JP2002515107A5 - - Google Patents
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- Publication number
- JP2002515107A5 JP2002515107A5 JP1998525622A JP52562298A JP2002515107A5 JP 2002515107 A5 JP2002515107 A5 JP 2002515107A5 JP 1998525622 A JP1998525622 A JP 1998525622A JP 52562298 A JP52562298 A JP 52562298A JP 2002515107 A5 JP2002515107 A5 JP 2002515107A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Description
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/760,150 US5836355A (en) | 1996-12-03 | 1996-12-03 | Building blocks for integrated gas panel |
US08/931,060 US6302141B1 (en) | 1996-12-03 | 1997-09-15 | Building blocks for integrated gas panel |
US08/760,150 | 1997-09-15 | ||
US08/931,060 | 1997-09-15 | ||
PCT/US1997/021327 WO1998025058A1 (en) | 1996-12-03 | 1997-11-19 | Building blocks for integrated gas panel |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002515107A JP2002515107A (ja) | 2002-05-21 |
JP2002515107A5 true JP2002515107A5 (ja) | 2005-08-11 |
Family
ID=27116778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52562298A Ceased JP2002515107A (ja) | 1996-12-03 | 1997-11-19 | 一体型ガスパネル用組立ブロック |
Country Status (6)
Country | Link |
---|---|
US (1) | US6302141B1 (ja) |
EP (1) | EP0941432A4 (ja) |
JP (1) | JP2002515107A (ja) |
KR (1) | KR20000069268A (ja) |
AU (1) | AU5265498A (ja) |
WO (1) | WO1998025058A1 (ja) |
Families Citing this family (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5992463A (en) | 1996-10-30 | 1999-11-30 | Unit Instruments, Inc. | Gas panel |
US6394138B1 (en) | 1996-10-30 | 2002-05-28 | Unit Instruments, Inc. | Manifold system of removable components for distribution of fluids |
US6293310B1 (en) | 1996-10-30 | 2001-09-25 | Unit Instruments, Inc. | Gas panel |
US6260581B1 (en) | 1998-06-12 | 2001-07-17 | J. Gregory Hollingshead | Apparatus for assembling modular chemical distribution substrate blocks |
EP1086327A1 (en) | 1998-06-12 | 2001-03-28 | J. Gregory Hollingshead | Unified modular chemical delivery blocks |
JP2001269567A (ja) * | 2000-03-24 | 2001-10-02 | Bioneer Corp | 多チャネル定量制御バルブ装置 |
JP2001317646A (ja) * | 2000-05-08 | 2001-11-16 | Smc Corp | 圧電式流体制御弁 |
DE20009234U1 (de) * | 2000-05-23 | 2000-08-24 | Buerkert Werke Gmbh & Co | Fluidisches Anschlusssystem |
US7150475B2 (en) | 2001-07-13 | 2006-12-19 | Talon Innovations, Inc. | Shear-resistant modular fluidic blocks |
US6634385B2 (en) * | 2001-12-21 | 2003-10-21 | Motorola, Inc. | Apparatus for conveying fluids and base plate |
AU2003262953A1 (en) * | 2002-08-27 | 2004-03-19 | Celerity Group, Inc. | Modular substrate gas panel having manifold connections in a common plane |
US6936086B2 (en) * | 2002-09-11 | 2005-08-30 | Planar Systems, Inc. | High conductivity particle filter |
US6874538B2 (en) * | 2003-03-26 | 2005-04-05 | Kevin S. Bennett | Fluid delivery system |
US7178556B2 (en) * | 2003-08-07 | 2007-02-20 | Parker-Hannifin Corporation | Modular component connector substrate assembly system |
TWI279158B (en) * | 2003-11-07 | 2007-04-11 | Celerity Group Inc | Surface mount heater |
EP1744131A1 (en) * | 2005-07-15 | 2007-01-17 | Indufil B.V. | Module for a gas system |
US7410519B1 (en) | 2005-08-16 | 2008-08-12 | Ewald Dieter H | Sandwich filter block |
JP2007275753A (ja) * | 2006-04-06 | 2007-10-25 | Toyota Motor Corp | 2液混合装置 |
WO2008024682A2 (en) * | 2006-08-25 | 2008-02-28 | Pall Corporation | Purification assemblies, purification units, and methods of assembling purification assemblies |
WO2008024683A1 (en) * | 2006-08-25 | 2008-02-28 | Pall Corporation | Fluid assemblies comprising a purification element |
KR100773756B1 (ko) * | 2006-09-13 | 2007-11-09 | 주식회사 아이피에스 | 가스유동블록 |
