|
US5992463A
(en)
|
1996-10-30 |
1999-11-30 |
Unit Instruments, Inc. |
Gas panel
|
|
US6394138B1
(en)
|
1996-10-30 |
2002-05-28 |
Unit Instruments, Inc. |
Manifold system of removable components for distribution of fluids
|
|
US6293310B1
(en)
|
1996-10-30 |
2001-09-25 |
Unit Instruments, Inc. |
Gas panel
|
|
WO1999064772A1
(en)
|
1998-06-12 |
1999-12-16 |
Hollingshead J Gregory |
Modular chemical delivery blocks
|
|
US6260581B1
(en)
|
1998-06-12 |
2001-07-17 |
J. Gregory Hollingshead |
Apparatus for assembling modular chemical distribution substrate blocks
|
|
JP2001269567A
(ja)
*
|
2000-03-24 |
2001-10-02 |
Bioneer Corp |
多チャネル定量制御バルブ装置
|
|
JP2001317646A
(ja)
*
|
2000-05-08 |
2001-11-16 |
Smc Corp |
圧電式流体制御弁
|
|
DE20009234U1
(de)
*
|
2000-05-23 |
2000-08-24 |
Bürkert Werke GmbH & Co., 74653 Ingelfingen |
Fluidisches Anschlusssystem
|
|
US7150475B2
(en)
|
2001-07-13 |
2006-12-19 |
Talon Innovations, Inc. |
Shear-resistant modular fluidic blocks
|
|
US6634385B2
(en)
*
|
2001-12-21 |
2003-10-21 |
Motorola, Inc. |
Apparatus for conveying fluids and base plate
|
|
KR20060017577A
(ko)
*
|
2002-08-27 |
2006-02-24 |
셀레리티 인크. |
공통 평면 내에 매니폴드 연결부를 갖는 모듈형 기판 가스패널
|
|
US6936086B2
(en)
*
|
2002-09-11 |
2005-08-30 |
Planar Systems, Inc. |
High conductivity particle filter
|
|
US6874538B2
(en)
*
|
2003-03-26 |
2005-04-05 |
Kevin S. Bennett |
Fluid delivery system
|
|
US7178556B2
(en)
*
|
2003-08-07 |
2007-02-20 |
Parker-Hannifin Corporation |
Modular component connector substrate assembly system
|
|
TWI279158B
(en)
*
|
2003-11-07 |
2007-04-11 |
Celerity Group Inc |
Surface mount heater
|
|
EP1744131A1
(en)
*
|
2005-07-15 |
2007-01-17 |
Indufil B.V. |
Module for a gas system
|
|
US7410519B1
(en)
|
2005-08-16 |
2008-08-12 |
Ewald Dieter H |
Sandwich filter block
|
|
JP2007275753A
(ja)
*
|
2006-04-06 |
2007-10-25 |
Toyota Motor Corp |
２液混合装置
|
|
US9061227B2
(en)
*
|
2006-08-25 |
2015-06-23 |
Pall Corporation |
Purification assemblies and methods of assembling purification assemblies
|
|
KR101423586B1
(ko)
*
|
2006-08-25 |
2014-07-25 |
폴 코포레이션 |
정화 요소를 포함하는 유체 조립체
|
|
KR100773756B1
(ko)
*
|
2006-09-13 |
2007-11-09 |
주식회사 아이피에스 |
가스유동블록
|
|
US20080302426A1
(en)
*
|
2007-06-06 |
2008-12-11 |
Greg Patrick Mulligan |
System and method of securing removable components for distribution of fluids
|
|
US7806143B2
(en)
*
|
2007-06-11 |
2010-10-05 |
Lam Research Corporation |
Flexible manifold for integrated gas system gas panels
|
|
US8307854B1
(en)
|
2009-05-14 |
2012-11-13 |
Vistadeltek, Inc. |
Fluid delivery substrates for building removable standard fluid delivery sticks
|
|
TWI534922B
(zh)
|
2009-06-10 |
2016-05-21 |
威士塔戴爾泰克有限責任公司 |
極端流量和／或高溫流體輸送基板
|
|
WO2012151292A2
(en)
|
2011-05-02 |
2012-11-08 |
Advantage Group International Inc. |
Manifold system for gas and fluid delivery
|
|
JP5868219B2
(ja)
*
|
2012-02-29 |
2016-02-24 |
株式会社フジキン |
流体制御装置
|
|
US8851113B2
(en)
*
|
2012-03-27 |
2014-10-07 |
Lam Research Coporation |
