JP2002531933A5 - - Google Patents

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Publication number
JP2002531933A5
JP2002531933A5 JP2000585032A JP2000585032A JP2002531933A5 JP 2002531933 A5 JP2002531933 A5 JP 2002531933A5 JP 2000585032 A JP2000585032 A JP 2000585032A JP 2000585032 A JP2000585032 A JP 2000585032A JP 2002531933 A5 JP2002531933 A5 JP 2002531933A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000585032A
Other versions
JP2002531933A (ja
Filing date
Publication date
Priority claimed from US09/201,928 external-priority patent/US6103628A/en
Application filed filed Critical
Publication of JP2002531933A publication Critical patent/JP2002531933A/ja
Publication of JP2002531933A5 publication Critical patent/JP2002531933A5/ja
Withdrawn legal-status Critical Current

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JP2000585032A 1998-12-01 1999-11-19 装填可能なハウジングを備えた反転可能な線形ポリッシャー Withdrawn JP2002531933A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/201,928 1998-12-01
US09/201,928 US6103628A (en) 1998-12-01 1998-12-01 Reverse linear polisher with loadable housing
PCT/US1999/027477 WO2000032356A1 (en) 1998-12-01 1999-11-19 Reverse linear polisher with loadable housing

Publications (2)

Publication Number Publication Date
JP2002531933A JP2002531933A (ja) 2002-09-24
JP2002531933A5 true JP2002531933A5 (ja) 2007-01-18

Family

ID=22747860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000585032A Withdrawn JP2002531933A (ja) 1998-12-01 1999-11-19 装填可能なハウジングを備えた反転可能な線形ポリッシャー

Country Status (10)

