CA2322387A1 - Micromechanical calorimetric sensor - Google Patents
Micromechanical calorimetric sensor Download PDFInfo
- Publication number
- CA2322387A1 CA2322387A1 CA002322387A CA2322387A CA2322387A1 CA 2322387 A1 CA2322387 A1 CA 2322387A1 CA 002322387 A CA002322387 A CA 002322387A CA 2322387 A CA2322387 A CA 2322387A CA 2322387 A1 CA2322387 A1 CA 2322387A1
- Authority
- CA
- Canada
- Prior art keywords
- spring element
- microcantilever
- coating material
- biomaterial
- cantilever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000006243 chemical reaction Methods 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims abstract description 25
- 238000000576 coating method Methods 0.000 claims description 49
- 239000011248 coating agent Substances 0.000 claims description 42
- 239000000463 material Substances 0.000 claims description 37
- 239000000126 substance Substances 0.000 claims description 36
- 238000001514 detection method Methods 0.000 claims description 27
- 239000012491 analyte Substances 0.000 claims description 16
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 11
- 230000008859 change Effects 0.000 claims description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 11
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 10
- 229910052737 gold Inorganic materials 0.000 claims description 10
- 239000010931 gold Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 8
- 229920000642 polymer Polymers 0.000 claims description 6
- 102000004190 Enzymes Human genes 0.000 claims description 5
- 108090000790 Enzymes Proteins 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 239000000427 antigen Substances 0.000 claims description 4
- 102000036639 antigens Human genes 0.000 claims description 4
- 108091007433 antigens Proteins 0.000 claims description 4
- 150000001720 carbohydrates Chemical class 0.000 claims description 4
- 235000014633 carbohydrates Nutrition 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000003814 drug Substances 0.000 claims description 4
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 102000004196 processed proteins & peptides Human genes 0.000 claims description 4
- 108090000765 processed proteins & peptides Proteins 0.000 claims description 4
- 102000004169 proteins and genes Human genes 0.000 claims description 4
- 108090000623 proteins and genes Proteins 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 150000003377 silicon compounds Chemical class 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 229940119177 germanium dioxide Drugs 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 230000005641 tunneling Effects 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 239000012620 biological material Substances 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 6
- 108020004711 Nucleic Acid Probes Proteins 0.000 claims 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 2
- 229910001385 heavy metal Inorganic materials 0.000 claims 2
- 239000002853 nucleic acid probe Substances 0.000 claims 2
- 230000002441 reversible effect Effects 0.000 claims 2
- 229910052717 sulfur Inorganic materials 0.000 claims 2
- 239000011593 sulfur Substances 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000001052 transient effect Effects 0.000 claims 1
- 239000003153 chemical reaction reagent Substances 0.000 abstract 2
- 239000000523 sample Substances 0.000 description 35
- 238000005452 bending Methods 0.000 description 18
- 238000005842 biochemical reaction Methods 0.000 description 15
- 230000035945 sensitivity Effects 0.000 description 10
- 229920001222 biopolymer Polymers 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 6
- 230000008646 thermal stress Effects 0.000 description 6
- 230000004044 response Effects 0.000 description 5
- 230000035882 stress Effects 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 2
