JP2002539472A5 - - Google Patents
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- JP2002539472A5 JP2002539472A5 JP2000604256A JP2000604256A JP2002539472A5 JP 2002539472 A5 JP2002539472 A5 JP 2002539472A5 JP 2000604256 A JP2000604256 A JP 2000604256A JP 2000604256 A JP2000604256 A JP 2000604256A JP 2002539472 A5 JP2002539472 A5 JP 2002539472A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12351499P | 1999-03-08 | 1999-03-08 | |
| US60/123,514 | 1999-03-08 | ||
| US09/491,427 | 2000-01-26 | ||
| US09/491,427 US6392775B1 (en) | 1998-01-13 | 2000-01-26 | Optical reflector for micro-machined mirrors |
| PCT/US2000/005995 WO2000054090A1 (en) | 1999-03-08 | 2000-03-08 | Improved optical reflector for micro-machined mirrors |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002539472A JP2002539472A (ja) | 2002-11-19 |
| JP2002539472A5 true JP2002539472A5 (enExample) | 2007-05-24 |
| JP4640743B2 JP4640743B2 (ja) | 2011-03-02 |
Family
ID=26821640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000604256A Expired - Fee Related JP4640743B2 (ja) | 1999-03-08 | 2000-03-08 | 微細加工ミラーの改良型光レフレクタ |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6392775B1 (enExample) |
| JP (1) | JP4640743B2 (enExample) |
| KR (1) | KR100673675B1 (enExample) |
| CN (1) | CN1160586C (enExample) |
| AU (1) | AU3730100A (enExample) |
| DE (1) | DE10084337T1 (enExample) |
| GB (1) | GB2368070B (enExample) |
| WO (1) | WO2000054090A1 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6937398B2 (en) | 2001-04-26 | 2005-08-30 | Intel Corporation | Highly reflective optical components |
| JP4582380B2 (ja) * | 2001-05-11 | 2010-11-17 | ソニー株式会社 | 光変調素子とそれを用いた光学装置、および光変調素子の製造方法 |
| JP4575628B2 (ja) * | 2001-08-23 | 2010-11-04 | 株式会社リコー | 光偏向器及びその製造方法、光走査モジュール、光走査装置、画像形成装置、画像表示装置 |
| US7593029B2 (en) | 2001-08-20 | 2009-09-22 | Ricoh Company, Ltd. | Optical scanning device and image forming apparatus using the same |
| US7145143B2 (en) * | 2002-03-18 | 2006-12-05 | Honeywell International Inc. | Tunable sensor |
| CN100394214C (zh) * | 2002-11-21 | 2008-06-11 | 台达电子工业股份有限公司 | 膜应力平衡镀膜方法以及应用该方法制造的光学组件 |
| CN100410891C (zh) * | 2002-12-09 | 2008-08-13 | 联想(北京)有限公司 | 计算机应用软件自纠错自重起方法 |
| JP4251054B2 (ja) | 2003-10-01 | 2009-04-08 | 株式会社デンソー | 半導体装置の製造方法 |
| KR100542559B1 (ko) * | 2003-10-29 | 2006-01-11 | 삼성전자주식회사 | 반사기 및 이를 구비하는 화상형성장치의 광주사장치 |
| WO2005112014A1 (ja) * | 2004-05-14 | 2005-11-24 | Fujitsu Limited | 光照射ヘッド、情報記憶装置、光照射ヘッド設計装置、および光照射ヘッド設計プログラム |
| JP4860268B2 (ja) * | 2006-01-13 | 2012-01-25 | 富士フイルム株式会社 | プリズムの製造方法、プリズム、光ピックアップ及び液晶プロジェクタ |
| US20100246036A1 (en) * | 2007-07-27 | 2010-09-30 | Lagana Paolo | Preliminary Controlled Pre-Deformation Treatment for the Production of Mirrors |
| JP5655365B2 (ja) * | 2009-08-04 | 2015-01-21 | セイコーエプソン株式会社 | 光偏向器、光偏向器の製造方法および画像表示装置 |
| JP2012042584A (ja) * | 2010-08-17 | 2012-03-01 | Seiko Epson Corp | 光フィルター、光フィルターモジュール、分光測定器および光機器 |
| CN103620481A (zh) * | 2011-06-03 | 2014-03-05 | Hoya株式会社 | 塑料透镜 |
| CN103777266A (zh) * | 2014-01-24 | 2014-05-07 | 大连波能激光光学有限公司 | 一种反射相位延迟镜及其制备方法 |
| JP2016081054A (ja) * | 2014-10-13 | 2016-05-16 | 台達電子工業股▲ふん▼有限公司Ｄｅｌｔａ Ｅｌｅｃｔｒｏｎｉｃｓ，Ｉｎｃ． | 光波長変換デバイス及びこれを用いた照明システム |
| JP7068660B2 (ja) * | 2016-09-12 | 2022-05-17 | ソニーグループ株式会社 | 光学補償素子、液晶ライトバルブ組立体及び液晶プロジェクタ装置 |
| CN108149197B (zh) * | 2017-12-22 | 2020-06-09 | 武汉大学 | 一种激光发生器反射板制作方法 |
| DE102018211325A1 (de) * | 2018-07-10 | 2020-01-16 | Robert Bosch Gmbh | Fabry-Perot-Interferometer-Einheit und Verfahren zur Herstellung einer Fabry-Perot-Interferometer-Einheit |
| JP7563261B2 (ja) * | 2021-03-19 | 2024-10-08 | 株式会社リコー | 光偏向素子、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置および移動体 |
| WO2025197615A1 (ja) * | 2024-03-18 | 2025-09-25 | パナソニックＩｐマネジメント株式会社 | 光学反射素子 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4309075A (en) | 1979-10-05 | 1982-01-05 | Optical Coating Laboratory, Inc. | Multilayer mirror with maximum reflectance |
| US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
| US4963012A (en) * | 1984-07-20 | 1990-10-16 | The United States Of America As Represented By The United States Department Of Energy | Passivation coating for flexible substrate mirrors |
