JP2002506993A - マイクロメカニカル熱量測定センサー - Google Patents

マイクロメカニカル熱量測定センサー

Info

Publication number
JP2002506993A
JP2002506993A JP2000537055A JP2000537055A JP2002506993A JP 2002506993 A JP2002506993 A JP 2002506993A JP 2000537055 A JP2000537055 A JP 2000537055A JP 2000537055 A JP2000537055 A JP 2000537055A JP 2002506993 A JP2002506993 A JP 2002506993A
Authority
JP
Japan
Prior art keywords
spring element
microcantilever
sample
deflection
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000537055A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002506993A5 (enExample
Inventor
トーマス ジー． サンダット
ミッチェル ジェイ． ドクティクズ
Original Assignee
ユーティ−バッテル エルエルシー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ユーティ−バッテル エルエルシー filed Critical ユーティ−バッテル エルエルシー
Publication of JP2002506993A publication Critical patent/JP2002506993A/ja
Publication of JP2002506993A5 publication Critical patent/JP2002506993A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
JP2000537055A 1998-03-16 1999-03-16 マイクロメカニカル熱量測定センサー Pending JP2002506993A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/039,707 US6096559A (en) 1998-03-16 1998-03-16 Micromechanical calorimetric sensor
US09/039,707 1998-03-16
PCT/US1999/005749 WO1999047911A1 (en) 1998-03-16 1999-03-16 Micromechanical calorimetric sensor

Publications (2)

Publication Number Publication Date
JP2002506993A true JP2002506993A (ja) 2002-03-05
JP2002506993A5 JP2002506993A5 (enExample) 2006-05-11

Family

ID=21906948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000537055A Pending JP2002506993A (ja) 1998-03-16 1999-03-16 マイクロメカニカル熱量測定センサー

Country Status (6)

Country Link
US (1) US6096559A (enExample)
EP (1) EP1066511A4 (enExample)
JP (1) JP2002506993A (enExample)
AU (1) AU3007599A (enExample)
CA (1) CA2322387A1 (enExample)
WO (1) WO1999047911A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005156525A (ja) * 2003-10-31 2005-06-16 Seiko Instruments Inc メカニカルセンサーおよびそれを用いた分析システム
JP2007516438A (ja) * 2003-12-04 2007-06-21 カウンシル・フォー・ザ・セントラル・ラボラトリー・オブ・ザ・リサーチ・カウンシルズ 流体プローブ
JP2014515483A (ja) * 2011-05-25 2014-06-30 マイクロヴィスク リミテッド バイモルフにより作動されピエゾ抵抗により読出しを行うマイクロカンチレバーセンサ
KR20190118419A (ko) * 2018-04-10 2019-10-18 국민대학교산학협력단 열팽창 정도 측정 장치 및 열팽창 정도 측정 방법