- 229960001138 acetylsalicylic acid Drugs 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 210000005036 nerve Anatomy 0.000 description 2
- 150000007523 nucleic acids Chemical class 0.000 description 2
- 102000039446 nucleic acids Human genes 0.000 description 2
- 108020004707 nucleic acids Proteins 0.000 description 2
- 229920001282 polysaccharide Polymers 0.000 description 2
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000007707 calorimetry Methods 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 150000004676 glycans Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000002831 pharmacologic agent Substances 0.000 description 1
- 239000005017 polysaccharide Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
- G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/039,707 | 1998-03-16 | ||
| US09/039,707 US6096559A (en) | 1998-03-16 | 1998-03-16 | Micromechanical calorimetric sensor |
| PCT/US1999/005749 WO1999047911A1 (en) | 1998-03-16 | 1999-03-16 | Micromechanical calorimetric sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2322387A1 true CA2322387A1 (en) | 1999-09-23 |
Family
ID=21906948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002322387A Abandoned CA2322387A1 (en) | 1998-03-16 | 1999-03-16 | Micromechanical calorimetric sensor |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6096559A (enExample) |
| EP (1) | EP1066511A4 (enExample) |
| JP (1) | JP2002506993A (enExample) |
| AU (1) | AU3007599A (enExample) |
| CA (1) | CA2322387A1 (enExample) |
| WO (1) | WO1999047911A1 (enExample) |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6805839B2 (en) * | 1999-03-12 | 2004-10-19 | Joseph P. Cunningham | Response microcantilever thermal detector |
| US6289717B1 (en) * | 1999-03-30 | 2001-09-18 | U. T. Battelle, Llc | Micromechanical antibody sensor |
| US6312959B1 (en) * | 1999-03-30 | 2001-11-06 | U.T. Battelle, Llc | Method using photo-induced and thermal bending of MEMS sensors |
| US6455000B1 (en) * | 1999-07-12 | 2002-09-24 | Fantom Technologies Inc. | Method and apparatus for measuring the concentration of a gas |
| JP2003507723A (ja) * | 1999-08-19 | 2003-02-25 | ザ・リージェンツ・オブ・ザ・ユニバーシティー・オブ・カリフォルニア | カンチレバーアレイブロックのパレットにより微小力を可視的に識別する装置及び方法 |
| US6436346B1 (en) * | 1999-09-14 | 2002-08-20 | U T Battelle, Llc | Micro-machined calorimetric biosensors |
| US7560070B1 (en) * | 1999-11-03 | 2009-07-14 | International Business Machines Corporation | Cantilever sensors and transducers |
| US7148017B1 (en) * | 2000-07-12 | 2006-12-12 | Cornell Research Foundation, Inc. | High sensitivity mechanical resonant sensor |
| AUPR007500A0 (en) * | 2000-09-13 | 2000-10-05 | Mulvaney, Paul | Micro cantilever rheometer |
| JPWO2002025274A1 (ja) * | 2000-09-20 | 2004-01-29 | 清野 祐子 | 反応検出方法、免疫反応検出方法及び装置 |
| US20030068655A1 (en) * | 2001-09-12 | 2003-04-10 | Protiveris, Inc. | Microcantilever apparatus and methods for detection of enzymes |
| US6926864B2 (en) * | 2001-11-09 | 2005-08-09 | Protiveris Inc | Microfluidics apparatus and methods for use thereof |
| US20060121502A1 (en) * | 2001-11-09 | 2006-06-08 | Robert Cain | Microfluidics apparatus for cantilevers and methods of use therefor |
| US6671631B2 (en) | 2002-01-04 | 2003-12-30 | General Electric Company | Systems and methods for analyzing viscoelastic properties of combinatorial libraries of materials |
| US7473031B2 (en) * | 2002-04-01 | 2009-01-06 | Palo Alto Research Center, Incorporated | Resistive thermal sensing |
| US7754492B2 (en) * | 2002-04-01 | 2010-07-13 | Palo Alto Research Center Incorporated | Thermal sensing device |
| US7473030B2 (en) | 2002-04-01 | 2009-01-06 | Palo Alto Research Center Incorporated | Thermal sensing |
| US7141210B2 (en) * | 2002-04-01 | 2006-11-28 | Palo Alto Research Center Incorporated | Apparatus and method for a nanocalorimeter for detecting chemical reactions |
| US7833800B2 (en) * | 2002-04-01 | 2010-11-16 | Palo Alto Research Center Incorporated | Thermal sensing with bridge circuitry |
