合され、絶
縁基体との間の空間に電子部品をガラス封止材で気密に
収容する平板上の蓋体とから成る電子部品収納用容器が
考案されている。この電子部品収納用容器では蓋体の厚
さを薄くすることによって電子部品収納用容器の曲げ強
度を保持したまま電子部品収納用容器の薄型化が実現可
能であるが、蓋体の薄型化に伴い封止時の絶縁基体との
位置合わせが困難になる傾向がある。一方、電子部品収
納用容器の小型化による封止幅の減少に伴い、封止時の
絶縁基体と蓋体との高い位置合わせ精度が求められてお
り、上面に電子部品を搭載部するための凹部を有する絶
縁基体と、絶縁基体の上面に接合され、絶縁基体との間
の空間に電子部品をガラス封止材で気密に収容する平板
上の蓋体とから成る電子部品収納用容器では、電子部品
収納用容器の小型化・薄型化が進むにつれて位置合わせ
がより困難となり、気密封止の信頼性上の問題を誘発し
ていた。
However, with the recent widespread use of portable electronic devices, there is an increasing demand for smaller and thinner electronic component storage containers, and glass is used for sealing. Also in an electronic component storage container, an insulating base having a recess for mounting electronic components on the upper surface for the purpose of downsizing and thinning is joined to the upper surface of the insulating base, and an electronic space is provided between the insulating base and the insulating base. There has been devised a container for storing electronic components, which includes a flat plate lid that hermetically stores components with a glass sealing material. In this electronic component storage container, it is possible to make the electronic component storage container thinner while maintaining the bending strength of the electronic component storage container by reducing the thickness of the lid. As a result, it tends to be difficult to align with the insulating substrate during sealing. On the other hand, along with the reduction of the sealing width due to the miniaturization of the electronic component storage container, high positioning accuracy between the insulating base and the lid at the time of sealing is required, and it is necessary to mount the electronic component on the upper surface. In an electronic component storage container comprising an insulating base having a recess and a flat plate lid which is joined to the upper surface of the insulating base and hermetically stores an electronic component in a space between the insulating base and a glass sealing material, As the container for storing electronic parts has become smaller and thinner, it has become more difficult to perform positioning, which has caused a problem of reliability of hermetic sealing.

【0009】本発明は上記問題点に鑑み案出されたもの
で、その目的は、絶縁基体と蓋体とから成る容器の内部
に電子部品を気密に封止し、その特性に劣化を招来する
ことがなく、電子部品を長期間にわたり正常かつ安定に
作動させることができる電子部品収納用容器を提供する
ことにある。
The present invention has been devised in view of the above problems, and an object thereof is to hermetically seal an electronic component inside a container composed of an insulating substrate and a lid, which causes deterioration of its characteristics. It is an object of the present invention to provide a container for storing electronic components, which can operate the electronic components normally and stably for a long period of time.

【0010】[0010]

【課題を解決するための手段】本発明の電子部品収納用
容器は、上面に電子部品を搭載部するための凹部を有す
る絶縁基体と、この絶縁基体の上面にガラス封止材を介
して接合され、絶縁基体との間の空間に電子部品を気密
に収容する蓋体とから成る電子部品収納用容器であっ
て、蓋体は0.3mm以下の厚さを有する平板形状から成
り、蓋体の外形寸法は絶縁基体の外形寸法より0.1〜0.3
mm小さく、かつ蓋体の外辺は絶縁基体の全周に渡り絶
縁基体の外辺から0.02〜0.3mm内側にあることを特徴
とするものである。
The container for housing electronic parts of the present invention is an insulating base having a concave portion for mounting electronic parts on the upper surface, and is joined to the upper surface of the insulating base via a glass sealing material. And a lid body for hermetically housing an electronic component in a space between the insulating base body, the lid body having a flat plate shape with a thickness of 0.3 mm or less. The external dimensions are 0.1 to 0.3 than the external dimensions of the insulating base.
It is characterized in that it is smaller by mm and the outer side of the lid is 0.02 to 0.3 mm inside from the outer side of the insulating base over the entire circumference of the insulating base.

【0011】また、本発明の電子部品収納用容器は、上
記構成においてガラス封止材が酸化銀14〜40重量%、ヨ
ウ化銀5〜20重量%、五酸化燐10〜30重量%、酸化硼素
5〜15重量%、酸化亜鉛1〜6重量%および酸化珪素5
〜15重量%を含むガラス成分にフィラーとして燐酸ジル
コニウムと酸化ジルコニウムと酸化ニオブとの固溶体を
外添加で10〜30重量%添加したものから成ることを特徴
とするものである。
Further, in the container for storing electronic parts of the present invention, in the above-mentioned constitution, the glass sealing material is 14 to 40% by weight of silver oxide, 5 to 20% by weight of silver iodide, 10 to 30% by weight of phosphorus pentoxide, Boron 5 to 15% by weight, zinc oxide 1 to 6% by weight, and silicon oxide 5
It is characterized in that it comprises 10 to 30% by weight of a solid solution of zirconium phosphate, zirconium oxide and niobium oxide as a filler added to a glass component containing 15 to 15% by weight.

