JP2002514001A5 - - Google Patents

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Publication number
JP2002514001A5
JP2002514001A5 JP2000546922A JP2000546922A JP2002514001A5 JP 2002514001 A5 JP2002514001 A5 JP 2002514001A5 JP 2000546922 A JP2000546922 A JP 2000546922A JP 2000546922 A JP2000546922 A JP 2000546922A JP 2002514001 A5 JP2002514001 A5 JP 2002514001A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000546922A
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Japanese (ja)
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JP2002514001A (ja
JP4620866B2 (ja
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Publication date
Priority claimed from US09/072,097 external-priority patent/US6547510B1/en
Application filed filed Critical
Publication of JP2002514001A publication Critical patent/JP2002514001A/ja
Publication of JP2002514001A5 publication Critical patent/JP2002514001A5/ja
Application granted granted Critical
Publication of JP4620866B2 publication Critical patent/JP4620866B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000546922A 1998-05-04 1999-04-06 同軸駆動軸を備えた二重アーム装置及びこれを用いた基板搬送方法 Expired - Lifetime JP4620866B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/072,097 1998-05-04
US09/072,097 US6547510B1 (en) 1998-05-04 1998-05-04 Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
PCT/US1999/007526 WO1999056920A1 (en) 1998-05-04 1999-04-06 Dual arm apparatus with co-axial drive shafts

Publications (3)

Publication Number Publication Date
JP2002514001A JP2002514001A (ja) 2002-05-14
JP2002514001A5 true JP2002514001A5 (https=) 2009-09-17
JP4620866B2 JP4620866B2 (ja) 2011-01-26

Family

ID=22105547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000546922A Expired - Lifetime JP4620866B2 (ja) 1998-05-04 1999-04-06 同軸駆動軸を備えた二重アーム装置及びこれを用いた基板搬送方法

Country Status (6)

Country Link
US (1) US6547510B1 (https=)
EP (1) EP1107853A1 (https=)
JP (1) JP4620866B2 (https=)
KR (1) KR20010043252A (https=)
AU (1) AU3384199A (https=)
WO (1) WO1999056920A1 (https=)

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US6350097B1 (en) * 1999-04-19 2002-02-26 Applied Materials, Inc. Method and apparatus for processing wafers
US6663333B2 (en) * 2001-07-13 2003-12-16 Axcelis Technologies, Inc. Wafer transport apparatus
US20030202865A1 (en) * 2002-04-25 2003-10-30 Applied Materials, Inc. Substrate transfer apparatus
US7891935B2 (en) 2002-05-09 2011-02-22 Brooks Automation, Inc. Dual arm robot
US6789793B2 (en) * 2002-05-24 2004-09-14 Heidelberger Druckmaschinen Ag Rotary signature transport device
US7384907B2 (en) * 2002-12-13 2008-06-10 Duke University Method of treating infection with ABl tyrosine kinase inhibitors
US20050223837A1 (en) * 2003-11-10 2005-10-13 Blueshift Technologies, Inc. Methods and systems for driving robotic components of a semiconductor handling system
US7458763B2 (en) 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
US20070269297A1 (en) 2003-11-10 2007-11-22 Meulen Peter V D Semiconductor wafer handling and transport
US20050255953A1 (en) * 2004-05-12 2005-11-17 Timothy Puckett Band Drive System for Telescopes, LIDAR and Other Instruments
WO2006014411A1 (en) 2004-07-02 2006-02-09 Strasbaugh Method and system for processing wafers
US8052030B2 (en) 2005-01-24 2011-11-08 The Boeing Company Apparatus for friction stir welding using spindle-in-spindle
US9517488B2 (en) 2004-12-30 2016-12-13 Plas-Pak Industries, Inc. Component delivery system utilizing film bags
US20100108709A1 (en) 2004-12-30 2010-05-06 Plas-Pak Industries Cartridge delivery system utilizing film bags
US8167522B2 (en) * 2005-03-30 2012-05-01 Brooks Automation, Inc. Substrate transport apparatus with active edge gripper
TWI342597B (en) * 2005-11-21 2011-05-21 Applied Materials Inc Methods and apparatus for transferring substrates during electronic device manufacturing
US7946800B2 (en) * 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
SG147353A1 (en) 2007-05-07 2008-11-28 Mfg Integration Technology Ltd Apparatus for object processing
JP2013544034A (ja) 2010-11-10 2013-12-09 ブルックス オートメーション インコーポレイテッド 双腕ロボット
WO2012125572A2 (en) * 2011-03-11 2012-09-20 Brooks Automation, Inc. Substrate processing tool
CN104428884B (zh) * 2012-07-05 2017-10-24 应用材料公司 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法
US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
KR102214943B1 (ko) * 2013-01-18 2021-02-10 퍼시몬 테크놀로지스 코포레이션 상이한 링크 길이를 가지는 아암이 구비되는 로봇
ES2431263B1 (es) * 2013-04-23 2014-09-10 Barnizados Industriales, S.A. Placa para falso techo o pared, procedimiento de fabricación de dicha placa
TWI672191B (zh) * 2013-10-16 2019-09-21 Applied Materials, Inc. 帶有裝設樞紐手臂之化學機械拋光機的系統及方法
CN104795347B (zh) * 2014-01-22 2018-05-04 北京北方华创微电子装备有限公司 晶圆支撑装置和去气工艺腔室
CN114367970B (zh) 2015-03-12 2024-04-05 柿子技术公司 具有从动末端执行器运动的机器人
WO2016172003A1 (en) * 2015-04-20 2016-10-27 Applied Materials, Inc. Buffer chamber wafer heating mechanism and supporting robot
US10580682B2 (en) 2017-02-15 2020-03-03 Persimmon Technologies, Corp. Material-handling robot with multiple end-effectors
US10629472B2 (en) 2017-08-17 2020-04-21 Persimmon Technologies Corporation Material handling robot
CN107717959B (zh) * 2017-11-07 2020-08-14 大连理工大学 一种部分解耦的scara高速并联机械手
CN110652357B (zh) * 2019-09-19 2020-06-12 中国科学院自动化研究所 双导丝或球囊的血管介入器械操控装置
US11679046B2 (en) 2019-11-04 2023-06-20 GE Precision Healthcare LLC Method and system for providing dual axes motions using a single drive
US11235935B2 (en) 2020-01-23 2022-02-01 Brooks Automation, Inc. Substrate transport apparatus
TWI767556B (zh) * 2021-02-08 2022-06-11 鴻勁精密股份有限公司 載具機構及其應用之作業設備

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