| AU2003232165A1 (en) * | 2002-06-07 | 2003-12-22 | Cantion A/S | A cantilever sensor with a current shield and a method for its production |
| US7387889B2 (en) * | 2002-08-22 | 2008-06-17 | Massachusetts Institute Of Technology | Measurement of concentrations and binding energetics |
| CA2504277A1 (en) * | 2002-11-08 | 2004-05-27 | Protiveris, Inc. | Multiplex illuminator and device reader for microcantilever array |
| WO2004046689A2 (en) * | 2002-11-15 | 2004-06-03 | The Regents Of The University Of California | System and method for multiplexed biomolecular analysis |
| US7344678B2 (en) * | 2002-11-15 | 2008-03-18 | The Regents Of The University Of California | Composite sensor membrane |
| US7521257B2 (en) * | 2003-02-11 | 2009-04-21 | The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada, Reno | Chemical sensor with oscillating cantilevered probe and mechanical stop |
| US7260980B2 (en) | 2003-03-11 | 2007-08-28 | Adams Jesse D | Liquid cell and passivated probe for atomic force microscopy and chemical sensing |
| US20060257286A1 (en) | 2003-10-17 | 2006-11-16 | Adams Jesse D | Self-sensing array of microcantilevers for chemical detection |
| JP4898097B2 (ja) * | 2003-10-31 | 2012-03-14 | セイコーインスツル株式会社 | メカニカルセンサーおよびそれを用いた分析システム |
| GB0328054D0 (en) * | 2003-12-04 | 2004-01-07 | Council Cent Lab Res Councils | Fluid probe |
| US7531002B2 (en) * | 2004-04-16 | 2009-05-12 | Depuy Spine, Inc. | Intervertebral disc with monitoring and adjusting capabilities |
| US20050255448A1 (en) * | 2004-05-13 | 2005-11-17 | Arun Majumdar | System for amplifying optical detection of cantilever deflection |
| US7217428B2 (en) * | 2004-05-28 | 2007-05-15 | Technology Innovations Llc | Drug delivery apparatus utilizing cantilever |
| GB2437753B8 (en) | 2004-10-01 | 2009-05-20 | Nevada System Of Higher Education | Cantilevered probe detector with piezoelectric element |
| US20060133961A1 (en) * | 2004-10-21 | 2006-06-22 | The Regents Of The University Of California | Bi-material cantilevers with flipped over material sections and structures formed therefrom |
| US7288873B2 (en) * | 2004-11-20 | 2007-10-30 | Scenterra, Inc. | Device for emission of high frequency signals |
| US7280078B2 (en) | 2004-11-20 | 2007-10-09 | Scenterra, Inc. | Sensor for detecting high frequency signals |
| US7914735B2 (en) * | 2005-01-18 | 2011-03-29 | Palo Alto Research Center Incorporated | Use of physical barriers to minimize evaporative heat losses |
| US7959873B1 (en) * | 2005-07-21 | 2011-06-14 | California Institute Of Technology | Biological detection based on differentially coupled nanomechanical systems using self-sensing cantilevers with attonewton force resolution |
| US7429125B2 (en) * | 2005-11-09 | 2008-09-30 | Hewlett-Packard Development Company, L.P. | System and method for cantilever based calorimetric analysis |
| US7691130B2 (en) * | 2006-01-27 | 2010-04-06 | Warsaw Orthopedic, Inc. | Spinal implants including a sensor and methods of use |
| US20080245135A1 (en) * | 2006-11-15 | 2008-10-09 | Cornell Research Foundation, Inc. | Microfluidic encapsulated nems resonators |
| US20080160638A1 (en) * | 2006-12-27 | 2008-07-03 | David Lederman | Functionalized Microcantilever Sensor and Associated Method For Detection of Targeted Analytes |
| US8168120B1 (en) | 2007-03-06 | 2012-05-01 | The Research Foundation Of State University Of New York | Reliable switch that is triggered by the detection of a specific gas or substance |
| US7632008B2 (en) * | 2007-06-08 | 2009-12-15 | Palo Alto Research Center Incorporated | Ranking fragment types with calorimetry |
| KR100912220B1 (ko) * | 2007-08-30 | 2009-08-14 | 재단법인서울대학교산학협력재단 | 코팅 스트레스 측정장치 |
| US7928343B2 (en) * | 2007-12-04 | 2011-04-19 | The Board Of Trustees Of The University Of Illinois | Microcantilever heater-thermometer with integrated temperature-compensated strain sensor |