【0012】本発明の電子部品収納用容器によれば、上
面に電子部品を搭載部するための凹部を有する絶縁基体
と、絶縁基体の上面にガラス封止材を介して接合され、
絶縁基体との間の空間に電子部品を気密に収容する蓋体
とから成る電子部品収納用容器であって、蓋体が0.3m
m以下の厚さを有する平板形状から成り、蓋体の外形寸
法が絶縁基体の外形寸法より0.1〜0.3mm小さく、かつ
蓋体の外辺が絶縁基体の全周に渡り絶縁基体の外辺から
0.02〜0.3mm内側にあることから、絶縁基体と蓋体と
をガラス封止材を介して接合させ容器を気密に封止する
際、絶縁基体側のガラス封止材と蓋体側のガラス封止材
とが溶融し合ったガラス封止材の表面張力が蓋体を絶縁
基体の中心部に位置合わせする方向に働き、絶縁基体と
蓋体とを極めて高い位置精度で封止することができ、そ
の結果、気密信頼性が極めて高い小型・薄型の電子部品
収納容器とすることができる。
According to the electronic component storage container of the present invention, an insulating base having a concave portion for mounting an electronic component on the upper surface is joined to the upper surface of the insulating base via a glass sealing material,
A container for storing electronic parts, which comprises a cover for hermetically storing electronic parts in a space between the base and the insulating base, the cover having a length of 0.3 m.
It has a flat plate shape with a thickness of m or less, the outer dimension of the lid is 0.1 to 0.3 mm smaller than the outer dimension of the insulating base, and the outer edge of the lid extends over the entire circumference of the insulating base from the outer edge of the insulating base.
Since it is on the inside of 0.02 to 0.3 mm, when the insulating base and the lid are joined together via the glass sealing material to hermetically seal the container, the glass sealing material on the insulating base side and the glass sealing on the lid side The surface tension of the glass sealing material in which the materials are melted works in the direction of aligning the lid with the center of the insulating base, and the insulating base and the lid can be sealed with extremely high positional accuracy, As a result, a small and thin electronic component storage container having extremely high airtight reliability can be provided.

【0013】また、本発明の電子部品収納用容器によれ
ば、絶縁基体と蓋体とを銀燐酸系ガラスを主成分とする
ガラス封止材で接合したことから、その封止温度を350
℃以下とすることができ、絶縁基体と蓋体とをガラス封
止材を介して接合させ、絶縁基体と蓋体とから成る容器
内部に電子部品を気密に収容する際、ガラス封止材を溶
融させる熱が内部に収容する電子部品に作用しても電子
部品の特性に劣化を招来することはなく、その結果、電
子部品を長期間にわたり正常、かつ安定に作動させるこ
とが可能となる。
Further, according to the container for storing electronic parts of the present invention, since the insulating base and the lid are joined by the glass sealing material containing silver phosphate glass as a main component, the sealing temperature is 350.
C. or less, and when the insulating base and the lid are joined via a glass sealant and the electronic component is hermetically housed inside the container made of the insulating base and the lid, the glass sealant is used. Even if the heat for melting acts on the electronic components housed inside, the characteristics of the electronic components are not deteriorated, and as a result, it becomes possible to operate the electronic components normally and stably for a long period of time.

【0014】[0014]

【発明の実施の形態】次に、本発明を添付の図面に基づ
き詳細に説明する。
DETAILED DESCRIPTION OF THE INVENTION The present invention will now be described in detail with reference to the accompanying drawings.

【0015】図1は本発明の電子部品収納用容器の実施
の形態の一例を示す断面図である。この図においては電
子部品が水晶振動子等の圧電振動子であり、電子部品収
納用容器が圧電振動子収納用容器である場合の例を示し
ている。
FIG. 1 is a sectional view showing an example of an embodiment of a container for storing electronic parts of the present invention. In this figure, an example is shown in which the electronic component is a piezoelectric oscillator such as a crystal oscillator, and the electronic component storage container is a piezoelectric oscillator storage container.

【0016】この図において1は絶縁基体、2は蓋体で
あり、主に絶縁基体1と蓋体2とで圧電振動子3を収容
するための容器4が構成される。
In this figure, 1 is an insulating base, 2 is a lid, and the insulating base 1 and the lid 2 constitute a container 4 for accommodating the piezoelectric vibrator 3.

【0017】絶縁基体1は、上面に凹部を有する略長方
形で、その凹部上面に圧電振動子3を搭載するための搭
載部1aが設けてあり、この搭載部1aには、圧電振動子3
が導電性樹脂Jを介して接着固定される。なお、絶縁基
体1は、その縦方向の寸法が1.5〜7.0mm、横方向の寸
法が1.0〜5.0mm、高さが0.3〜1.5mm程度であり、ま
た、凹部上面の、後述する蓋体2との接合面の幅が0.25
〜0.7mm程度となっている。
The insulating substrate 1 has a substantially rectangular shape having a concave portion on the upper surface, and a mounting portion 1a for mounting the piezoelectric vibrator 3 is provided on the upper surface of the concave portion. The mounting portion 1a has the piezoelectric vibrator 3 therein.
Are bonded and fixed via the conductive resin J. The insulating substrate 1 has a longitudinal dimension of 1.5 to 7.0 mm, a lateral dimension of 1.0 to 5.0 mm, and a height of about 0.3 to 1.5 mm. The width of the joint surface with is 0.25
It is about 0.7 mm.

【0018】絶縁基体1は、酸化アルミニウム質焼結体
やムライト質焼結体・窒化アルミニウム質焼結体・窒化
珪素質焼結体・炭化珪素質焼結体等の電気絶縁材料から
成り、例えば酸化アルミニウム質焼結体から成る場合で
あれば、酸化アルミニウム・酸化珪素・酸化マグネシウ
ム・酸化カルシウム等の原料粉末に適当な有機バインダ
・溶剤・可塑剤・分散剤等を添加混合して泥漿物を作
り、この泥漿物を従来周知のドクターブレード法やカレ
ンダーロール法等のシート成形法を採用しシート状に成
形してセラミックグリーンシート(セラミック生シー
ト)を得、しかる後、それらセラミックグリーンシート
に適当な打ち抜き加工を施すとともにこれを複数枚積層
し、約1600℃の高温で焼成することによって製作され
る。
The insulating substrate 1 is made of an electrically insulating material such as an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, a silicon nitride sintered body, or a silicon carbide sintered body. If it is made of aluminum oxide sintered material, powder of aluminum oxide, silicon oxide, magnesium oxide, calcium oxide, etc. is mixed with appropriate organic binder, solvent, plasticizer, dispersant, etc. Then, the sludge is formed into a sheet by using a sheet forming method such as the well-known doctor blade method or calendar roll method to obtain a ceramic green sheet (ceramic green sheet), and then suitable for those ceramic green sheets. It is manufactured by performing various punching processes, stacking multiple sheets, and firing at a high temperature of about 1600 ° C.

