JP2002515107A - 一体型ガスパネル用組立ブロック - Google Patents

一体型ガスパネル用組立ブロック

Info

Publication number
JP2002515107A
JP2002515107A JP52562298A JP52562298A JP2002515107A JP 2002515107 A JP2002515107 A JP 2002515107A JP 52562298 A JP52562298 A JP 52562298A JP 52562298 A JP52562298 A JP 52562298A JP 2002515107 A JP2002515107 A JP 2002515107A
Authority
JP
Japan
Prior art keywords
port
block
gas
manifold
gas panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP52562298A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002515107A5 (enExample
Inventor
マークレック，ジェフリイ・アール
レックス，デニス・ジイ
シュースター，リチャード・イー
エリオット，ブレント
Original Assignee
キネティック・フルーイド・システムズ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/760,150 external-priority patent/US5836355A/en
Application filed by キネティック・フルーイド・システムズ filed Critical キネティック・フルーイド・システムズ
Publication of JP2002515107A publication Critical patent/JP2002515107A/ja
Publication of JP2002515107A5 publication Critical patent/JP2002515107A5/ja
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Multiple-Way Valves (AREA)
JP52562298A 1996-12-03 1997-11-19 一体型ガスパネル用組立ブロック Ceased JP2002515107A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US08/760,150 US5836355A (en) 1996-12-03 1996-12-03 Building blocks for integrated gas panel
US08/931,060 1997-09-15
US08/931,060 US6302141B1 (en) 1996-12-03 1997-09-15 Building blocks for integrated gas panel
US08/760,150 1997-09-15
PCT/US1997/021327 WO1998025058A1 (en) 1996-12-03 1997-11-19 Building blocks for integrated gas panel

Publications (2)

Publication Number Publication Date
JP2002515107A true JP2002515107A (ja) 2002-05-21
JP2002515107A5 JP2002515107A5 (enExample) 2005-08-11

Family

ID=27116778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52562298A Ceased JP2002515107A (ja) 1996-12-03 1997-11-19 一体型ガスパネル用組立ブロック

Country Status (6)

Country Link
US (1) US6302141B1 (enExample)
EP (1) EP0941432A4 (enExample)
JP (1) JP2002515107A (enExample)
KR (1) KR20000069268A (enExample)
AU (1) AU5265498A (enExample)
WO (1) WO1998025058A1 (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007275753A (ja) * 2006-04-06 2007-10-25 Toyota Motor Corp ２液混合装置
JP2013177948A (ja) * 2012-02-29 2013-09-09 Fujikin Inc 流体制御装置
JP2015519724A (ja) * 2012-03-27 2015-07-09 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ プラズマ処理システムにおける共有ガスパネル
JP2015201646A (ja) * 2014-04-07 2015-11-12 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 構成独立型のガス供給システム
JP2017534036A (ja) * 2014-11-15 2017-11-16 バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー 最小のデッドレグを有する改善されたバルブブロック
US10794519B2 (en) 2016-01-15 2020-10-06 Lam Research Corporation Additively manufactured gas distribution manifold
US10914003B2 (en) 2014-10-17 2021-02-09 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor