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US6805839B2 (en) * 1999-03-12 2004-10-19 Joseph P. Cunningham Response microcantilever thermal detector
US6312959B1 (en) * 1999-03-30 2001-11-06 U.T. Battelle, Llc Method using photo-induced and thermal bending of MEMS sensors
US6289717B1 (en) * 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
US6455000B1 (en) * 1999-07-12 2002-09-24 Fantom Technologies Inc. Method and apparatus for measuring the concentration of a gas
EP1204842A4 (en) * 1999-08-19 2003-04-02 Univ California APPARATUS AND METHOD FOR THE VISUAL IDENTIFICATION OF MICROFORCES BY MEANS OF A RANGE OF BOOM BLOCKS
US6436346B1 (en) * 1999-09-14 2002-08-20 U T Battelle, Llc Micro-machined calorimetric biosensors
AU7549700A (en) * 1999-11-03 2001-05-14 International Business Machines Corporation Cantilever sensors and transducers
US7148017B1 (en) * 2000-07-12 2006-12-12 Cornell Research Foundation, Inc. High sensitivity mechanical resonant sensor
AUPR007500A0 (en) * 2000-09-13 2000-10-05 Mulvaney, Paul Micro cantilever rheometer
CN1461411A (zh) * 2000-09-20 2003-12-10 清野祐子 反应检测方法,免疫反应检测方法及其设备
US20030068655A1 (en) * 2001-09-12 2003-04-10 Protiveris, Inc. Microcantilever apparatus and methods for detection of enzymes
US6926864B2 (en) * 2001-11-09 2005-08-09 Protiveris Inc Microfluidics apparatus and methods for use thereof
US20060121502A1 (en) * 2001-11-09 2006-06-08 Robert Cain Microfluidics apparatus for cantilevers and methods of use therefor
US6671631B2 (en) 2002-01-04 2003-12-30 General Electric Company Systems and methods for analyzing viscoelastic properties of combinatorial libraries of materials
US7754492B2 (en) * 2002-04-01 2010-07-13 Palo Alto Research Center Incorporated Thermal sensing device
US7473031B2 (en) * 2002-04-01 2009-01-06 Palo Alto Research Center, Incorporated Resistive thermal sensing
US7473030B2 (en) 2002-04-01 2009-01-06 Palo Alto Research Center Incorporated Thermal sensing
US7833800B2 (en) * 2002-04-01 2010-11-16 Palo Alto Research Center Incorporated Thermal sensing with bridge circuitry
US7141210B2 (en) * 2002-04-01 2006-11-28 Palo Alto Research Center Incorporated Apparatus and method for a nanocalorimeter for detecting chemical reactions
EP1511996A1 (en) * 2002-06-07 2005-03-09 Cantion A/S A cantilever sensor with a current shield and a method for its production
US7387889B2 (en) * 2002-08-22 2008-06-17 Massachusetts Institute Of Technology Measurement of concentrations and binding energetics
JP2006505795A (ja) * 2002-11-08 2006-02-16 プロウティヴァリス、インク マイクロ片持ばりアレイ用の多重照明器、および素子読取装置
WO2004046689A2 (en) * 2002-11-15 2004-06-03 The Regents Of The University Of California System and method for multiplexed biomolecular analysis
US7344678B2 (en) * 2002-11-15 2008-03-18 The Regents Of The University Of California Composite sensor membrane
US7521257B2 (en) * 2003-02-11 2009-04-21 The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada, Reno Chemical sensor with oscillating cantilevered probe and mechanical stop
US7260980B2 (en) 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
US20060257286A1 (en) * 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
US7531002B2 (en) * 2004-04-16 2009-05-12 Depuy Spine, Inc. Intervertebral disc with monitoring and adjusting capabilities
US20050255448A1 (en) * 2004-05-13 2005-11-17 Arun Majumdar System for amplifying optical detection of cantilever deflection
US7217428B2 (en) * 2004-05-28 2007-05-15 Technology Innovations Llc Drug delivery apparatus utilizing cantilever
GB2437753B8 (en) 2004-10-01 2009-05-20 Nevada System Of Higher Education Cantilevered probe detector with piezoelectric element
US20060133961A1 (en) * 2004-10-21 2006-06-22 The Regents Of The University Of California Bi-material cantilevers with flipped over material sections and structures formed therefrom
US7280078B2 (en) 2004-11-20 2007-10-09 Scenterra, Inc. Sensor for detecting high frequency signals
WO2006055960A2 (en) * 2004-11-20 2006-05-26 Scenterra, Inc. Device for emission of high frequency signals
US7914735B2 (en) * 2005-01-18 2011-03-29 Palo Alto Research Center Incorporated Use of physical barriers to minimize evaporative heat losses
US7959873B1 (en) * 2005-07-21 2011-06-14 California Institute Of Technology Biological detection based on differentially coupled nanomechanical systems using self-sensing cantilevers with attonewton force resolution
US7429125B2 (en) * 2005-11-09 2008-09-30 Hewlett-Packard Development Company, L.P. System and method for cantilever based calorimetric analysis
US7691130B2 (en) * 2006-01-27 2010-04-06 Warsaw Orthopedic, Inc. Spinal implants including a sensor and methods of use
US20080245135A1 (en) * 2006-11-15 2008-10-09 Cornell Research Foundation, Inc. Microfluidic encapsulated nems resonators
US20080160638A1 (en) * 2006-12-27 2008-07-03 David Lederman Functionalized Microcantilever Sensor and Associated Method For Detection of Targeted Analytes
US8168120B1 (en) 2007-03-06 2012-05-01 The Research Foundation Of State University Of New York Reliable switch that is triggered by the detection of a specific gas or substance
US7632008B2 (en) * 2007-06-08 2009-12-15 Palo Alto Research Center Incorporated Ranking fragment types with calorimetry
KR100912220B1 (ko) * 2007-08-30 2009-08-14 재단법인서울대학교산학협력재단 코팅 스트레스 측정장치
US7928343B2 (en) * 2007-12-04 2011-04-19 The Board Of Trustees Of The University Of Illinois Microcantilever heater-thermometer with integrated temperature-compensated strain sensor
WO2009097487A1 (en) * 2008-01-31 2009-08-06 The Board Of Trustees Of The University Of Illinois Temperature-dependent nanoscale contact potential measurement technique and device
US8931950B2 (en) 2008-08-20 2015-01-13 The Board Of Trustees Of The University Of Illinois Device for calorimetric measurement
US8130072B2 (en) * 2009-05-14 2012-03-06 Palo Alto Research Center Incorporated Vanadium oxide thermal microprobes
US8393785B2 (en) * 2009-05-14 2013-03-12 Palo Alto Research Center Incorporated Nanocalorimeter based on thermal probes
US8387443B2 (en) * 2009-09-11 2013-03-05 The Board Of Trustees Of The University Of Illinois Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer
TWI420537B (zh) * 2009-12-29 2013-12-21 Univ Nat Taiwan 熱效應自補償系統及用於熱效應補償的裝置與方法
US8914911B2 (en) 2011-08-15 2014-12-16 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy
US8533861B2 (en) 2011-08-15 2013-09-10 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy
EP2648005A1 (en) * 2012-04-02 2013-10-09 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Calibration of a mechanical property of SPM cantilevers
WO2014063712A1 (en) * 2012-10-26 2014-05-01 Danmarks Tekniske Universitet Photothermal resonance
GB2508358B (en) 2012-11-28 2014-10-29 Microvisk Ltd Apparatus and method for monitoring a sedimentation parameter in a fluid medium sample
CN107084964B (zh) * 2017-06-05 2021-02-05 京东方科技集团股份有限公司 生物传感器及其制备方法和进行生物传感的方法
EP3715826B1 (en) * 2019-03-26 2024-03-06 Infineon Technologies AG Sensor device, particle sensor device and method for detecting a particulate matter density