【0019】また、絶縁基体1には搭載部1a近傍から底
面にかけて複数個のメタライズ配線層5が被着形成され
ている。そして、このメタライズ配線層5の搭載部1aの
近傍に位置する部位には圧電振動子3の各電極が導電性
エポキシ樹脂等から成る導電性樹脂Jを介して電気的に
接続され、また絶縁基体1の底面に導出された部位には
外部電気回路の配線導体(図示せず)が半田等のロウ材
を介して取着される。
A plurality of metallized wiring layers 5 are formed on the insulating substrate 1 from the vicinity of the mounting portion 1a to the bottom surface. Then, each electrode of the piezoelectric vibrator 3 is electrically connected to a portion of the metallized wiring layer 5 located in the vicinity of the mounting portion 1a via a conductive resin J made of a conductive epoxy resin or the like, and an insulating substrate. A wiring conductor (not shown) of an external electric circuit is attached to a portion led out to the bottom surface of 1 via a brazing material such as solder.

【0020】なお、メタライズ配線層5はタングステン
・モリブデン・マンガン等の高融点金属粉末に適当な有
機溶剤・溶媒・可塑剤等を添加混合して得た金属ペース
トを従来周知のスクリーン印刷法等の厚膜手法を採用し
て絶縁基体1となるセラミックグリーンシートにあらか
じめ印刷塗布しておき、これをセラミックグリーンシー
トと同時に焼成することによって絶縁基体1の上面から
底面にかけて所定パターンに被着形成される。また、メ
タライズ配線層5はその表面にニッケル・金等の良導電
性で耐蝕性およびロウ材との濡れ性が良好な金属をめっ
き法により1〜20μmの厚みに被着させておくと、メタ
ライズ配線層5の酸化腐蝕を有効に防止することができ
るとともにメタライズ配線層5と圧電素子3との導電性
樹脂Jによる接続およびメタライズ配線層5と外部電極
とのロウ付けを極めて強固となすことができる。
For the metallized wiring layer 5, a metal paste obtained by adding and mixing a suitable organic solvent, a solvent, a plasticizer, etc. to a high melting point metal powder such as tungsten, molybdenum, manganese, etc. by a conventionally known screen printing method or the like. A thick film method is used to print and apply to the ceramic green sheet to be the insulating substrate 1 in advance, and this is baked simultaneously with the ceramic green sheet to form a predetermined pattern from the upper surface to the bottom surface of the insulating substrate 1. . Further, the metallized wiring layer 5 is formed by depositing a metal such as nickel or gold having good conductivity, corrosion resistance and wettability with the brazing material to a thickness of 1 to 20 μm by plating. Oxidation and corrosion of the wiring layer 5 can be effectively prevented, and connection between the metallized wiring layer 5 and the piezoelectric element 3 by the conductive resin J and brazing of the metallized wiring layer 5 and the external electrode can be made extremely strong. it can.

【0021】また、導電性樹脂Jは、例えば導電性エポ
キシ樹脂等から成り、絶縁基体1の搭載部1aに導電性樹
脂Jを介して圧電振動子3を載置させ、しかる後、導電
性樹脂Jに熱硬化処理を施し熱硬化させることによっ
て、圧電振動子3を絶縁基体1に接着固定させる役目を
はたす。
The conductive resin J is made of, for example, a conductive epoxy resin, and the piezoelectric vibrator 3 is placed on the mounting portion 1a of the insulating substrate 1 via the conductive resin J. By heat-curing J to heat-cure it, the piezoelectric vibrator 3 serves to adhere and fix to the insulating substrate 1.

【0022】さらに、絶縁基体1の上面には蓋体2がガ
ラス封止材6を介して接合され、これによって絶縁基体
1と蓋体2とから成る容器4の内部に圧電振動子3が気
密に収容される。
Further, the lid 2 is bonded to the upper surface of the insulating base 1 through the glass sealing material 6, whereby the piezoelectric vibrator 3 is hermetically sealed inside the container 4 composed of the insulating base 1 and the lid 2. Housed in.

【0023】蓋体2は、酸化アルミニウム質焼結体や窒
化アルミニウム質焼結体・窒化珪素質焼結体・炭化珪素
質焼結体・ムライト質焼結体等の電気絶縁材料や鉄−ニ
ッケル−コバルト合金・鉄−ニッケル合金等の金属材料
から成る。蓋体2が、例えば酸化アルミニウム質焼結体
から成る場合、酸化アルミニウムや窒化珪素・酸化マグ
ネシウム・酸化カルシウム等の原料粉末を所定のプレス
金型内に充填するとともに一定圧力で押圧して成形し、
しかる後、この成形品を約1500℃の温度で焼成すること
によって製作される。また、蓋体2は0.3mm以下の厚
さを有する平板形状から成り、蓋体2の外形寸法は絶縁
基体1の外形寸法より0.1〜0.3mm小さい。
The lid 2 is made of an electrically insulating material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a silicon nitride sintered body, a silicon carbide sintered body or a mullite sintered body, or iron-nickel. -Cobalt alloy, iron-nickel alloy and other metal materials. When the lid body 2 is made of, for example, an aluminum oxide sintered body, it is formed by filling raw material powder such as aluminum oxide, silicon nitride, magnesium oxide, calcium oxide, etc. into a predetermined press die and pressing it with a constant pressure. ,
Then, the molded product is manufactured by firing at a temperature of about 1500 ° C. Further, the lid body 2 has a flat plate shape having a thickness of 0.3 mm or less, and the outer dimensions of the lid body 2 are smaller by 0.1 to 0.3 mm than the outer dimensions of the insulating substrate 1.

