JP2002510841A5 - - Google Patents

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Publication number
JP2002510841A5
JP2002510841A5 JP2000541717A JP2000541717A JP2002510841A5 JP 2002510841 A5 JP2002510841 A5 JP 2002510841A5 JP 2000541717 A JP2000541717 A JP 2000541717A JP 2000541717 A JP2000541717 A JP 2000541717A JP 2002510841 A5 JP2002510841 A5 JP 2002510841A5
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JP
Japan
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JP2000541717A
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JP4597367B2 (ja
JP2002510841A (ja
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Priority claimed from US09/052,144 external-priority patent/US6155199A/en
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Publication of JP2002510841A publication Critical patent/JP2002510841A/ja
Publication of JP2002510841A5 publication Critical patent/JP2002510841A5/ja
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Publication of JP4597367B2 publication Critical patent/JP4597367B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000541717A 1998-03-31 1999-03-25 プラズマ発生装置及びプラズマ発生方法 Expired - Lifetime JP4597367B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/052,144 1998-03-31
US09/052,144 US6155199A (en) 1998-03-31 1998-03-31 Parallel-antenna transformer-coupled plasma generation system
PCT/US1999/006495 WO1999050885A1 (en) 1998-03-31 1999-03-25 Parallel-antenna transformer-coupled plasma generation systems

Publications (3)

Publication Number Publication Date
JP2002510841A JP2002510841A (ja) 2002-04-09
JP2002510841A5 true JP2002510841A5 (ja) 2006-05-18
JP4597367B2 JP4597367B2 (ja) 2010-12-15

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JP2000541717A Expired - Lifetime JP4597367B2 (ja) 1998-03-31 1999-03-25 プラズマ発生装置及びプラズマ発生方法

Country Status (4)

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US (1) US6155199A (ja)
JP (1) JP4597367B2 (ja)
KR (1) KR100602074B1 (ja)
WO (1) WO1999050885A1 (ja)

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