Shared gas panels in plasma processing systems
|
|
US9091397B2
(en)
|
2012-03-27 |
2015-07-28 |
Lam Research Corporation |
Shared gas panels in plasma processing chambers employing multi-zone gas feeds
|
|
JP2015201646A
(ja)
*
|
2014-04-07 |
2015-11-12 |
ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ |
構成独立型のガス供給システム
|
|
US9968765B2
(en)
|
2014-07-21 |
2018-05-15 |
The Cleveland Clinic Foundation |
Convection enhanced delivery device and system
|
|
US9907941B2
(en)
|
2014-07-21 |
2018-03-06 |
The Cleveland Clinic Foundation |
Convection enhanced delivery device and system
|
|
US10557197B2
(en)
|
2014-10-17 |
2020-02-11 |
Lam Research Corporation |
Monolithic gas distribution manifold and various construction techniques and use cases therefor
|
|
JP6616415B2
(ja)
*
|
2014-11-15 |
2019-12-04 |
バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー |
最小のデッドレグを有する改善されたバルブブロック
|
|
US10022689B2
(en)
|
2015-07-24 |
2018-07-17 |
Lam Research Corporation |
Fluid mixing hub for semiconductor processing tool
|
|
US10118263B2
(en)
|
2015-09-02 |
2018-11-06 |
Lam Researech Corporation |
Monolithic manifold mask and substrate concepts
|
|
US9879795B2
(en)
|
2016-01-15 |
2018-01-30 |
Lam Research Corporation |
Additively manufactured gas distribution manifold
|
|
US10215317B2
(en)
|
2016-01-15 |
2019-02-26 |
Lam Research Corporation |
Additively manufactured gas distribution manifold
|
|
US10633934B2
(en)
|
2017-01-05 |
2020-04-28 |
KHOLLE Magnolia 2015, LLC |
Flowline junction fitting with long-sweep bore
|
|
US10683708B2
(en)
|
2017-01-05 |
2020-06-16 |
KHOLLE Magnolia 2015, LLC |
Frac manifold and systems
|
|
US10538973B2
(en)
|
2017-01-05 |
2020-01-21 |
KHOLLE Magnolia 2015, LLC |
Offset flange and angled shim flowline fittings
|
|
US10662749B1
(en)
|
2017-01-05 |
2020-05-26 |
KHOLLE Magnolia 2015, LLC |
Flowline junction fittings for frac systems
|
|
FR3069905B1
(fr)
*
|
2017-08-03 |
2019-09-06 |
Alcrys Fluid Control & Services |
Module pour un kit de distribution et de regulation d’un gaz sous pression, kit et systeme de distribution et de regulation associes
|
|
CN119200379A
(zh)
|
2018-05-07 |
2024-12-27 |
朗姆研究公司 |
可配置分布式互锁系统
|
|
US10982522B1
(en)
|
2018-07-18 |
2021-04-20 |
KHOLLE Magnolia 2015, LLC |
Missile for frac manifold
|
|
JP7553468B2
(ja)
*
|
2019-04-15 |
2024-09-18 |
ラム リサーチ コーポレーション |
ガス送給用のモジュール式構成要素システム
|
|
US11619326B1
(en)
|
2019-06-24 |
2023-04-04 |
Cantex International, Inc. |
Anti-vibration mount
|
|
FR3108701B1
(fr)
|
2020-03-25 |
2022-02-18 |
Air Liquide France Ind |
Dispositif de prélèvement d’échantillon de gaz
|
|
WO2023006204A1
(fr)
|
2021-07-29 |
2023-02-02 |
Air Liquide France Industrie |
Dispositif de prélèvement d'échantillon de gaz
|
|
US20230097346A1
(en)
*
|
2021-09-30 |
2023-03-30 |
Applied Materials, Inc. |
Flow guide apparatuses for flow uniformity control in process chambers
|
|
CN119096006A
(zh)
|
2022-03-10 |
2024-12-06 |
应用材料公司 |
模块化的多方向性气体混合区块
|