【0024】絶縁基体1と蓋体2との接合封止は、まず
ガラス封止材6を絶縁基体1および蓋体2の接合領域に
従来周知のスクリーン印刷法等を採用して予め被着させ
ておき、これをガラス封止材6の軟化溶融温度で焼成し
て絶縁基体1および蓋体2の接合領域に溶融被着し、次
に、絶縁基体1の搭載部1aに圧電振動子3を導電性樹脂
Jを介して接着固定し、さらに、絶縁基体1の接合面に
蓋体2をその接合面が重なるように載置し、しかる後、
ガラス封止材6の軟化溶融温度で焼成することによっ
て、蓋体2の自重により行なわれる。
In order to bond and seal the insulating substrate 1 and the lid body 2, first, the glass sealing material 6 is applied in advance to the bonding region of the insulating substrate 1 and the lid body 2 by using a conventionally known screen printing method or the like. The glass encapsulant 6 is fired at the softening melting temperature of the glass encapsulant 6 to be melted and adhered to the bonding region of the insulating base 1 and the lid 2. Next, the piezoelectric vibrator 3 is mounted on the mounting portion 1a of the insulating base 1. The conductive resin J is bonded and fixed, and the lid 2 is placed on the joint surface of the insulating substrate 1 so that the joint surface overlaps.
This is performed by the weight of the lid body 2 by firing at the softening melting temperature of the glass sealing material 6.

【0025】本発明の電子部品収納用容器によれば、絶
縁基体1と蓋体2とをガラス封止材6を介して接合させ
容器4を気密に封止する際、絶縁基体1側のガラス封止
材6と蓋体2側のガラス封止材とが溶融し合ったガラス
封止材6の表面張力が蓋体2を絶縁基体1の中心部に位
置合わせする方向に働き、絶縁基体1と蓋体2とを極め
て高い位置精度で封止することができ、その結果、蓋体
2の外辺が絶縁基体1の全周に渡り絶縁基体1の外辺か
ら0.02〜0.3mm内側にある状態で封止され、気密信頼
性が極めて高い小型・薄型の電子部品収納容器とするこ
とができる。
According to the container for storing electronic parts of the present invention, when the insulating base 1 and the lid 2 are bonded to each other through the glass sealing material 6 to hermetically seal the container 4, the glass on the insulating base 1 side is sealed. The surface tension of the glass encapsulant 6 in which the encapsulant 6 and the glass encapsulant on the side of the lid 2 melt together acts in the direction of aligning the lid 2 with the central portion of the insulating substrate 1, and the insulating substrate 1 The lid 2 and the lid 2 can be sealed with extremely high positional accuracy. As a result, the outer edge of the lid 2 is 0.02 to 0.3 mm inside from the outer edge of the insulating base 1 over the entire circumference of the insulating base 1. It is possible to provide a small and thin electronic component storage container that is sealed in a state and has extremely high airtight reliability.

【0026】なお、蓋体2の外辺が絶縁基体1の全周に
渡り絶縁基体1の外辺から0.02未満あるいは0.3mmを
超えて内側に位置した場合、絶縁基体1と蓋体2との接
合部の幅が狭くなり、容器6の気密封止の信頼性が低下
する傾向がある。従って、蓋体2の外辺が絶縁基体1の
全周に渡り絶縁基体1の外辺から0.02〜0.3mm内側に
ある状態で封止されることが好ましい。
When the outer edge of the lid body 2 is located inside the outer edge of the insulating base body 1 by less than 0.02 or more than 0.3 mm over the entire circumference of the insulating base body 1, the insulating base body 1 and the lid body 2 are separated from each other. The width of the joint portion becomes narrow, and the reliability of hermetically sealing the container 6 tends to decrease. Therefore, it is preferable that the outer periphery of the lid body 2 is sealed 0.02 to 0.3 mm inside from the outer periphery of the insulating base 1 over the entire periphery of the insulating base 1.

【0027】また、蓋体2は0.3mmを超える厚みの場
合、その自重が大きなものとなり、溶融したガラス封止
材6の表面張力により移動することが困難となり、高い
位置精度で封止することが困難となる傾向がある。従っ
て、蓋体2の厚みは0.3mm以下であることが重要であ
る。他方、蓋体2に強度を付与するという観点からは、
その厚みが0.1mm以上であることがこのましい。
If the lid 2 has a thickness of more than 0.3 mm, its own weight becomes large and it becomes difficult to move due to the surface tension of the molten glass sealing material 6, so that the lid 2 should be sealed with high positional accuracy. Tends to be difficult. Therefore, it is important that the thickness of the lid body 2 is 0.3 mm or less. On the other hand, from the viewpoint of imparting strength to the lid body 2,
It is preferable that the thickness is 0.1 mm or more.

