JP2002531816A - レーザー干渉計による測定を改善するための方法 - Google Patents

レーザー干渉計による測定を改善するための方法

Info

Publication number
JP2002531816A
JP2002531816A JP2000585616A JP2000585616A JP2002531816A JP 2002531816 A JP2002531816 A JP 2002531816A JP 2000585616 A JP2000585616 A JP 2000585616A JP 2000585616 A JP2000585616 A JP 2000585616A JP 2002531816 A JP2002531816 A JP 2002531816A
Authority
JP
Japan
Prior art keywords
laser interferometer
laser beam
air
laser
sound wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000585616A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002531816A5 (enExample
Inventor
レオニド・ミハルヨフ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JP2002531816A publication Critical patent/JP2002531816A/ja
Publication of JP2002531816A5 publication Critical patent/JP2002531816A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Lasers (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2000585616A 1998-12-02 1999-11-26 レーザー干渉計による測定を改善するための方法 Pending JP2002531816A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI982603 1998-12-02
FI982603A FI982603L (fi) 1998-12-02 1998-12-02 Laser-mittauksen epätarkkuutta pienentävä mittausmenetelmä
PCT/FI1999/000978 WO2000033021A1 (en) 1998-12-02 1999-11-26 Method for improving measurements by laser interferometer

Publications (2)

Publication Number Publication Date
JP2002531816A true JP2002531816A (ja) 2002-09-24
JP2002531816A5 JP2002531816A5 (enExample) 2005-12-22

Family

ID=8553022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000585616A Pending JP2002531816A (ja) 1998-12-02 1999-11-26 レーザー干渉計による測定を改善するための方法

Country Status (19)

Country Link
US (1) US6501550B1 (enExample)
EP (1) EP1149268B1 (enExample)
JP (1) JP2002531816A (enExample)
KR (1) KR100729491B1 (enExample)
CN (1) CN1170117C (enExample)
AT (1) ATE323879T1 (enExample)
AU (1) AU768410B2 (enExample)
BR (1) BR9916875A (enExample)
CA (1) CA2350736C (enExample)
CZ (1) CZ299040B6 (enExample)
DE (1) DE69930966T2 (enExample)
DK (1) DK1149268T3 (enExample)
ES (1) ES2263292T3 (enExample)
FI (1) FI982603L (enExample)
IL (2) IL143453A0 (enExample)
MX (1) MXPA01005609A (enExample)
PT (1) PT1149268E (enExample)
RU (1) RU2243500C2 (enExample)
WO (1) WO2000033021A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203231A (ja) * 2010-03-03 2011-10-13 Canon Inc 光波干渉計測装置
JP2014500492A (ja) * 2010-11-16 2014-01-09 クゥアルコム・インコーポレイテッド 超音波反射信号に基づく物体位置推定のためのシステム及び方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI110209B (fi) * 1999-06-23 2002-12-13 Leonid Mihaljov Menetelmä laserinterferometrillä tehtävien mittauksien tarkkuuden parantamiseksi
DE10329043B4 (de) * 2003-06-27 2007-07-26 Leuze Electronic Gmbh & Co Kg Verfahren zur Bestimmung von Distanzen
GB0523455D0 (en) 2005-11-18 2005-12-28 Renishaw Plc Dynamic air turbulence compensation
ES2335427T3 (es) * 2006-07-04 2010-03-26 Pepperl + Fuchs Gmbh Procedimiento y dispositivo para la medicion optoelectronica de distancia sin contacto conforme al principio de tiempo de transito.
DE102007055665A1 (de) * 2007-11-21 2009-05-28 Dr. Johannes Heidenhain Gmbh Interferometeranordnung und Verfahren zu deren Betrieb
US10203268B2 (en) 2008-12-04 2019-02-12 Laura P. Solliday Methods for measuring and modeling the process of prestressing concrete during tensioning/detensioning based on electronic distance measurements
US9354043B2 (en) 2008-12-04 2016-05-31 Laura P. Solliday Methods for measuring and modeling the structural health of pressure vessels based on electronic distance measurements
US8209134B2 (en) * 2008-12-04 2012-06-26 Laura P. Solliday Methods for modeling the structural health of a civil structure based on electronic distance measurements

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3854325A (en) * 1973-07-13 1974-12-17 Us Air Force Method and means for determining fatigue damage and surface stress
US4372150A (en) * 1980-06-05 1983-02-08 Beckman Instruments, Inc. Flow monitoring method and apparatus
US4600307A (en) * 1983-07-29 1986-07-15 The Perkin-Elmer Corporation Coherent radiation detecting apparatus
GB2170907B (en) * 1985-02-06 1988-08-24 Sonic Tape Plc Improvements relating to distance measuring devices
JPS6222091A (ja) * 1985-07-22 1987-01-30 Nippon Kooteingu Kk 距離測定方法
US4998295A (en) * 1988-12-30 1991-03-05 General Electric Company Receiver having an interferometer
GB8920448D0 (en) * 1989-09-09 1989-10-25 Renishaw Plc Apparatus for adjusting the alignment of a light beam
US5182863A (en) * 1990-10-22 1993-02-02 Spectra-Physics Laserplane, Inc. Automatic plumb and level tool with acoustic measuring capability
US5604592A (en) * 1994-09-19 1997-02-18 Textron Defense Systems, Division Of Avco Corporation Laser ultrasonics-based material analysis system and method using matched filter processing
US5624188A (en) * 1994-10-20 1997-04-29 West; David A. Acoustic thermometer
GB2313193B (en) * 1996-05-14 2000-06-14 Guide Dogs For The Blind Ass T Method and apparatus for distance measurement

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203231A (ja) * 2010-03-03 2011-10-13 Canon Inc 光波干渉計測装置
JP2014500492A (ja) * 2010-11-16 2014-01-09 クゥアルコム・インコーポレイテッド 超音波反射信号に基づく物体位置推定のためのシステム及び方法
US9810784B2 (en) 2010-11-16 2017-11-07 Qualcomm Incorporated System and method for object position estimation based on ultrasonic reflected signals

Also Published As

Publication number Publication date
RU2243500C2 (ru) 2004-12-27
DK1149268T3 (da) 2006-08-14
EP1149268B1 (en) 2006-04-19
AU1563100A (en) 2000-06-19
CA2350736A1 (en) 2000-06-08
IL143453A (en) 2007-06-17
FI982603A7 (fi) 2000-06-03
KR100729491B1 (ko) 2007-06-15
FI982603A0 (fi) 1998-12-02
CN1329711A (zh) 2002-01-02
ATE323879T1 (de) 2006-05-15
KR20010099817A (ko) 2001-11-09
CZ299040B6 (cs) 2008-04-09
FI982603L (fi) 2000-06-03
DE69930966D1 (de) 2006-05-24
CZ20011929A3 (cs) 2001-10-17
US6501550B1 (en) 2002-12-31
AU768410B2 (en) 2003-12-11
WO2000033021A8 (en) 2001-01-11
ES2263292T3 (es) 2006-12-01
MXPA01005609A (es) 2003-07-14
CA2350736C (en) 2007-05-15
WO2000033021A1 (en) 2000-06-08
CN1170117C (zh) 2004-10-06
DE69930966T2 (de) 2006-12-28
BR9916875A (pt) 2001-11-13
PT1149268E (pt) 2006-07-31
IL143453A0 (en) 2002-04-21
EP1149268A1 (en) 2001-10-31

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