JP5630731B2 - 浄化アセンブリ及び浄化アセンブリの組立方法 - Google Patents
浄化アセンブリ及び浄化アセンブリの組立方法 Download PDFInfo
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- JP5630731B2 JP5630731B2 JP2009525703A JP2009525703A JP5630731B2 JP 5630731 B2 JP5630731 B2 JP 5630731B2 JP 2009525703 A JP2009525703 A JP 2009525703A JP 2009525703 A JP2009525703 A JP 2009525703A JP 5630731 B2 JP5630731 B2 JP 5630731B2
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- purification
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- purification unit
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- 238000000746 purification Methods 0.000 title claims description 166
- 238000000034 method Methods 0.000 title description 8
- 239000012530 fluid Substances 0.000 claims description 95
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000007789 gas Substances 0.000 description 16
- 238000003466 welding Methods 0.000 description 14
- 239000000758 substrate Substances 0.000 description 13
- 230000007246 mechanism Effects 0.000 description 12
- 238000004891 communication Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 5
- 230000001788 irregular Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005219 brazing Methods 0.000 description 3
- 238000002788 crimping Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000013618 particulate matter Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000004323 axial length Effects 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000006112 glass ceramic composition Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920005597 polymer membrane Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0005—Mounting of filtering elements within casings, housings or frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
- B01D35/02—Filters adapted for location in special places, e.g. pipe-lines, pumps, stop-cocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
- B01D35/30—Filter housing constructions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0415—Beds in cartridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
- B01D2259/40084—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by exchanging used adsorbents with fresh adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/45—Gas separation or purification devices adapted for specific applications
- B01D2259/455—Gas separation or purification devices adapted for specific applications for transportable use
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
- Y10T29/49945—Assembling or joining by driven force fit
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Separation Of Gases By Adsorption (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Description
Claims (4)
- ガスを浄化するための浄化アセンブリであって、
第1の取付け表面と、反対側の第2の取付け表面と、空洞と、を含む浄化ユニットであって、前記浄化ユニットが更に前記第1の取付け表面から前記空洞を通って前記第2の取付け表面に延びる流体流路と、前記流体流路に亘って前記空洞内に配置された浄化要素とを含む浄化ユニットと、
第1の取付け表面と反対側の第2の取付け表面とを含むブロック部材であって、前記ブロック部材が更に前記ブロック部材の前記第1の取付け表面から前記第2の取付け表面に前記ブロック部材を通って延びるソケットを含み、前記浄化ユニットが前記ソケット内に位置決めされ、前記ブロック部材が前記浄化ユニットを取り囲み、前記ブロック部材の前記第1の取付け表面が前記ソケットの一方の端部を取り囲んでいて前記浄化ユニットの前記第1の取付け表面と同一平面上にあり、前記ブロック部材の前記第2の取付け表面が前記ソケットの反対側の端部を取り囲んでいて前記浄化ユニットの前記第2の取付け表面と同一平面上にある、ブロック部材と、を備える浄化アセンブリ。 - 前記ブロック部材が前記ブロック部材の前記第1の取付け表面から前記ブロック部材の前記第2の取付け表面に延びる流体流路を更に含み、前記ソケットが前記ブロック部材の前記流体流路から間隔をあけて隔離されている、請求項1に記載の浄化アセンブリ。
- 前記ソケットが円筒形構成を有し、前記浄化ユニットが円筒形構成を有し、また前記浄化ユニットが前記ソケット内で前記ブロック部材に適合する側壁を有する、請求項1又は2に記載の浄化アセンブリ。
- 前記浄化ユニットが締り嵌め又は摩擦嵌めによって前記ソケット内で前記ブロック部材に嵌合される、請求項1〜3のいずれか一項に記載の浄化アセンブリ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US84002406P | 2006-08-25 | 2006-08-25 | |
US60/840,024 | 2006-08-25 | ||
PCT/US2007/076208 WO2008024682A2 (en) | 2006-08-25 | 2007-08-17 | Purification assemblies, purification units, and methods of assembling purification assemblies |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012153593A Division JP5630743B2 (ja) | 2006-08-25 | 2012-07-09 | 浄化アセンブリ及び浄化アセンブリの組立方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010501335A JP2010501335A (ja) | 2010-01-21 |
JP5630731B2 true JP5630731B2 (ja) | 2014-11-26 |
Family
ID=38865016
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009525703A Active JP5630731B2 (ja) | 2006-08-25 | 2007-08-17 | 浄化アセンブリ及び浄化アセンブリの組立方法 |