【0028】さらに、蓋体2は、その外形寸法が絶縁基
体1の外形寸法より0.1〜0.3mm小さいことが重要であ
る。蓋体2の外形寸法が絶縁基体1の外形寸法よりもそ
の大きさが0.1未満あるいは0.3mmを超えて小さい場
合、蓋体2が溶融したガラス封止材6の表面張力により
位置精度よく移動して、蓋体2の外辺が絶縁基体1の全
周に渡り絶縁基体1の外辺から0.02〜0.3mm内側にあ
る状態で封止することが困難となる傾向がある。従っ
て、蓋体2は、その外形寸法が絶縁基体1の外形寸法よ
り0.1〜0.3mm小さいことが重要である。
Further, it is important that the outer dimensions of the lid 2 are smaller than the outer dimensions of the insulating substrate 1 by 0.1 to 0.3 mm. When the outer dimension of the lid body 2 is smaller than the outer dimension of the insulating substrate 1 by less than 0.1 or more than 0.3 mm, the lid body 2 moves with high position accuracy due to the surface tension of the melted glass sealing material 6. Thus, it tends to be difficult to seal the lid body 2 with the outer edge thereof being 0.02 to 0.3 mm inside from the outer edge of the insulating base 1 over the entire circumference of the insulating base 1. Therefore, it is important that the outer dimensions of the lid 2 are smaller than the outer dimensions of the insulating substrate 1 by 0.1 to 0.3 mm.

【0029】また、絶縁基体1と蓋体2との接合領域に
溶融被着してあるガラス封止材6の厚さは、ともに0.05
〜0.15mmの範囲であることが好ましい。ガラス封止材
の厚さが0.05mm未満では溶融したガラス封止材6に働
く表面張力が小さく、表面張力で絶縁基体1の中心部に
蓋体2を位置合わせすることが困難となる。他方、ガラ
ス封止材の厚さが0.15mmを超えると接合後のガラス封
止材6の厚さが厚くなり過ぎ容器4の薄型化が困難とな
る。従って、絶縁基体1と蓋体2との接合領域に溶融被
着してあるガラス封止材6の厚さは、ともに0.05〜0.15
mmの範囲であることが好ましい。
In addition, the thickness of the glass sealing material 6 melt-deposited on the joint area between the insulating base 1 and the lid 2 is both 0.05.
It is preferably in the range of 0.15 mm. If the thickness of the glass sealing material is less than 0.05 mm, the surface tension acting on the melted glass sealing material 6 is small, and it becomes difficult to position the lid body 2 on the central portion of the insulating substrate 1 by the surface tension. On the other hand, when the thickness of the glass sealing material exceeds 0.15 mm, the thickness of the glass sealing material 6 after joining becomes too thick, and it becomes difficult to make the container 4 thin. Therefore, the thickness of the glass sealing material 6 melt-deposited on the joint region between the insulating base 1 and the lid 2 is 0.05 to 0.15.
It is preferably in the range of mm.

【0030】さらに、蓋体2に溶融被着するガラス封止
材6の幅は、絶縁基体1に溶融被着したガラス封止材6
の接合領域の幅と同等であることが好ましい。このよう
にすることによって、容器4の外周では絶縁基体1側に
ガラスフィレットが形成され、容器4の内周では蓋体2
側にガラスフィレットが形成される。この結果、容器4
の外周と内周の双方にガラスフィレットが形成されるこ
とによって絶縁基体1を蓋体2との封止強度が極めて高
いものとなる。なお、容器4の外周と内周の双方に形成
されたガラスフィレットは、ガラス封止材6の軟化溶融
温度で蓋体2の自重によって接合する際に、絶縁基体1
の中心部に蓋体2を位置合わせする方向に働く表面張力
の観点からも好適である。
Further, the width of the glass sealing material 6 melt-deposited on the lid body 2 is the width of the glass sealing material 6 melt-deposited on the insulating substrate 1.
It is preferable that the width is the same as the width of the joining region. By doing so, a glass fillet is formed on the side of the insulating substrate 1 on the outer circumference of the container 4, and the lid 2 is formed on the inner circumference of the container 4.
A glass fillet is formed on the side. As a result, container 4
By forming the glass fillets on both the outer circumference and the inner circumference, the sealing strength between the insulating base 1 and the lid 2 becomes extremely high. It should be noted that the glass fillets formed on both the outer circumference and the inner circumference of the container 4 are insulated from each other by the insulating base 1 when the lid 2 is bonded by its own weight at the softening melting temperature of the glass sealing material 6.
It is also suitable from the viewpoint of the surface tension acting in the direction in which the lid 2 is aligned with the central portion of the.

【0031】また、本発明の電子部品収納用容器におい
ては、絶縁基体1と蓋体2を接合するガラス封止材6
を、酸化銀14〜40重量%、ヨウ化銀5〜20重量%、五酸
化燐10〜30重量%、酸化硼素5〜15重量%、酸化亜鉛1
〜6重量%および酸化珪素5〜15重量%を含むガラス成
分にフィラーとして燐酸ジルコニウムと酸化ジルコニウ
ムと酸化ニオブとの固溶体を外添加で10〜30重量%添加
したものとしたことから、そのガラス軟化点を350℃以
下と低くすることができ、絶縁基体1と蓋体2とを封止
材6を介して接合させ、絶縁基体1と蓋体2とから成る
容器4内部に圧電振動子3を気密に収容する際、ガラス
封止材6を溶融させる熱が内部に収容する圧電振動子3
に作用しても圧電振動子3の特性に劣化を招来すること
はなく、その結果、圧電振動子3を長期間にわたり正
常、かつ安定に作動させることが可能となる。
Further, in the container for storing electronic parts of the present invention, the glass sealing material 6 for joining the insulating base 1 and the lid 2 together.
Silver oxide 14 to 40% by weight, silver iodide 5 to 20% by weight, phosphorus pentoxide 10 to 30% by weight, boron oxide 5 to 15% by weight, zinc oxide 1
-10% by weight of a solid solution of zirconium phosphate, zirconium oxide and niobium oxide as a filler was added to a glass component containing 6% by weight to 5% by weight of silicon oxide and 5% to 15% by weight of silicon oxide. The point can be lowered to 350 ° C. or lower, the insulating base 1 and the lid 2 are joined together via the sealing material 6, and the piezoelectric vibrator 3 is placed inside the container 4 composed of the insulating base 1 and the lid 2. Piezoelectric vibrator 3 in which heat for melting glass sealing material 6 is housed inside when hermetically housed
Does not deteriorate the characteristics of the piezoelectric vibrator 3, and as a result, the piezoelectric vibrator 3 can be operated normally and stably for a long period of time.