US20080302426A1 (en) * | 2007-06-06 | 2008-12-11 | Greg Patrick Mulligan | System and method of securing removable components for distribution of fluids |
US7806143B2 (en) * | 2007-06-11 | 2010-10-05 | Lam Research Corporation | Flexible manifold for integrated gas system gas panels |
US8307854B1 (en) | 2009-05-14 | 2012-11-13 | Vistadeltek, Inc. | Fluid delivery substrates for building removable standard fluid delivery sticks |
TWI534922B (zh) | 2009-06-10 | 2016-05-21 | 威士塔戴爾泰克有限責任公司 | 極端流量和/或高溫流體輸送基板 |
US8950433B2 (en) | 2011-05-02 | 2015-02-10 | Advantage Group International Inc. | Manifold system for gas and fluid delivery |
JP5868219B2 (ja) * | 2012-02-29 | 2016-02-24 | 株式会社フジキン | 流体制御装置 |
US9091397B2 (en) | 2012-03-27 | 2015-07-28 | Lam Research Corporation | Shared gas panels in plasma processing chambers employing multi-zone gas feeds |
US8851113B2 (en) * | 2012-03-27 | 2014-10-07 | Lam Research Coporation | Shared gas panels in plasma processing systems |
US10128087B2 (en) | 2014-04-07 | 2018-11-13 | Lam Research Corporation | Configuration independent gas delivery system |
US9907941B2 (en) | 2014-07-21 | 2018-03-06 | The Cleveland Clinic Foundation | Convection enhanced delivery device and system |
US9968765B2 (en) | 2014-07-21 | 2018-05-15 | The Cleveland Clinic Foundation | Convection enhanced delivery device and system |
US10557197B2 (en) | 2014-10-17 | 2020-02-11 | Lam Research Corporation | Monolithic gas distribution manifold and various construction techniques and use cases therefor |
JP6616415B2 (ja) * | 2014-11-15 | 2019-12-04 | バーサム マテリアルズ ユーエス,リミティド ライアビリティ カンパニー | 最小のデッドレグを有する改善されたバルブブロック |
US10022689B2 (en) | 2015-07-24 | 2018-07-17 | Lam Research Corporation | Fluid mixing hub for semiconductor processing tool |
US10118263B2 (en) | 2015-09-02 | 2018-11-06 | Lam Researech Corporation | Monolithic manifold mask and substrate concepts |
US9879795B2 (en) | 2016-01-15 | 2018-01-30 | Lam Research Corporation | Additively manufactured gas distribution manifold |
US10215317B2 (en) | 2016-01-15 | 2019-02-26 | Lam Research Corporation | Additively manufactured gas distribution manifold |
US10683708B2 (en) | 2017-01-05 | 2020-06-16 | KHOLLE Magnolia 2015, LLC | Frac manifold and systems |
US10538973B2 (en) | 2017-01-05 | 2020-01-21 | KHOLLE Magnolia 2015, LLC | Offset flange and angled shim flowline fittings |
US10662749B1 (en) | 2017-01-05 | 2020-05-26 | KHOLLE Magnolia 2015, LLC | Flowline junction fittings for frac systems |
US10633934B2 (en) | 2017-01-05 | 2020-04-28 | KHOLLE Magnolia 2015, LLC | Flowline junction fitting with long-sweep bore |
FR3069905B1 (fr) | 2017-08-03 | 2019-09-06 | Alcrys Fluid Control & Services | Module pour un kit de distribution et de regulation d’un gaz sous pression, kit et systeme de distribution et de regulation associes |
WO2019217315A1 (en) | 2018-05-07 | 2019-11-14 | Lam Research Corporation | Configurable distributed-interlock-system |
US10982522B1 (en) | 2018-07-18 | 2021-04-20 | KHOLLE Magnolia 2015, LLC | Missile for frac manifold |
CN113994460A (zh) * | 2019-04-15 | 2022-01-28 | 朗姆研究公司 | 用于气体输送的模块部件系统 |
US11619326B1 (en) | 2019-06-24 | 2023-04-04 | Cantex International, Inc. | Anti-vibration mount |
FR3108701B1 (fr) | 2020-03-25 | 2022-02-18 | Air Liquide France Ind | Dispositif de prélèvement d’échantillon de gaz |
WO2023006204A1 (fr) | 2021-07-29 | 2023-02-02 | Air Liquide France Industrie | Dispositif de prélèvement d'échantillon de gaz |
US20230097346A1 (en) * | 2021-09-30 | 2023-03-30 | Applied Materials, Inc. | Flow guide apparatuses for flow uniformity control in process chambers |
WO2023172558A1 (en) * | 2022-03-10 | 2023-09-14 | Applied Materials, Inc. | Modular multl-directional gas mixing block |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3572368A (en) | 1969-09-02 | 1971-03-23 | Honeywell Inc | Pneumatic control system manifold means |
