JP2002515124A5 - - Google Patents

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Publication number
JP2002515124A5
JP2002515124A5 JP1998548285A JP54828598A JP2002515124A5 JP 2002515124 A5 JP2002515124 A5 JP 2002515124A5 JP 1998548285 A JP1998548285 A JP 1998548285A JP 54828598 A JP54828598 A JP 54828598A JP 2002515124 A5 JP2002515124 A5 JP 2002515124A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP1998548285A
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English (en)
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JP2002515124A (ja
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Priority claimed from US08/850,473 external-priority patent/US6055054A/en
Application filed filed Critical
Publication of JP2002515124A publication Critical patent/JP2002515124A/ja
Publication of JP2002515124A5 publication Critical patent/JP2002515124A5/ja
Ceased legal-status Critical Current

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Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
Figure 2002515124
JP54828598A 1997-05-05 1998-05-04 三次元検査システム Ceased JP2002515124A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/850,473 US6055054A (en) 1997-05-05 1997-05-05 Three dimensional inspection system
US08/850,473 1997-05-05
PCT/US1998/008950 WO1998050757A2 (en) 1997-05-05 1998-05-04 Three dimensional inspection system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009095573A Division JP4901903B2 (ja) 1997-05-05 2009-04-10 三次元検査システム

Publications (2)

Publication Number Publication Date
JP2002515124A JP2002515124A (ja) 2002-05-21
JP2002515124A5 true JP2002515124A5 (ja) 2005-12-02

Family

ID=25308209

Family Applications (2)

Application Number Title Priority Date Filing Date
JP54828598A Ceased JP2002515124A (ja) 1997-05-05 1998-05-04 三次元検査システム
JP2009095573A Expired - Fee Related JP4901903B2 (ja) 1997-05-05 2009-04-10 三次元検査システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2009095573A Expired - Fee Related JP4901903B2 (ja) 1997-05-05 2009-04-10 三次元検査システム

Country Status (6)

Country Link
US (1) US6055054A (ja)
EP (1) EP1017962B1 (ja)
JP (2) JP2002515124A (ja)
KR (1) KR20010012293A (ja)
DE (1) DE69819027T2 (ja)
WO (1) WO1998050757A2 (ja)

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CN102012607B (zh) * 2010-09-29 2011-12-28 卓盈微电子（昆山）有限公司 对柔性线路板成像的装置
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KR20210099172A (ko) * 2015-06-05 2021-08-11 케이엘에이 코포레이션 반도체 디바이스들의 적어도 측면들의 검사를 위한 장치, 방법 및 컴퓨터 프로그램 제품
CN107889522B (zh) * 2015-08-26 2020-08-28 Abb瑞士股份有限公司 对象多视角检测设备及其方法
CN105588841A (zh) * 2016-01-28 2016-05-18 浙江工业大学 基于机器视觉的针脚倾斜缺陷检测装置
JP7194055B2 (ja) * 2019-03-22 2022-12-21 日立Astemo株式会社 接合部の検査方法及び接合部の検査装置
CN112985275B (zh) * 2021-05-14 2021-08-20 苏州鼎纳自动化技术有限公司 一种产品内壁尺寸检测机构

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