【0032】なお、ガラス封止材6のガラス成分は、酸
化銀の量が14重量%未満であるとガラスの軟化溶融温度
が高くなって、低温での容器4の気密封止が困難となる
傾向があり、他方、40重量%を超えるとガラスの軟化溶
融温度が低下して、圧電振動子3を外部電気回路基板に
実装する際の熱によってガラス封止材6が軟化溶融し
て、容器4の気密封止の信頼性が大きく低下してしまう
傾向がある。従って、酸化銀の量は14〜40重量%の範囲
であることが好ましい。
In the glass component of the glass sealing material 6, if the amount of silver oxide is less than 14% by weight, the softening and melting temperature of the glass becomes high and it becomes difficult to hermetically seal the container 4 at a low temperature. On the other hand, if it exceeds 40% by weight, the softening and melting temperature of the glass lowers, and the glass sealing material 6 softens and melts by the heat when the piezoelectric vibrator 3 is mounted on the external electric circuit board. The reliability of the airtight sealing of No. 4 tends to be greatly reduced. Therefore, the amount of silver oxide is preferably in the range of 14-40% by weight.

【0033】また、ヨウ化銀の量は5重量%未満である
とガラスの軟化溶融温度が高くなって、低温での容器4
の気密封止が困難となる傾向があり、他方、20重量%を
超えるとガラスの耐薬品性が低下し、容器4の気密封止
の信頼性が大きく低下してしまう傾向がある。従って、
ヨウ化銀の量は5〜20重量%の範囲であることが好まし
い。
If the amount of silver iodide is less than 5% by weight, the softening and melting temperature of the glass becomes high and the container 4 at a low temperature is heated.
However, if the amount exceeds 20% by weight, the chemical resistance of the glass tends to deteriorate, and the reliability of the hermetic sealing of the container 4 tends to largely decrease. Therefore,
The amount of silver iodide is preferably in the range of 5 to 20% by weight.

【0034】五酸化燐の量が10重量%未満であるとガラ
スの軟化溶融温度が高くなって、低温での容器4の気密
封止が困難となる傾向があり、他方、30重量%を超える
とガラスの耐薬品性が低下し、容器4の気密封止の信頼
性が大きく低下してしまう傾向がある。従って、五酸化
燐の量は10〜30重量%の範囲であることが好ましい。
If the amount of phosphorus pentoxide is less than 10% by weight, the softening and melting temperature of the glass tends to be high, and it tends to be difficult to hermetically seal the container 4 at low temperatures, while it exceeds 30% by weight. Therefore, the chemical resistance of the glass is lowered, and the reliability of hermetic sealing of the container 4 tends to be greatly lowered. Therefore, the amount of phosphorus pentoxide is preferably in the range of 10 to 30% by weight.

【0035】酸化硼素の量が5重量%未満であるとガラ
スの結晶化が進み低温での容器4の気密封止が困難とな
る傾向にあり、他方、15重量%を超えるとガラスの耐薬
品性が低下し、容器4の気密封止の信頼性が大きく低下
してしまう傾向がある。従って、酸化硼素の量は5〜15
重量%の範囲であることが好ましい。
If the amount of boron oxide is less than 5% by weight, crystallization of the glass is promoted, and it becomes difficult to hermetically seal the container 4 at low temperatures, while if it exceeds 15% by weight, the chemical resistance of the glass becomes high. Property, and the reliability of hermetically sealing the container 4 tends to be greatly reduced. Therefore, the amount of boron oxide is 5 to 15
It is preferably in the range of% by weight.

【0036】酸化亜鉛の量が1重量%未満であるとガラ
スの耐薬品性が低下し、容器4の気密封止の信頼性が大
きく低下してしまう傾向があり、他方、6重量%を超え
るとガラスの結晶化が進み低温での容器4の気密封止が
困難となる傾向にある。従って、酸化亜鉛の量は1〜6
重量%の範囲であることが好ましい。
If the amount of zinc oxide is less than 1% by weight, the chemical resistance of the glass tends to deteriorate, and the reliability of the hermetic sealing of the container 4 tends to decrease significantly, while it exceeds 6% by weight. When the glass is crystallized, it becomes difficult to hermetically seal the container 4 at a low temperature. Therefore, the amount of zinc oxide is 1 to 6
It is preferably in the range of% by weight.

【0037】酸化珪素は、その量が5重量%未満である
とガラスの熱膨張係数が大きくなって絶縁基体1および
蓋体2の熱膨張係数と大きく相違して、容器4の気密封
止の信頼性が低下してしまう傾向があり、15重量%を
超えるとガラスの軟化溶融温度が高くなり、低温での容
器4の気密封止が困難となる傾向がある。従って、酸化
珪素の量は5〜15重量%の範囲であることが好まし
い。
If the amount of silicon oxide is less than 5% by weight, the coefficient of thermal expansion of the glass becomes large and the coefficient of thermal expansion greatly differs from the coefficients of thermal expansion of the insulating substrate 1 and the lid 2. The reliability tends to decrease, and if it exceeds 15% by weight, the softening and melting temperature of the glass becomes high, and it tends to be difficult to hermetically seal the container 4 at a low temperature. Therefore, the amount of silicon oxide is preferably in the range of 5 to 15% by weight.