US3806088A (en) * | 1972-05-01 | 1974-04-23 | Hydro Syst Inc | Manifold apparatus |
DK134080B (da) | 1972-08-08 | 1976-09-06 | Teknova As | Apparatsæt til indkobling i en mediumledning, navnlig en trykluftledning. |
DE2302267B1 (de) | 1973-01-18 | 1974-06-12 | Abex Gmbh Denison, 4010 Hilden | Leitungssäule für hydraulische Ventile |
FR2257846B1 (ja) | 1973-07-03 | 1976-05-28 | Legris France Sa | |
US3885389A (en) * | 1973-09-26 | 1975-05-27 | Melvin Corp | Manifold with internal filter |
FR2250907A1 (en) | 1973-11-09 | 1975-06-06 | Bouteille Daniel | Assembly baseplates for pneumatic or hydraulic distributors - tongue and groove are standard modules which connect with into rigid block |
DE2547847A1 (de) * | 1975-10-25 | 1977-05-05 | Beukenberg Maschf | Vorrichtung zur verteilung von hydraulischen oder pneumatischen arbeitsmedien |
JPS5325775A (en) | 1976-08-24 | 1978-03-09 | Miller Fluid Power Corp | Module type fluid flow control element |
US4082324A (en) | 1976-10-04 | 1978-04-04 | Obrecht Robert E | Connection arrangement for manifold blocks |
DE2648751C2 (de) | 1976-10-27 | 1986-04-30 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen | Vorrichtung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß |
US4524807A (en) | 1982-05-21 | 1985-06-25 | Humphrey Products Company | Snap-together modular manifold construction |
US4657047A (en) | 1984-12-10 | 1987-04-14 | Nordson Corporation | Modular color changers with improved valves and manifolds |
US4848393A (en) | 1986-06-27 | 1989-07-18 | West Robert E | Fault tolerant fluid flow apparatus |
JP2559613B2 (ja) * | 1988-02-29 | 1996-12-04 | 株式会社小松製作所 | 操作弁装置 |
US5178191A (en) | 1990-09-05 | 1993-01-12 | Newmatic Controls Inc. | Modular pneumatic control systems |
DE4111893C2 (de) | 1991-04-09 | 1995-04-13 | Mannesmann Ag | Ventil-Grundplatte, insbesondere für gasförmige Medien |
US5368062A (en) | 1992-01-29 | 1994-11-29 | Kabushiki Kaisha Toshiba | Gas supplying system and gas supplying apparatus |
US5439026A (en) | 1992-12-11 | 1995-08-08 | Tokyo Electron Limited | Processing apparatus and flow control arrangement therefor |
JP2616875B2 (ja) * | 1993-05-12 | 1997-06-04 | エスエムシー株式会社 | マニホールドバルブ |
WO1995010001A1 (en) | 1993-10-06 | 1995-04-13 | Unit Instruments, Inc. | Apparatus for handling process fluid |
US5730181A (en) | 1994-07-15 | 1998-03-24 | Unit Instruments, Inc. | Mass flow controller with vertical purifier |
US5605179A (en) | 1995-03-17 | 1997-02-25 | Insync Systems, Inc. | Integrated gas panel |
DE59609634D1 (de) | 1995-03-24 | 2002-10-17 | Rexroth Mecman Gmbh | Modulare Ventilanordnung |
JP3546275B2 (ja) * | 1995-06-30 | 2004-07-21 | 忠弘 大見 | 流体制御装置 |
US5642756A (en) * | 1996-02-29 | 1997-07-01 | Bio-Chem Valve Inc. | Valve manifold assembly |
US5662143A (en) | 1996-05-16 | 1997-09-02 | Gasonics International | Modular gas box system |
US5992463A (en) | 1996-10-30 | 1999-11-30 | Unit Instruments, Inc. | Gas panel |
US5836355A (en) * | 1996-12-03 | 1998-11-17 | Insync Systems, Inc. | Building blocks for integrated gas panel |
DE29706400U1 (de) * | 1997-04-11 | 1997-05-28 | Roetelmann Gmbh & Co | Vorrichtung zum Verteilen oder Mischen von fluiden Medien |
-
1997
- 1997-09-15 US US08/931,060 patent/US6302141B1/en not_active Expired - Lifetime
- 1997-11-19 WO PCT/US1997/021327 patent/WO1998025058A1/en not_active Application Discontinuation
- 1997-11-19 EP EP97947611A patent/EP0941432A4/en not_active Withdrawn
- 1997-11-19 JP JP52562298A patent/JP2002515107A/ja not_active Ceased
- 1997-11-19 AU AU52654/98A patent/AU5265498A/en not_active Abandoned
- 1997-11-19 KR KR1019997004883A patent/KR20000069268A/ko not_active Application Discontinuation