JP2012153593A Active JP5630743B2 (ja) | 2006-08-25 | 2012-07-09 | 浄化アセンブリ及び浄化アセンブリの組立方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012153593A Active JP5630743B2 (ja) | 2006-08-25 | 2012-07-09 | 浄化アセンブリ及び浄化アセンブリの組立方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9061227B2 (ja) |
JP (2) | JP5630731B2 (ja) |
KR (1) | KR101574743B1 (ja) |
WO (1) | WO2008024682A2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10596503B1 (en) * | 2016-12-19 | 2020-03-24 | Technetics Group Llc | Metal seal with an integral filter |
US20190001242A1 (en) * | 2017-06-30 | 2019-01-03 | Mott Corporation | Filter with non-horizontal cavity |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1546259A (fr) | 1966-12-01 | 1968-11-15 | Vacco Ind | Filtre |
JPS5532735Y2 (ja) * | 1972-03-24 | 1980-08-05 | ||
JPS5927698B2 (ja) * | 1977-11-28 | 1984-07-07 | 株式会社日本製鋼所 | プラスチツク押出機における自動「ろ」網交換装置 |
JPS5849394Y2 (ja) * | 1977-12-13 | 1983-11-11 | アイシン精機株式会社 | 塵埃濾過負圧管路継手 |
US4382808A (en) * | 1981-06-26 | 1983-05-10 | Beckman Instruments, Inc. | Assembly for holding a filter |
JPS5873313U (ja) * | 1981-11-06 | 1983-05-18 | 株式会社東芝 | ガスフイルタ− |
JPS61108861A (ja) | 1984-11-01 | 1986-05-27 | Honda Motor Co Ltd | エアクリ−ナ |
US5234165A (en) * | 1992-02-25 | 1993-08-10 | Tri-Tech Services, Inc. | Agricultural sprayers |
ATE135283T1 (de) * | 1992-05-11 | 1996-03-15 | Gneuss Kunststofftechnik Gmbh | Filter für kunststoffschmelzen |
US5663476A (en) * | 1994-04-29 | 1997-09-02 | Motorola, Inc. | Apparatus and method for decomposition of chemical compounds by increasing residence time of a chemical compound in a reaction chamber |
US5545242A (en) * | 1994-07-19 | 1996-08-13 | Pall Corporation | In-line filter for tubing |
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US5605179A (en) * | 1995-03-17 | 1997-02-25 | Insync Systems, Inc. | Integrated gas panel |
KR100232112B1 (ko) * | 1996-01-05 | 1999-12-01 | 아마노 시게루 | 가스공급유닛 |
JPH1085533A (ja) * | 1996-09-12 | 1998-04-07 | Hitachi Ltd | 空気清浄装置 |
US6302141B1 (en) * | 1996-12-03 | 2001-10-16 | Insync Systems, Inc. | Building blocks for integrated gas panel |
JP4378553B2 (ja) * | 1997-10-13 | 2009-12-09 | 忠弘 大見 | 流体制御装置 |
JP3657756B2 (ja) * | 1997-12-01 | 2005-06-08 | 日本精線株式会社 | フィルター装置 |
WO1999035422A1 (en) * | 1998-01-09 | 1999-07-15 | Swagelok Company | Seal for a modular flow devices |
US6015444A (en) * | 1998-02-27 | 2000-01-18 | Eaton Corporation | Apparatus and system for venting a transmission |
US6514323B1 (en) * | 1998-06-24 | 2003-02-04 | Pall Corporation | Purification assemblies and purification methods |
US6149718A (en) * | 1998-10-16 | 2000-11-21 | Mott Mettallurgical Corporation | Contamination control system |
WO2000031462A1 (en) * | 1998-11-20 | 2000-06-02 | Mykrolis Corporation | System and method for integrating gas components |
US6283143B1 (en) * | 2000-03-31 | 2001-09-04 | Lam Research Corporation | System and method for providing an integrated gas stick |
JP4156184B2 (ja) * | 2000-08-01 | 2008-09-24 | 株式会社キッツエスシーティー | 集積化ガス制御装置 |
US6447565B1 (en) * | 2001-05-03 | 2002-09-10 | General Motors Corporation | Transmission vent assembly |
US6769463B2 (en) * | 2001-05-16 | 2004-08-03 | Celerity Group, Inc. | Fluid flow system |
JP3564115B2 (ja) * | 2001-12-06 | 2004-09-08 | シーケーディ株式会社 | ガス供給ユニット |
JP4092164B2 (ja) * | 2002-09-20 | 2008-05-28 | シーケーディ株式会社 | ガス供給ユニット |
US7105037B2 (en) | 2002-10-31 | 2006-09-12 | Advanced Technology Materials, Inc. | Semiconductor manufacturing facility utilizing exhaust recirculation |
JP2006038525A (ja) * | 2004-07-23 | 2006-02-09 | Fuji Photo Film Co Ltd | 液体濾過器具及び乾式分析素子 |
US7410519B1 (en) * | 2005-08-16 | 2008-08-12 | Ewald Dieter H | Sandwich filter block |
-
2007
- 2007-08-17 KR KR1020097006049A patent/KR101574743B1/ko active IP Right Grant
- 2007-08-17 US US12/376,825 patent/US9061227B2/en active Active
- 2007-08-17 WO PCT/US2007/076208 patent/WO2008024682A2/en active Application Filing
- 2007-08-17 JP JP2009525703A patent/JP5630731B2/ja active Active
-
2012
- 2012-07-09 JP JP2012153593A patent/JP5630743B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
KR101574743B1 (ko) | 2015-12-04 |
JP2012232304A (ja) | 2012-11-29 |
WO2008024682A3 (en) | 2008-07-10 |
JP2010501335A (ja) | 2010-01-21 |
US9061227B2 (en) | 2015-06-23 |
US20100162671A1 (en) | 2010-07-01 |
WO2008024682A2 (en) | 2008-02-28 |
KR20090057042A (ko) | 2009-06-03 |
JP5630743B2 (ja) | 2014-11-26 |
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