Country Link
US (2) US6103628A (ja)
EP (1) EP1135236B1 (ja)
JP (1) JP2002531933A (ja)
KR (1) KR100638798B1 (ja)
CN (1) CN1131765C (ja)
AT (1) ATE280014T1 (ja)
AU (1) AU1629900A (ja)
DE (1) DE69921354T2 (ja)
TW (1) TW425332B (ja)
WO (1) WO2000032356A1 (ja)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7449098B1 (en) 1999-10-05 2008-11-11 Novellus Systems, Inc. Method for planar electroplating
US7531079B1 (en) 1998-10-26 2009-05-12 Novellus Systems, Inc. Method and apparatus for uniform electropolishing of damascene IC structures by selective agitation
US6464571B2 (en) * 1998-12-01 2002-10-15 Nutool, Inc. Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
US7425250B2 (en) * 1998-12-01 2008-09-16 Novellus Systems, Inc. Electrochemical mechanical processing apparatus
US6468139B1 (en) * 1998-12-01 2002-10-22 Nutool, Inc. Polishing apparatus and method with a refreshing polishing belt and loadable housing
US6589105B2 (en) 1998-12-01 2003-07-08 Nutool, Inc. Pad tensioning method and system in a bi-directional linear polisher
US6244935B1 (en) * 1999-02-04 2001-06-12 Applied Materials, Inc. Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet
US6475070B1 (en) * 1999-02-04 2002-11-05 Applied Materials, Inc. Chemical mechanical polishing with a moving polishing sheet
US6491570B1 (en) * 1999-02-25 2002-12-10 Applied Materials, Inc. Polishing media stabilizer
US6626744B1 (en) 1999-12-17 2003-09-30 Applied Materials, Inc. Planarization system with multiple polishing pads
US7048607B1 (en) 2000-05-31 2006-05-23 Applied Materials System and method for chemical mechanical planarization
US6520833B1 (en) * 2000-06-30 2003-02-18 Lam Research Corporation Oscillating fixed abrasive CMP system and methods for implementing the same
US6561884B1 (en) * 2000-08-29 2003-05-13 Applied Materials, Inc. Web lift system for chemical mechanical planarization
US7153410B2 (en) 2000-08-30 2006-12-26 Micron Technology, Inc. Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces
US7078308B2 (en) * 2002-08-29 2006-07-18 Micron Technology, Inc. Method and apparatus for removing adjacent conductive and nonconductive materials of a microelectronic substrate
US7153195B2 (en) 2000-08-30 2006-12-26 Micron Technology, Inc. Methods and apparatus for selectively removing conductive material from a microelectronic substrate
US7160176B2 (en) * 2000-08-30 2007-01-09 Micron Technology, Inc. Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate
US7220166B2 (en) * 2000-08-30 2007-05-22 Micron Technology, Inc. Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate
US7129160B2 (en) * 2002-08-29 2006-10-31 Micron Technology, Inc. Method for simultaneously removing multiple conductive materials from microelectronic substrates
US7074113B1 (en) 2000-08-30 2006-07-11 Micron Technology, Inc. Methods and apparatus for removing conductive material from a microelectronic substrate
US7134934B2 (en) * 2000-08-30 2006-11-14 Micron Technology, Inc. Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium
US7112121B2 (en) 2000-08-30 2006-09-26 Micron Technology, Inc. Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate
US7192335B2 (en) * 2002-08-29 2007-03-20 Micron Technology, Inc. Method and apparatus for chemically, mechanically, and/or electrolytically removing material from microelectronic substrates
US7094131B2 (en) 2000-08-30 2006-08-22 Micron Technology, Inc. Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material
US6867448B1 (en) 2000-08-31 2005-03-15 Micron Technology, Inc. Electro-mechanically polished structure
US6592439B1 (en) 2000-11-10 2003-07-15 Applied Materials, Inc. Platen for retaining polishing material
US6776695B2 (en) * 2000-12-21 2004-08-17 Lam Research Corporation Platen design for improving edge performance in CMP applications
US6607425B1 (en) 2000-12-21 2003-08-19 Lam Research Corporation Pressurized membrane platen design for improving performance in CMP applications
JP2004528998A (ja) * 2001-06-12 2004-09-24 ナトゥール・インコーポレイテッド 被加工物を二方向に研磨するための改良された方法及び装置
US6503131B1 (en) * 2001-08-16 2003-01-07 Applied Materials, Inc. Integrated platen assembly for a chemical mechanical planarization system
US7121919B2 (en) * 2001-08-30 2006-10-17 Micron Technology, Inc. Chemical mechanical polishing system and process
US6838149B2 (en) * 2001-12-13 2005-01-04 3M Innovative Properties Company Abrasive article for the deposition and polishing of a conductive material
US6776693B2 (en) 2001-12-19 2004-08-17 Applied Materials Inc. Method and apparatus for face-up substrate polishing
US6722946B2 (en) * 2002-01-17 2004-04-20 Nutool, Inc. Advanced chemical mechanical polishing system with smart endpoint detection
US20030146102A1 (en) * 2002-02-05 2003-08-07 Applied Materials, Inc. Method for forming copper interconnects
CN1653600A (zh) * 2002-03-13 2005-08-10 Asm努突尔股份有限公司 铜和阻障层之整合化学机械抛光的方法和设备
US6939203B2 (en) 2002-04-18 2005-09-06 Asm Nutool, Inc. Fluid bearing slide assembly for workpiece polishing