【0038】また、燐酸ジルコニウムと酸化ジルコニウ
ムと酸化ニオブ固溶体とから成るフィラーは、ガラス封
止材6の熱膨張係数を調整し、絶縁基体1および蓋体2
にガラス封止材6を強固に接合させ、容器4の気密信頼
性を大きく向上させるとともにガラス封止材6の機械的
強度を向上させる作用をなす。このフィラーの含有量が
10重量%未満であるとガラス封止材6の機械的強度が低
下するとともにガラス封止材6の熱膨張係数が絶縁基体
1および蓋体2の熱膨張係数に対して大きく相違して封
止材6を絶縁基体1および蓋体2に強固に接合させるこ
とができなくなる傾向がある。他方、30重量%を超える
とガラス封止材6の流動性が低下して、低温での気密封
止が困難と成る傾向にある。従って、フィラーの含有量
は10〜30重量%の範囲であることが好ましい。
The filler composed of zirconium phosphate, zirconium oxide, and niobium oxide solid solution adjusts the thermal expansion coefficient of the glass sealing material 6, and the insulating base 1 and the lid 2
The glass sealing material 6 is strongly bonded to the glass sealing material 6, and the airtight reliability of the container 4 is greatly improved and the mechanical strength of the glass sealing material 6 is improved. The content of this filler is
If it is less than 10% by weight, the mechanical strength of the glass sealing material 6 is lowered, and the thermal expansion coefficient of the glass sealing material 6 is greatly different from the thermal expansion coefficients of the insulating substrate 1 and the lid body 2 for sealing. There is a tendency that the material 6 cannot be firmly bonded to the insulating base 1 and the lid 2. On the other hand, if it exceeds 30% by weight, the fluidity of the glass sealing material 6 is lowered, and airtight sealing at low temperature tends to be difficult. Therefore, the content of the filler is preferably in the range of 10 to 30% by weight.

【0039】なお、ガラス封止材6はガラス成分とフィ
ラーとから成り、耐湿性に優れていることから大気中に
含まれる水分がガラス封止材6を介して容器4の内部に
侵入しようとしてもその水分の侵入は有効に阻止され、
その結果、容器4の内部に収容する圧電振動子3の表面
電極が酸化腐蝕されることは殆どなく、圧電振動子3を
正常に作動させることも可能となる。
Since the glass sealing material 6 is composed of a glass component and a filler and is excellent in moisture resistance, moisture contained in the atmosphere tries to enter the inside of the container 4 through the glass sealing material 6. The invasion of water is effectively blocked,
As a result, the surface electrode of the piezoelectric vibrator 3 housed inside the container 4 is hardly oxidized and corroded, and the piezoelectric vibrator 3 can be normally operated.

【0040】また、本発明においては、ガラス封止材6
が酸化鉛を含有していないことから、地球環境に負荷を
与えることもない。
Further, in the present invention, the glass sealing material 6
Since it does not contain lead oxide, it does not affect the global environment.

【0041】かくして本発明の電子部品収納用容器によ
れば、絶縁基体1の搭載部1aに圧電振動子3の一端を導
電性エポキシ樹脂等から成る導電性樹脂Jを介して接着
固定するとともに圧電振動子3の各電極をメタライズ配
線層5に電気的に接続させ、しかる後、絶縁基体1の搭
載部1aを覆うように蓋体2をガラス封止材6を介して接
合させ、絶縁基体1と蓋体2とからなる容器4の内部に
圧電振動子3を気密に収容することによって最終製品と
しての圧電振動装置が完成する。
Thus, according to the container for storing electronic parts of the present invention, one end of the piezoelectric vibrator 3 is adhered and fixed to the mounting portion 1a of the insulating substrate 1 through the conductive resin J made of a conductive epoxy resin or the like, and the piezoelectric element is formed. Each electrode of the vibrator 3 is electrically connected to the metallized wiring layer 5, and then the lid body 2 is bonded via the glass sealing material 6 so as to cover the mounting portion 1a of the insulating base body 1. A piezoelectric vibrating device as a final product is completed by hermetically housing the piezoelectric vibrator 3 in a container 4 composed of the lid 2 and the lid 2.

【0042】なお、本発明は上述の実施の形態に限定さ
れるものではなく、本発明の要旨を逸脱しない範囲であ
れば種々の変更は可能である。例えば上述の例では圧電
振動子を収容するための電子部品収納用容器を示した
が、本発明は半導体素子を収容するための半導体素子収
容用容器にも適用し得るものでる。
The present invention is not limited to the above-mentioned embodiments, and various modifications can be made without departing from the gist of the present invention. For example, although the electronic component housing container for housing the piezoelectric vibrator is shown in the above example, the present invention can also be applied to a semiconductor element housing container for housing a semiconductor element.

【0043】[0043]

【発明の効果】本発明の電子部品収納用容器によれば、
上面に電子部品を搭載部するための凹部を有する絶縁基
体と、絶縁基体の上面に接合され、絶縁基体との間の空
間に電子部品を封止材で気密に収容する蓋体とから成る
電子部品収納用容器であって、蓋体が0.3mm以下の厚
さを有する平板形状から成り、蓋体の外形寸法が絶縁基
体の外形寸法より0.1〜0.3mm小さく、かつ蓋体の外辺
が絶縁基体の全周に渡り絶縁基体の外辺から0.02〜0.3
mm内側にあることから、絶縁基体と蓋体とをガラス封
止材を介して接合させ容器を気密に封止する際、絶縁基
体側のガラス封止材と蓋体側のガラス封止材とが溶融し
合ったガラス封止材の表面張力が蓋体を絶縁基体の中心
部に位置合わせする方向に働き、絶縁基体と蓋体とを極
めて高い位置精度で封止することができ、その結果、気
密信頼性が極めて高い小型・薄型の電子部品収納容器と
することができる。
According to the electronic component storage container of the present invention,
An electronic device including an insulating base having a concave portion for mounting an electronic component on the upper surface, and a lid body joined to the upper surface of the insulating base and hermetically housing the electronic component in a space between the insulating base and a sealing material. A container for storing parts, wherein the lid has a flat plate shape with a thickness of 0.3 mm or less, the outer dimensions of the lid are 0.1 to 0.3 mm smaller than the outer dimensions of the insulating base, and the outer periphery of the lid is insulated. 0.02 to 0.3 from the outer edge of the insulating substrate over the entire circumference of the substrate
Since the insulating base and the lid are bonded to each other via the glass sealing material and the container is hermetically sealed, the glass sealing material on the insulating base side and the glass sealing material on the lid side are The surface tension of the fused glass sealing material acts in the direction of aligning the lid with the center of the insulating base, and the insulating base and the lid can be sealed with extremely high positional accuracy, and as a result, It is possible to provide a small and thin electronic component storage container with extremely high airtight reliability.