| WO2009097487A1 (en) * | 2008-01-31 | 2009-08-06 | The Board Of Trustees Of The University Of Illinois | Temperature-dependent nanoscale contact potential measurement technique and device |
| WO2010022285A1 (en) | 2008-08-20 | 2010-02-25 | The Board Of Trustees Of The University Of Illinois | Device for calorimetric measurement |
| US8393785B2 (en) * | 2009-05-14 | 2013-03-12 | Palo Alto Research Center Incorporated | Nanocalorimeter based on thermal probes |
| US8130072B2 (en) * | 2009-05-14 | 2012-03-06 | Palo Alto Research Center Incorporated | Vanadium oxide thermal microprobes |
| US8387443B2 (en) * | 2009-09-11 | 2013-03-05 | The Board Of Trustees Of The University Of Illinois | Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer |
| TWI420537B (zh) * | 2009-12-29 | 2013-12-21 | Univ Nat Taiwan | 熱效應自補償系統及用於熱效應補償的裝置與方法 |
| GB2491806B (en) | 2011-05-25 | 2013-07-10 | Microvisk Ltd | Apparatus and method for measuring properties of a fluid |
| US8914911B2 (en) | 2011-08-15 | 2014-12-16 | The Board Of Trustees Of The University Of Illinois | Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy |
| US8533861B2 (en) | 2011-08-15 | 2013-09-10 | The Board Of Trustees Of The University Of Illinois | Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy |
| EP2648005A1 (en) * | 2012-04-02 | 2013-10-09 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Calibration of a mechanical property of SPM cantilevers |
| WO2014063712A1 (en) * | 2012-10-26 | 2014-05-01 | Danmarks Tekniske Universitet | Photothermal resonance |
| GB2508358B (en) | 2012-11-28 | 2014-10-29 | Microvisk Ltd | Apparatus and method for monitoring a sedimentation parameter in a fluid medium sample |
| CN107084964B (zh) * | 2017-06-05 | 2021-02-05 | 京东方科技集团股份有限公司 | 生物传感器及其制备方法和进行生物传感的方法 |
| KR102042706B1 (ko) * | 2018-04-10 | 2019-11-08 | 국민대학교산학협력단 | 열팽창 정도 측정 장치 및 열팽창 정도 측정 방법 |
| EP3715826B1 (en) * | 2019-03-26 | 2024-03-06 | Infineon Technologies AG | Sensor device, particle sensor device and method for detecting a particulate matter density |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4591550A (en) * | 1984-03-01 | 1986-05-27 | Molecular Devices Corporation | Device having photoresponsive electrode for determining analytes including ligands and antibodies |
| US4963815A (en) * | 1987-07-10 | 1990-10-16 | Molecular Devices Corporation | Photoresponsive electrode for determination of redox potential |
| US5440920A (en) * | 1994-02-03 | 1995-08-15 | Molecular Imaging Systems | Scanning force microscope with beam tracking lens |
| US5445008A (en) * | 1994-03-24 | 1995-08-29 | Martin Marietta Energy Systems, Inc. | Microbar sensor |
| US5719324A (en) * | 1995-06-16 | 1998-02-17 | Lockheed Martin Energy Systems, Inc. | Microcantilever sensor |
| US5807758A (en) * | 1995-07-21 | 1998-09-15 | Lee; Gil U. | Chemical and biological sensor using an ultra-sensitive force transducer |
| JP2940643B2 (ja) * | 1995-09-01 | 1999-08-25 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | 振れセンサを組み込んだカンチレバー |
| US5831181A (en) * | 1995-09-29 | 1998-11-03 | The Regents Of The University Of California | Automated tool for precision machining and imaging |
-
1998
- 1998-03-16 US US09/039,707 patent/US6096559A/en not_active Expired - Lifetime
-
1999
- 1999-03-16 CA CA002322387A patent/CA2322387A1/en not_active Abandoned
- 1999-03-16 JP JP2000537055A patent/JP2002506993A/ja active Pending
- 1999-03-16 AU AU30075/99A patent/AU3007599A/en not_active Abandoned
- 1999-03-16 WO PCT/US1999/005749 patent/WO1999047911A1/en not_active Ceased
- 1999-03-16 EP EP99911434A patent/EP1066511A4/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002506993A (ja) | 2002-03-05 |
| EP1066511A1 (en) | 2001-01-10 |
| EP1066511A4 (en) | 2006-08-02 |
| WO1999047911A1 (en) | 1999-09-23 |
| US6096559A (en) | 2000-08-01 |
| AU3007599A (en) | 1999-10-11 |
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