JP2002506993A5 - - Google Patents

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Publication number
JP2002506993A5
JP2002506993A5 JP2000537055A JP2000537055A JP2002506993A5 JP 2002506993 A5 JP2002506993 A5 JP 2002506993A5 JP 2000537055 A JP2000537055 A JP 2000537055A JP 2000537055 A JP2000537055 A JP 2000537055A JP 2002506993 A5 JP2002506993 A5 JP 2002506993A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000537055A
Other languages
Japanese (ja)
Other versions
JP2002506993A (ja
Filing date
Publication date
Priority claimed from US09/039,707 external-priority patent/US6096559A/en
Application filed filed Critical
Publication of JP2002506993A publication Critical patent/JP2002506993A/ja
Publication of JP2002506993A5 publication Critical patent/JP2002506993A5/ja
Pending legal-status Critical Current

Links

JP2000537055A 1998-03-16 1999-03-16 マイクロメカニカル熱量測定センサー Pending JP2002506993A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/039,707 1998-03-16
US09/039,707 US6096559A (en) 1998-03-16 1998-03-16 Micromechanical calorimetric sensor
PCT/US1999/005749 WO1999047911A1 (en) 1998-03-16 1999-03-16 Micromechanical calorimetric sensor

Publications (2)

Publication Number Publication Date
JP2002506993A JP2002506993A (ja) 2002-03-05
JP2002506993A5 true JP2002506993A5 (enExample) 2006-05-11

Family

ID=21906948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000537055A Pending JP2002506993A (ja) 1998-03-16 1999-03-16 マイクロメカニカル熱量測定センサー

Country Status (6)

Country Link
US (1) US6096559A (enExample)
EP (1) EP1066511A4 (enExample)
JP (1) JP2002506993A (enExample)
AU (1) AU3007599A (enExample)
CA (1) CA2322387A1 (enExample)
WO (1) WO1999047911A1 (enExample)

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US20060133961A1 (en) * 2004-10-21 2006-06-22 The Regents Of The University Of California Bi-material cantilevers with flipped over material sections and structures formed therefrom
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US7928343B2 (en) * 2007-12-04 2011-04-19 The Board Of Trustees Of The University Of Illinois Microcantilever heater-thermometer with integrated temperature-compensated strain sensor
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US8387443B2 (en) * 2009-09-11 2013-03-05 The Board Of Trustees Of The University Of Illinois Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer
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KR102042706B1 (ko) * 2018-04-10 2019-11-08 국민대학교산학협력단 열팽창 정도 측정 장치 및 열팽창 정도 측정 방법
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