【0044】また、本発明の電子部品収納用容器によれ
ば、絶縁基体と蓋体とを銀燐酸系ガラスを主成分とする
ガラス封止材で接合したことから、その封止温度を 350
℃以下とすることができ、絶縁基体と蓋体とをガラス封
止材を介して接合させ、絶縁基体と蓋体とから成る容器
内部に電子部品を気密に収容する際、ガラス封止材を溶
融させる熱が内部に収容する電子部品に作用しても電子
部品の特性に劣化を招来することはなく、その結果、電
子部品を長期間にわたり正常、かつ安定に作動させるこ
とが可能となる。
Further, according to the container for storing electronic parts of the present invention, since the insulating substrate and the lid are joined by the glass sealing material containing silver phosphate glass as a main component, the sealing temperature is set to 350.
C. or less, and when the insulating base and the lid are joined via a glass sealant and the electronic component is hermetically housed inside the container made of the insulating base and the lid, the glass sealant is used. Even if the heat for melting acts on the electronic components housed inside, the characteristics of the electronic components are not deteriorated, and as a result, it becomes possible to operate the electronic components normally and stably for a long period of time.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の電子部品収納用容器の実施の形態の一
例を示す断面図である。
FIG. 1 is a cross-sectional view showing an example of an embodiment of a container for storing electronic components of the present invention.

【符号の説明】[Explanation of symbols]

1・・・・・・絶縁基体 1a・・・・・・搭載部 2・・・・・・蓋体 3・・・・・・電子部品(圧電振動子) 4・・・・・・容器 6・・・・・・ガラス封止材 1 ... Insulating substrate 1a ・ ・ ・ ・ ・ ・ Mounting part 2 ... Lid 3 ・ ・ Electronic parts (piezoelectric vibrator) 4 ・ ・ Container 6 ... Glass encapsulant

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 上面に電子部品を搭載部するための凹部
を有する絶縁基体と、該絶縁基体の上面にガラス封止材
を介して接合され、前記絶縁基体との間の空間に電子部
品を気密に収容する蓋体とから成る電子部品収納用容器
であって、前記蓋体は0.3mm以下の厚さを有する平
板形状から成り、前記蓋体の外形寸法は前記絶縁基体の
外形寸法より0.1〜0.3mm小さく、かつ前記蓋体
の外辺は前記絶縁基体の全周に渡り前記絶縁基体の外辺
から0.02〜0.30mm内側にあることを特徴とす
る電子部品収納用容器。
1. An insulating base having a recess for mounting an electronic component on an upper surface thereof, and an insulating base bonded to the upper surface of the insulating base via a glass sealing material, and an electronic component being provided in a space between the insulating base and the insulating base. An electronic component storage container comprising a lid body that is hermetically sealed, wherein the lid body has a flat plate shape having a thickness of 0.3 mm or less, and an outer dimension of the lid body is larger than an outer dimension of the insulating base body. Electronic component storage characterized in that it is smaller by 0.1 to 0.3 mm and the outer side of the lid is 0.02 to 0.30 mm inside from the outer side of the insulating base over the entire circumference of the insulating base. Container.
【請求項2】 前記ガラス封止材は酸化銀14〜40重
量%、ヨウ化銀5〜20重量%、五酸化燐10〜30重
量%、酸化硼素5〜15重量%、酸化亜鉛1〜6重量%
および酸化珪素5〜15重量%を含むガラス成分にフィ
ラーとして燐酸ジルコニウムと酸化ジルコニウムと酸化
ニオブとの固溶体を外添加で10〜30重量%添加した
ものから成ることを特徴とする請求項1記載の電子部品
収納用容器。
2. The glass sealing material comprises 14 to 40% by weight of silver oxide, 5 to 20% by weight of silver iodide, 10 to 30% by weight of phosphorus pentoxide, 5 to 15% by weight of boron oxide, and 1 to 6 of zinc oxide. weight%
2. A glass component containing 5 to 15% by weight of silicon oxide and 10 to 30% by weight of a solid solution of zirconium phosphate, zirconium oxide and niobium oxide as a filler added externally. A container for storing electronic components.
JP2001194272A 2001-06-27 2001-06-27 Vessel for housing electronic component Pending JP2003007879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001194272A JP2003007879A (en) 2001-06-27 2001-06-27 Vessel for housing electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001194272A JP2003007879A (en) 2001-06-27 2001-06-27 Vessel for housing electronic component

Publications (1)

Publication Number Publication Date
JP2003007879A true JP2003007879A (en) 2003-01-10

Family

ID=19032438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001194272A Pending JP2003007879A (en) 2001-06-27 2001-06-27 Vessel for housing electronic component

Country Status (1)

Country Link
JP (1) JP2003007879A (en)

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