| US4547432A (en) * | 1984-07-31 | 1985-10-15 | The United States Of America As Represented By The United States Department Of Energy | Method of bonding silver to glass and mirrors produced according to this method |
| US5835255A (en) * | 1986-04-23 | 1998-11-10 | Etalon, Inc. | Visible spectrum modulator arrays |
| JP2620712B2 (ja) * | 1988-11-08 | 1997-06-18 | 株式会社 トプコン | ２波長反射防止多層膜 |
| JPH02287301A (ja) * | 1989-04-27 | 1990-11-27 | Copal Co Ltd | 入射角非依存性高反射率誘電体多層膜反射鏡 |
| JPH02297501A (ja) * | 1989-05-12 | 1990-12-10 | Copal Co Ltd | 反射鏡 |
| US5216551A (en) * | 1990-02-16 | 1993-06-01 | Asahi Kogaku Kogyo K.K. | Surface reflector |
| JP3120882B2 (ja) * | 1991-10-31 | 2000-12-25 | 旭光学工業株式会社 | 表面高反射鏡 |
| GB2261079B (en) * | 1991-10-31 | 1995-06-14 | Asahi Optical Co Ltd | Surface reflecting mirror |
| US5311360A (en) | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
| US6219015B1 (en) * | 1992-04-28 | 2001-04-17 | The Board Of Directors Of The Leland Stanford, Junior University | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
| FR2712990B1 (fr) | 1993-11-22 | 1996-04-05 | Commissariat Energie Atomique | Miroir à large bande et à haute réflectivité et procédé de réalisation d'un tel miroir. |
| US5500761A (en) * | 1994-01-27 | 1996-03-19 | At&T Corp. | Micromechanical modulator |
| US5936159A (en) | 1994-03-09 | 1999-08-10 | Nippondenso Co., Ltd. | Semiconductor sensor having multi-layer movable beam structure film |
| US5619059A (en) * | 1994-09-28 | 1997-04-08 | National Research Council Of Canada | Color deformable mirror device having optical thin film interference color coatings |
| JP3691544B2 (ja) | 1995-04-28 | 2005-09-07 | アジレント・テクノロジーズ・インク | 面発光レーザの製造方法 |
| US5841579A (en) * | 1995-06-07 | 1998-11-24 | Silicon Light Machines | Flat diffraction grating light valve |
| US5922212A (en) | 1995-06-08 | 1999-07-13 | Nippondenso Co., Ltd | Semiconductor sensor having suspended thin-film structure and method for fabricating thin-film structure body |
| US6142642A (en) * | 1995-06-29 | 2000-11-07 | Cardinal Ig Company | Bendable mirrors and method of manufacture |
| FR2737019B1 (fr) | 1995-07-19 | 1997-08-22 | Commissariat Energie Atomique | Microelements de balayage pour systeme optique |
| US5739945A (en) | 1995-09-29 | 1998-04-14 | Tayebati; Parviz | Electrically tunable optical filter utilizing a deformable multi-layer mirror |
| US5825528A (en) | 1995-12-26 | 1998-10-20 | Lucent Technologies Inc. | Phase-mismatched fabry-perot cavity micromechanical modulator |
| US5636051A (en) * | 1996-01-03 | 1997-06-03 | Daewoo Electronics Co., Ltd | Thin film actuated mirror array having dielectric layers |
| US5850309A (en) * | 1996-03-27 | 1998-12-15 | Nikon Corporation | Mirror for high-intensity ultraviolet light beam |
| US5872880A (en) * | 1996-08-12 | 1999-02-16 | Ronald S. Maynard | Hybrid-optical multi-axis beam steering apparatus |
| GB2324882B (en) * | 1997-04-29 | 2001-05-23 | Daewoo Electronics Co Ltd | Array of thin film actuated mirrors and method for the manufacture thereof |
| KR19990004774A (ko) * | 1997-06-30 | 1999-01-25 | 배순훈 | 박막형 광로 조절 장치의 제조 방법 |
| US6075639A (en) * | 1997-10-22 | 2000-06-13 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined scanning torsion mirror and method |
| US5998906A (en) * | 1998-01-13 | 1999-12-07 | Seagate Technology, Inc. | Electrostatic microactuator and method for use thereof |
| US6011646A (en) * | 1998-02-20 | 2000-01-04 | The Regents Of The Unviersity Of California | Method to adjust multilayer film stress induced deformation of optics |
-
2000
- 2000-01-26 US US09/491,427 patent/US6392775B1/en not_active Expired - Lifetime
- 2000-03-08 WO PCT/US2000/005995 patent/WO2000054090A1/en not_active Ceased
- 2000-03-08 DE DE10084337T patent/DE10084337T1/de not_active Withdrawn
- 2000-03-08 KR KR1020017011434A patent/KR100673675B1/ko not_active Expired - Fee Related
- 2000-03-08 GB GB0123889A patent/GB2368070B/en not_active Expired - Fee Related
- 2000-03-08 JP JP2000604256A patent/JP4640743B2/ja not_active Expired - Fee Related
- 2000-03-08 CN CNB008069212A patent/CN1160586C/zh not_active Expired - Fee Related
- 2000-03-08 AU AU37301/00A patent/AU3730100A/en not_active Abandoned