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US4591550A (en) * 1984-03-01 1986-05-27 Molecular Devices Corporation Device having photoresponsive electrode for determining analytes including ligands and antibodies
US4963815A (en) * 1987-07-10 1990-10-16 Molecular Devices Corporation Photoresponsive electrode for determination of redox potential
US5440920A (en) * 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
US5445008A (en) * 1994-03-24 1995-08-29 Martin Marietta Energy Systems, Inc. Microbar sensor
US5719324A (en) * 1995-06-16 1998-02-17 Lockheed Martin Energy Systems, Inc. Microcantilever sensor
US5807758A (en) * 1995-07-21 1998-09-15 Lee; Gil U. Chemical and biological sensor using an ultra-sensitive force transducer
JP2940643B2 (ja) * 1995-09-01 1999-08-25 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 振れセンサを組み込んだカンチレバー
US5831181A (en) * 1995-09-29 1998-11-03 The Regents Of The University Of California Automated tool for precision machining and imaging

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005156525A (ja) * 2003-10-31 2005-06-16 Seiko Instruments Inc メカニカルセンサーおよびそれを用いた分析システム
JP2007516438A (ja) * 2003-12-04 2007-06-21 カウンシル・フォー・ザ・セントラル・ラボラトリー・オブ・ザ・リサーチ・カウンシルズ 流体プローブ
JP2011102810A (ja) * 2003-12-04 2011-05-26 Science & Technology Facilites Council 流体プローブ
JP2011154036A (ja) * 2003-12-04 2011-08-11 Microvisk Ltd 流体プローブ
JP2014515483A (ja) * 2011-05-25 2014-06-30 マイクロヴィスク リミテッド バイモルフにより作動されピエゾ抵抗により読出しを行うマイクロカンチレバーセンサ
KR20190118419A (ko) * 2018-04-10 2019-10-18 국민대학교산학협력단 열팽창 정도 측정 장치 및 열팽창 정도 측정 방법
KR102042706B1 (ko) * 2018-04-10 2019-11-08 국민대학교산학협력단 열팽창 정도 측정 장치 및 열팽창 정도 측정 방법

Also Published As

Publication number Publication date
EP1066511A1 (en) 2001-01-10
WO1999047911A1 (en) 1999-09-23
CA2322387A1 (en) 1999-09-23
US6096559A (en) 2000-08-01
EP1066511A4 (en) 2006-08-02
AU3007599A (en) 1999-10-11

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