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US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
US6293310B1 (en) 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
US6394138B1 (en) 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
US6260581B1 (en) 1998-06-12 2001-07-17 J. Gregory Hollingshead Apparatus for assembling modular chemical distribution substrate blocks
EP1086327A1 (en) * 1998-06-12 2001-03-28 J. Gregory Hollingshead Unified modular chemical delivery blocks
JP2001269567A (ja) * 2000-03-24 2001-10-02 Bioneer Corp 多チャネル定量制御バルブ装置
JP2001317646A (ja) * 2000-05-08 2001-11-16 Smc Corp 圧電式流体制御弁
DE20009234U1 (de) * 2000-05-23 2000-08-24 Bürkert Werke GmbH & Co., 74653 Ingelfingen Fluidisches Anschlusssystem
US7150475B2 (en) 2001-07-13 2006-12-19 Talon Innovations, Inc. Shear-resistant modular fluidic blocks
US6634385B2 (en) * 2001-12-21 2003-10-21 Motorola, Inc. Apparatus for conveying fluids and base plate
CN100396980C (zh) * 2002-08-27 2008-06-25 迅捷公司 在公共平面中有歧管连接的模块式衬底配气板
US6936086B2 (en) * 2002-09-11 2005-08-30 Planar Systems, Inc. High conductivity particle filter
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
CN1887029A (zh) * 2003-11-07 2006-12-27 迅捷公司 表面安装的加热器
EP1744131A1 (en) * 2005-07-15 2007-01-17 Indufil B.V. Module for a gas system
US7410519B1 (en) 2005-08-16 2008-08-12 Ewald Dieter H Sandwich filter block
KR101423586B1 (ko) * 2006-08-25 2014-07-25 폴 코포레이션 정화 요소를 포함하는 유체 조립체
KR101574743B1 (ko) * 2006-08-25 2015-12-04 폴 코포레이션 정화 조립체, 및 정화 조립체의 조립 방법
KR100773756B1 (ko) * 2006-09-13 2007-11-09 주식회사 아이피에스 가스유동블록
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US7806143B2 (en) * 2007-06-11 2010-10-05 Lam Research Corporation Flexible manifold for integrated gas system gas panels
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
TWI534922B (zh) 2009-06-10 2016-05-21 威士塔戴爾泰克有限責任公司 極端流量和／或高溫流體輸送基板
WO2012151292A2 (en) 2011-05-02 2012-11-08 Advantage Group International Inc. Manifold system for gas and fluid delivery
US9091397B2 (en) 2012-03-27 2015-07-28 Lam Research Corporation Shared gas panels in plasma processing chambers employing multi-zone gas feeds
US9907941B2 (en) 2014-07-21 2018-03-06 The Cleveland Clinic Foundation Convection enhanced delivery device and system
US9968765B2 (en) 2014-07-21 2018-05-15 The Cleveland Clinic Foundation Convection enhanced delivery device and system
US10022689B2 (en) 2015-07-24 2018-07-17 Lam Research Corporation Fluid mixing hub for semiconductor processing tool
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
US10662749B1 (en) 2017-01-05 2020-05-26 KHOLLE Magnolia 2015, LLC Flowline junction fittings for frac systems
US10538973B2 (en) 2017-01-05 2020-01-21 KHOLLE Magnolia 2015, LLC Offset flange and angled shim flowline fittings
US10633934B2 (en) 2017-01-05 2020-04-28 KHOLLE Magnolia 2015, LLC Flowline junction fitting with long-sweep bore
US10683708B2 (en) 2017-01-05 2020-06-16 KHOLLE Magnolia 2015, LLC Frac manifold and systems
FR3069905B1 (fr) 2017-08-03 2019-09-06 Alcrys Fluid Control & Services Module pour un kit de distribution et de regulation d’un gaz sous pression, kit et systeme de distribution et de regulation associes
CN112368653B (zh) 2018-05-07 2024-08-27 朗姆研究公司 可配置分布式互锁系统
US10982522B1 (en) 2018-07-18 2021-04-20 KHOLLE Magnolia 2015, LLC Missile for frac manifold
CN120473408A (zh) * 2019-04-15 2025-08-12 朗姆研究公司 用于气体输送的模块部件系统
US11619326B1 (en) 2019-06-24 2023-04-04 Cantex International, Inc. Anti-vibration mount
FR3108701B1 (fr) 2020-03-25 2022-02-18 Air Liquide France Ind Dispositif de prélèvement d’échantillon de gaz
EP4377664A1 (fr) 2021-07-29 2024-06-05 Air Liquide France Industrie Dispositif de prélèvement d'échantillon de gaz
US20230097346A1 (en) * 2021-09-30 2023-03-30 Applied Materials, Inc. Flow guide apparatuses for flow uniformity control in process chambers
JP2025509450A (ja) 2022-03-10 2025-04-11 アプライド マテリアルズ インコーポレイテッド モジュール式多方向ガス混合ブロック

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US3806088A (en) * 1972-05-01 1974-04-23 Hydro Syst Inc Manifold apparatus
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DE2302267B1 (de) 1973-01-18 1974-06-12 Abex Gmbh Denison, 4010 Hilden Leitungssäule für hydraulische Ventile
FR2257846B1 (enExample) 1973-07-03 1976-05-28 Legris France Sa
US3885389A (en) * 1973-09-26 1975-05-27 Melvin Corp Manifold with internal filter
FR2250907A1 (en) 1973-11-09 1975-06-06 Bouteille Daniel Assembly baseplates for pneumatic or hydraulic distributors - tongue and groove are standard modules which connect with into rigid block
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DE2648751C2 (de) 1976-10-27 1986-04-30 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Vorrichtung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß
US4524807A (en) 1982-05-21 1985-06-25 Humphrey Products Company Snap-together modular manifold construction
US4657047A (en) 1984-12-10 1987-04-14 Nordson Corporation Modular color changers with improved valves and manifolds
US4848393A (en) 1986-06-27 1989-07-18 West Robert E Fault tolerant fluid flow apparatus
JP2559613B2 (ja) * 1988-02-29 1996-12-04 株式会社小松製作所 操作弁装置
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US5836355A (en) * 1996-12-03 1998-11-17 Insync Systems, Inc. Building blocks for integrated gas panel
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007275753A (ja) * 2006-04-06 2007-10-25 Toyota Motor Corp ２液混合装置
JP2013177948A (ja) * 2012-02-29 2013-09-09 Fujikin Inc 流体制御装置
JP2015519724A (ja) * 2012-03-27 2015-07-09 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ プラズマ処理システムにおける共有ガスパネル
JP2015201646A (ja) * 2014-04-07 2015-11-12 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 構成独立型のガス供給システム
US10914003B2 (en) 2014-10-17 2021-02-09 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor
JP2017534036A (ja) * 2014-11-15 2017-11-16 バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー 最小のデッドレグを有する改善されたバルブブロック
US10794519B2 (en) 2016-01-15 2020-10-06 Lam Research Corporation Additively manufactured gas distribution manifold

Also Published As

Publication number Publication date
EP0941432A4 (en) 2003-01-29
WO1998025058A1 (en) 1998-06-11
AU5265498A (en) 1998-06-29
EP0941432A1 (en) 1999-09-15
KR20000069268A (ko) 2000-11-25
US6302141B1 (en) 2001-10-16

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