DE69930966T2 - Verfahren zur verbesserung von messungen mittels laserinterferometer - Google Patents

Verfahren zur verbesserung von messungen mittels laserinterferometer Download PDF

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Publication number
DE69930966T2
DE69930966T2 DE69930966T DE69930966T DE69930966T2 DE 69930966 T2 DE69930966 T2 DE 69930966T2 DE 69930966 T DE69930966 T DE 69930966T DE 69930966 T DE69930966 T DE 69930966T DE 69930966 T2 DE69930966 T2 DE 69930966T2
Authority
DE
Germany
Prior art keywords
laser interferometer
sound
laser
air
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69930966T
Other languages
German (de)
English (en)
Other versions
DE69930966D1 (de
Inventor
Leonid Mihaljov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69930966D1 publication Critical patent/DE69930966D1/de
Application granted granted Critical
Publication of DE69930966T2 publication Critical patent/DE69930966T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Lasers (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
DE69930966T 1998-12-02 1999-11-26 Verfahren zur verbesserung von messungen mittels laserinterferometer Expired - Lifetime DE69930966T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI982603 1998-12-02
FI982603A FI982603L (fi) 1998-12-02 1998-12-02 Laser-mittauksen epätarkkuutta pienentävä mittausmenetelmä
PCT/FI1999/000978 WO2000033021A1 (en) 1998-12-02 1999-11-26 Method for improving measurements by laser interferometer

Publications (2)

Publication Number Publication Date
DE69930966D1 DE69930966D1 (de) 2006-05-24
DE69930966T2 true DE69930966T2 (de) 2006-12-28

Family

ID=8553022

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69930966T Expired - Lifetime DE69930966T2 (de) 1998-12-02 1999-11-26 Verfahren zur verbesserung von messungen mittels laserinterferometer

Country Status (19)

Country Link
US (1) US6501550B1 (enExample)
EP (1) EP1149268B1 (enExample)
JP (1) JP2002531816A (enExample)
KR (1) KR100729491B1 (enExample)
CN (1) CN1170117C (enExample)
AT (1) ATE323879T1 (enExample)
AU (1) AU768410B2 (enExample)
BR (1) BR9916875A (enExample)
CA (1) CA2350736C (enExample)
CZ (1) CZ299040B6 (enExample)
DE (1) DE69930966T2 (enExample)
DK (1) DK1149268T3 (enExample)
ES (1) ES2263292T3 (enExample)
FI (1) FI982603L (enExample)
IL (2) IL143453A0 (enExample)
MX (1) MXPA01005609A (enExample)
PT (1) PT1149268E (enExample)
RU (1) RU2243500C2 (enExample)
WO (1) WO2000033021A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI110209B (fi) * 1999-06-23 2002-12-13 Leonid Mihaljov Menetelmä laserinterferometrillä tehtävien mittauksien tarkkuuden parantamiseksi
DE10329043B4 (de) * 2003-06-27 2007-07-26 Leuze Electronic Gmbh & Co Kg Verfahren zur Bestimmung von Distanzen
GB0523455D0 (en) 2005-11-18 2005-12-28 Renishaw Plc Dynamic air turbulence compensation
ES2335427T3 (es) * 2006-07-04 2010-03-26 Pepperl + Fuchs Gmbh Procedimiento y dispositivo para la medicion optoelectronica de distancia sin contacto conforme al principio de tiempo de transito.
DE102007055665A1 (de) * 2007-11-21 2009-05-28 Dr. Johannes Heidenhain Gmbh Interferometeranordnung und Verfahren zu deren Betrieb
US10203268B2 (en) 2008-12-04 2019-02-12 Laura P. Solliday Methods for measuring and modeling the process of prestressing concrete during tensioning/detensioning based on electronic distance measurements
US9354043B2 (en) 2008-12-04 2016-05-31 Laura P. Solliday Methods for measuring and modeling the structural health of pressure vessels based on electronic distance measurements
US8209134B2 (en) * 2008-12-04 2012-06-26 Laura P. Solliday Methods for modeling the structural health of a civil structure based on electronic distance measurements
JP5602538B2 (ja) * 2010-03-03 2014-10-08 キヤノン株式会社 光波干渉計測装置
EP2641105B1 (en) * 2010-11-16 2015-01-21 Qualcomm Incorporated System and method for object position estimation based on ultrasonic reflected signals

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3854325A (en) * 1973-07-13 1974-12-17 Us Air Force Method and means for determining fatigue damage and surface stress
US4372150A (en) * 1980-06-05 1983-02-08 Beckman Instruments, Inc. Flow monitoring method and apparatus
US4600307A (en) * 1983-07-29 1986-07-15 The Perkin-Elmer Corporation Coherent radiation detecting apparatus
GB2170907B (en) * 1985-02-06 1988-08-24 Sonic Tape Plc Improvements relating to distance measuring devices
JPS6222091A (ja) * 1985-07-22 1987-01-30 Nippon Kooteingu Kk 距離測定方法
US4998295A (en) * 1988-12-30 1991-03-05 General Electric Company Receiver having an interferometer
GB8920448D0 (en) * 1989-09-09 1989-10-25 Renishaw Plc Apparatus for adjusting the alignment of a light beam
US5182863A (en) * 1990-10-22 1993-02-02 Spectra-Physics Laserplane, Inc. Automatic plumb and level tool with acoustic measuring capability
US5604592A (en) * 1994-09-19 1997-02-18 Textron Defense Systems, Division Of Avco Corporation Laser ultrasonics-based material analysis system and method using matched filter processing
US5624188A (en) * 1994-10-20 1997-04-29 West; David A. Acoustic thermometer
GB2313193B (en) * 1996-05-14 2000-06-14 Guide Dogs For The Blind Ass T Method and apparatus for distance measurement

Also Published As

Publication number Publication date
RU2243500C2 (ru) 2004-12-27
DK1149268T3 (da) 2006-08-14
JP2002531816A (ja) 2002-09-24
EP1149268B1 (en) 2006-04-19
AU1563100A (en) 2000-06-19
CA2350736A1 (en) 2000-06-08
IL143453A (en) 2007-06-17
FI982603A7 (fi) 2000-06-03
KR100729491B1 (ko) 2007-06-15
FI982603A0 (fi) 1998-12-02
CN1329711A (zh) 2002-01-02
ATE323879T1 (de) 2006-05-15
KR20010099817A (ko) 2001-11-09
CZ299040B6 (cs) 2008-04-09
FI982603L (fi) 2000-06-03
DE69930966D1 (de) 2006-05-24
CZ20011929A3 (cs) 2001-10-17
US6501550B1 (en) 2002-12-31
AU768410B2 (en) 2003-12-11
WO2000033021A8 (en) 2001-01-11
ES2263292T3 (es) 2006-12-01
MXPA01005609A (es) 2003-07-14
CA2350736C (en) 2007-05-15
WO2000033021A1 (en) 2000-06-08
CN1170117C (zh) 2004-10-06
BR9916875A (pt) 2001-11-13
PT1149268E (pt) 2006-07-31
IL143453A0 (en) 2002-04-21
EP1149268A1 (en) 2001-10-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: STROHSCHAENK UND KOLLEGEN, 85521 OTTOBRUNN