US7799200B1 (en) 2002-07-29 2010-09-21 Novellus Systems, Inc. Selective electrochemical accelerator removal
US7138039B2 (en) * 2003-01-21 2006-11-21 Applied Materials, Inc. Liquid isolation of contact rings
US7087144B2 (en) * 2003-01-31 2006-08-08 Applied Materials, Inc. Contact ring with embedded flexible contacts
US7025861B2 (en) 2003-02-06 2006-04-11 Applied Materials Contact plating apparatus
US7018273B1 (en) 2003-06-27 2006-03-28 Lam Research Corporation Platen with diaphragm and method for optimizing wafer polishing
US20050016861A1 (en) * 2003-07-24 2005-01-27 Thomas Laursen Method for planarizing a work piece
US7112122B2 (en) * 2003-09-17 2006-09-26 Micron Technology, Inc. Methods and apparatus for removing conductive material from a microelectronic substrate
US8158532B2 (en) 2003-10-20 2012-04-17 Novellus Systems, Inc. Topography reduction and control by selective accelerator removal
US8530359B2 (en) 2003-10-20 2013-09-10 Novellus Systems, Inc. Modulated metal removal using localized wet etching
US7153777B2 (en) 2004-02-20 2006-12-26 Micron Technology, Inc. Methods and apparatuses for electrochemical-mechanical polishing
US7648622B2 (en) 2004-02-27 2010-01-19 Novellus Systems, Inc. System and method for electrochemical mechanical polishing
US7195544B2 (en) * 2004-03-23 2007-03-27 Cabot Microelectronics Corporation CMP porous pad with component-filled pores
US6955588B1 (en) 2004-03-31 2005-10-18 Lam Research Corporation Method of and platen for controlling removal rate characteristics in chemical mechanical planarization
US20050218000A1 (en) * 2004-04-06 2005-10-06 Applied Materials, Inc. Conditioning of contact leads for metal plating systems
US7285195B2 (en) * 2004-06-24 2007-10-23 Applied Materials, Inc. Electric field reducing thrust plate
US7566391B2 (en) 2004-09-01 2009-07-28 Micron Technology, Inc. Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media
US20070014958A1 (en) * 2005-07-08 2007-01-18 Chaplin Ernest R Hanger labels, label assemblies and methods for forming the same
US8168540B1 (en) 2009-12-29 2012-05-01 Novellus Systems, Inc. Methods and apparatus for depositing copper on tungsten
JP2017148931A (ja) * 2016-02-19 2017-08-31 株式会社荏原製作所 研磨装置および研磨方法
KR102339948B1 (ko) * 2019-07-02 2021-12-17 (주)미래컴퍼니 연마 시스템 및 연마 방법
CN111955945A (zh) * 2020-08-27 2020-11-20 代永金 一种中医药柜的驱动装置
CN116833900B (zh) * 2023-07-31 2024-01-26 广东工业大学 一种用于半导体晶片化学机械抛光的磁流变弹性抛光垫、制备方法及其应用
CN117340689A (zh) * 2023-11-03 2024-01-05 湖南普照信息材料有限公司 一种玻璃基板的抛光方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3113204A1 (de) * 1981-04-02 1982-10-28 Percy 3008 Garbsen Lambelet "vorrichtung zum schleifen, schmirgeln oder polieren von werkstuecken"
DE3643914A1 (de) * 1986-12-22 1988-06-30 Zeiss Carl Fa Verfahren und vorrichtung zum laeppen bzw. polieren optischer flaechen
JPH05177523A (ja) * 1991-06-06 1993-07-20 Commiss Energ Atom 張設された微小研磨剤小板、および改良されたウエハー支持ヘッドを備えた研磨装置
US5245796A (en) * 1992-04-02 1993-09-21 At&T Bell Laboratories Slurry polisher using ultrasonic agitation
JP2894153B2 (ja) * 1993-05-27 1999-05-24 信越半導体株式会社 シリコンウエーハの製造方法、およびその装置
US5650039A (en) * 1994-03-02 1997-07-22 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved slurry distribution
ATE186001T1 (de) * 1994-08-09 1999-11-15 Ontrak Systems Inc Linear poliergerät und wafer planarisierungsverfahren
US5593344A (en) * 1994-10-11 1997-01-14 Ontrak Systems, Inc. Wafer polishing machine with fluid bearings and drive systems
US5908530A (en) 1995-05-18 1999-06-01 Obsidian, Inc. Apparatus for chemical mechanical polishing
US5762751A (en) * 1995-08-17 1998-06-09 Semitool, Inc. Semiconductor processor with wafer face protection
US5951373A (en) * 1995-10-27 1999-09-14 Applied Materials, Inc. Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning
US5961372A (en) 1995-12-05 1999-10-05 Applied Materials, Inc. Substrate belt polisher
JP2830907B2 (ja) 1995-12-06 1998-12-02 日本電気株式会社 半導体基板研磨装置
US5770521A (en) * 1996-05-30 1998-06-23 Cypress Semiconductor Corporation Anti-shear method and system for semiconductor wafer removal
JPH09321001A (ja) * 1996-05-31 1997-12-12 Komatsu Electron Metals Co Ltd 半導体ウェハの研磨方法
US5899801A (en) * 1996-10-31 1999-05-04 Applied Materials, Inc. Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system
US5807165A (en) * 1997-03-26 1998-09-15 International Business Machines Corporation Method of electrochemical mechanical planarization
US6110025A (en) 1997-05-07 2000-08-29 Obsidian, Inc. Containment ring for substrate carrier apparatus
US5899798A (en) 1997-07-25 1999-05-04 Obsidian Inc. Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing
US6113479A (en) 1997-07-25 2000-09-05 Obsidian, Inc. Wafer carrier for chemical mechanical planarization polishing
US6196896B1 (en) 1997-10-31 2001-03-06 Obsidian, Inc. Chemical mechanical polisher

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